Displacement, Motion, Distance, Or Position Patents (Class 73/1.79)
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Publication number: 20140060148Abstract: Aspects of the present disclosure describe systems and methods for calibrating a metrology tool by using proportionality factors. The proportionality factors may be obtained by measuring a substrate under different measurement conditions. Then calculating the measured metrology value and one or more quality merits. From this information, proportionality factors may be determined. Thereafter the proportionality factors may be used to quantify the inaccuracy in a metrology measurement. The proportionality factors may also be used to determine an optimize measurement recipe. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: ApplicationFiled: March 15, 2013Publication date: March 6, 2014Inventors: Eran Amit, Dana Klein, Guy Cohen, Amir Widmann, Nimrod Shuall, Amnon Manassen, Nuriel Amir
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Patent number: 8666695Abstract: A system and method that may sense and recognize a motion of a user is provided. The system and method may recognize a variety of motions of the user based on sensing data received from a remote controller.Type: GrantFiled: July 12, 2010Date of Patent: March 4, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Seung Ju Han, Jung Bae Kim, Chi Youn Park
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Publication number: 20140007646Abstract: A downhole sensor calibration apparatus includes a rotational or gimbaling mechanism for guiding a sensing axis of an orientation responsive sensor through a three-dimensional orbit about three orthogonal axes. A method includes using measurements taken over the three-dimensional orbit to calibrate the sensor and determine other characteristics of the sensor or tool.Type: ApplicationFiled: September 9, 2013Publication date: January 9, 2014Applicant: HALLIBURTON ENERGY SERVICES, INC.Inventors: Paul F. RODNEY, Adan Hernandez HERRERA, Christopher Allen GOLLA, James H. DUDLEY, Joe MARZOUK
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Patent number: 8617774Abstract: A method for calibrating an apparatus for the position measurement of measurement structures on a lithography mask comprises the following steps: qualifying a calibration mask comprising diffractive structures arranged thereon by determining positions of the diffractive structures with respect to one another by means of interferometric measurement, determining positions of measurement structures arranged on the calibration mask with respect to one another by means of the apparatus, and calibrating the apparatus by means of the positions determined for the measurement structures and also the positions determined for the diffractive structures.Type: GrantFiled: April 10, 2010Date of Patent: December 31, 2013Assignee: Carl Zeiss SMS GmbHInventors: Norbert Kerwien, Jochen Hetzler
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Publication number: 20130319077Abstract: A method for the validation of solar altitude-dependent measured values of several measurement channels (3) is disclosed. Measured values of the measurement channels that take the solar altitude into consideration are stored; Stored ratios (201) of the stored measured values (106) for all solar altitudes are calculated and stored (200); an expected ratio (301) is determined (300) by calculation of a frequency distribution over all stored ratios (201); a current ratio of a currently measured measured value to the current measured values of the other measurement channels (3) are calculated (400); and the currently measured measured values are validated (5). If the expected ratio (301) corresponds to the stored ratio (201) and the stored ratio (201) corresponds to the currently ratio, the current measured value is valid (506). If the expected ratio (301) corresponds to the stored ratio (201) and the stored ratio (201) deviates from the current ratio, a disturbance is present (505).Type: ApplicationFiled: March 18, 2013Publication date: December 5, 2013Applicant: SKYTRON ENERGY GMBHInventor: skytron energy GmbH
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Publication number: 20130305805Abstract: Disclosed are a calibration device, a calibration system and a calibration method. The calibration device includes a camera configured to capture image information, a laser sensor configured to capture image information, a laser sensor configured to detect distance information, and a calibration module configured to perform a calibration of the camera and the laser sensor by obtaining a relation between the image information and the distance information, wherein the calibration module includes a plane member disposed to intersect a scanning surface of the laser sensor such that an intersection line is generated, and disposed within a capturing range by the camera so as to be captured by the camera, and a controller configured to perform coordinate conversions with respect to the image information and the distance information based on a ratio between one side of the plane member and the intersection line, and based on a plane member image included in the image information.Type: ApplicationFiled: July 24, 2013Publication date: November 21, 2013Applicant: AGENCY FOR DEFENSE DEVELOPMENTInventors: Seong Yong AHN, Tok Son CHOE, Yong Woon PARK, Won Seok LEE
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Publication number: 20130269415Abstract: A method of detecting a crank signal error that includes incrementing a crank tooth counter in response to detecting a crank signal, comparing the crank tooth counter to an expected value when a cam signal is detected, and indicating a crank signal error if the crank tooth counter is not substantially equal to the expected value. This method is advantageous because a cam interval used to determine when to start and stop counting crank tooth pulses is automatically adjusted for variations in engine speed, while the prior art time based methods must adjust the time interval for variations in engine speed.Type: ApplicationFiled: April 12, 2012Publication date: October 17, 2013Applicant: DELPHI TECHNOLOGIES, INC.Inventors: SALEM AHMAD FAYYAD, ANDY TENKA, SERGIO QUELHAS
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Patent number: 8539814Abstract: A material measure for use in evaluating the performance of a measuring instrument for measuring surface texture includes: a measurement area having a plurality of grooves in a predetermined direction. With the configuration, each of the grooves has a simple cross-sectional shape at a cross-section along the predetermined direction; and a length of the cross-sectional shape in the predetermined direction is different for the predetermined number of adjacent grooves in the predetermined direction.Type: GrantFiled: August 10, 2010Date of Patent: September 24, 2013Assignee: Olympus CorporationInventors: Takahiko Kakemizu, Akihiro Fujii
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Patent number: 8534112Abstract: Support device (1) for probe (2) to measure the physical characteristics of air in contact with an aerodynamic surface (3) comprises: a rod (9) affixed to a probe (2) to distance probe (2) from an aerodynamic surface (3) such that probe (2) measures the air undisturbed by the aerodynamic surface (3); a support (4) adapted to be affixed to the aerodynamic surface (3) to which the foregoing rod (9) is connected such that support (4) permits rotation of rod (9) about the principal axis (12) of probe (9) to calibrate the position of probe (2) and such that the rotation of rod (9) may be locked once the position of probe (2) has been calibrated. An aerodynamic surface (3) comprising device (1), and a method for the calibration of probe (2) to measure the physical characteristics of the air in contact with an aerodynamic surface (3) are also disclosed.Type: GrantFiled: December 21, 2010Date of Patent: September 17, 2013Assignee: Eads Construcciones Aeronauticas, SAInventor: Rafael Huertos Sanz
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Patent number: 8532951Abstract: An iterative method for calibrating a transducer array characterized by calibration parameters, based on time delay measurements between transducer pairs, comprising the steps of: creating a distance data set that includes pairwise distances between estimated positions of transducer; forming a time delay measurement data set that includes time delay measurements between transducer pairs; generating from the time delay measurement data set an estimate of at least one calibration parameter; modifying the time delay measurement data set and the distance data set based on the estimated calibration parameters; denoising the modified distance data set with an iterative algorithm; updating the estimated positions of transducers based on the denoised modified distance data set; and repeating at least a portion of the steps until the difference between the estimated positions of transducer pairs and updated estimated positions of transducers satisfies a stopping criterion.Type: GrantFiled: December 22, 2010Date of Patent: September 10, 2013Assignee: Delphinus Medical Technologies, Inc.Inventors: Olivier Roy, Neb Duric, Ivana Jovanovic, Martin Vetterli
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Publication number: 20130205867Abstract: An automatic rectifying system for machine tools includes a carrier platform, a contact type probe, a control device and a driving mechanism. The carrier platform may carry a work piece and a calibrator. The contact type probe is fitted to a main axle. In use, the contact type probe may touch the calibrator. The position of the calibrator corresponds to at least a trigger parameter so as to define a reference point. Such trigger parameter is fed to the control device. Then, the control device generates a control signal. Next, the control signal is fed to the driving mechanism, which in turn may move the carrier platform to offset the displacements or deviations of the carrier platform.Type: ApplicationFiled: February 10, 2012Publication date: August 15, 2013Inventor: Rock Liao
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Publication number: 20130184942Abstract: Apparatus for moving an automotive vehicle seat along a track includes a motor, a first sensor sensing rotation of the motor, and a second sensor detecting presence of the seat at a reference position along the track. A controller determines a seat position based upon signals from the first sensor and calibrates the determined seat position based upon a signal from the second sensor indicating that the seat is at the reference position. This allows any error that as accumulated in the seat position as determined by the first sensor to be eliminated each time the seat reaches the known reference position.Type: ApplicationFiled: January 17, 2012Publication date: July 18, 2013Applicant: FORD GLOBAL TECHNOLOGIES, LLCInventors: Mark A. Cuddihy, Mancharprasad K. Rao
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Patent number: 8485016Abstract: A method of calibrating a biometric device useful to measure a target dimension of a physiological tissue is provided comprising the steps of: measuring the target dimension of at least two samples of a reference material with the device to provide an actual output, wherein the reference material possesses at least one property of the tissue required for the function of the device and wherein each of the samples has a known target dimension; calculating a calibration equation based on the actual output of the device and the known target dimensions of the samples; and adjusting the actual output of the device according to the calibration equation to yield a corrected output. The calibration method provides a means of obtaining accurate tissue measurements. Also provided is a method of using a biometric device to measure a target dimension of a physiological tissue which incorporates calibration.Type: GrantFiled: June 11, 2007Date of Patent: July 16, 2013Inventors: Trefford Simpson, Amir Moezzi
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Patent number: 8485017Abstract: The robotic work object cell calibration system includes a work object. The work object emits a pair of beam-projecting lasers acting as a crosshair, intersecting at a tool contact point (TCP). The work object emits four plane-projecting lasers are used to adjust the yaw, pitch, and roll of the robot tool relative to the tool contact point (TCP). The robotic work object cell calibration system provides a calibration system which is simpler, which involves a lower investment cost, which entails lower operating costs than the prior art, and can be used for different robot tools on a shop floor without having to perform a recalibration for each robot tool.Type: GrantFiled: August 1, 2012Date of Patent: July 16, 2013Inventor: Matthew E. Trompeter
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Patent number: 8468869Abstract: A method of calibrating a group of parameters of an articulated coordinate measuring apparatus includes the use of primary and secondary standard units. These standard units each include one or more calibration reference portions, and the group of parameters include primary and secondary calibration parameters. Space coordinates of each reference portion of the primary standard unit is measured at a plurality of arm positions of the apparatus, and calibration is performed for the primary calibration parameters based on the measurements. Space coordinates of the reference portions of secondary standard unit is then measured and parameter calibration is performed for the secondary calibration parameters based on these measurements.Type: GrantFiled: May 26, 2008Date of Patent: June 25, 2013Assignee: Kosaka Laboratory Ltd.Inventor: Fumikazu Ebara
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Publication number: 20130151001Abstract: Four basic measurements are performed when calibrating a spherical measurement probe fastened to a tool spindle having a fixed longitudinal position along the spindle axis. Moving the measurement probe transversely towards the calibration sphere yields a basic position of the tool spindle relative to an element with an attached calibration sphere, when measurement probe touches the calibration sphere. The measurement probe is rotated about the spindle axis from one basic measurement to the next by the same angle, whereas the orientation of the calibration sphere is maintained for all four basic measurements. Based on the basic positions, a reference position of the tool spindle relative to the element, at which the tool spindle is located above the calibration sphere and the spindle axis goes through a central point of the calibration sphere, is determined and taken into account in further calibration of the measurement probe.Type: ApplicationFiled: February 21, 2012Publication date: June 13, 2013Applicant: Siemens AktiengesellschaftInventors: ANDREAS HAASE, HOLGER KRETSCHMAR
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Patent number: 8460190Abstract: Automated image interpretation is provided with transducer position and/or orientation sensing. The current position of a transducer is used to determine the anatomy being imaged. Other reference information, such as (1) the previous position of the transducer and the known anatomy being imaged at that time or (2) a reference device at a known location, is used in the determination. The anatomy is determined based on position sensing or determined based on position sensing and other anatomy features, such as image analysis.Type: GrantFiled: December 21, 2006Date of Patent: June 11, 2013Assignee: Siemens Medical Solutions USA, Inc.Inventors: John I. Jackson, Constantine Simopoulos
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Patent number: 8453527Abstract: A movable member position-sensing device includes a sensor and a biasing member in operable communication with both the sensor and a movable member such that it can generate a bias to both the sensor and the movable member and configured to communicate a parameter to the sensor indicative of a position of the movable member.Type: GrantFiled: March 23, 2010Date of Patent: June 4, 2013Assignee: Baker Hughes IncorporatedInventor: Ashraf S. Soliman
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Patent number: 8452564Abstract: Disclosed is a method of determining geometric errors in a machine tool or measuring machine having a mobile unit for moving a target within a measuring volume. The method includes the steps of generating a succession of laser beams in different directions by means of an interferometer, and, for each direction, moving the target into a number of points along the beam; measuring, by means of the interferometer, the abscissa of each of the points from an origin located along the direction of the beam; acquiring the coordinates of each of the points by means of the machine; and determining error parameters of the machine on the basis of the abscissas measured by the interferometer, and the coordinates of the points acquired by the machine.Type: GrantFiled: May 9, 2008Date of Patent: May 28, 2013Assignees: Hexagon Metrology S.p.A., Istituto Nazionale di Ricerca Metrologica (I.N.RI.M.)Inventors: Alessandro Balsamo, Michele Verdi
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Publication number: 20130125615Abstract: A calibration device for gauges for the measurement of the geometrical characteristics of cylinders, such as the diameter, profile, rotundity and eccentricity errors, wherein such gauges include a pair of movable opposing arms equipped with feelers or sensors at their free ends, includes a pair of abutments reciprocally approachable and/or withdrawable by means of motors until a sample measure is obtained, as desired, within the measuring range of the gauge, on which the calibration device is assembled, revealed by means of measuring means cooperating with the abutments, such that consequently the feelers or sensors are respectively abutted or approached to the abutments to reveal the sample measure.Type: ApplicationFiled: July 7, 2011Publication date: May 23, 2013Inventors: Fausto Candiani, Paolo Gaboardi, Claudio Trevisan, Flavio Stefano Bianchessi
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Patent number: 8447551Abstract: An assembly tool is provided. The assembly tool comprises a body and a gripper mount slidably mounted to the body with a first actuator. The first actuator is configured to slide the gripper mount from a first position to a second position along an axis. The assembly tool also comprises a gripper assembly slidably mounted to the gripper mount with a second actuator. The second actuator is configured to facilitate displacement of the gripper assembly with respect to the gripper mount along the axis. The assembly tool also comprises an encoder configured to indicate a displacement distance between an expected position and an actual position of the gripper assembly with respect to the gripper mount along the axis when the gripper mount is in the second position.Type: GrantFiled: June 30, 2010Date of Patent: May 21, 2013Assignee: Western Digital Technologies, Inc.Inventors: Tze Yang Ong, Jit Han Tan
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Patent number: 8442791Abstract: A position for a vehicle is corrected by detecting landmarks on the journey route and correcting the measured vehicle position when a landmark of this kind has been identified. The landmarks are stored in a database in the vehicle with associated exact GPS positions. When a landmark is reached, the associated exact GPS position is compared with the position measured in the vehicle, whereupon the measured position is corrected. In this way, the position finding can be improved.Type: GrantFiled: April 23, 2008Date of Patent: May 14, 2013Assignee: Continental Teves AG & Co. oHGInventor: Ulrich Stählin
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Patent number: 8429954Abstract: A scanning probe microscope includes a plate moveable in an x-axis direction, a y-axis direction, and a z-axis direction, and a probe tip coupled to the plate. A plurality of actuators cooperate to move the probe tip with three degrees of freedom of movement.Type: GrantFiled: June 22, 2009Date of Patent: April 30, 2013Assignee: Purdue Research FoundationInventor: Jason Vaughn Clark
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Patent number: 8424364Abstract: An active scanner bow compensator for use with a scanner is described. The scanner includes a moveable scanning platform supported within a frame. The active scanner bow compensator supports the scanner and includes a frame of reference, sensors, and an actuator. The sensors detect out-of-plane motion of the scanning platform relative to the frame of reference, and the actuators compensate for the out-of-plane motion by adjusting the orientation of the frame relative to the frame of reference. The active scanner bow compensator may be used in atomic force microscopy applications.Type: GrantFiled: November 13, 2009Date of Patent: April 23, 2013Assignee: nPoint, Inc.Inventors: Katerina Moloni, Richard Arndt, Lucas Chasteen, Douglas M. Code, Adam Frost, Timothy K. Klemp
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Patent number: 8423171Abstract: In a method for processing a workpiece in a tool machine, a first step (Step S4) for continuously measuring a position of a tip portion of a tool attached to a main axis, a second step (Step S5) for computing a displacement amount of the position of the tip point of the tool based on a result of the measurement, a third step (Step S8) for observing a time period while the displace amount is belonged in arrange of allowable displace amount previously determined, a fourth step (Step S9) for keeping an idling operation in case that the time for which the displace amount is belonged in the range of the allowable displacement amount is shorter than a time period previously determined and intermitting the idling operation in the case that the time for which the displace amount is belonged in the range of the allowable displacement amount become the time period previously determined and a fifth step (Step S10) for starting a process with respect to the workpiece in the case that the idling operation is finished areType: GrantFiled: October 23, 2008Date of Patent: April 16, 2013Assignee: Mitsubishi Heavy Industries, Ltd.Inventors: Yoshikatsu Sato, Shigeru Honda
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Publication number: 20130086973Abstract: Systems and methods for calibrating a coin sensor are disclosed herein. An auto-calibrating coin sensor configured in accordance with one embodiment of the disclosure includes a movable carrier holding at least one test coin or other test object. The carrier can move the test object past or through the coin sensor to calibrate the coin sensor. Embodiments of the present technology can include rotatable and linearly moveable carriers that are configured to move an attached test object through a coin sensor. Additionally, auto-calibrating coin sensors in accordance with the present technology can be configured to initiate an auto-calibration based on the commencement of a coin counting session, a set schedule, a temperature change, and/or other events.Type: ApplicationFiled: October 7, 2011Publication date: April 11, 2013Inventors: Douglas A. Martin, Michael A. Stoy
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Patent number: 8407022Abstract: A bias value associated with a sensor, e.g., a time-varying, non-zero value which is output from a sensor when it is motionless, is estimated using at least two, different bias estimating techniques. A resultant combined or selected bias estimate may then be used to compensate the biased output of the sensor in, e.g., a 3D pointing device.Type: GrantFiled: December 17, 2010Date of Patent: March 26, 2013Assignee: Hillcrest Laboratories, Inc.Inventors: Hua Sheng, Matthew G. Liberty, Christopher D. Roller, Charles W. K. Gritton
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Patent number: 8333103Abstract: A method for calibrating a force measuring probe comprises providing a probe having an insertion tube with a distal tip, a joint comprising a resilient member, a joint sensor in conjunction with a processor coupled to the probe wherein the processor has a memory of an axial displacement threshold for the joint stored therein; applying force to the distal tip; measuring the displacement and deflection of the distal tip; correlating the measured displacement and deflection of the distal tip to the applied force and storing the correlation in the memory until reaching the axial displacement threshold; applying force greater than the axial displacement threshold to the distal tip to define a new force value; measuring the position of the distal tip in a plane transverse to the direction of force exerted on the distal tip; correlating the measured position of the distal tip in the plane transverse to the direction of force to the new force value and storing the correlation in the memory until reaching a pre-establType: GrantFiled: March 30, 2011Date of Patent: December 18, 2012Assignee: Biosense Webster (Israel), Ltd.Inventors: Yevgeny Bonyak, Doron Ludwin
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Patent number: 8330603Abstract: A dewatering system includes a selective calibrating sensor circuit configured to receive sensor readings from an electronic sensor, to determine if the electronic sensor is immersed in water, to allow a user to adjust a pump down time in the field, and to generate a control output signal accordingly. The selective calibrating sensor circuit periodically performs a self-calibration when the electronic sensor is not immersed in water to cancel the effect of potential contaminants deposited on the electronic sensor over its operating life. The selective calibrating sensor circuit inhibits calibration when the electronic sensor is immersed in water. In some applications with multiple electronic sensors, the selective calibrating sensor circuit disconnects from one of the electronic sensors before performing the self-calibration.Type: GrantFiled: June 26, 2009Date of Patent: December 11, 2012Assignee: SEEwater, Inc.Inventor: Robert F. Gibb
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Publication number: 20120307207Abstract: Method for determining deviations between coordinate systems of different technical systems, comprising the steps of determining a coordinate position of a reference feature of a test object in the coordinate system (u,v) of a first of the technical systems, the attachment of at least one test feature to the test object, with the test feature being attached in the coordinate system of a second of the technical systems at a coordinate position that is determined in dependence on the determined coordinate position of the reference feature, the determination of a coordinate position of at least one test feature and/or at least one feature derived from it in the coordinate system (u,v) of the first technical system, and determination of deviations between the coordinate systems of the first and second technical system, at least on the basis of: (a) the determined coordinate position of at least one test feature and/or of at least one feature derived from it in the coordinate system (u,v) of the first technical syType: ApplicationFiled: February 15, 2010Publication date: December 6, 2012Inventors: Mario Abraham, Johannes Agethen, Mario Klafke, Joachim Matschnigg
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Patent number: 8311759Abstract: An inline inspection system and method for calibrating an acoustic monitoring structure installed along a pipe. The system includes a pipe inspection vehicle; a microprocessor configured to attach a time stamp to a measured distance traveled by the pipe inspection vehicle; an acoustic source attached to the pipe inspection vehicle and configured to generate sound waves inside the pipe, the sound waves having predetermined frequencies and predetermined amplitudes; plural sensors disposed along the pipe and configured to record time of arrivals and intensities of the sound waves generated by the acoustic source; and a processing unit configured to communicate with the plural sensors and receive the time of arrivals, intensities and frequencies of the sound waves from the plural sensors. The processing unit calibrates the acoustic monitoring structure by calculating a distance between the acoustic source and a first sensor of the plural sensors.Type: GrantFiled: December 29, 2009Date of Patent: November 13, 2012Assignee: PII (Canada) LimitedInventor: Jeff Sutherland
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Patent number: 8302456Abstract: A technique for actively damping internal vibrations in a scanning probe microscope is disclosed. The excitation of various mechanical movements, including resonances, in the mechanical assembly of an SPM can adversely effect its performance, especially for high speed applications. An actuator is used to compensate for the movements. The actuator may operate in only the z direction, or may operate in other directions. The actuator(s) may be located at positions of antinodes.Type: GrantFiled: February 22, 2007Date of Patent: November 6, 2012Assignee: Asylum Research CorporationInventor: Roger Proksch
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Publication number: 20120272539Abstract: A blade gap setting device for a potato chip cutting head, the device comprising an elongate body having an upper surface and a lower surface, at least one mounting for a depth micrometer having a displaceable spindle, the mounting extending from the upper surface to the lower surface to permit a depth micrometer to be mounted to the upper surface with a free end of the displaceable spindle being exposed at the lower surface, a first lower reference surface and a second front reference surface, at least the second front reference surface being located forwardly of the at least one mounting.Type: ApplicationFiled: April 29, 2011Publication date: November 1, 2012Inventors: Ahmed Nadim KHAN, Richard Decena ORNELAZ, JR., Brian David SCHROEDER, David WARREN, Julian ROMANCZUKIEWICZ
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Publication number: 20120272540Abstract: A blade gap setting device for attachment to a blade holder of a blade cutter assembly has an elongate body with an upper surface and a lower surface and at least one mounting for a depth micrometer having a displaceable spindle. The depth micrometer is installed through a channel of the mounting, with a free end of the displaceable spindle being exposed beneath the mounting. The device also has a first rounded front reference surface located at a position in front of the mounting, a second front reference surface extending downwardly from the body, and a third lower reference surface below the mounting or spindle. The reference surfaces serve as contact points to bear against interior portions of the blade cutter assembly; in particular, the blade holder and a top surface of the blade.Type: ApplicationFiled: April 26, 2012Publication date: November 1, 2012Inventor: Richard Decena Ornelaz, JR.
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Patent number: 8297103Abstract: The invention concerns a method of and apparatus for measurement and/or calibration of the position of an object in space in such embodiment where the apparatus contains at least one moving arm fitted to the frame on one end and on the other end fitted to a platform, where the platform can be attached to the object to be measured or calibrated; during the motion of the object with the platform attached the relative positions of individual members of at least one moving arm, frame and platform are read and the measured data is used for determination of the position of the object or for its calibration.Type: GrantFiled: December 20, 2006Date of Patent: October 30, 2012Assignees: Czech Technical University In Prague, INOMECH S.R.O.Inventors: Michael Valasek, Frantisek Petru, Zbynek Sika, Václav Bauma, Roman Smid
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Patent number: 8290717Abstract: In a plasma processing chamber, a method and an arrangement to stabilize pressure are provided. The method includes providing coarse pressure adjustments in an open-loop manner and thereafter providing fine pressure adjustments in a closed-loop manner. The coarse pressure adjustments are performed by rapidly re-position confinement rings employing an assumed linear relationship between the conductance and the confinement rings position to bring the pressure in the plasma generating region quickly to roughly a desired set point. The fine pressure adjustments are performed by at least employing mechanical vacuum pump(s), turbo pump(s), confinement ring positioning and/or combinations thereof to achieve a derive pressure set point.Type: GrantFiled: February 6, 2009Date of Patent: October 16, 2012Assignee: Lam Research CorporationInventors: Rajinder Dhindsa, James H. Rogers
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Publication number: 20120247176Abstract: A test auxiliary device for testing a portable data terminal having a plurality of sensors includes a base, a carrying unit, a driving unit, and a controlling unit. The carrying unit is disposed on the base and includes a carrying platform and a carrying base. The carrying platform and the carrying base form a first angle and a second angle with the base, respectively, and thereby together form a compound slope. The driving unit drives the carrying unit to move, allowing the carrying platform to move with acceleration and at an angular velocity. The controlling unit receives sensing values generated by the sensors, respectively. The test auxiliary device further includes a test matching unit for testing the sensors in operation. Accordingly, the test auxiliary device assists users in determining whether the sensors of the portable data terminal are functioning well.Type: ApplicationFiled: June 21, 2011Publication date: October 4, 2012Inventors: BING-CHENG OU, TZU-HAOMR SHENG, CHING-FENG HSIEH
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Patent number: 8272246Abstract: Self-calibration of a multiple channel clearance sensor system, which in one embodiment includes at least one sensor for measuring at least one clearance parameter signal between a stationary object and a rotating object of a rotating machine. The sensor output is processed as a clearance parameter by an offset correction section configured to determine an offset error in the clearance parameter signal which is used by a level shifter. The level shifter is also switchably coupled to the clearance parameter signal wherein the output of the level shifter, which may be amplified and digitally converted, is processed by a signal level analyzer to determine a channel gain signal.Type: GrantFiled: September 30, 2008Date of Patent: September 25, 2012Assignee: General Electric CompanyInventors: Emad Andarawis Andarawis, Wayne Charles Hasz, David So Keung Chan, David Mulford Shaddock, John Harry Down, Samhita Dasgupta, David Richard Esler, Zhiyuan Ren, Mahadevan Balasubramaniam, Ibrahim Issoufou Kouada
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Patent number: 8260319Abstract: The present invention relates to a method for determining a distance between a wireless transceiver and a wireless receiver arranged to communicate with each other in a wireless communication network, the wireless receiver having an active and an inactive reception state, the method comprising transmitting, with the wireless receiver in the active reception state, a first transmission signal, receiving a first reflection signal, the first reflection signal being a reflection of the first transmission signal and influenced by the active reception state of the wireless receiver, transmitting, with the wireless receiver in the inactive reception state, a second transmission signal, receiving a second reflected signal, the second reflection signal being a reflection of the second transmission signal and influenced by the inactive reception state of the wireless receiver, and determining a distance between the wireless transceiver and the wireless receiver based on the second reflection signal.Type: GrantFiled: June 10, 2008Date of Patent: September 4, 2012Assignee: Rosemount Tank Radar ABInventors: Fabian Wenger, Mats Nordlund
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Patent number: 8245563Abstract: A system for determining a setpoint associated with a position of a pedal in an automobile of type that includes two sensors each measuring a value associated with the pedal position. The system includes a mechanism capable of switching between a first and second state on a predetermined switching position of the pedal, and a mechanism generating the setpoint on the basis of the measures from the two sensors and of a current state of the switching mechanism. The generation mechanism is capable of selecting the measure corresponding to the smallest of the pedal positions when the switching mechanism is in the first state, and selecting the measure corresponding to the largest of the pedal positions when the switching mechanism is in the second state.Type: GrantFiled: October 30, 2008Date of Patent: August 21, 2012Assignee: Renault s.a.s.Inventor: Christophe Dang Van Nhan
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Publication number: 20120191397Abstract: A method and apparatus for monitoring motion of a rigid body, such as a head, in which a plurality of reference sensors are attached to a calibration structure, such as a helmet, and a plurality of body-mountable sensors are adapted for mounting on the rigid body. Once mounted, the positions and orientations of the body-mountable sensors may be unknown. In operation, a processing unit receives signals from the reference sensors and the body-mountable sensors and determines calibration parameters for the body-mountable sensors. The calibration parameters depend upon the sensitivity of the body-mountable sensors to linear, rotational and centripetal motions. These sensitivities, in turn, are dependent upon the positions and orientations of the body-mountable sensors. Body motion is determined from the body-mountable sensors using the calibration parameters.Type: ApplicationFiled: January 19, 2012Publication date: July 26, 2012Inventor: Graham Paul Eatwell
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Patent number: 8219353Abstract: A measurement apparatus calibrated to measure an absolute diameter of a part in a shop floor environment. The measurement apparatus includes a calibration that includes compensation factors for thermal expansion, shifting of measurement parts (arm, support tower, and related laser), and variances of these parts. The resulting measurements report an absolute diameter of a part to a higher degree of accuracy than previously possible. Also, the calculated compensation factor eliminate the need for an isolated, climate-controlled measurement room.Type: GrantFiled: January 28, 2010Date of Patent: July 10, 2012Assignee: Axiam, Inc.Inventors: Robert M. Lee, Robert E. Parsons
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Publication number: 20120160007Abstract: A method for calibrating an apparatus for the position measurement of measurement structures on a lithography mask comprises the following steps: qualifying a calibration mask comprising diffractive structures arranged thereon by determining positions of the diffractive structures with respect to one another by means of interferometric measurement, determining positions of measurement structures arranged on the calibration mask with respect to one another by means of the apparatus, and calibrating the apparatus by means of the positions determined for the measurement structures and also the positions determined for the diffractive structures.Type: ApplicationFiled: April 10, 2010Publication date: June 28, 2012Applicant: CARL ZEISS SMS GMBHInventors: Norbert Kerwien, Jochen Hetzler
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Publication number: 20120151988Abstract: A calibration artifact includes an elongated body made substantially entirely of ceramic material and having a direction of elongation. A plurality of measurement elements comprising the ceramic material are integrally formed with the elongated body, each measurement element comprising a first planar measurement surface facing in a first direction. The first planar measurement surface of each measurement element is parallel to the first planar measurement surface of each of the other measurement elements of the plurality of measurement elements. The calibration artifact may be a unitary step gauge formed with a single piece of ceramic material.Type: ApplicationFiled: December 14, 2011Publication date: June 21, 2012Applicant: Hexagon Metrology, Inc.Inventors: Wilhelmus Weekers, John Langlais, David Harvey, Peter Hicks
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Patent number: 8203330Abstract: Distance measuring device comprising an emitter and a receiver, said emitter being arranged to produce a magnetic field by means of a resonant circuit having a resonant frequency, said receiver being arranged to pick up at said resonant frequency the magnetic field emitted by the emitter and convert the strength of the magnetic field picked up into a first signal having an energy value, said emitter being arranged to produce said magnetic field intermittently, each emission having a predetermined energy, said receiver being connected to a detector arranged to determine, by correlation of said first signal with a second predetermined signal having a waveform representative of a signal to be picked up by the receiver, a distance measurement signal representing the distance between the emitter and the receiver. The device finds its application in detectors for sleep disorders or other forms of illness.Type: GrantFiled: January 17, 2005Date of Patent: June 19, 2012Assignees: Nomics (Societe Anonyme), Logistique Spatiale Wallonne-Wallonia Space Logistics- “W.S.L.” (Societe Anonyme)Inventors: Pierre Ansay, Robert Poirrier, Bernard Beckers
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Publication number: 20120144895Abstract: A device for detecting at least the zero-point position of at least one moving component. The device comprises at least one detection device that is fixedly supported relative to the zero-point position of the component. The component has at least one recess in the area of the zero-point position to be detected. The detection device has at least first and second sensors which form a sensor pair. The sensor pair is associated with the recess, in the area of the zero-point position, in order to detect a change of state so that the zero-point position can be detected without moving the component.Type: ApplicationFiled: August 11, 2010Publication date: June 14, 2012Applicant: ZF FRIEDRICHSHAFEN AGInventors: Oliver Maschmann, Andreas Fuessl
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Patent number: 8191399Abstract: There is described a method for monitoring a drive device for a defective sensor signal from a first sensor of the drive device and to a monitoring device which is suitable for this purpose. Although sensors operate reliably, sensor errors which may give rise to significant damage if they are not detected may arise. Monitoring the sensor makes it possible to increase the reliability of the drive device. The sensor signal from the first sensor is compared with a sensor signal from a second sensor in such a manner that the first sensor is monitored. In this case, the monitoring device is intended, in particular, for a sensor having a sensor disc.Type: GrantFiled: November 16, 2006Date of Patent: June 5, 2012Assignee: Siemens AktiengesellschaftInventor: Günter Schwesig
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Patent number: 8190389Abstract: Devices and methods wherein an adapter is used to attach an electromagnetic image guidance component to a medical device such that an electromagnetic image guidance system may be used to track the location of the medical device within the body of a human or animal subject.Type: GrantFiled: May 17, 2006Date of Patent: May 29, 2012Assignee: Acclarent, Inc.Inventors: Isaac J. Kim, Eric Goldfarb, Ketan P. Muni, Joshua Makower, Robert K. Deckman
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Publication number: 20120127453Abstract: A controller measures positional information of a stage within an XY plane using three encoders which at least include one each of an X encoder and a Y encoder of an encoder system, and the stage is driven in the XY plane, based on measurement results of the positional information and positional information (p1, q1), (p2, q2), and (p3, q3) in a surface parallel to the XY plane of a head (an encoder) used for measurement of the positional information. Accordingly, it becomes possible to control the movement of the stage with good precision, while switching the head (the encoder) used for control during the movement of the stage using the encoder system which includes a plurality of heads.Type: ApplicationFiled: January 31, 2012Publication date: May 24, 2012Applicant: NIKON CORPORATIONInventor: Yuichi SHIBAZAKI
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Publication number: 20120125077Abstract: A downhole sensor calibration apparatus includes a rotational or gimbaling mechanism for guiding a sensing axis of an orientation responsive sensor through a three-dimensional orbit about three orthogonal axes. A method includes using measurements taken over the three-dimensional orbit to calibrate the sensor and determine other characteristics of the sensor or tool.Type: ApplicationFiled: November 13, 2009Publication date: May 24, 2012Applicant: HALLIBURTON ENERGY SERVICES, INCInventors: Paul F. Rodney, Adan Hernandez Herrera, Christopher Allen Golla, James H. Dudley, Joe Marzouk