Abstract: A torque sensor comprises a transducer plate having a center area and periphery connected by a plurality of spokes and instrumentation beams. The transducer plate exhibits mechanical compliance under axial torque, but stiffness under off-axis loads. Strain gages attached to instrumentation beams detect deformation caused by axial torques. The instrumentation beams may be asymmetric, allowing strain gages to be placed in regions of high sensitivity to axial torques and low sensitivity to off-axis loads. The strain gage responses from some off-axis loads are designed to be coupled to, or linearly dependent on, the strain gage responses of other off-axis loads. This reduces the number of strain gages necessary to resolve the loads. The spokes and beams are cost-effectively formed by removing adjacent transducer plate material in simple shapes.

Abstract: A strain inducing body includes a strain inducing portion including a movable portion that deforms in response to force or moment in a predetermined axial direction and a non-movable portion that does not deform in response to the force or moment, and an input transmitter that is connected to the non-movable portion and does not deform in response to the force or moment, wherein the input transmitter includes, a first frame portion, a plurality of first beam structures each of which has one end thereof connected to the first frame portion and extends from the first frame portion to an inside of the first frame portion, a first coupling portion that connects other ends of the first beam structures, an accommodating portion that is provided inside the first coupling portion and that is capable of housing a sensor chip to detect the force or the moment.

Abstract: A torque sensor which can improve detection accuracy is provided. The torque sensor includes a first structure, a second structure, a third structure provided between the first structure and the second structure and at least two sensor portions provided between the first structure and the second structure, and a stiffness of one of the first structure and the second structure, closer to the sensor portions is higher than that of the other one.

Abstract: A force sensor, flexible sensing element, and method for the force sensor are disclosed. The force sensor uses a flexible sense element with two flexible arms dedicated to measuring strain related to a pitch force and two flexible arms dedicated to measuring strain related to roll force. The use of two channels for each measurement provides a command lane and a monitor lane for strain measurements. Strain gauges are disposed on both the top and the bottom surfaces of each arm, thus providing two completely redundant systems. When a failure is detected in one of the systems, the redundant system can be implemented.

Abstract: The present disclosure is flexible and stretchable conductive articles that include a printed circuit and a stretchable substrate. The printed circuit contains an electrically conductive trace. The electrically conductive trace may be positioned on the surface of or be imbibed into the pores through the thickness of a synthetic polymer membrane. The synthetic polymer membrane is compressed in the x-y direction such that buckling of the membrane occurs in the z-direction. Additionally, the synthetic polymer membrane may be porous or non-porous. In some embodiments, the synthetic polymer membrane is microporous. The printed circuit may be discontinuously bonded to the stretchable substrate. Advantageously, the flexible, conductive articles retain conductive performance over a range of stretch. In some embodiments, the conductive articles have negligible resistance change when stretched up to 50% strain. The printed circuits may be integrated into garments, such as smart apparel or other wearable technology.

Abstract: The present invention improves the reliability of a force sensor in terms of mechanical troubles. The force sensor includes: a primary bridge circuit that includes a first strain gauge group disposed on a first main face of a strain element and that is configured to detect a component, in a specific direction, of a force exerted on a strain element; and a secondary bridge circuit that includes a second strain gauge group disposed on a second main face of the strain element and that is configured to detect a component of a force in the same direction as the specific direction.

Abstract: Described herein is a ruggedized microelectromechanical (“MEMS”) force sensor including both piezoresistive and piezoelectric sensing elements and integrated with complementary metal-oxide-semiconductor (“CMOS”) circuitry on the same chip. The sensor employs piezoresistive strain gauges for static force and piezoelectric strain gauges for dynamic changes in force. Both piezoresistive and piezoelectric sensing elements are electrically connected to integrated circuits provided on the same substrate as the sensing elements. The integrated circuits can be configured to amplify, digitize, calibrate, store, and/or communicate force values electrical terminals to external circuitry.

Abstract: In a force sensor according to one embodiment, a main body is cylindrical. A cylindrical movable body is movable with respect to the main body and includes at least three circular openings in the outer circumference thereof. A strain body is fixed to the main body and the movable body and is deformable according to the movement of the movable body. Strain sensors are provided on the strain body. A first stopper is arranged inside each of the openings and includes a first outer circumferential surface including a first outer diameter less than a diameter of the opening. A cylindrical second stopper is arranged separate from a first inner circumferential surface of the main body by a first distance and includes a second outer circumferential surface of a second outer diameter less than a diameter of the first inner circumferential surface.

Abstract: In order to prevent swiveling of unintended joint pieces and enhance positioning and motion reproducibility of a distal end portion, a bending mechanism includes: a plurality of joint pieces connected in series along the longitudinal axis; a plurality of elongated tension-transmissions that transmit tensions for individually driving the joint pieces; and at least one guide having guide channels that movably support the tension-transmissions in the longitudinal direction thereof and that guide the tension-transmissions along curved paths extending around the longitudinal axis.

Abstract: A torque sensor includes a first region, a second region, a plurality of third regions connecting the first and second regions, a first strain generation part and a second strain generation part. The first strain generation part of which a first end is provided on the first region, and of which a first intermediate portion is provided on a second structure. The second strain generation part of which a third end is provided on the first region, of which a second intermediate portion is provided on the second region, and of which a fourth end is provided near a second end of the first strain generation part. A strain body provided with a resistor connects the second end of the first strain generation part and the fourth end of the second strain generation part.

Abstract: Provided is a semiconductor pressure sensor which includes: five connection pads having plate shapes and formed of conductive materials, respectively, and arranged in parallel with each other; and four semiconductor resistance units connecting a predetermined pair of the connection pads to each other among the connection pads and having resistance values varying in proportion to a variation of a length due to the external pressure, wherein the five connection pads include a power supply pad, a first output voltage pad, a first ground pad, a second output voltage pad, and a second ground pad.

Abstract: An integrated sensing device comprising a force sensor and fingerprint sensor disposed on different portions of a flexible circuit. The fingerprint sensor is disposed on a first side of a first portion of the flexible circuit and the force sensor is disposed on a second portion of the flexible circuit. The flexible circuit is configured such that the first portion is over the second portion. The fingerprint sensor includes fingerprint sensor electrodes disposed on the first side of the first portion. The force sensor comprises a compressible layer disposed between a second side of the first portion and a first side of the second portion, and one or more one force electrodes.

Abstract: The present disclosure relates to a measuring device (42, 43) for measuring forces and/or torques between a motorized vehicle (1) and a trailer or attachment which is towed or pushed thereby, wherein the measuring device (42, 43) has at least three sensor elements (22, 34) which are arranged on a carrier (20, 31), transversely with respect to a virtual longitudinal axis of the motorized vehicle (1) and spaced apart from one another, wherein the measuring device (42, 43) is arranged in a coupling region between the motorized vehicle (1) and the pulled or pushed trailer or attachment, and wherein, in order to transmit their measured values, the sensor elements (22, 34) are connected to an evaluation device (40), which is configured to convert these measured values into signals for force displays and/or torque displays according to magnitude and direction.

Abstract: A measuring device (60) is configured for measuring forces or torques between a motorized vehicle (1) and a trailer or attachment which is towed or pushed thereby. The measuring device (60) has at least three sensor elements (79, 80) arranged on a carrier (71), transversely with respect to a virtual longitudinal axis of the motorized vehicle (1) and spaced apart from one another. The measuring device (60) is arranged in a coupling region between the motorized vehicle (1) and the pulled or pushed trailer or attachment. In order to transmit their measured values, the sensor elements (79, 80) are connected to an evaluation device (40), which is configured to convert these measured values into signals for force displays and/or torque displays according to magnitude and direction.

Abstract: An apparatus with embedded water detection and heater includes a substrate including a number of conductive traces and a lid including multiple electrodes. Each electrode is coupled to at least one of the conductive traces through vias. A sensor is placed inside a cavity of the lid and is electrically coupled to one or more conductive traces of the substrate. A gel at least partially fills the lid and covers the sensor. The presence of water on the apparatus is detected by measuring a dielectric permittivity between at least two of the plurality of electrodes, and the electrodes can generate heat to eliminate the water.

Abstract: A load cell body for transmitting forces and moments in plural directions is disclosed. The load cell body comprises a first member, a second member and a plurality of pairs of support columns. The second member includes a plurality of apertures, where a portion of a plurality of portions of the first member extends into each aperture. The plurality of pairs of support column columns are configured for each portion of the first member and the corresponding aperture of the second member, such that each pair of support columns connects the corresponding portion of the first member to the second member.

Abstract: A novel six-dimensional force and torque sensor includes a central boss, a cylindrical housing arranged outside the central boss, and twelve elastic beams for connecting the central boss with the cylindrical housing. The twelve elastic beams are respectively provided with strain gauges as needed, and a bottom of the central boss is provided with a mounting hole for mounting a signal processing module. The present invention has the characteristics of self-decoupling, high rigidity, high natural frequency, desirable linearity, ideal repeatability and perfect hysteresis, and ability to measure a large torque (50 N·m). In addition, the sensor can be designed to have different measuring ranges and sensitivities by changing the dimensions of each of the elastic beams.

Abstract: A transducer sensor body includes a first support structure and a second support structure. A tubular element has a center bore along a longitudinal axis. An elongated first flexure joins the tubular element to the first support structure parallel to the longitudinal axis. The first flexure is rigid to transfer a longitudinal force therethrough along the longitudinal axis and is rigid to transfer an axial force therethrough along an axial axis that is orthogonal to the longitudinal axis. An elongated second flexure joins the tubular element to the second support structure parallel to the longitudinal axis. The second flexure is rigid to transfer a longitudinal force therethrough along the longitudinal axis and is to transfer the axial force therethrough along the axial axis.

Abstract: A system includes a first plate and a second plate disposed in parallel, and guides disposed between the first and second plates, including a first guide cantilevered from the first plate and a second guide cantilevered from the second plate. The first guide is offset from the second guide, and a plurality of bearings include a first bearing disposed at a distal end of the first guide, and a second bearing disposed at a distal end of the second guide. The first guide is arranged to mate with the second bearing, and the second guide is arranged to mate with the first bearing. The system further includes elastic members, including a first elastic member between the first plate and the second plate and provided concentrically around the first guide to extend in an axial direction along the first guide.

Abstract: A bicycle pedal is basically provided with a pedal spindle, a pedal body, a sensor adaptor and at least one force sensor. The pedal spindle includes a crank arm mounting part. The pedal body is rotatably mounted on the pedal spindle about a center spindle axis. The sensor adaptor includes a first fixing part non-movably attached to the pedal spindle at a first point, a second fixing part non-movably attached to the pedal spindle at a second point and a sensor mounting part extending between the first and second fixing parts, the first point being axially spaced from the second point with respect to the center spindle axis, the sensor mounting part being non-fixed to the pedal spindle. The force sensor is disposed on the sensor mounting part to detect a pedaling force transmitted from the pedal body to the pedal spindle.

Abstract: A method for ascertaining deformations of a geometric body or for measuring forces or torques acting thereon using force measuring sensors or deformation measuring sensors. A plurality of such sensors are arranged on the geometric body in at least two groups. A first group of sensors registers forces acting on the geometric body or deformations of the geometric body in a first spatial direction with reference to a coordinate system fixed relative to the geometric body. A second group of sensors registers forces acting on the geometric body or deformations thereof in a second spatial direction with reference to the coordinate system fixed relative to the geometric body, which is independent of the first spatial direction. Signal outputs of the sensors are compared to one another for the purpose of registering and evaluating signals and for determining or assessing force components or deformation components acting in different spatial directions.

Abstract: A switching type six-axis force-torque sensor is provided which includes: a sensor substrate attached to a structural body to be measured. A first measuring unit is installed at one side in respect to a central portion of the sensor substrate and measures strain and a second measuring unit is installed on the sensor substrate at a position that faces the first measuring unit in respect to the central portion and measures strain. Further, a third measuring unit is installed at a position that is orthogonal to a connecting line, which connects the first measuring unit and the second measuring unit, and measures strain and a fourth measuring unit is installed at a position that faces the third measuring unit in respect to the central portion and measures strain.

Abstract: A highly sensitive load detection device includes a tubular peripheral wall portion; a disk-shaped disk portion that has a through hole formed coaxially with the peripheral wall portion and that is supported on an inner surface of the peripheral wall portion with a gap between the disk portion and a placement surface on which the peripheral wall portion is placed; a load input portion that is formed in a spherical shape having a diameter larger than an inside diameter of the through hole on at least a side thereof facing the through hole, that is placed on the through hole, and to which a load of an object to be detected is input; and sensors that are provided on the disk portion so as to be point-symmetric about the through hole, and that detect a strain corresponding to the load input to the load input portion.

Abstract: A tactile sensor and a multi-axial tactile sensor are provided, each of which is thin and can measure shearing force. A multi-axial tactile sensor 1 includes a sensor element 2 provided in a plane substantially at the same level as the surface of a substrate 6, and an outer package member 42 covering around the sensor element 2 and transmitting external force to the sensor element 2. The sensor element 2 includes a flexible beam 7 (8) having at least one end supported by the substrate 6. The sensor element 2 detects deformation of the beam 7 (8), the deformation being caused in the direction in parallel with the surface of the substrate 6.

Abstract: A sensor assembly comprises a base plate and a sensor member displaceable relative to the base plate. A spring arrangement operates in first and second stages in response to displacement of the sensor member relative to the base plate. Different resolutions of force and torque measurements are associated with the first and second stages. A light sensitive transducer senses displacement of the sensor member relative to the base plate and generates corresponding output signals. A collimator directs a plurality of light beams onto the light sensitive transducer so that the light beams strike different pixels of the light sensitive transducer to sense displacement of the sensor member relative to the base plate.

Abstract: Disclosed is an apparatus for measuring a shearing force upon sitting in a seat in a vehicle. The apparatus includes a shearing force sensor, a signal processor, and a monitoring device. The shearing force sensor is disposed in a compartment in a seat and senses the shearing force generated upon sitting on the seat. The signal processor filters and amplifies a signal from the shearing force sensor 10, and converts an amplified analog signal into a digital signal. The monitoring device analyzes the signal converted by the signal processor and displays the signal. As a result, the apparatus measures all directions of shearing forces generated upon sitting.

Abstract: A flexible force or pressure sensing mat includes a first sheet of electrically conductive first paths, a second sheet of electrically conductive second paths, and a sensing layer positioned between the first and second sheets. The first and second conductive paths are oriented transversely to each other, and the locations of their intersections define individual sensing areas or sensors. The sensing layer is made from materials that have first and second electrical characteristics—such as capacitance and resistance—that vary in response to physical forces exerted thereon. A controller repetitively measures the multiple electrical characteristics of each sensor in order to produce a near real time pressure distribution map of the forces sensed by the mat. The mat can be used on a patient support surface—such as a bed, cot, stretcher, recliner, operating table, etc.—to monitor and help reduce the likelihood of a patient developing pressure ulcers.

Abstract: A pressure sensing sheet includes at least first, second, and third layers wherein the first and third layers each have conductive paths defined therein that are separated by nonconductive spacers. The orientation of the conductive paths of the first layer are transverse to the orientation of the conductive paths of the third layer. The second layer is made of material that has an electrical characteristic that changes with applied pressure, such as, but not limited to, piezoresistive or piezoelectric material. The first and/or third layers are made from multi-material sheets wherein a first type of material will repel conductive particles when subjected to an autocatalytic coating process, while the second type of material will bond with the conductive particles during the autocatalytic coating process. The use of different materials in the first and/or third layers facilitates the manufacturing of the conductive paths and nonconductive spacers.

Abstract: Force and torque sensors (10, 10a) include a load-bearing element (12), and strain gauges (20, 22, 23) mounted on the load-bearing element (12) so that the strain gauges (20, 22, 23) generate outputs responsive to external forces and moments applied to the load-bearing element (12). The strain gauges (20, 22, 23) are configured, and the responsive outputs of the strain gauges (20, 22, 23) are processed such that the force and moment measurements generated by the sensors (10, 10a) are substantially immune from drift due to thermally-induced strain in the load-bearing element (12).

Abstract: A multi-degree of freedom transducer for converting manually applied forces and torques into electrical signals, and configured to be fixed to a base object. The transducer comprises a handle bar having two ends and a first longitudinal direction, and a supporting assembly suitable for fixing the two ends of the handle bar to the base object. The supporting assembly comprising a frame structure at each of the ends of the handle bar, wherein each of the frame structures comprises at least two measuring beams. At least one of the measuring beams includes a second longitudinal direction and at least one other of the measuring beams includes a third longitudinal direction. Each of the at least two measuring beams comprises two strain gauges configured to sense strain in the third longitudinal direction and arranged on two different, non-parallel side surfaces of each of the at least two measuring beams.

Abstract: A device and a method are disclosed for measuring sectional forces on a single-piece structural element in respect of a sectional plane by strain gauges, wherein a first and a second strain gauge of the plurality of strain gauges are arranged on a first outer wall, and a third and a fourth strain gauge are arranged on a second outer wall, with the result that, when the structural element is loaded with a first force, the change in length of the first and third strain gauges is opposite to the change in length of the second and fourth strain gauges, wherein the first outer wall and the second outer wall have, in the region of a cavity, at least three openings, which are separated from each other by webs, and wherein the first, second, third and fourth strain gauges are arranged on the webs.

Abstract: A strain sensor is provided having an annular collar. At least one sensor is movably coupled to the collar, the at least one sensor having a body with a plurality of silicon strain gages coupled thereto. A first soldering connector is coupled to the collar, the first soldering connector configured to provide an excitation voltage. A plurality of second soldering connectors are coupled to the collar. A plurality of first conductors electrically are coupled to the first soldering connector on one end, and one of the plurality of silicon strain gages on a second end. A plurality of second conductors electrically are coupled between one of the plurality of second soldering connectors and one of the plurality of silicon strain gages.

Abstract: A force sensing array includes multiple layers of material that are arranged to define an elastically stretchable sensing sheet. The sensing sheet may be placed underneath a patient to detect interface forces or pressures between the patient and the support structure that the patient is positioned on. The force sensing array includes a plurality of force sensors. The force sensors are defined where a row conductor and a column conductor approach each other on opposite sides of a force sensing material, such as a piezoresistive material. In order to reduce electrical cross talk between the plurality of sensors, a semiconductive material is included adjacent the force sensing material to create a PN junction with the force sensing material. This PN junction acts as a diode, limiting current flow to essentially one direction, which, in turn, reduces cross talk between the multiple sensors.

Abstract: The disclosure relates to a multiaxial force-torque sensor having a transducer structure, with strain gauges placed in defined areas to measure the strain, from which the forces and torques are calculated, and where the transducer structure can include (e.g., consist of) two concentric rings connected with spokes. The transducer structure can be a planar mechanical structure, and all strain gauges can be applied to the same surface of the transducer structure to measure non-radial strain components.

Abstract: This disclosure describes techniques for using a “low-profile” load cell to sense a force exerted by a load upon a target object in one or more of a first, second, and third directions relative to the target object. The techniques include using a plurality of sensing beams disposed between a sensing node and a base of the load cell, where each sensing beam is configured for sensing the force exerted by the load upon the sensing node in one or more of two directions relative to the load cell. For example, each sensing beam may include a first section configured to deform in response to a component of the force that corresponds to one of the first, second, and third directions, and a second section configured to deform in response to a component of the force that corresponds to another one of the first, second, and third directions.

Abstract: A strain monitoring system including an array of semiconductor strain gauges. Each strain gauge in the array of strain gauges includes a lithographically fabricated 4-resistor bridge for providing a voltage potential corresponding to the strain in the bridge and thin film transistors to provide addressability to each 4-resistor bridge in the array. After completion of the array of strain gauges, in preferred embodiments the array of strain gauges are transferred to polyimide film which is in turn bonded to a surface region of the component to be tested for strains. Each bridge provides voltage signals corresponding to the strain to which the material under the bridge is being subjected. In preferred embodiments control and data acquisition function are separated from the semiconductor strain gage array. Preferred embodiments the system are utilized to monitor strains on components of aircraft, especially light weight robotic aircraft.

Abstract: A dual mode capacitive touch panel includes a sensor substrate, an electrode layer comprising an array of sensor electrodes arranged over the sensor substrate, the array of sensor electrodes including a plurality of drive electrodes and a plurality of sense electrodes, each sensor electrode corresponding to a location on the sensor substrate, and a shield layer arranged over and spaced apart from the electrode layer. The shield layer includes a predetermined resistance that permits transmission of an electric field at a first frequency and prevents transmission of an electric field at a second frequency, wherein a spacing between the shield layer and the electrode layer is deformable as a result of a force applied to the shield layer due to a user touch, wherein the deformation alters a capacitance between the shield layer and a sensor electrode of the array.

Abstract: Force or pressure transducer arrays have elastically stretchable electrically conductive polymer threads disposed in parallel rows and columns that contact at intersections thereof a piezoresistive material which has an electrical resistivity which varies inversely with pressure or force exerted thereon to form a matrix array of force or pressure sensor elements. The threads are fixed to a single one or pair of flexible elastically stretchable substrate sheets made of thin sheets of an insulating polymer such as PVC, or for greater elasticity and conformability to irregularly-shaped objects such as human body parts, an elastically stretchable fabric such as LYCRA or SPANDEX. Elastic stretchability of the sensor arrays is optionally enhanced by disposing either or both row and column conductive threads in sinuously curved, serpentine paths rather than straight lines.

Abstract: A spacer block for gathering data to be used in the balancing of the joint arthroplasty or repair and in the selection of a trial insert which includes a first body piece and a second body piece. A plurality of sensors and a processor are positioned between the first body piece and the second body piece when the pieces are assembled together to form the spacer block. A chim is removably mounted to a top surface of the second body piece, the chim is associated with the plurality of sensors and positioned in relation to the plurality of sensors such that a force exerted on the chim by a weight bearing surface is detected by the plurality of sensors.

Abstract: The invention relates to a torque sensor comprising an inner body, an outer annular body surrounding the inner body concentrically and webs connecting the inner body to the outer annular body in a star shape. Further on the torque sensor comprises a means for introducing torque and at least one measuring element on a web for determining deformation. The webs have the form of a u-profile.

Abstract: A feedback system for identifying an external force, includes an operation plate and a pressure-sensing unit. The pressure-sensing unit includes an elastic member supporting the operation plate and a pressure sensor inside the elastic member. The pressure sensor includes a pressure sensitive film. An inner side of the elastic member is filled with fluid material which acts on the pressure sensitive film. The operation plate is driven by the external force to be slant which extrudes the elastic member to deform so as to change fluid pressure of the fluid material limited in the elastic member, and such change of the fluid pressure can be sensed by the pressure sensitive film of the pressure sensor so as to identify the movement and the intensity of the external force.

Abstract: In one embodiment, a force sensor apparatus is provided including a tube portion having a plurality of radial ribs and a strain gauge positioned over each of the plurality of radial ribs, a proximal end of the tube portion that operably couples to a shaft of a surgical instrument that operably couples to a manipulator arm of a robotic surgical system, and a distal end of the tube portion that proximally couples to a wrist joint coupled to an end effector.

Abstract: An apparatus, system, and method for improving force and torque sensing and feedback to the surgeon performing a telerobotic surgery are provided. In one embodiment, a surgical instrument, a robotic surgical system, a cannula, a cannula seal, and a method for improved sensing of z-axis forces on a robotic surgical instrument are disclosed.

Abstract: A force sensor chip of the present invention is for detecting an external force, and comprises a base member including an action portion where the external force is applied, a support portion that supports the action portion therearound, and a connecting portion that connects the action portion and the support portion together, a plurality of strain detecting resistive elements that are formed at respective deformation producing portions of the base member which deform when the external force is applied, and a thin-film resistor that is formed at upper layers of the strain detecting resistive elements with a resistive-element wiring and an interlayer insulation film intervening between the thin-film resistor and the strain detecting resistive elements.

Abstract: A triaxial force sensor including: a deformable membrane; a detector detecting a deformation of the membrane configured to carry out a triaxial detection of the force to be detected; and an adhesion mechanism disposed at least at one of the principal faces of the deformable membrane, configured to secure the one of the principal faces of the deformable membrane to at least one elastomer material to be acted upon by the force to be detected, and distributed uniformly at a whole of the surface of the one of the principal faces of the deformable membrane, the deformable membrane being disposed between a cavity and the elastomer material.

Abstract: A stress sensing device senses a shear force and a pressing force. The stress sensing device includes a support body, a support film, first and second piezoelectric parts and an elastic layer. The support body has an opening defined by a pair of straight parts perpendicular to a sensing direction of the shear force and parallel to each other. The support film having flexibility closes off the opening. The first piezoelectric part is disposed over the support film and straddling an inside portion and an outside portion of the opening along at least one of the straight parts of the opening as seen in plan view. The second piezoelectric part is disposed to the inside portion of the opening and set apart from the first piezoelectric part as seen in the plan view. The elastic layer covers the first piezoelectric part, the second piezoelectric part, and the support film.

Abstract: A three-axis load sensor utilizing four piezoresistive devices on a flexible silicon membrane is provided. The load sensor further includes a mesa disposed on the membrane substantially equidistant from the piezoresistive devices. A six-axis load cell is provided by placing a plurality of load sensors disposed on a substrate, the substrate configured to attach to an object wherein forces applied to the object can be measured and/or determined. The load sensors can be manufactured using bulk microfabrication techniques on a single crystal silicon wafer, and can detect normal and shear loading applied to the membrane.

Abstract: In one embodiment, a force sensor apparatus is provided including a tube portion having a plurality of radial ribs and a strain gauge positioned over each of the plurality of radial ribs, a proximal end of the tube portion that operably couples to a shaft of a surgical instrument that operably couples to a manipulator arm of a robotic surgical system, and a distal end of the tube portion that proximally couples to a wrist joint coupled to an end effector.

Abstract: A sensor device includes a package, a sensor element that is disposed in the package, and a lid that seals the package. The lid includes a flexible portion that surrounds the vicinity of the sensor element in a plan view.

Abstract: A sensor element is formed by, when an ? axis, a ? axis orthogonal to the ? axis, and a ? axis orthogonal to the ? axis and the ? axis are set, laminating piezoelectric substrates and electrodes in the ? axis direction. The sensor element includes connecting sections arranged such that a part of external sections of the electrodes aligns with a part of external sections of the piezoelectric substrates. The connecting sections are arranged not to align with one another in a direction of the ? axis. Conductors that electrically connect the connecting sections and external connecting sections are formed along outer peripheral sections of the piezoelectric substrates.