Abstract: A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.

Abstract: A control system for a tiltable vehicle may include a motor controller configured to respond to backward or reverse operation of the vehicle by hindering a responsiveness of the control system (e.g., proportionally) and/or eventually disengaging a drive motor of the vehicle. Accordingly, a user may intuitively and safely dismount the vehicle by selectively commanding reverse operation. In some examples, the backward direction may be user-defined.

Abstract: According to one embodiment, a vibration apparatus includes a coupled vibration mechanism which includes a plurality of mass parts and connects the mass parts, a catch and release mechanism which catches a vibrating mass parts to stop vibration and releases a caught mass parts to start vibration and a control circuitry configured to determine whether catching the mass parts by the catch and release mechanism is successful or failed and control the catch and release mechanism for raising possibility for catching the mass parts by the catch and release mechanism, if the catching the mass parts is determined as failed.

Abstract: A semiconductor device includes a substrate, a beam, a movable structural body, a first stopper member, a second stopper member and a third stopper member. The first stopper member is arranged with a first gap from the movable structural body in an in-plane direction. The second stopper member is arranged with a second gap from the movable structural body in an out-of-plane direction. The third stopper member is arranged opposite to the second stopper member with the movable structural body interposed therebetween in the out-of-plane direction, and is arranged with a third gap from the movable structural body. Consequently, there can be provided a semiconductor device in which excessive displacement of the movable structural body can be suppressed to thereby suppress damage to and breakage of the beam supporting the movable structural body, and a method of manufacturing the same.

Abstract: A sensor includes a first structure that is attachable to a measurement specimen, a second structure that is made of material which is smaller in thermal expansion coefficient than the first structure, a bottom surface of the second structure being connected to the first structure, and a detector that is connected to an upper surface of the second structure, the detector being configured to detect a deformation of the second structure.

Abstract: A micromechanical sensor device with a movable gate includes a field effect transistor having a drain region, a source region, a channel region arranged between the field effect transistor and the source region and including a first doping type, and a movable gate. The movable gate is separated from the channel region by an interspace. The drain region, the source region, and the channel region are arranged in a substrate. An oxide region is provided in the substrate at least at longitudinal sides of the channel region.

Abstract: A tunneling accelerometer that can be implemented as a MEMS micro sensor provides differential sensing that minimizes large forces resulting from undesired environmental effects. Used as a seismic sensor, for example, the accelerometer exhibits maximum sensitivity for small seismic waves and suppresses very large seismic activities occurring at shallower depths. In one embodiment, detected current decreases from its maximum for stronger forces and is maximized for small vibrations. In another embodiment, separation of columns of top and bottom tunneling tip pairs, one column from the next, increases gradually so that the tunneling accelerometer suppresses sensitivity to large accelerations such as large seismic activity. A manufacturing process for the accelerometer provides reduced complexity for better yield.

Abstract: A functional device includes: a substrate; and a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate, in which the movable section includes a plurality of first shaft portions with relatively high rigidity, the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, and protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions.

Abstract: A device for measuring force components formed from a single crystal material, wherein the device comprises at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, which mass body provides a mass of inertia. The mass body has a first and a second major surface which are substantially parallel with a wafer plane. A mass body cross section presents a portion which is substantially symmetrical along a centrally (in the thickness direction) located plane parallel with the wafer plane. Disclosed is also a method for its production and an accelerometer comprising at least one such device. The device allow for a more compact 3-axis accelerometer.

Abstract: There is provided a MEMS sensor including: a mass body; a support part floatably supporting the mass body; and a flexible beam having one end connected to the mass body and the other end connected to the support part. At least one end of the flexible beam connected to the mass body or the support part includes a curved portion to maximize an effective length supporting a load.

Abstract: Embodiments of the invention provide an acceleration sensor, including a mass body part including a first mass body and a second mass body, flexible beams coupled with the first mass body, and a support part including first support parts, which are connected to the flexible beams and are disposed to face the second mass body, and second support parts, which are coupled with the first support parts. The mass body part, the flexible beams, and the support parts are configured of a first substrate and a second substrate coupled with each other so as to be stacked, and when the mass body part is excessively displaced, the second mass body contacts the first support parts to limit the displacement of the mass body part.

Abstract: A MEMS sensor (20, 86) includes a support structure (26) suspended above a surface (28) of a substrate (24) and connected to the substrate (24) via spring elements (30, 32, 34). A proof mass (36) is suspended above the substrate (24) and is connected to the support structure (26) via torsional elements (38). Electrodes (42, 44), spaced apart from the proof mass (36), are connected to the support structure (26) and are suspended above the substrate (24). Suspension of the electrodes (42, 44) and proof mass (36) above the surface (28) of the substrate (24) via the support structure (26) substantially physically isolates the elements from deformation of the underlying substrate (24). Additionally, connection via the spring elements (30, 32, 34) result in the MEMS sensor (22, 86) being less susceptible to movement of the support structure (26) due to this deformation.

Abstract: An acceleration measuring apparatus that can easily detect acceleration with high accuracy is provided. In the apparatus, positional displacement of a swingable pendulum member is detected, feedback control is performed to maintain the pendulum member in a stationary state using an actuator, and acceleration is measured by measuring the output of the actuator at this time. A movable electrode is provided to the pendulum member, and a loop is formed in which a fixed electrode provided to oppose the movable electrode, and an oscillating circuit, a crystal unit, and the movable electrode are electrically connected in series. By measuring an oscillating frequency of the oscillating circuit at this time, a change in the size of a variable capacitance formed between the movable electrode and the fixed electrode is detected, and thereby the positional displacement of the pendulum member is detected.

Abstract: A cantilever beam accelerometer design is disclosed that obviates the need of attaching electrical leads directly to the piezoelectric plates. According to one aspect of the invention, two identical proof-masses are positioned on top of each piezoelectric plate in a symmetrical fashion. In advance of attaching the masses to the plates, electrical leads are attached to the masses by some suitable technique such as soldering. Each proof-mass is positioned on its respective piezoelectric plate as close to the free-end of the beam as practical, to keep the size of the mass reasonably small. The disclosed concept is useful for both series and parallel configurations of the piezoelectric plates, wherein the polarization vectors are in opposite directions for two plates connected in series and the polarization vectors are in the same direction for two plates connected in parallel.

Abstract: A differential capacitance torque sensor utilizes multiple voltage sources in order to compensate for inherent electrical asymmetries in the sensor. A first voltage source having a voltage V1 is electrically connected across a longitudinally-extending, conductive proof mass, a first upper capacitor C1 and the second lower capacitor C4. A second voltage source having a voltage V2 is connected in series with the first voltage source, a second upper capacitor C3 and a first lower capacitor C2, such that the voltage V2 is given by V 2 = ? ? + 1 ? V 1 , where ? is a parameter defined as ? = C 2 + C 3 C 1 + C 4 - 1.

Abstract: The invention relates to a microelectromechanical structure, and more particularly, to systems, devices and methods of compensating the effect of the thermo-mechanical stress by incorporating and adjusting elastic elements that are used to couple a moveable proof mass to anchors. The proof mass responds to acceleration by displacing and tilting with respect to a moveable mass rotational axis. The thermo-mechanical stress is accumulated in the structure during the courses of manufacturing, packaging and assembly or over the structure's lifetime. The stress causes a displacement on the proof mass. A plurality of elastic elements is coupled to support the proof mass. Geometry and configuration of these elastic elements are adjusted to reduce the displacement caused by the thermo-mechanical stress.

Abstract: A balanced teeter-totter accelerometer has a mass suspended above a substrate, the mass having an axis of rotation that is parallel to the substrate and substantially geometrically centered with respect to the shape of the mass. A physical acceleration in a direction perpendicular to the substrate causes the mass to rotate about the axis of rotation. The rotation is sensed by measuring a change in capacitance of electrodes on the substrate. The accelerometer may be calibrated using the same sensing electrodes.

Abstract: An ultrasonic transmitter and receiver includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size that is smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members.

Abstract: A device for measuring the acceleration of a moving body includes a pendulum capable of oscillating about an instantaneous center of rotation and a detection system capable of detecting an oscillation of the pendulum that is likely to result from the acceleration. The pendulum has a geometric configuration enabling it to interact with the detection system. The geometric configuration is such that the detection system only indicates an oscillation of the pendulum that exceeds a threshold oscillation value.

Abstract: In an inverted pendulum type vehicle having a traveling motion unit, when a component about an axis in a second direction and a component about an axis in a first direction from within a tilt error between an actual tilt angle and a desired tilt angle of the payload supporting part are defined as ?be_x_s and ?be_y_s, respectively, and when a component in the first direction and a component in the second direction from within a traveling velocity of a representative point of the vehicle in a stationary state in which ?be_x_s and ?be_y_s are retained constant are defined as Vb_x_stb and Vb_y_stb, respectively, a traveling motion of the traveling motion unit is controlled so that a ratio of a magnitude of Vb_x_stb with respect to a magnitude of ?be_x_s and a ratio of a magnitude of Vb_y_stb with respect to ?be_y_s becomes a ratio different from each other.

Abstract: A device for measuring force components formed from a single crystal material, wherein the device comprises at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, which mass body provides a mass of inertia. The mass body has a first and a second major surface which are substantially parallel with a wafer plane. A mass body cross section presents a portion which is substantially symmetrical along a centrally (in the thickness direction) located plane parallel with the wafer plane. Disclosed is also a method for its production and an accelerometer comprising at least one such device. The device allow for a more compact 3-axis accelerometer.

Abstract: An accelerometer, comprises, a measurement mass, a top cap silicon wafer and a bottom cap silicon wafer, which both are coupled with the said measurement mass; the measurement mass comprises a support frame, a mass, and a plurality of resilient beams; the mass and the resilient beams are located within the support frame; the mass and the support frame are connected by several sets of the resilient beams, and each set comprises two resilient folding beams; the resilient folding beams are symmetrically provided with respect to the midline of the mass; a connection beam is provided in between each set of the resilient folding beams to connect the resilient folding beams together. Silicon wafers with electrodes are bonded on the top and bottom surfaces of the measurement mass; and forms a capacitor with the measurement mass. The accelerometer in the present invention has a large mode isolation ratio, and it is symmetrical in high order vibrational modes , which further decreases the noise of the MEMS chip.

Abstract: Operating an ultrasonic transmitter and receiver includes providing a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members.

Abstract: Provided is a controller for an inverted pendulum type vehicle capable of moving the vehicle smoothly. The inverted pendulum type vehicle 1 is provided with a grip 18 at a upper end portion of a base body 9. A grip-acting external force F acting on the grip 18 is detected by a force sensor 55. According to the detected grip-acting external force F, a required center-of-gravity velocity generator 74 determines required center-of-gravity velocities Vb_x_aim and Vb_y_aim, and on the basis thereof, a traveling motion unit controller determines a manipulated variable for control.

Abstract: Methods and apparatuses are disclosed that assist in sensing underwater signals in connection with geophysical surveys. One embodiment relates to a transducer including a cantilever coupled to a base. The cantilever may include a beam and a first coupling surface angularly oriented from the beam, and the base may include a second coupling surface angularly oriented from the beam and substantially parallel to the first coupling surface of the cantilever. The transducer may further include a sensing material coupled between the first coupling surface of the cantilever and the second coupling surface of the base.

Abstract: Provided is a controller of an inverted pendulum type vehicle capable of being moved smoothly by a guided subject as a support. In the inverted pendulum type vehicle 1, an upper portion of a base body 9 is fixed with a grip 18 extending vertically, and a joystick 20 is disposed at an upper end of the grip 18 and is configured to be held by a guided subject to issue commands to every direction of 360° according to thumb operations thereof. A manipulated variable of the joystick 20 is detected by a position sensor 55, a required center-of-gravity velocity generator 74 determines required center-of-gravity velocities of Vb_x_aim and Vb_y_aim according to the detected manipulated variable of the joystick 20, and on the basis thereof, a traveling motion unit controller determines a manipulated variable for control.

Abstract: A control device of an inverted pendulum type vehicle capable of simplifying the steering of the vehicle, and of improving handling quality thereof, is provided. A control unit 50 of an inverted pendulum type vehicle sequentially determines a target-of-retaining velocity magnitude amount which is a magnitude of a desired velocity of a predetermined representative point in a predetermined period of time, or a magnitude of a component in a predetermined direction of the desired velocity, to be retained stable to a value identical to the target-of-retaining velocity magnitude amount in relation to the desired velocity determined immediately before start of the period of time, in the case where a predetermined condition is satisfied, and control the traveling motion of a traveling motion unit 5 in accordance with the determined desired velocity.

Abstract: A control device of an inverted pendulum type vehicle capable of easily performing a circling movement of the vehicle, without requiring complex maneuvering operation. A control unit 50 of an inverted pendulum type vehicle 1 determines a desired tilt angle of a payload supporting part 3 according to a yaw rate measured value by a yaw rate sensor 53 equipped to the vehicle 1, and controls a traveling motion of a traveling motion unit 5 so as to bring an actual tilt angle close to the desired tilt angle.

Abstract: An acceleration sensor includes a frame having a hollow space at an inside thereof, four beams extending from the frame to the hollow space, four plummets connected to ends of the four beams, and four sensing units provided on the four beams. One ends of the beams is connected to portions of the frame opposite to each other with respect to the hollow space. The two plummets face each other across the center of the hollow space. One ends of the other two beams are connected to portions of the frame opposite to each other with respect to the hollow space. The other two plummets face each other across the center of the hollow space. This acceleration sensor reduces variations and temporal changes in its sensitivity.

Abstract: Provided is a control device of an inverted pendulum type vehicle capable of moving the vehicle toward a desired direction easily. In the inverted pendulum type vehicle 1, one end of a cord member C is connected to a seat 3 via an engagement member 4. A tension of the cord member C is detected by a triaxial force sensor. According to the detected tension of the cord member C, a required center-of-gravity velocity generator 74 determines required center-of-gravity velocities Vb_x_aim and Vb_y_aim, and a manipulated variable for control is determined according thereto.

Abstract: Provided is a control device of an inverted pendulum type vehicle capable of adjusting a deviation of a tilt angle of a base body from a desired tilt angle so as to maintain the vehicle in a normal state where the tilt angle matches the desired tilt angle and the vehicle is in halt. When an update condition for updating a tilt offset adjusting variable ?b_xy_offset is satisfied (STEP 21), a posture control calculator 80 performs a first mode arithmetic process (STEP 22) to update the tilt offset adjusting variable ?b_xy_offset, and meanwhile determines imaginary wheel rotational angular acceleration commands ?wdot_x_cmd and ?wdot_y_cmd via a second mode arithmetic process (STEP 23) by using the tilt offset adjusting variable ?b_xy_offset updated in the first mode arithmetic process.

Abstract: Provided is a control device capable of imparting a driving force appropriate for controlling a tilt angle of a loading part to a traveling motion unit, despite the weight of an object to be transported mounted on the loading part capable of freely tilting of an inverted pendulum type vehicle. Velocity command values for defining a desired value of a traveling velocity of a traveling motion unit 5 so as to bring an tilt error between a measured value of the tilt angle of a loading part 3 of an inverted pendulum type vehicle 1 and a desired tilt angle of a predetermined value close to 0 is sequentially determined, and an actuator 7 is controlled so as to make the actual traveling velocity of the traveling motion unit 5 follow a desired value of the traveling velocity defined by the velocity command value.

Abstract: In an inverted pendulum type vehicle, a manipulated variable for control of a traveling motion unit is determined using adjustment parameters Ki_x, Ki_y (i=1, 2, 3) and ?b_x_obj, ?b_y_obj, which changes its value in accordance with whether it is in the loaded state in which an object to be transported is loaded on a loading part of the inverted pendulum type vehicle, or whether it is in the non-loaded state in which the object to be transported is not loaded thereon. The adjustment parameters are changed at a faster rate of change in the case of the transition from the loaded state to the non-loaded state, than in the case of the transition from the non-loaded state to the loaded state. The adjustment parameters for control are changed appropriately during transition while suppressing occurrence of slipping of the traveling motion unit.

Abstract: A control device of an inverted pendulum type vehicle capable of controlling fluctuation of a traveling velocity of a vehicle according to operating state of the vehicle. A traveling motion unit controlling element 50 of an inverted pendulum type vehicle 1 includes a first processing mode and a second processing mode. In the first processing mode, determines a manipulated variable for control so as to bring a tilt angle of a payload supporting part 3 and a traveling velocity of a representative point of the vehicle 1 closer to a desired value. In the second processing mode, the traveling motion unit controlling element 50 determines the manipulated variable for control while making a sensitivity to change of the manipulated variable for control with respect to a measured value of the traveling velocity of the representative point to be relatively lower than that in the first processing mode.

Abstract: An inverted pendulum type vehicle includes a loaded mode in which an object to be transported is loaded on a boarding unit, and a non-loaded state mode in which the object to be transported is not loaded thereon. When traveling velocities of a representative point of the vehicle in a steady-state, in which tilt errors ?be_x_s, ?be_y_s between actual tilt angles of a boarding unit and desired tilt angles thereof are maintained, constant are Vb_x_stb, Vb_y_stb, a traveling motion of a traveling motion unit is controlled such that at least a ratio of a magnitude of Vb_x_stb with respect to a magnitude of ?be_x_s becomes a smaller ratio in the non-loaded state mode than in the loaded state mode. Such inverted pendulum type vehicle is difficult to move in the non-loaded state mode, and is easy to move in the loaded mode.

Abstract: A micromechanical acceleration sensor includes a substrate with a substrate surface arranged in one plane, a first counter-electrode arranged on the substrate surface, a second counter-electrode arranged on the substrate surface, and a rocking mass arranged above the first counter-electrode and the second counter-electrode. The rocking mass is in this case connected to the substrate via a torsion spring which permits tilting of the rocking mass about an axis of rotation. Further provided are a first compensation counter-electrode arranged on the substrate surface and a second compensation counter-electrode arranged on the substrate surface. In addition, a first compensation electrode is arranged above the first compensation counter-electrode and a second compensation electrode is arranged above the second compensation counter-electrode.

Abstract: A crystal device that has stable vibration characteristics and that offers high reliability and high accuracy. The crystal device includes a first major face, which contains a portion of a base and a portion of a vibrating prong within a single plane, formed on the crystal plate, and a second major face, which contains another portion of the base and another portion of the vibrating prong within a single plane, formed on a crystal plate, wherein the first major face and the second major face have different outer shapes. The shapes of the first and second major faces can be produced by first forming mask layer patterns on a crystal substrate by exposure through different mask patterns and then etching the crystal substrate using the thus formed mask layer patterns.

Abstract: The invention concerns a folded pendulum, comprising: a support (F); a test mass (PM); a simple pendulum (SP); an inverted pendulum (IP); the simple pendulum and the inverted pendulum being connected at one of their ends to the test mass (PM) and at the other end to the support (F) by means of 4 corresponding joint systems (G), the test mass being not connected to the support (F) and being therefore free to oscillate, each joint system (G) relevant to the simple pendulum (PS) comprising one or more joints in tension, the folded pendulum being characterised in that: each of the joint systems (G) relevant to the inverted pendulum (IP) comprises one or more joints in compression. The invention further concern a seismic sensor utilizing the folded pendulum according to the invention.

Abstract: An accelerometer that has a cross coupling coefficient due to pendulum droop of the proof mass that is approximately equal and opposite in sign to a cross coupling coefficient due to resonator nonlinearity. The accelerometer includes a proof mass, a housing having at least two opposing interior walls, and one or more flexures for flexibly connecting the proof mass at a first end to a first one of the opposing walls of the housing. A first resonator is connected to a first surface of the proof mass at an end of the proof mass opposite the first end and to the housing wall that is not attached to the flexure. A second resonator is connected to a second surface of the proof mass and the housing wall that receives the first resonator. The second surface is on an opposite side of the proof mass as the first surface.

Abstract: There is provided an acceleration sensor including: a weight portion; plural fixed portions formed above a bottom plate around a periphery of the weight portion; a beam portion coupling the fixed portions and the weight portion, and holding the weight portion at a position separated from the bottom plate; a detection portion provided at the beam portion and detecting deformation of the beam portion; a frame portion provided so as to project out from the bottom plate and surround the fixed portions at a position separated from the fixed portions; and a lid portion of plate shape that seals an opening of the frame portion.

Abstract: An inertial sensor includes a stopper having a first locking member extending from a flame onto a proof-mass, a first recess formed at the proof-mass, including a bottom surface, a second locking member extending from the proof-mass onto the edge of the flame, a second recess formed at the edge of the side member of the flame and a projection member projecting from the flame toward the proof-mass, wherein each of the first locking member and the projection member is disposed on the both sides of the second recess.

Abstract: A seismic sensor includes a frame, a pendulum pivotably mounted to the frame, a mechanism for sensing angular position of the pendulum, and a monolithic flat spring oriented between the frame and the pendulum for balancing the pendulum at an equilibrium position. The monolithic flat spring includes: (i) an operating region for providing a restoring force to the pendulum proportional to an angular displacement of the pendulum; and (ii) a suspension region for transmitting a force to a portion of the operating region and applying a negligible bending moment to the portion of the operating region.

Abstract: To provide an oscillating current converter fabricated by utilizing the MEMS technology making it possible to further decrease the size yet improving the conversion efficiency. An oscillating current converter 1 fabricated by using the MEMS technology and comprising a cantilever 4 having an opening 5 formed on the distal end side thereof and is cantilevered on the proximal end side thereof, a coil 6 wound around the opening 5 of the cantilever 4, and a magnet 8 arranged so as to enter into the inside of the opening 5 of the cantilever 4, wherein the cantilever 4 oscillates to generate an induced electromotive force in the coil 6.

Abstract: Sensing structures are provided which are designed using non-conventional designs. These sensing structures have improved sensitivity and noise floor at low frequencies.

Abstract: A covered acceleration sensor element includes a weight portion, a support frame portion surrounding the weight portion, a plurality of flexible beam portions for connecting the weight portion to the support frame portion to support the weight portion, piezoresistance elements provided on the beam portions, and wirings for connecting them. An upper cover and a lower cover enclosing the periphery of the weight portion together with the support frame portion are joined to the face and back of the support frame portion. Acceleration in the directions of three axes, i.e., a first axis in the joining thickness direction, a second axis in a plane perpendicular to the first axis, and a third axis in the plane and perpendicular to the second axis, or acceleration in the direction of any of the axes, is detected from changes in the resistances of the piezoresistance elements. The support frame portion is separated by separation grooves into an inner frame and an outer frame.

Abstract: Exhibiting, exemplifying, and personifying science and technology, an adjustable, hand-held, educational pendulum instrumented with a visual inertial motion sensor resembling a lollipop consists of two hard rubber disks, a pendulum bob and a sensor mass, threaded onto a composite plastic line. Sliding the disks on the line configures the educational pendulum for various new and classical science experiments, such as oscillating naturally, changing mass of bob, changing length of arm, sensing gravity, and sensing changes in motion. Like a person, the visual inertial sensor, a mass on a spring or the pendulum equivalent, ordinarily flexes to sense changes in motion, but not that of a simple coasting swing, creating a puzzling mystery. Consciously experiencing interacting pendulum parts transferring energy push and pull on one another to rhythmically move and flex per laws of nature can help a person to better know and appreciate how transfers of energy animate and power our wonderful world.

Abstract: Disclosed are moveable microstructures comprising in-plane capacitive microaccelerometers, with submicro-gravity resolution (<200 ng/?Hz) and very high sensitivity (>17 pF/g). The microstructures are fabricated in thick (>100 ?m) silicon-on-insulator (SOI) substrates or silicon substrates using a two-mask fully-dry release process that provides large seismic mass (>10 milli-g), reduced capacitive gaps, and reduced in-plane stiffness. Fabricated devices may be interfaced to a high resolution switched-capacitor CMOS IC that eliminates the need for area-consuming reference capacitors. The measured sensitivity is 83 mV/mg (17 pF/g) and the output noise floor is ?91 dBm/Hz at 10 Hz (corresponding to an acceleration resolution of 170 ng/?Hz). The IC consumes 6 mW power and measures 0.65 mm2 core area.

Abstract: A micromechanical inertial sensor having at least one seismic mass which may be deflected relative to a substrate, and at least one electrode surface which in terms of circuitry, together with at least portions of the seismic mass forms at least one capacitor having a capacitance which is dependent on the deflection of the seismic mass. At least one additional auxiliary electrode is included which is located outside the region which forms the capacitor and which may be set at a potential that deviates from the potential of the seismic mass.

Abstract: A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on the single crystal silicon substrate (1), and the thickness of the cantilever (13) in a direction parallel to the surface of the single crystal silicon substrate (1) is made smaller than the thickness of the cantilever in the direction of the depth of the single crystal silicon substrate (1), and movable in a direction parallel to the substrate surface. In addition, the surface of the cantilever (13) and the part of the single crystal silicon substrate (1), opposing the cantilever (13), are, respectively, coated with an SiO2 film (5), so that an electrode short circuit is prevented in a capacity-type sensor. In addition, a signal-processing circuit (10) is formed on the single crystal silicon substrate (1), so that signal processing is performed as the cantilever (13) moves.

Abstract: A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on the single crystal silicon substrate (1), and the thickness of the cantilever (13) in a direction parallel to the surface of the single crystal silicon substrate (1) is made smaller than the thickness of the cantilever in the direction of the depth of the single crystal silicon substrate (1), and movable in a direction parallel to the substrate surface. In addition, the surface of the cantilever (13) and the part of the single crystal silicon substrate (1), opposing the cantilever (13), are, respectively, coated with an SiO2 film (5), so that an electrode short circuit is prevented in a capacity-type sensor. In addition, a signal-processing circuit (10) is formed on the single crystal silicon substrate (1), so that signal processing is performed as the cantilever (13) moves.