Abstract: With a certain pipeline, either buried or deposited on a sea/lake bottom, the formation of critical faults is determined and localized, which arise in the walls of the pipeline, or the development of an already localized fault is monitored, through sensors regularly distributed along the pipeline, and fixed to the same by means of a plate equipped with a pass-through hole in which the sensor is inserted.

Abstract: A method of testing a haptic device that includes an actuator and has a first weight includes placing the haptic device on a test fixture that has a second weight that is greater than the first weight. The haptic device is placed on the test fixture so that the actuator within the haptic device is substantially close to the center of gravity of the test fixture. The method further includes causing the haptic device to generate haptic effects via the actuator, and measuring the acceleration of the test fixture during the haptic effects.

Abstract: The present invention describes an order tracking system (200) and method (100) for tracking at least one order from mechanical and/or acoustic vibrations generated by a periodic excitation process of a physical system. The order tracking system (200) comprises a means for obtaining (212) a mechanical and/or acoustic vibration data of a physical system and a means for obtaining (214) system reference data. It further comprises a means for combining (224) the mechanical and/or acoustic vibration data with the system reference data and a means for applying (226) a digital FIR filter to at least the mechanical and/or acoustic vibration data for deriving based thereon at least one order.

Abstract: A data acquisition system for vibration analysis signals includes a logarithmic amplifier for compressing wide dynamic range signals. The logarithmic amplifier replaces attenuators, gain amplifiers, and gain switches used in a conventional system. Further, only a low bit-count analog to digital converter is needed in combination with the logarithmic amplifier. Consequently, the footprint of the system and system cost are reduced.

Abstract: A tilt and vibration sensor incorporating a plurality of electrodes and a conductive spherical. body which is turned on and off by the moving displacement of the spherical body, and which may be remarkably reduced in size and may have high performance and high operating sensitivity, high durability, and high reliability; and a method of manufacturing the sensor. The case (1) of the sensor comprises a case body (5) formed of a non-conductive material having such excellent gas-barrier property and heat resistance that can stop the transmission of gases which affects the on/off operation of the sensor due to the moving displacement of the conductive spherical body (4) and a cover body (7) sealing airtight the opening part (6) of the case body.

Abstract: An ultrasonic sensor that has a simplified structure, ensures high water resistance, and shortens the manufacturing time. An ultrasonic sensor includes a transducer, an electronic circuit substrate on which an electronic circuit is arranged to process an ultrasonic signal transmitted and received via the transducer, and a housing including a substrate retainer that retains the electronic circuit board. The substrate retainer includes a lid welded to an open portion thereof to hermetically seal the substrate retainer against the entry of a liquid.

Abstract: A method of simulating attenuation of an impulse signal of a reciprocating compressor includes providing a reciprocating compressor that includes a crank connected to a motor, a compression chamber, a reciprocating piston positioned in the compression chamber, and a connecting rod attached to the piston. The method also includes connecting the connecting rod to the crank with a first crank pin, mounting at least one transducer on the reciprocating compressor, running the compressor, measuring a first impulse signal with the at least one transducer, replacing the first crank pin with a second crank pin, the second crank pin having a diameter different than the diameter of the first crank pin, running the compressor, measuring a second impulse signal with the at least one transducer, and comparing the first impulse signal to the second impulse to determine an amount of attenuation between the first and second impulse signals.

Abstract: A process device for coupling to an industrial process for use in monitoring or controlling the process includes a device housing configured to physically couple to the industrial process. A coil of wire is mounted to the housing and a magnet is configured to move through the coil of wire. The relative movement of the magnet is responsive to vibrations in the industrial process. Such relative movement induces an electrical current in the coil of wire. Electrical circuitry in the housing includes an input to receive the electrical current from the coil of wire.

Abstract: An obstacle detection device has an ultrasonic sensor fixed to a first side of a mount member. The ultrasonic sensor sends/receives ultrasonic wave toward/from a second side of the mount member, which is opposite to the first side thereof. At least one of a mounting surface of the ultrasonic sensor and a mounting surface of the mount member has a protrusion, which protrudes therefrom so that an end surface of the protrusion contacts the other of the mounting surfaces. The mounting surfaces of the mount member and the ultrasonic sensor face each other. The end surface of the protrusion and the mounting surface of the ultrasonic sensor are different from each other in at least one of shape and area thereof.

Abstract: A method and apparatus for ultrasonic inspection. The ultrasonic inspection apparatus comprises ultrasonic transducers, a body, a set of engagement members and a set of ports. The ultrasonic transducers are at a position generally adjacent to a surface of an object. The body has a contact surface capable of contacting the surface and is capable of holding the set of ultrasonic transducers. The engagement members are connected to the body for engagement with the surface. The engagement members are flexibly bendable and are conformed to contours across the surface to form a coupling region within the body. The set of ports deliver a coupling material to the coupling region. The engagement members, when in contact with the surface of the object, cause a seal to retain an amount of the coupling material within the coupling region sufficient to couple the ultrasonic transducers to the surface.

Abstract: A geophone including a plurality of ferromagnetic masses (e.g., magnets) disposed to oscillate on one or more compliant elements (e.g., springs) in a manner that produces a steep flux gradient at one or more conductive coils is disclosed. The magnetic masses are positioned with like poles facing each other so as to compress the magnetic field gradient. The coils may be positioned in the flux gap either between the magnets, in close proximity to the magnets, or surrounding the magnets. Vibration measurements may then be detected from the movement of at least one of the magnetic masses.

Abstract: Embodiments of the invention relate generally to the detection of anomalous or aberrant movement of a reciprocating element in a reciprocating device and, more particularly, to the analysis of one or more components of a vibration signal produced by such anomalous or aberrant movement of the reciprocating element. One embodiment of the invention provides a system for identifying an anomalous movement of a reciprocating element in a reciprocating device, the system comprising: at least one sensing device for sensing a vibration signal of the reciprocating element; a processing apparatus for separating the vibration signal into a first component having a first frequency range and a second component having a second frequency range different than the first frequency range; and an analysis device for analyzing, displaying, or both, at least one of the first and the second components of the vibration signal.

Abstract: An accelerometer or a seismometer using an in-plane suspension geometry having a suspension plate and at least one fixed capacitive plate. The suspension plate is formed from a single piece and includes an external frame, a pair of flexural elements, and an integrated proof mass between the flexures. The flexural elements allow the proof mass to move in the sensitive direction in the plane of suspension while restricting movement in all off-axis directions. Off-axis motion of the proof mass is minimized by the use of intermediate frames disbursed within and between the flexural elements. Intermediate frames can include motion stops to prevent further relative motion during overload conditions. The device can also include a dampening structure, such as a spring or gas structure that includes a trapezoidal piston and corresponding cylinder, to provide damping during non-powered states. The capacitive plate is made of insulating material.

Abstract: A method for evaluating feeling of hitting of a golf club, includes: measuring vibration of a golf club appearing in a circumferential direction of a shaft when a golf ball is hit by the golf club having the three-axis accelerometer attached to the shaft by a three-axis accelerometer; analyzing the vibration of the golf club along the circumferential direction of the shaft measured by the three-axis accelerometer by a hand-arm vibration measurement filter; and evaluating feeling of hitting of the golf club in accordance with a result of analysis of vibration of the golf club appearing along the circumferential direction of the shaft by the hand-arm vibration measurement filter.

Abstract: A vibration monitoring system for an electrical submersible pump (ESP) that includes a fiber optic cable coupled with the ESP and an optical sensor coupled with the fiber optic cable. The optical sensor emits electromagnetic radiation into the fiber optic cable, some of which reflects back from optical discontinuities provided in the fiber optic cable. By receiving the reflected electromagnetic radiation, the optical sensor estimates the location of the optical discontinuities. Displacement and rate of displacement of the optical discontinuities can be estimated when the reflections are received over a period of time. Because the fiber optic cable, and the optical discontinuities, move with the ESP, displacement measurements of the optical discontinuities correlate to ESP movement, including ESP vibration.

Abstract: A method for predicting a blade structure failure within a coupled blade structure including a plurality of blades supported for rotation on a rotor and a shroud structure coupling the blades. The method includes the steps of determining displacements of a plurality of predetermined circumferential locations on the shroud structure during rotation of the blade row, where the displacements are provided as a function of time relative to the periodic rotation of the shroud structure for time intervals that are integer multiples of rotor rotation. A signal characteristic related to vibrational mode and a nodal diameter of the shroud structure is derived based on the displacements of the circumferential locations on the shroud structure.

Abstract: A device for measuring a vibration frequency of a mechanically vibrating string or rod, comprising a microwave transmitter for directing microwaves towards the vibrating string and a microwave receiver for receiving the microwaves amplitude modulated by the frequency of mechanical vibration. A member is arranged close to a vibration maximum of the vibrating string. The member is arranged on one side of the vibrating object and the microwave receiver is arranged on the other side thereof. The device is used for measuring temperature, pressure, torque, force or identity.

Abstract: A cleaning robot may be provided having a case and a sensor assembly. The sensor assembly may include a sensor hole having a first opening provided at an outer surface of the case and a second opening provided inwardly of the first opening, with respect to a center of the case. Additionally, the sensor assembly may include a sensor element configured to receive a signal and the sensor element may be provided inwardly of the first opening.

Abstract: Provided are a tilted vibration sensor incorporating a plurality of electrodes and a conductive spherical body which is turned on and off by the moving displacement of the spherical body, and which may be remarkably reduced in size and may have high performance and high operating sensitivity, high durability, and high reliability; and a method of manufacturing the sensor. The case (1) of the sensor comprises a case body (5) formed of a non-conductive material having such excellent gas-barrier property and heat resistance that can stop the transmission of gases which affects on the on/off operation of the sensor due to the moving displacement of the conductive spherical body (4) and a cover body (7) sealing airtight the opening part (6) of the case body. In the method of manufacturing the vibration sensor, moisture and particulate impurities affecting the on/off operation are removed from the hollow part (2) of the case (1), and the hollow part is evacuated.

Abstract: Two or more sound sensors are placed in a space of interest. Each sensor has a light-emitting output. Each sensor can be positioned at a specific location, such as at an ear location for a seated listener. An excitation source can provide a specified acoustical energy stimulus to the space. A user can obtain a visual impression of acoustical response of the space corresponding to the sound sensors' positions. An image acquisition system can acquire an image of the sound sensors responding to a stimulus. Acquired images can be analyzed to determine response characteristics. A presentation system can provide a display of response characteristics.

Abstract: One example of a seismic vibrator system includes a baseplate having a bottom surface and a coupling mechanism, the coupling mechanism being operable to a deployed position; a hold-down mass connected to the baseplate; a lifting mechanism in operational connection with the hold-down mass and the baseplate to apply a selected hold-down weight to the baseplate; and a driving mechanism functionally connected to the baseplate to transmit seismic energy through the baseplate into a ground surface to which the baseplate is coupled, wherein the coupling mechanism is urged outward from the bottom surface and into physical contact with the ground surface when operated to the deployed position.

Abstract: An apparatus and method for measuring the acoustical energy that will be applied to a substrate during cleaning. A substrate is provided that has placed upon it a piezoelectric member that is capable of sensing the acoustical power that is transmitted. This enables the detection and calibration of transducer assemblies that are used in the cleaning of substrates.

Abstract: The present invention describes an order tracking system (200) and method (100) for tracking at least one order from mechanical and/or acoustic vibrations generated by a periodic excitation process of a physical system. The order tracking system (200) comprises a means for obtaining (212) a mechanical and/or acoustic vibration data of a physical system and a means for obtaining (214) system reference data. It further comprises a means for combining (224) the mechanical and/or acoustic vibration data with the system reference data and a means for applying (226) a digital FIR filter to at least the mechanical and/or acoustic vibration data for deriving based thereon at least one order.

Abstract: Devices usable as sensors, as transducers, or as both sensors and transducers include one or more nanotubes or nanowires. In some embodiments, the devices may each include a plurality of sensor/transducer devices carried by a common substrate. The sensor/transducer devices may be individually operable, and may exhibit a plurality of resonant frequencies to enhance the operable frequency bandwidth of the devices. Sensor/transducer devices include one or more elements configured to alter a resonant frequency of a nanotube. Such elements may be selectively and individually actuable. Methods for sensing mechanical displacements and vibrations include monitoring an electrical characteristic of a nanotube. Methods for generating mechanical displacements and vibrations include using an electrical signal to induce mechanical displacements or vibrations in one or more nanotubes.

Abstract: Disclosed are sensing apparatus, such as mass sensors, comprising longitudinal block resonators having annexed platforms that offer the improved mass sensitivity at micron scale, high-Q in air, simplicity of fabrication, and improved reliability. Exemplary mass sensors comprise a central block separated from a substrate. Two annexed platforms are coupled to the central block by way of two separating beams that are separated from the substrate. One or more anchors are coupled to the central block by way of support beams that are separated from the substrate by insulating material. One or more transducers are provided for actuating and sensing vibration of the central block and the annexed platforms. The transducers may employ capacitive and piezoelectric drive and sense schemes.

Abstract: Various embodiments of the present invention include systems and methods for multimodal functional imaging based upon photoacoustic and laser optical scanning microscopy. In particular, at least one embodiment of the present invention utilizes a contact lens in combination with an ultrasound transducer for purposes of acquiring photoacoustic microscopy data. Traditionally divergent imaging modalities such as confocal scanning laser ophthalmoscopy and photoacoustic microscopy are combined within a single laser system. Functional imaging of biological samples can be utilized for various medical and biological purposes.

Abstract: Various embodiments of the present invention include systems and methods for multimodal functional imaging based upon photoacoustic and laser optical scanning microscopy. In particular, at least one embodiment of the present invention utilizes a contact lens in combination with an ultrasound transducer for purposes of acquiring photoacoustic microscopy data. Traditionally divergent imaging modalities such as confocal scanning laser opthalmoscopy and photoacoustic microscopy are combined within a single laser system. Functional imaging of biological samples can be utilized for various medical and biological purposes.

Abstract: Some embodiments of the present invention provide a system that generates a simulated vibration pattern in a computer subsystem. During operation, a vibration pattern is monitored at a location in the computer subsystem, wherein the vibration pattern is monitored while the computer subsystem is incorporated into the computer system and the computer system is operating. Then, the vibrations of the computer subsystem are mimicked by generating the simulated vibration pattern at the same location in the computer subsystem based on the monitored vibration pattern.

Abstract: The invention relates to an ultrasonic sensor (2) in particular a motor vehicle ultrasonic sensor, comprising a housing (4), and a diaphragm (6) which is supported in or on a section (12) of the housing (4) and which has a diaphragm base (8) and a substantially cylindrical wall section (18) adjoining the diaphragm base (8), at least one stabilizing and/or attenuating auxiliary element (22, 30, 32) being arranged on or in the wall section (18) of the diaphragm (6).

Abstract: A vibration excitator is described, comprising: a main body (2); a stinger (3) which is adapted to move relative to the main body (2), in a particular working direction; an actuator (5) coupled to the main body (2) and the stinger (3); wherein the stinger (3) has a first end (3a) that is coupled to the main body (2), and an opposite second end (3b) that is intended for attachment to an object (V) to be examined; wherein the stinger (3) has an elastic centre point (Me); wherein the main body (2) has a centre of gravity (G); and wherein L1=L3 applies, wherein L1 is the distance between the elastic centre point (Me) and the second stinger end (3b), measured along the said working direction; and wherein L3 is the distance between the centre of gravity (G) and the second stinger end (3b), measured along the said working direction.

Abstract: Strain waves of THz frequencies can coherently generate radiation when they propagate past an interface between materials with different piezoelectric coefficients. Such radiation is of detectable amplitude and contains sufficient information to determine the time-dependence of the strain wave with unprecedented subpicosecond, nearly atomic time and space resolution.

Abstract: A shake detecting sensor includes: a plurality of shake detecting sensors that detects a shake; and an adder circuit that adds shake signals output from the plurality of shake detecting sensors. A signal added by the adder circuit is output as a shake signal output from one sensor.

Abstract: A waveform detector may include multiple stages.

Abstract: A method of monitoring vibrations in a blade structure of a turbine including generating signals from a sensor located adjacent to a radial outer edge of the blade structure to sense passage of targets located on the blade structure. The sensor is mounted eccentrically and the signals are obtained with the sensor located at different angular positions. In a first aspect of the invention, the signals from the sensor are used to determine a target slope angle of a target on a first turbine blade during operation of the turbine. In a second aspect of the invention, the signals from the sensor are used to position the sensor in response to a sensed variation in the axial position of the target on the first turbine blade.

Abstract: An ultrasonic sensor includes an ultrasonic detecting element, an acoustic matching member, and an oscillation damping member. The ultrasonic detecting element detects an ultrasonic wave. The acoustic matching member has a receiving surface that is adapted on a side of the certain object to be exposed to a space, in which the detected body exists. The receiving surface receives the ultrasonic wave reflected by the detected body. The acoustic matching member is made of a material having an acoustic impedance larger than that of air and smaller than that of the ultrasonic detecting element. The oscillation damping member is disposed between an attachment portion and the acoustic matching member. The attachment portion is adapted for attaching the ultrasonic sensor to the certain object. The oscillation damping member damps transmission of oscillation from the certain object to the acoustic matching member.

Abstract: A capacitive micromachined ultrasonic transducer (cMUT) has an acoustic decoupling feature. A cavity is introduced underneath the regular cMUT element, preferably in the substrate, to provide acoustic decoupling. Trenches are also introduced to separate the cMUT elements and to provide further acoustic decoupling. The acoustic decoupling feature may be used in both conventional membrane-based cMUT and the newer embedded-spring cMUT (ESCMUT). Exemplary fabrication methods are also described.

Abstract: Technique for deterring and monitoring internal defect condition of a mud pump during the operation and/or in a laboratory conditions are illustrated. One or more acoustic transducers are attached in the proximity of one or more valves of the pump. Variation(s) in the output signal parameters are continuously monitored. Variation of the signal over the predetermined threshold level indicate a gradual degradation of the pump or if the variation of the signal occurs over a short interval it may indicate a sudden failure of the pump. Likewise, a system of detecting internal defect condition of the pump and apparatus for monitoring the pump condition is illustrated. The techniques are also applied to duplex and/or triplex high-pressure pumps used to push hydrocarbons through pipelines. Apparatus and system similar to that disclosed for the mud pump is equally applicable to the high-pressure pumps used to push hydrocarbons through pipelines.

Abstract: A method is provided for analyzing vibrations of a variable speed rotating body. The method includes producing a signal that is proportional to an acceleration of the rotating body and producing a plurality of pulses. Each pulse represents a revolution of the rotating body and is indicative of a vibration sample at a rotational position of the rotating body. The signal is converted to a numeric value that is indicative of a vibrational amplitude of the rotating body. The plurality of pulses are converted to revolution time periods indicative of a rotational rate of the rotating body. The method also includes producing a harmonic vibrational amplitude at a harmonic of the rotational rate of the rotating body, and representing a phase of the harmonic vibrational amplitude relative to the rotational position of the rotating body.

Abstract: The invention is a vibration sensor with a carrying element capable of being set into vibration; a conversion device having a field coil to set and/or tap the carrying element into vibration; an anchor mounted in the field coil; and, a vibration element to transmit the vibrations from the carrying element into/from a surrounding space. The anchor is designed as two parts, having a permanent magnet and a coil core connected to the field coil, with an air gap arranged therebetween and lying in the area of the axial extension of the field coil. The permanent magnet is connected to the carrying element to transmit vibrations; and, the field coil and the permanent magnet are arranged to interact in such a way that any vibration of the permanent magnet induces current flow in the field coil and/or induces vibration of the permanent magnet in the field coil.

Abstract: A vibrating electrode plate 24 that senses a sound pressure faces a counter electrode plate 25 to constitute a capacitance type acoustic sensor. In the counter electrode plate 25, acoustic perforations 31 are opened in order to pass vibration, and plural projections 36 are provided on a surface facing the vibrating electrode plate 24. An interval between the projections 36 is decreased in a region where the vibrating electrode plate 24 has high flexibility to easily generate local sticking with the counter electrode plate 25. The interval between the projections 36 is increased in a region where the vibrating electrode plate 24 has low flexibility to hardly generate local sticking with the counter electrode plate 25. The projections thus arranged prevent firm fixing of the vibrating electrode plate to the counter electrode plate and interruption of vibration of the vibrating electrode plate.

Abstract: A device of testing a vibrating device includes a housing, a connector, an indicator, and a vibrating sensing apparatus. The connector, the indicator, and the vibrating sensing apparatus are mounted with the housing, and electronically connected in series. When the test device is vibrated by a portable electronic device received in the housing, the vibrating sensing apparatus forms a closed circuit with the connector and the indicator to activate the indicator to indicate whether the vibrating performance of the portable electronic device is normal or not.

Abstract: Document inspection system comprising a transport system for transporting documents along a transport path (12) through an inspection station. At least one ultrasonic inspection apparatus at the inspection station, the apparatus including ultrasonic transmitting and receiving transducers (42,44) arranged on opposite sides of the transport path, and a processing system for monitoring ultrasonic signals received by the receiving transducer. An ultrasonic absorbing material (300) is provided around the transducers and facing the transport path for absorbing ultrasound reflected by a document. Document guide apparatus (312,314), having a lower coefficient of friction than the absorbing material, extends partially over the absorbing material (300) so as to prevent documents contacting the absorbing material in use while leaving the absorbing material exposed to the transport path at least adjacent the transducers.

Abstract: A head of an ultrasonic probe is formed by joining a flexible sheet holding a plurality of ultrasonic transducers to a curved surface of a support. Concave-convex shapes (concave-convex surfaces) are provided on the curved surface of the support and a joining surface of the flexible sheet. The concave-convex surfaces correspond to each other, and are engaged with each other to determine relative positions of the flexible sheet and the support when they are joined. Each of grooves on the concave-convex surface is positioned between adjacent ultrasonic transducers.

Abstract: A method for non-destructive testing of a drive shaft that is accessible by only one of its ends in longitudinal waves, using a multi-element annular ultrasonic transducer. Such a transducer consists of independent elements that can be excited by electrical pulses of the same frequency, but for which different electronic phase shifts will be applied, in the invention, to the pulses transmitted to the elements. Such an electronic phase shift allows the focussing or deflection of a final beam synthesized by all the elements constituting the transducer, the said final beam being concentrated to adopt a generally cylindrical shape with a cross-section that is far smaller than the cross-section of the shaft to be tested and is highly energetic over a long distance due to the waveguide effect created by the cylindrical geometry of the shaft.

Abstract: An ultrasonic sensor is provided with a substrate unit where a thin-walled portion is arranged and a piezoelectric oscillator which is formed at the substrate unit. The piezoelectric oscillator includes two electrodes and a piezoelectric film positioned between the two electrodes. The thin-walled portion and the piezoelectric oscillator construct a membrane structure which will resonate at a predetermined frequency.

Abstract: A laser transmission system is used for inspecting workpieces. The system has a source of laser beams that is coupled to a first lens assembly. A first hollow core waveguide is operably coupled to the first lens assembly. An end of an optical fiber coupled to the first hollow core waveguide. A second hollow core waveguide is coupled to the other end of the optical fiber. A second lens assembly operably coupled to the second hollow core waveguide. The length of the hollow core waveguides range from about 5 to 100 times the focal lengths of the lens assemblies. A motion control system is operably coupled to the second hollow core waveguide and the second lens assembly for controllably displacing the second hollow core waveguide and the second lens assembly with respect to a workpiece.

Abstract: A seismic sensor, having a body which incorporates means for detecting and/or measuring waves, and, in the extension of said body, a tip for insertion into the ground, said tip extending between an upper end and a lower end, wherein said tip has at least two wings which together give said tip a V-shaped profile, said wings having between them at least one cavity which extends from said upper end to close to said lower end.

Abstract: A pressure sensitive acoustic wave sensor and actuator include an acoustic wave cavity fo?ned in a substrate, a transducer generating an acoustic wave substantially trapped in the acoustic wave cavity and an acoustic wave absorbing member that absorbs more acoustic wave energy in the acoustic wave cavity in response to increased pressure on the member. The speed and/or braking of an electric vehicle is controlled through operator input of a foot pedal, using the pressure sensitive acoustic wave sensor.

Abstract: An ultrasonic sensor attached to a certain object, includes an ultrasonic detecting element, an acoustic matching member, and a reflection limiting member. The ultrasonic detecting element detects an ultrasonic wave. The acoustic matching member has a receiving surface that is adapted on a side of the certain object to face toward the detected body. The reflection limiting member is disposed to a side portion of the acoustic matching member between the receiving surface and an opposing surface of the acoustic matching member. The reflection limiting member limits the ultrasonic wave, which transmits inside the acoustic matching member, from being reflected by the side portion.

Abstract: An electronic device substrate handling system. The system comprises an electronic device fabrication tool and a mechanical handling structure. The fabrication tool is configured to hold at least one substrate on a mounting body of the tool. The mechanical handling structure is configured to actuate the substrate such that the substrate is transferred to or from the mounting body. The system further comprises a vibration monitor coupled to at least one of the mechanical handling structure, or, the tool. The vibration monitor is configured to measure vibrations of the mechanical handling structure, or, the tool, while said mechanical handling structure is actuating said substrate. The vibration monitor is also configured to convert the measured vibrations into a time-dependent electrical signal.