Abstract: An integrated differential pressure sensor includes, in a monolithic body of semiconductor material, a first face and a second face, a cavity extending at a distance from the first face and delimited therewith by a flexible membrane formed in part by epitaxial material from the monolithic body and in part by annealed epitaxial material from the monolithic body, an access passage in fluid communication with the cavity, and in the flexible membrane at least one transduction element configured so as to convert a deformation of the flexible membrane into electrical signals. The cavity is formed in a position set at a distance from the second face and is delimited at the second face with a portion of the monolithic body.

Abstract: A field device includes a capacitive gauge pressure sensor configured to measure a gage pressure of a process media. A sensor body of the pressure sensor includes first and second chambers. The second chamber is under vacuum and forms a vacuum dielectric for the pressure sensor. An atmospheric reference port is formed in the sensor body and maintains the first chamber in equilibrium with ambient atmospheric pressure. A process media inlet port of the sensor is configured to couple to a process media source. The sensor includes a conductive deflectable diaphragm between the second chamber and the media inlet port. A capacitive plate is disposed in the second chamber in relation to the diaphragm such that deflection of the diaphragm generates a change in capacitance.

Abstract: A field device includes a capacitive gauge pressure sensor configured to measure a gage pressure of a process media. A sensor body of the pressure sensor includes first and second chambers. The second chamber is under vacuum and forms a vacuum dielectric for the pressure sensor. An atmospheric reference port is formed in the sensor body and maintains the first chamber in equilibrium with ambient atmospheric pressure. A process media inlet port of the sensor is configured to couple to a process media source. The sensor includes a conductive deflectable diaphragm between the second chamber and the media inlet port. A capacitive plate is disposed in the second chamber in relation to the diaphragm such that deflection of the diaphragm generates a change in capacitance.

Abstract: A method for manufacturing a capacitance sensor comprises the steps of (a) depositing a film to be a diaphragm forming a moving electrode, (b) heating the film to be the diaphragm to a first temperature, and (c) depositing a film to be a plate forming a fixed electrode opposing to the moving electrode. Stresses of the diaphragm and the plate of the capacitance sensor are optimized.

Abstract: The present invention provides a diaphragm attaching structure of an electrostatic capacity type pressure gauge which can achieve an improvement of a measuring precision by inhibiting a poor weld and a heat strain from being generated while restricting an increase of a cost with an easy manufacturing.

Abstract: Cannula assemblies with pressure sensors made of stacked coplanar layers and ambulatory infusion systems comprising the same are disclosed. The cannula assemblies include a hub and an infusion cannula. The hub includes a pressure sensor and a fluid channel fluidly coupled to the infusion cannula. The pressure sensor is formed from a stack of coplanar layers including a top layer, a base layer an electrode layer and a counter electrode layer. The fluid channel is positioned between the top layer and the base layer. The electrode layer is positioned between the top layer and the base layer and coupled to the fluid channel. The counter-electrode layer is positioned between the top layer and the electrode layer. A spacer layer having a through cut-out defining an electrode cavity is disposed between the top layer and the base layer such that the electrode layer extends across the electrode cavity.

Abstract: The present invention relates to a capacitance type pressure measurement apparatus by using a diaphragm, and more specifically to an apparatus for measuring pressure by using a diaphragm capable of measuring pressure of atmospheric pressure or less as well as pressure of atmospheric pressure or more without having a getter pump by fixedly mounting a pressure variable container on a sensor housing having a diaphragm mounted therein.

Abstract: A pressure transmitter is provided. The pressure transmitter includes a pressure sensor including a pair of process fluid pressure ports each having a deflectable diaphragm. A first variable capacitor is disposed within the pressure sensor and has a capacitance that varies with differential pressure between the process fluid ports. A second variable capacitor is disposed within the pressure sensor and has a capacitance that varies with line pressure.

Abstract: A fuel storage system includes a storage vessel including a dielectric liner, a voltage sensor formed by a pair of plates disposed on opposing surfaces of the liner, and a controller configured to determine a gas pressure in the storage vessel based on voltages measured by the sensor.

Abstract: Disclosed is a capacitive pressure probe for high temperature applications, such as for use in a gas turbine engine. The capacitive probe or pressure sensor of the present invention includes, inter alia, a sensor housing that defines an interior sensing chamber having a pressure port and an interior reference chamber positioned adjacent to a sensing electrode. The reference chamber is separated from the sensing chamber by a deflectable diaphragm made from Haynes 230 alloy, wherein the deflection of the diaphragm in response to an applied pressure in the sensing chamber corresponds to a change in capacitance value detected by the sensing electrode.

Abstract: The invention relates to a vacuum measuring cell device comprising a vacuum membrane measuring cell (8) having a connecting means (5, 6) arranged thereon for a communicating connection to the medium to be measured, an electronic system (34), which is electrically connected to the vacuum membrane measuring cell (8), and also comprising a heating arrangement (20, 21) for heating the vacuum membrane measuring cell (8) to a predefinable temperature value, wherein the heating arrangement (20, 21) substantially encloses the entire vacuum membrane measuring cell (8) such that said cell forms a thermal container (20). Said container constitutes a thermal body (20a) in the area of the connecting means (5, 6) and connecting means (6) are guided through it, the connecting means thereby being thermally contacted at least in some areas by the thermal body. The thermal container (20a) comprises a heating source (21) for the heating thereof.

Abstract: A semiconductor device includes a first sensor element in a first branch of a Wheatstone bridge and a second sensor element in a second branch of the Wheatstone bridge. The semiconductor device includes a first reference element in the first branch and a second reference element in the second branch. The semiconductor device includes a circuit configured to switch the first sensor element to the second branch and the second sensor element to the first branch.

Abstract: A sensor design, respectively a micromechanical sensor structure for capacitive relative-pressure measurement, that will allow very small pressure differentials to be reliably recorded at high absolute pressures even in harsh, particle-laden measuring environments. For that purpose, the micromechanical sensor element includes a deflectable diaphragm structure which is provided with at least one deflectable electrode, and a fixed support structure for at least one fixed counter-electrode which is located opposite the deflectable electrode. The diaphragm structure includes two mutually parallel configured diaphragms that are joined rigidly to one another via at least one connecting crosspiece, so that each application of force to one of the two diaphragms is directly transmitted to the respective other diaphragm.

Abstract: A capacitance diaphragm gauge includes an inclination angle sensor which detects the inclination angle of the gauge. The pressure dependences of capacitance obtained when the capacitance diaphragm gauge is mounted on a vacuum apparatus at the first inclination angle (+90°), the second inclination angle (0°), and the third inclination angle (?90°) are stored in a storage unit in advance. A pressure measurement value is then corrected based on the inclination angle information detected by the inclination angle sensor and the capacitance-pressure characteristic data is actually measured at the first, second and third inclination angles, and stored in the gauge.

Abstract: A pressure sensor for sensing a fluid pressure comprising: a first chamber including a first conductive membrane, wherein a fluid is sealed within the first chamber at a reference pressure such that the first conductive membrane deflects from pressure differences between the reference and the fluid pressure; a second chamber including a second conductive membrane sealed from the fluid pressure, wherein the second membrane deflects in response to a change in temperature which the pressure sensor is exposed thereto; and a circuit in electrical communication with the first and second conductive membrane, the circuit being configured to obtain a first and second signal from the first and second conductive membranes respectively, the first and second signals being indicative of the deflection of the first and second conductive membranes, wherein the circuit adjusts the first signal by the second signal to generate an output signal indicative of the fluid pressure.

Abstract: A pressure transducer includes a diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate.

Abstract: A pressure sensor includes a fill tube which is arranged to couple to a process pressure. A sensor is coupled to the fill tube and is configured to measure pressure of fluid in the fill tube as a function of a change of a physical property of the fill tube. Circuitry is provided to measure pressure using the pressure sensor, and to measure pressure based upon the change of the physical property of the fill tube.

Abstract: A capacitive pressure includes a laminated arrangement with a first flexible, electrically insulating carrier film carrying a first capacitor electrode, a second flexible, electrically insulating carrier film carrying a second capacitor electrode and a flexible, electrically insulating spacer film sandwiched between the first and second carrier films, where the spacer film has a through-hole or recess therein, with respect to which the first and second capacitor electrodes are arranged opposite one another, in such a way that the first and second electrodes are brought closer together by resilient bending of the first and/or second carrier film into the through-hole or recess under the action of a compressive force acting on the pressure sensor.

Abstract: A capacitative pressure sensor that has a silicon substrate, CMOS layers deposited on the silicon substrate, a conductive layer deposited on the CMOS layer and, a passivation layer on the conductive layer. A conductive membrane extends from the substrate assembly such that it is spaced from the conductive layer. The conductive layer has a plurality of apertures and the silicon substrate to define a passage for fluid communication with fluid pressure exterior to the pressure sensor and a cap extending from the substrate assembly to cover the membrane and form a chamber on one side of the conductive membrane that is sealed from the fluid pressure exterior to the pressure sensor.

Abstract: A measuring device is disclosed for capacitive pressure and/or temperature measurement, particularly for tire pressure control systems, having at least one sensor, which has a capacitive measuring element to detect a state value, which is applied at an output-side measuring node of the measuring element, with at least one A/D converter operating according to the dual-slope method, with a charging/discharging circuit, for mutual charging and discharging of the measuring element and for generating a sawtooth-shaped measuring potential at the measuring node as a measure for the capacitance of the measuring element, with a period counter, which determines the periods of the measuring potential, and with a clock counter, which determines the cycles of a clock signal, which lie within the duration of at least one period of the measuring potential. The invention relates to a measuring method for capacitive pressure and/or temperature measurement.

Abstract: A method for fabricating a wireless pressure sensor includes providing a first substrate. A portion of the first substrate is controllably displaced to form a cavity. A conducting material is patterned on the first substrate to form a first capacitor plate and a first inductor. A second substrate is provided. A conducting material is patterned on the second substrate to form a second capacitor plate. The second substrate is attached to the first substrate to seal the cavity such that at least a portion of the second substrate is movable with respect to the first substrate within the cavity in response to a change in an external condition. A hermetically sealed capacitive pressure sensor may reside in the cavity between the first substrate and second substrate.

Abstract: A pressure sensor includes a first set of electrodes, a second set of electrodes, and a common electrode. The first and second sets of electrodes overlie an insulative surface, wherein the first set of electrodes represent sense capacitor bottom electrodes and the second set of electrodes represent reference capacitor bottom electrodes. The second set of electrodes is configured in an interleaved arrangement with the first set of electrodes, wherein the geometry of individual electrodes of the first set of electrodes substantially matches the geometry of individual electrodes of the second set of electrodes.

Abstract: A pressure sensor includes a first set of electrodes, a second set of electrodes, and a common electrode. The first and second sets of electrodes overlie an insulative surface, wherein the first set of electrodes represent sense capacitor bottom electrodes and the second set of electrodes represent reference capacitor bottom electrodes. The second set of electrodes is configured in an interleaved arrangement with the first set of electrodes, wherein the geometry of individual electrodes of the first set of electrodes substantially matches the geometry of individual electrodes of the second set of electrodes.

Abstract: The present invention relates to a pressure sensor. The pressure sensor includes a substrate assembly. The substrate assembly defines closed channels and includes a conductive layer. A conductive membrane extends from the substrate assembly and is spaced from the conductive layer. The conductive membrane defines a plurality of apertures. A cap extends from the substrate assembly to cover the membrane.

Abstract: A sensor may include a substrate that has a cavity formed in a surface thereof. A diaphragm, having a conductive portion, may be suspended over the cavity, a selective coating may be present on a face of the diaphragm outside of the cavity, and a counterelectrode may be spaced from and in opposition to the diaphragm. The diaphragm may deform upon interaction of the selective coating with an analyte and thereby alter a capacitance of the sensor in a manner indicative of a degree of interaction.

Abstract: A pressure measuring cell has a first housing body and a membrane arranged proximate the housing body, both of ceramic. The membrane has a peripheral edge joined to the first housing body to create a reference pressure chamber. A second housing body made of ceramic material is opposite the membrane and is joined to the peripheral edge of the membrane, the second housing body together with the membrane forming a measurement pressure chamber. The second housing body has a port for connecting the pressure measuring cell to a medium to be measured. The first housing body, the second housing body and the membrane are tightly connected along the peripheral edge of the membrane in a central area of the first housing body a hole is formed, reaching through the first housing body and at least in the central region of the membrane and opposite the hole a surface of the membrane is formed as a first optically reflective area.

Abstract: A wireless based sensor assembly incorporated within a sealed and pressurized vessel including an end plug secured against an inner surface of the vessel. Temperature and pressure sensors are mounted to inner exposed locations of the end plug and are capable of monitoring temperature and a pressure conditions existing within the sealed vessel. A power supply is communicated to the sensors within said vessel and such that the sensors communicate, in wireless fashion, information regarding the conditions existing internally within the vessel to an external location.

Abstract: An implantable pressure sensor, which may be incorporated within an implantable medical electrical lead, includes an insulative sidewall, which contains a gap capacitor and an integrated circuit. The insulative sidewall of the pressure sensor includes a pressure sensitive diaphragm portion, and the gap capacitor includes a first electrode plate, which is attached to an interior surface of the diaphragm portion of the sidewall, and a second electrode plate, which is spaced apart from the first electrode plate and coupled to the integrated circuit, which is coupled, through the sidewall, to a supply contact and a ground contact. A conductive layer extends over one of the interior surface of the diaphragm portion of the sidewall and an exterior surface of the diaphragm portion; and the conductive layer is coupled to the ground contact to either shield or ground the first electrode plate.

Abstract: The invention provides for a pressure sensor with compensation for temperature variations. The sensor has CMOS layers deposited on a substrate, a conductive layer connected to the CMOS and a passivation layer deposited on the CMOS layers. The arrangement also includes a conductive active membrane spaced from the conductive layer to form an active chamber, and a conductive reference membrane spaced from the conductive layer to form a sealed reference chamber. Further included is a cap which covers the membranes, said cap exposing the active membrane to an outside fluid pressure. The active membrane further defines a foot which is located between the substrate and cap with a leg extending away from the substrate and terminating in a substantially planar deflectable portion, which deflects due to differential pressure stresses so that an active capacitance is developed between the active membrane and the conductive layer depending on the electrical permittivity e of the fluid.

Abstract: The present invention is directed at methods and apparatuses for facilitating the establishment of a reference pressure within a reference chamber of a pressure transducer. The transducer has a housing and a cover, the housing defining a reference chamber and an aperture. A meltable sealing material is disposed on at least one of the cover and the housing. The apparatus includes a pressure chamber that is rotatable between a first position and a second position, a pressure source that is connected to the pressure chamber, a guide that is attachable to the transducer near the aperture, and a heater for selectively heating the pressure chamber to a temperature sufficiently high to melt the sealing material. The cover is positioned in an internal space of the guide. The guide is attached to the transducer near the aperture.

Abstract: A differential pressure sensor method and system includes a number of elastomer plates, which can be placed with certain distance and sealed in a small tube, wherein the tube can be connected to a number of detection areas. The surface of the elastomers can be covered with a thin film of conductive elastomer as a compliant electrode. The resistance of the compliant electrodes varies with deformation of the elastomer plates and the resistance change can be measured through circuits. A variable capacitor also exists between the elastomer plates due to a sealed space and the compliant electrodes. The elastomer plates deform accordingly when the pressure varies in the detection areas and the variation of the capacitance can be detected through circuits. The pressure difference between the detection areas can then be detected utilizing the variation in resistance and capacitance.

Abstract: In an electrostatic capacitance diaphragm vacuum gauge, a diaphragm and a detection electrode opposing the diaphragm are arranged in a vacuum. The electrostatic capacitance diaphragm vacuum gauge measures pressure by measuring the change degree of an electrostatic capacitance between the diaphragm and detection electrode. The electrostatic capacitance diaphragm vacuum gauge includes atmospheric pressure variation factor detection units which detect atmospheric pressure variation factors as external factors that varies the pressure of the vacuum. The pressure of the vacuum is measured by subtracting information detected by the atmospheric pressure variation factor detection units.

Abstract: An implantable pressure sensor, which may be incorporated within an implantable medical electrical lead, includes an insulative sidewall, which contains a gap capacitor and an integrated circuit. The insulative sidewall of the pressure sensor includes a pressure sensitive diaphragm portion, and the gap capacitor includes a first electrode plate, which is attached to an interior surface of the diaphragm portion of the sidewall, and a second electrode plate, which is spaced apart from the first electrode plate and coupled to the integrated circuit, which is coupled, through the sidewall, to a supply contact and a ground contact. A conductive layer extends over one of the interior surface of the diaphragm portion of the sidewall and an exterior surface of the diaphragm portion; and the conductive layer is coupled to the ground contact to either shield or ground the first electrode plate.

Abstract: A capacitive pressure sensor for an industrial process transmitters comprises a housing, a sensing diaphragm, an electrode and a fill fluid. The housing includes an interior cavity and a channel extending from an exterior of the housing to the cavity. The sensing diaphragm is disposed within the interior cavity opposite the electrode. The fill fluid occupies the interior cavity such that a pressure from the channel is conveyed to the sensing diaphragm to adjust a capacitance between the electrode and the sensing diaphragm. The fill fluid has a dielectric constant higher than about 3.5. In various embodiments, the pressure sensor has a diameter less than approximately 3.175 centimeters (˜1.25 inches), the electrode has a diameter less than approximately 1 cm (˜0.4 inches), the pressure sensor has a capacitance of approximately 5 to approximately 10 pico-farads, and the fill fluid is comprised of hydraulic fluid having a liquid additive.

Abstract: The invention relates to a flexible, resilient capacitive sensor suitable for large-scale manufacturing. The sensor comprises a dielectric, an electrically conductive layer on the first side of the dielectric layer, an electrically conductive layer on a second side of the dielectric layer, and a capacitance meter electrically connected to the two conductive layers to detect changes in capacitance upon application of a force to the detector. The conductive layers are configured to determine the position of the applied force. The sensor may be shielded to reduce the effects of outside interference.

Abstract: A pressure sensing system positions a microelectromechanical (MEMS) diaphragm of a MEMS pressure sensor die in a housing to indirectly sample pressure state of a fluid being measured. A second housing diaphragm is used to make direct contact with the fluid being measured. Pressure state of the fluid being measured is transferred from the housing diaphragm through an electrically insulating intermediary fluid to the MEMS diaphragm thereby allowing the MEMS pressure sensor die to indirectly sample pressure state of the fluid being measured. Electrically conductive support members and electrically conductive solid vias are used to electrically couple circuitry of the MEMS pressure sensor die to external wires outside the housing.

Abstract: A high pressure transducer has an H shaped cross-section with a center arm of the H having a top and bottom surface with the top surface of the H accommodating four strain gauges. Two strain gauges are located at the center of the top portion of the center arm of the H and are positive strain gauges, while two strain gauges are located near the periphery of the center arm of the gauge. The bottom surface of the center arm of the gauge has an active area of a smaller diameter than the circular diameter of the center arm portion of the transducer. The smaller active area is surrounded by a thicker stepped area which surrounds an active area on the pressure side of the H shaped member.

Abstract: A contact force sensor package includes a substrate layer having a vibration detection unit and a pair of first junction pads that are electrical connection ports which are provided on an upper surface of the substrate layer, a flexible circuit substrate layer having a pair of second junction pads provided at a position corresponding to the first junction pads and electrically connected to the first junction pad, a vibration transfer unit having one side contacting the vibration detection unit and the other side contacting a human body and transferring a sphygmus wave of the human body to the vibration detection unit, and an adhesion layer formed between the substrate layer and the flexible circuit substrate layer to reinforce a junction force between the substrate layer and the flexible circuit substrate layer, the adhesion layer being not formed in an area overlapping at least the vibration transfer unit.

Abstract: A capacitive micromachined ultrasound transducer (cMUT) cell is presented. The cMUT cell includes a lower electrode. Furthermore, the cMUT cell includes a diaphragm disposed adjacent to the lower electrode such that a gap having a first gap width is formed between the diaphragm and the lower electrode, wherein the diaphragm comprises one of a first epitaxial layer or a first polysilicon layer. In addition, a stress reducing material is disposed in the first epitaxial layer.

Abstract: Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm (2) at a spacing a first housing plate (1) is disposed sealing in the margin region with a joining means (3), and that on the other side of the diaphragm (2) at a spacing a second housing plate (4) is disposed sealing in the margin region with a joining means (3), and that the second housing plate (4) has an opening at which a connection means (5) is disposed sealing with joining means (3) for the connection of the measuring cell (8) with the medium to be measured, wherein the diaphragm (2) and the two housing plates (1, 4) are comprised of a metal oxide.

Abstract: A pressure sensor for sensing a fluid pressure comprising: a first chamber including a first conductive membrane, wherein a fluid is sealed within the first chamber at a reference pressure such that the first conductive membrane deflects from pressure differences between the reference and the fluid pressure; a second chamber including a second conductive membrane sealed from the fluid pressure, wherein the second membrane deflects in response to a change in temperature which the pressure sensor is exposed thereto; and a circuit in electrical communication with the first and second conductive membrane, the circuit being configured to obtain a first and second signal from the first and second conductive membranes respectively, the first and second signals being indicative of the deflection of the first and second conductive membranes, wherein the circuit adjusts the first signal by the second signal to generate an output signal indicative of the fluid pressure.

Abstract: A pressure transmitter is provided. The pressure transmitter includes a pressure sensor including a pair of process fluid pressure ports each having a deflectable diaphragm. A first variable capacitor is disposed within the pressure sensor and has a capacitance that varies with differential pressure between the process fluid ports. A second variable capacitor is disposed within the pressure sensor and has a capacitance that varies with line pressure.

Abstract: A method and apparatus for monitoring the pressure of a fluid within a rigid vessel are disclosed. A preferred method comprises monitoring the capacitance of a capacitor comprising a deformable resilient solid dielectric separating first and second conductive elements, the capacitor being exposed to said pressurised fluid such that the distance between the conductive elements and thus the capacitance of the capacitor changes with compression or relaxation of the dielectric in response to changes in fluid pressure.

Abstract: The invention provides for a capacitance sensing circuit for a pressure sensor. The pressure sensor includes a sensor membrane and a compensation membrane. The circuit includes a controller arranged in signal communication with a charge amplifier, a charge injector and two switches. The charge amplifier is connected to the switches via a sensor capacitor in parallel with a reference capacitor in parallel with a parasitic capacitance to ground. The charge injector and charge amplifier are arranged in parallel connection between the capacitors and the controller. The controller operates the circuit to determine a charge imbalance indicative of a pressure difference between the sensor and compensation membranes.

Abstract: Microfluidic devices having wall structures comprised of sintered glass frit and further including a glass, glass-ceramic or ceramic membrane structure sealed by a sintered seal to said wall structures, such that a fluid passage or chamber is defined at least in part by the wall structures and said membrane structure. This allows for changes in pressure within the fluid passage or chamber to cause deflections of the membrane structure, providing for direct measurement of pressure within the device. The microfluidic device may have both floors and walls of sintered frit, or may have only walls of sintered frit, with planar floor-like substrate structures, thicker than the membrane structure defining the vertical boundaries of the internal passages. The device may include multiple fluid passages or chambers each defined at least in part by a membrane structure. Multiple membrane structures may be used in a single device, and one single membrane structure may be used for multiple passages or chamber.

Abstract: This invention relates generally to a micromachined acoustic transducer that has a scalable array of sealed cavities and perforated members forming capacitive cells that convert the electrical signal to acoustic signal or vice versa. It also relates to the method and more particularly to a micromachined acoustic transducer which includes a plurality of micromachined membranes and perforated members forming capacitive cells and more particularly to an acoustic transducer in which the capacitive cells are connected in a scalable array whereby electrical signals are applied to the said array and converted to acoustic signals. The transducer can either be used as an acoustic actuator or a microphone.

Abstract: The invention relates to a measuring cell, comprising a support and a sensor, whereby a measuring chamber is arranged between the support and the sensor and the sensor is arranged on the support by means of individual material deposits provided between the support and the sensor. Said material deposits are preferably gold bumps.

Abstract: A transmitter for use in an industrial process control system, includes a process coupling configured to couple to a process fluid. A sensor housing has a cavity formed therein which is in fluidic communication with the process fluid. A diaphragm in the cavity isolates a portion of the cavity from the process fluid and moves in response to pressure applied by the process fluid. A first electrode in the isolated portion of the cavity is configured to form a first capacitance with the diaphragm and a second electrode in the isolated portion of the cavity configured to form a second capacitance with the diaphragm. Measurement circuitry coupled to the first and second capacitance measures a pressure of the process fluid based upon at least one of the first capacitance and second capacitance. The measurement circuitry further configured to measure vibrations in the process fluid based upon at least one of the first capacitance and second capacitance.

Abstract: A capacitive pressure sensing device comprising, a base member, a diaphragm member deflectable under an external pressure, a cantilever member disposed between the base member and the diaphragm member and supported on a support structure, wherein the base member and the cantilever member form a capacitor structure of the device and wherein deflection of the diaphragm member beyond a threshold value causes the cantilever member to deflect to cause a capacitive change in the capacitor structure.

Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.