Abstract: A flexure pivot in the form of a thin material connection formed as a result of adjacent material-free spaces is disclosed, as is a force-transfer mechanism for use in a force-measuring device, in particular a balance, containing at least one flexure pivot of the aforementioned type. The force-transfer mechanism has a stationary portion with a lever arrangement comprising at least one reduction lever and serving to transmit a force to a measuring transducer, and it further has at least one coupling element serving to introduce an input force into the lever arrangement, the coupling element being stiff against lengthwise deformation but flexible with regard to bending and having at least one thin material connection. The at least one lever is supported on the stationary portion and/or on a preceding lever by a flexible fulcrum pivot having a thin material connection.

Abstract: A sensor package having a force sensing element and a housing. The force sensing element has an element surface, a well, a first and second shelves within the well. The housing has a housing surface. The first and second shelves of the housing are arranged to support the force sensing element so that the element surface and the housing surface are substantially coplanar and so that the element surface of the force sensing element directly senses a force without need of an actuator.

Abstract: A pressure transducer suitable for use as a component of a passive occupant detection system installed in a passenger vehicle. The transducer comprises first and second contact members separated by a spacing member. The first contact member has on a surface thereof a primary contact comprising first and second terminations and portions spaced apart in a first direction. The second contact member has on a surface thereof a plurality of secondary contacts crossing and facing the spaced-apart portions of the primary contact through an opening in the spacing member. Application of an increasing force causes the contact members to move toward each other, causing an increasing number of the spaced-apart portions to be shorted out by the secondary contacts and causing an increasing number of secondary contacts to contact the primary contact, thereby altering the electrical path between the terminations of the primary contact.

Abstract: A torque sensing apparatus for picking up a magnetic field of a magnetostrictive material disposed on a shaft, the torque sensing apparatus having: a first integrating ring; a second integrating ring; a first fluxgate return strip and a second fluxgate return strip each being connected to the first integrating ring at one end and the second integrating ring at the other end; an excitation coil; and a feedback coil; wherein the first integrating ring and the second integrating ring are configured to be positioned to pick up flux signals along the entire periphery of the ends of the magnetostrictive material.

Abstract: A surface pressure distribution sensor includes a row-line portion and a column-line portion that face each other with a certain spacing therebetween by a spacer. The row-line portion includes a glass substrate, multiple row lines formed on the glass substrate so as to extend in parallel to each other in a first direction, and an insulating film that covers the row lines. The column-line portion includes a flexible film and multiple column lines formed on the flexible film so as to extend in parallel to each other in a second direction orthogonal to the first direction.

Abstract: A motorized chassis dynamometer machine. In one embodiment, the dynamometer machine includes a fixed frame assembly. At least one roller assembly is mounted on the fixed frame assembly. At least one independent motor assembly is connected to each roller assembly. The independent motor assembly is used for driving the roller assembly. At least one independent loading dynamometer assembly capable of measuring the vehicle input power at each roller assembly is coupled to each roller assembly. In a preferred embodiment, the dynamometer assembly is only operable for loading each independent roller assembly, while the motor assembly is operable for driving each independent roller assembly. The machine has at least one motor controller capable of controlling each independent motor assembly and at least one dynamometer controller capable of controlling each independent dynamometer assembly.

Abstract: A hand-held power tool includes a torque cut-off device (2) for presetting a torque of the driving shaft (3) of the hand-held power tool and formed as a control device (4) having a rotatable control sleeve (5) including a control cam (6) having at least two cam sections (6a, 6b), and a control element (7) secured in the housing (1) of the power tool without a possibility of rotation but with a possibility of an axial displacement relative to a rotational axis (D) of the control sleeve (5) and having at least two probing sections (8a, 8b) cooperating with respective cam sections (6a, 6b) for presetting the torque.

Abstract: A three-dimensional measure device with air bearings includes a base member having a platform horizontally securely thereon. A bridge is slidably mounted on the platform and moved along a first dimension. The bridge includes a first support and a second support respectively supporting a horizontal portion of the bridge. A runner is slidably mounted on the horizontal portion and moved along a second dimension. A tubular shaft is reciprocally and moved received in the runner and moved along a three dimension. A probe is longitudinally movably received in the tubular shaft. The air bearings are mounted between two adjacent elements that are moved relative to each other. Each air bearing has a resilient member mounted and previously compressed therein to provide an act force to the air bearing for adjusting a gap between the two adjacent elements that are moved relative to each other.

Abstract: The invention relates to a measuring device for detecting loads, especially torque, bending moment, and axial force applied to rotating components such as shafts, spindles, and/or pins with which changes if length caused by load are measured and determined in a non-contact manner with aid of at least one resistance strain gauge fixed on the component. For a non-contact feeding of supply energy for the resistance strain gauge and a likewise non-contact transmission of measured values to an evaluation device, an electronic rotor mechanism is provided which is arranged in one or several protective ring(s) (1) that encompasses the resistance strain gauge. For improving accuracy of the measurement and the informative capacity of the measuring results of the measuring device, the protective ring(s) (1) is (are) so arranged on the component that they are supported on one side or are formed deformable with respect to the component.

Abstract: A apparatus 10,110 is provided that measures the speed of sound and/or vortical disturbances propagating in a fluid or mixture having entrained gas/air to determine the gas volume fraction of the flow 12 propagating through a pipes and compensating or correcting the volumetric flow measurement for entrained air. The GVF meter includes and array of sensor disposed axially along the length of the pipe. The GVF measures the speed of sound propagating through the pipe and fluid to determine the gas volume fraction of the mixture using array processing. The GVF meter can be used with an electromagnetic meter and a consistency meter to compensate for volumetric flow rate and consistency measurement respective, to correct for errors due to entrained gas/air.

Abstract: Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.

Abstract: A vascular prosthesis tester (10) for inducing stresses upon a vascular prosthesis (22) having a channel extending through the vascular prosthesis is disclosed. The tester includes a pump (18) adaptable to pressurize a fluid disposed within the channel to induce a radial stress upon the vascular prosthesis. The tester may further include a bend applicator (16) operable to induce a bending stress, a torque applicator (12) operable to induce a torque, a linear force applicator (52) operable to induce a linear force, and/or a stop (28) for inducing a lateral push stress upon the vascular prosthesis. A method of fatigue testing a vascular prosthesis contained within a fluid conduit is also disclosed. The method includes injecting a fluid within the inner channel and inducing a torque, bending stress, linear stress, and/or later push stress upon the vascular prosthesis.

Abstract: A surface pressure distribution sensor includes a row-line portion and a column-line portion that face each other with a certain spacing therebetween by a spacer. The row-line portion includes a glass substrate, multiple row lines formed on the glass substrate so as to extend in parallel to each other in a first direction, and an insulating film that covers the row lines. The column-line portion includes a flexible film and multiple column lines formed on the flexible film so as to extend in parallel to each other in a second direction orthogonal to the first direction.

Abstract: The alignment of railway tracks may be monitored using an accelerometer (36) mounted on a bogie (24) of a railway vehicle to detect lateral accelerations, and a displacement transducer (38) to monitor the lateral displacements of a wheelset (27) relative to the bogie. The acceleration signals are digitised, and processed corresponding to double integration, so as to deduce the lateral displacements of the bogie, and in conjunction with the signals from the displacement transducer hence to determine the effective lateral displacements of the track. This can provide a more useful indication of the lateral positions of the rails than measurements of the gauge faces. Such equipment (16) may be installed in a service vehicle, and operate automatically, downloading resulting data to a remote base station at regular intervals.

Abstract: A seat belt tension sensor for measuring the magnitude of tension in a seat belt. The seat belt tension sensor has a housing with a cavity. An anchor plate has a portion located in the cavity. The housing moves relative to the anchor plate between a first position and a second position. A sensor is mounted to the housing. The housing presses on the sensor as the housing moves from the first to the second position. The sensor generates an electrical signal in response to the housing moving between the first and second positions. The electrical signal changes as a function of tension on the seat belt. The sensor is a strain gage. The housing engages the anchor plate in the second position to protect the sensor from damage in a vehicle crash situation.

Abstract: A sensor device (11) for a vehicle seat, in particular a motor vehicle seat, has at least one sensor (15) for the detection of forces inside the vehicle seat. The vehicle seat has at least one bearing area between two components that are mobile relative to one another, and the sensor device (11) is installed in the bearing area.

Abstract: In order to form a device for detecting and preprocessing weights acting on a vehicle seat in such a way that it can be used in particular in conditions which are very difficult in terms of measuring technology, and in particular under the other special ambient conditions within a vehicle, and the weighing signal of which is substantially uninfluenced by this and can consequently provide a reliable parameter for airbag activation, it is proposed that this device comprises at least three load cells, which are disposed on load-carrying parts of the vehicle seat at corner points of an imaginary polygonal area and in each case generate a weighing signal corresponding to the weight, and an electronic evaluation circuit, which receives and preprocesses the weighing signals of the load cells and generates an output signal based on the weighing signals, the evaluation circuit comprising an evaluation function with which a localization of the center of gravity of the weight acting on the vehicle seat can be carried ou

Abstract: A magnetoelastic torque sensor assembly is provided for sensing torsion load of a shaft, such as an automotive steering column. The assembly includes a molded plastic body that defines an axial channel and includes an axial opening. The assembly also includes a U-shaped lead frame that is embedded within the molded plastic body and includes side portions that extend within side sections of the molded plastic body about the channel. Magnetic flux sensors are embedded in the side sections of the molded plastic body and connected to the lead frame. For use, the shaft is radially received through the axial opening in the molded plastic body and coaxially positioned within the channel. The magnetic flux sensors are positioned about the shaft in a predetermined and fixed arrangement. The sensor array preferably includes sensors that are disposed in a plane through the axis, either diametrically opposed or axially spaced.

Abstract: A rotation sensor functioning as both a rotation-angle sensor and a torque sensor is provided which, when applied to a steering sensor for an automobile, for example, permits reduction in the number of components and thus in the weight of the automobile and contributes to conservation of global environment. The rotation sensor has slip rings covered with conductive synthetic resin having small coefficient of friction, allowing the contact pressure of brushes disposed in sliding contact with the slip rings to be kept low and the life duration of the slip rings to be prolonged. Further, no metal powder is produced when the brushes slide on the respective slip rings, and it is therefore possible to prevent the formation of unwanted insulating film.

Abstract: A coil is fabricated as two or more tracks of a printed circuit board and arranged close to a conductor to measure the rate of change of current in the conductor. Each turn of the coil is displaced from its neighboring turn in a direction parallel to the direction of the conductor. The output from the coil may be used to provide a detection signal for a position detection scheme in a switched reluctance drive.

Abstract: A device includes at least one magnetic field generator placed on a first plane of a right section of a shaft and at least one magnetic field detector placed in a second plane of a right section of the shaft. The detector produces a signal proportional to the torque following the relative angular shift of the field generator in relation to the detector, the magnetic field generator having a magnetic structure supported by support mechanisms connected to the turning shaft. The magnetic field detector is located roughly opposite the magnetic field generator and is supported by support mechanisms connected to the turning shaft.

Abstract: A tension meter and wrench arrangement is constructed to includes a resistance type tension meter and an integrated device installed in a wrench, the integrated device providing a voltage output corresponding to the variation of resistance detected by the tension meter and converting the voltage output into digital signal for display through a display screen, the wrench having a sliding sleeve adapted for protecting the integrated device.

Abstract: The invention relates to a dynamometric tool (1) used as a four-mandrel press (2). Said press head (2) is provided with a specific press geometry which is predefined by the mandrels (11). The aim of the invention is to produce a tool which can determine the actual force of compression in an easy-to-handle manner. The inventive tool also comprises two levers (4, 5) which are joined together and adapted to the geometry of the press head (2), and which interact upon a pressure sensor (6) during compression.

Abstract: An electromechanical component consists of a polymeric body comprising a mechanically active part with a spring and a frame, and of a metal layer which encompasses the spring substantially completely so as to mechanically stabilize the same. The electromechanical component can be an acceleration sensor, a rotary speed sensor, a microvalve, a micropump, a pressure sensor, or a force sensor. Production of said electromechanical component incurs drastically reduced costs compared to electromechanical components produced using silicon-based technology because simple injection-moulding and/or embossing processes, instead of the complicated silicon-based technology, can be used for producing said electromechanical component.

Abstract: The present invention makes it possible to detect efficiently and accurately small torque. A torque detector includes a first shaft portion (first torque detecting portion), a first strain gage, a second shaft portion (second torque detecting portion), and a second strain gage. The first strain gage is provided on the first shaft portion. The second shaft portion has lower rigidity than the first shaft portion. The second torque sensor is provided on the second shaft portion to measure smaller torque than the first strain gage.

Abstract: A torque sensor is provided with a coil whose inductance changes in accordance with variation in torque acting on an object. The torque is detected on the basis of the inductance of the coil. Specifically, the torque sensor includes a first oscillation circuit for detecting the inductance of the coil and for oscillating a signal having a period corresponding to the detected inductance. The period of the signal generated by the first oscillation circuit is detected by a period detection section. A torque detection section detects the torque on the basis of the period detected by the period detection section.

Abstract: That portion of an n-type single-crystal Si layer 1 which corresponds to a pressure-sensitive region is etched to an SiO2 layer 2 by using the SiO2 layer 2 as an etching stopper layer. The SiO2 layer 2 exposed by this etching is removed. The pressure-sensitive region of the n-type single-crystal Si layer 3 is etched by a predetermined amount to form a diaphragm 4. Thus, the SiO2 layer 2 is removed from the diaphragm 4 and a diaphragm edge portion 6.

Abstract: There are provided a stable and highly sensitive nanometric mechanical oscillator having a considerably high detection resolution that enables detection of variation in force or mass on the nanometer order, as well as a method of fabricating the same, and a measurement apparatus using the same. A nanometric mechanical oscillator (10) includes a base (11), a tetrahedral oscillator mass (13); and an elastic neck portion (12) for connecting the base (11) and the tetrahedral oscillator mass (13). The oscillator (10) assumes a mushroom-like shape and has a nanometric size. The oscillator mass (13) assumes a tetrahedral shape and is suitable to be used as a probe of a scanning forth microscope in which the oscillator mass (13) serving as a probe is caused to approach to an arbitrary sample surface in order to observe the surface state.

Abstract: A compact sensing apparatus having reduced cross section and methods are provided for sensing the magnitude and direction of an electrical or magnetic field. The compact sensing apparatus and method preferably provide one of two transducer orientations in relation to the direction of the field arranged in the sensor apparatus to provide the smallest possible cross section. The compact sensing apparatus preferably includes a plurality of mounting pins. Each of the plurality of mounting pins preferably includes a first pin portion and a second pin portion connected to the first pin portion at a predetermined angle. The predetermined angle is preferably less than 180 degrees and more preferably in the range of about 70-110 degrees.

Abstract: A method of determining setpoint values in motor vehicles that have at least two drive assemblies. Torque setpoint values are determined in separate evaluation branches for each of the drive assemblies as a function of a variable that characterizes the driver's requirement and as a function of operating variables of the motor vehicle. The specific strengths and weaknesses of the respective drive assembly are taken into account directly in the respective evaluation branch.

Abstract: A tensiometer and method for measuring tension measure strain produced by a lateral displacement of a flexible line under tension. A block having a cylindrical cavity following a curved path is used to displace the flexible line. Tension in the line produces compressive stress within the block in the direction of the radius of curvature and tensile stress in the direction opposite the radius of curvature. A resistive strain gauge is used to measure strain due to either the compressive stress or tensile stress and a measurement circuit generates either a graphical display in accordance with standard tension measurement units, an audible or visual alarm when tension exceeds a predetermined threshold, or both.

Abstract: A load machine for a combustion engine test bench includes at least one eddy-current brake associated with at least one electric drive. The brake includes a toothed ferromagnetic rotor secured to a shaft mounted so that it can rotate through a casing containing at least one induction coil borne by an internal peripheral region of the casing, so as to generate a magnetic field across which the rotor is intended to pass in order to generate eddy currents which brake the rotation of the shaft. The shaft is coupled to the combustion engine to be tested, and the electric drive is a variable-reluctance electric motor.

Abstract: The subject matter of the invention is a rolldynamometer for motor vehicles comprising at least one running roll or drum (9) for one wheel (2) of one axis of the vehicle (1) to be examined, respectively, at least one electric motor (9) for directly driving and slowing down the running rolls (3), the stator housing (9a) of said electric motor (9) being borne in a support frame (6) in a pendulum fashion and supported on said support frame via force meters (20), and a control unit to which a running simulator for adjusting specific vehicle data and for simulating selected running conditions is allocated. For increasing the accuracy of the measurements, according to the invention, the stator housing (9a) of the driving motor (9) is borne in a lubrication oil free bearing arrangement in the support frame (6).

Abstract: A torque sensing calibration unit comprises a hollow torsion bar (2) to which torque is to be applied, associated with two or more pairs or positions sensors (10, 11, 12, 13, 14, 15) each pair being arranged to measure movement of the bar on diametrically opposite sides of a central axis through the bar (2). The pairs of sensors are arranged to measure movement in mutually perpendicular directions.

Abstract: The invention presents a sled device for testing the rollover threshold of a vehicle. The sled has a carriage that is mounted on a track. The carriage can slide upon the track from a first track location. The carriage is configured so that an actual vehicle may be placed on the carriage. When a vehicle is on the carriage, the vehicle is positioned with one side of the vehicle positioned toward the first tract location and the second side of the vehicle positioned toward the second track location. The carriage is propelled from the first tract location to the second track location by an accelerator. As the carriage nears the second track location, a decelerator slows and arrests the movement of the carriage, thereby simulating an impulse potentially sufficient to cause the vehicle to roll.

Abstract: A multidirectional fatigue damage indicator is disclosed. The fatigue damage indicator is composed of a series of fatigue fuse elements welded to a semicircular assembly frames. The fuse elements have the same fatigue lifetime in each row but have different lifetime from row to row so that it may enable one to monitor the progress of fatigue damage of the structure. A series of fatigue fuse elements are welded to a semicircular assembly frame in circumferential direction and additionally in radial direction. The arrangement in circumferential direction is to cover the changing characteristics of the principal stress directions while that in radial direction is to monitor the actual progress of fatigue damage under combined cyclic loads by watching the sequential fracture of the fuse elements.

Abstract: A torque sensor has a generator whose output signal is a function of a torque, a second signal generator, whose output signal changes in an opposite direction as a function of the torque, and an evaluation device which has a summing means which is connected to the two signal generators. For this purpose, connected to an integrator whose output is connected to a first input of a comparator whose second input is connected to the output of the comparator reset input of the integrator output of the torque sensor.

Abstract: In testing system and method for an automotive vehicular component such as an engine, a system monitor section sets required items including a vehicular specification and a running resistance of the vehicle and outputs the set required items to a measurement controlling section, a model generating section is provided in which a simulation model including a vehicular vertical vibration model constituted by a vehicular suspension spring and a tire spring and a spring model of an inertia system is set, a vehicular model execution controlling section executes a vehicular model simulation for the vehicular component to be tested by introducing at least an acceleration signal and a clutch signal from the measurement controlling section and the simulation model from the model generating section and outputs control signals to the inverter and the electronic control section so as to control the vehicular component to be tested.

Abstract: Two external rings and an internal ring form an assembly that is connected to a column so it rotates with it, to which column the torque to be measured is applied. Elastically deformable members connect the internal ring to one external ring, and the other external ring remaining essentially unstressed. A measurement device, such as, for example, a probe having at least one with Hall effect device, measures relative displacement of the two external rings to determine the torque applied. The invention also concerns the steering devices equipped with such torque sensors, for example, for power or assisted steering.

Abstract: A load cell comprises a member for receiving forces applied by the load, and a plurality of force sensing elements supported by the member and arranged with respect, to each other to independently sense differently directed components of the applied forces. The member is disposed, e.g., in a horizontal plane for receiving the load forces, and the force sensing elements are strain gages. One of the strain gages is arranged to sense a component of the forces applied in a vertical direction relative to the plane, and a second strain gage is arranged to sense a component of the forces applied in a horizontal direction relative to the plane. Among other advantages, the load cell is highly versatile can be used to measure loading forces applied in virtually any direction.

Abstract: A torque sensor which does not require complicated neutral adjustment using a position adjustment mechanism or the like, which is capable of reducing cost and heat generation, improving reliability and realizing a one-system detection circuit. A torque sensor has a control calculating portion for varying operation timing of a coil for detecting torque and sample holding timing and a storage portion for storing an initial value of each element of the torque sensor. The torque is detected on the basis of sampling of transition voltage of the coil and a comparison with the initial value in the storage portion is made during detection of the torque is not being performed so that a failure of each element of the torque sensor is detected. Another torque sensor structured to detect torque in accordance with transient voltages which are generated in the portion in which coils and electric resistors are connected to each other is enabled to detect an abnormality of short circuit between a pair of the coils.

Abstract: The invention provides a device for testing motor vehicle wheels, tires, wheel hubs, wheel bearings, and wheel bolts under loading conditions similar to operating conditions, including a mounting device for pivoting attachment of a vehicle wheel; a drum arranged around the vehicle wheel in such a way that the vehicle wheel can be brought into rolling contact with the inner circumferential surface of the drum; a vertical or radial loading device which, in order to apply a vertical or radial force acting in the vertical or radial direction of the vehicle wheel onto the mounting device, is connected with the latter; a lateral or axial loading device for applying a lateral or axial force acting in the lateral or axial direction of the vehicle wheel, in order to apply the lateral or axial force onto the mounting device, the lateral or axial loading device being connected with the mounting device; at least one ring located on the inner circumferential surface of the drum, which ring is arranged as a thrust ring adj

Abstract: A torque sensor having an improved detection accuracy is disclosed. The torque sensor includes a cylindrical stator. The stator is arranged to face a magnetostrictive member fixed to a shaft. The stator includes a stator body and two retainer rings. When assembling the stator body and the two retainer rings, a pair of exciting coils and a pair of detecting coils are accommodated in the inner wall of the stator. Joints between the stator body and the two retainer rings are not exposed to the inner surface of the stator.

Abstract: A torque sensor has a first signal generator whose output signal changes as a function of a torque, a second signal generator whose output signal changes in the opposite direction as a function of the torque, and a circuit which has a difference-forming unit and a summing device. The output signal of each signal generator passes through an amplifier whose gain is controlled and identical for both output signals and the amplified output signals are present on the difference-forming unit and on the summing device the output of the summing device being connected to a controller which controls the gain.

Abstract: A method and related apparatus for measuring the adhesiveness of slow-release tablets or the like are disclosed.

Abstract: The method is intended for setting the force limiters of a lifting appliance equipped with a winch-type lifting mechanism (8), the electric motor of which is controlled by a variable-speed drive unit ensuring regulation of the drive torque.

Abstract: A dynamometer, which provides an apparatus and method for testing a torque converter without requiring that an automotive transmission be attached, includes a unique adapter assembly and hydraulic circuit connected to the torque converter.

Abstract: The sensor of the invention comprises a flexible beam of a rectangular cross section with rigid solid end blocks at both ends for securing the sensor in a tester. The beam has two symmetrically-shaped through slots cut in mutually perpendicular directiors so that they are partially intersect within a body of the beam. Each slot has at its opposite ends notches which are wider than the slots so that the distance from the inner wall of the notch to the outer side surface of the beam is shorter than the distance to this surface from the inner wall of the slot. Strain gauges are attached to mutually perpendicular surfaces at the ends of the beam which are flexible in the direction of the force being measured and are rigid in the perpendicular direction. Under effect of the loading force and of the friction force, the flexible beam acts as a pair of overlapped and mutually perpendicular parallelograms.

Abstract: A torque sensor having a plurality of axial grooves formed on an outer circumferential surface of the end portion of a first rotation shaft to which a cylindrical member is fixed so as to be extended in an axial direction of the first rotation shaft. A circumferential groove is continuously and circumferentially formed on the outer circumferential surface of the end portion of the first rotation shaft. A plurality of protrusions are formed on an inner circumferential surface of the cylindrical member to be fitted into the plurality of axial grooves respectively to thereby prevent a rotation of the cylindrical member relative to the first rotation shaft. A portion of the cylindrical member which is disposed outward of the circumferential groove is deformed to fit into the circumferential groove to thereby prevent an axial displacement of the cylindrical member relative to the first rotation shaft. Further, a coil unit having a coil is disposed so as to enclose a second rotation shaft.

Abstract: The invention provides a small-sized and high-sensitivity three-axis sensor capable of three-dimensionally detecting a physical quantity using a single sensor unit. The three-axis sensor comprises an operating member; a supporting base having a hollow and disposed around the operating member located at the center of the hollow; and a flexible plate having a piece of piezoelectric material in contact with at least one pair of electrodes and extending across the hollow at an end of the supporting base, the operating member being suspended at the center of the hollow by the flexible plate; wherein the flexible plate is deformed in response to the behavior of the operating member corresponding to a physical quantity applied from the outside, and the piece of piezoelectric material generates a charge corresponding to the deformation of the flexible plate thereby three-dimensionally detecting the magnitude and the direction of the physical quantity.