Abstract: In an embodiment, a wireless power transmitter module includes a sensing grid configured to detect a receiver, a movable wireless power transmitter unit including a wireless power transmitter coil, and a two-dimensional linear motor including a plurality of linear motor coils configured to move the movable wireless power transmitter unit in a two-dimensional plane towards a location of the receiver.

Abstract: A method includes transferring a wafer over a wafer stage on a wafer table. The wafer table includes a table body, a wafer stage, a first sliding member, a second sliding member, a first cable, a first bracket and a second bracket, and a stopper. The second sliding member is movable along a first direction, in which the first sliding member is coupled to a track of the second sliding member, the first sliding member being movable along a second direction vertical to the first direction. The first bracket and the second bracket are connected by a leaf spring. The method includes moving the wafer stage toward the edge of the table body, such that the wafer stage pushes the first cable outwardly, such that the leaf spring is moved toward a first protective film on a surface of the stopper facing the leaf spring.

Abstract: An apparatus, including: a scanning probe microscope head with a frame configured to fit within an insert of a cryostat, and a scanner, a probe and a sample holder all disposed within the frame; and a coarse motor assembly disposed within the frame and comprising: a positionable component; and coarse motors. The coarse motors are configured to move the positionable component relative to the frame along an X axis, a Y axis, and a Z axis. The apparatus further includes a universal electrical base connection with half of a plug/socket arrangement. The plug/socket arrangement is configured to provide electrical communication between the scanning probe microscope head and a base which has a second half of the plug/socket arrangement when the scanning probe microscope head is lowered onto the base.

Abstract: A working device has a configuration with seven degrees of freedom, and is configured to perform work using an end effector. The working device includes: a linear motion unit having three degrees of freedom; a rotary unit having three degrees of freedom; and a rotary drive mechanism having one degree of freedom. The rotary drive mechanism is configured to rotate the rotary unit relative to the linear motion unit. The linear motion unit is mounted on a mount such that a base portion thereof is fixed to the mount. The rotary drive mechanism is mounted on an output portion of the linear motion unit. The rotary unit is mounted on an output portion of the rotary drive mechanism. The end effector is mounted on an output portion of the rotary unit.

Abstract: The present application discloses a wheel bolt pressing device, which includes a frame, a servo motor, a connecting shaft, a bottom plate, a mounting base, a cylinder, a support, a spring A, a pull pin, a limiting sleeve, a thrust bearing, a bracket, a bolt, a strong magnet, a bolt mounting rack, a large linear bearing, a guide shaft, a press-down cylinder, a cylinder flange, a balancing stand, a guard, rollers, a mounting shaft, a mounting rack, contacts, an elastic rubber band, a holder, pin rolls and the like. The device may meet the requirement of a wheel for pressing bolts on line in use, which has ideal effect, high efficiency, and high automation degree. In addition, the wheel bolt pressing device is safe and reliable in work, and is particularly suitable for batch production in production lines.

Abstract: The present invention proposes a macro-micro integrated compound platform with adjustable dynamic characteristics. When a macro platform mover and a micro platform mover are driven at the same time, the whole large-scale high-speed motion can be realized; when a motion deviation occurs, a micro motion platform can be driven separately to realize the high-frequency motion deviation compensation, because the micro motion platform has small inertia and zero friction and achieves precision displacement output through elastic deformation.

Abstract: An alignment system for aligning an ingot of semiconductor or solar-grade material is provided. The alignment system includes a mounting block for attachment to the ingot, an optical device for aligning a predetermined centerline of the ingot with a reference line, and adjustable supports configured for supporting the ingot on at least four support points and configured to adjust the position of the ingot. The mounting block is movable between a horizontal position and a vertical position.

Abstract: A stage apparatus has a base; a movable portion including a stage movable relative to the base; a flexible utility line for supplying utility to the movable portion; and a cover for covering the utility line, the cover including: a housing member provided to one of the base and the movable portion, in which an opening is formed; and a sealing member provided to the other of the base and the movable portion, which is arranged opposite to a side, in which the opening is formed, of the housing member with a gap therebetween, and has a side for sealing the opening.

Abstract: Systems and methods for providing passive haptic feedback are described. Embodiments of the present invention comprise an actuator for bringing a manipulandum and braking surface into contact and thereby providing a resistance. The manipulandum includes scroll wheels, scroll drums, linear sliders and similar user input devices. The actuator may be, for example, electromagnetic or piezo-electric. An embodiment of the present invention may include a processor in communication with the actuator for providing the haptic effects.

Abstract: A positioning mechanism for precisely moving a 3D printing stage in two dimensions is disclosed. The positioning mechanism consists of a first drive assembly, a second drive assembly, a moveable platform, and a stationary frame. The first and second drive assemblies each consist of a gear rack, pinion wire, and actuator. The first and second drive assemblies are configured to move the stage in orthogonal directions in a substantially horizontal plane. Both the first and second pinion wires are in direct contact with the stage as well as the frame, thereby providing an effective parallel linkage between stage and frame.

Abstract: A precision equipment having: a base; a table supported by the base; a tubular rod connected to a side of the table via a joint; a drive mechanism that moves the rod forward and backward; and a laser interferometer that detects displacement of the table relative to the base. The joint is provided by a supplying-discharging static-pressure joint and includes: a movement surface that is connected to the table and is orthogonal to a moving direction of the table; a drive surface that is connected to the rod and faces the movement surface; and a fluid supply channel supplying fluid to a static-pressure clearance between the movement surface and the drive surface. The laser interferometer includes a laser path having an optical axis along the moving direction passing through the inside of the rod of which a pressure is reduced and the drive surface and reflect on the movement surface.

Abstract: A wireless charger installed with a two-dimensional moving mechanism which is simply configured, inexpensive and can be easily miniaturized is provided wherein a table is freely moved in the X-axis direction and the Y-axis direction. In the two dimensional moving mechanism, each pair of X axis pinions are arranged to simultaneously mesh with teeth near both ends of each rack arranged on an X axis slider and Y axis slider respectively. Each pair of pinions are driven by each motor and rotated in synchronization.

Abstract: A compact and gearless driving mechanism with a reduced operational envelope includes a support frame and two driving assemblies. The support frame includes a top plate and a bottom plate. Each driving assembly includes a first linear driving module, a second linear driving module intersecting with the first, and a third linear driving module intersecting with the second. The first linear driving module drives the second linear driving module to move along the first linear driving module, the second linear driving module drives the third linear driving module to move along the second linear driving module. A driving direction of each third linear driving module is inclined relative to the driving directions of the first linear driving module and the second linear driving module.

Abstract: Driving mechanism without gears or other meshing structures which can operate in restricted environments includes a first linear driving module, a second linear driving module coupled to the first linear driving module, and a third linear driving module coupled to the second linear driving module. The first linear driving module is configured to drive the second linear driving module to move along the first linear driving module. The second linear driving module is configured to drive the third linear driving module to move long the second linear driving module. A driving direction of the third linear driving module is inclined relative to a plane parallel to directions of the first and second linear driving modules.

Abstract: A robot for virtual reality experience, in which a settling body for a user is moved in multidirectional according to operation states of first and second moving units and first and second crank motors. The settling body creates various moving directions according to the operation states of the first and second moving units and the first and second crank motors, and each magnitude of forces applied to each moving direction is changed, thereby forming the various waveforms.

Abstract: The machine contains the machine's body (1) with guide (L) and the manipulator that consists of the first arm (A) and the second arm (B). Inside guide (L), situated at one of the sides of the machine's, body (1) the following elements, which constitute successive elements of the manipulator, are mounted: element (C1) that guides the end of the first arm (A) together with the first drive (A1) and element (C2) that guides the and of the second arm (B) together with the second drive (B1), whereas the opposite ends of the first arm (A) and the second arm (B) are joined together with each other in the self-aligning manner. The movement range of the tool's socket (2), as delineated by area (P), which constitutes a rectangle with sides (X) and (Y), where side (X) is parallel to guide (L).

Abstract: The present invention relates to an oblique-driven platform structure, comprising: a base, a first rail, a screw, a first sliding block, a second sliding block, an oblique slide rod, at least one second rail, at least one third sliding block, a work platform, and a motor. There is a trigonometric relation between the oblique slide rod, the screw and the second rail, and an oblique drive angle is formed between the oblique slide rod and the screw; Therefore, with the change of the stroke position of the screw, the displacement resolution of the work platform can still kept the same value when the work platform is driven. Moreover, the displacement of the screw stroke can be proportionally transformed to the feed rate of the work platform through the trigonometric relation, such that the driven work platform can get an extremely high displacement resolution without using any high-level servo motor.

Abstract: A machine tool including: a table disposed on a saddle movable along an X-axis; a pair of linear motors that moves the table along a Y-axis; position detectors that detect a first position and a second position of the table on the Y-axis; a pair of guide rails attached to the saddle; and four bearings engaged with the pair of guide rails, is provided. The machine tool includes a connecting unit connecting the table to the four bearings such that the table is rotatable relative to the four bearings, and a control unit that controls the pair of linear motors on the basis of the first and second positions.

Abstract: A hexapod actuator device, notably used in flight simulators or driving simulators, includes six legs. A first end of each leg is notably mobilizable along a straight segment by virtue of a motorized carriage. The hexapod actuator comprises notably six segments of straight lines that may be coplanar or inclined with respect to the ground. A second end of each leg may be mounted free on a ball joint with three degrees of freedom in rotation. Each of the ball joints is secured to a mobile platform. The device lies in the field of systems allowing motion to be imparted to pilot cabins for example.

Abstract: A linear actuator includes a housing, a rotary unit disposed in the housing, and a screw member driven by the rotary unit. The rotary unit is translatable relative to the housing when the screw member is driven by the rotary unit.

Abstract: This apparatus for mobilization of the body comprises a receiving platform which is movable in relation to a fixed chassis, and which is designed to support a subject who is to be treated in a standing position. The platform is connected to the chassis by a double pivot connection, and it is driven by an oscillating movement in relation to an axis passing substantially through its center, by means of actuators each connected by a pivot connection to a shaft connected to said platform, said actuators themselves being articulated on the chassis.

Abstract: A work transfer apparatus includes a work carrying mechanism, a driving source that drives the work carrying mechanism, a sealed box that accommodates the driving source in a hermetically sealed state, and a coolant circulation path provided in the sealed box for cooling the driving source. The sealed box includes a box body with an opening, and a partition lid for closing the opening. The partition lid includes an outer plate member and an inner plate member superposed on the outer plate member. The coolant circulation path is disposed at the interface between the outer plate member and the inner plate member.

Abstract: A feeder for a machine tool adapted to move a table relative to a saddle by rotation of a motor includes a ball thread nut fixed to the saddle and a ball thread shaft that engages with the ball thread nut in a rotatable manner but is immovable in an axial direction of the ball thread shaft relative to the table. The motor is fixed to the table and the ball thread shaft is coupled to the motor. A sum of a movable distance of the table relative to the saddle and a length of the saddle in the axial direction is shorter than a length of the table in the axial direction. The feeder further includes rails fixed to the table on its surface where the motor is fixed and bearings that are fixed to the saddle and bear the rails.

Abstract: A multi-functional feed-screw-type dovetail stage may include a male threaded rod having, on each of its ends, a coupling portion for coupling to a control knob; a first support and a second support provided on respective sides of a fixed member for rotatably supporting the male-threaded rod; and the control knob that detachably couples via its coupling portion to the male-threaded rod and serves to rotate the male-threaded rod. A slide member travels until a female-threaded cylinder engaging the fixed member abuts the first support and the second support upon moving.

Abstract: Systems to control movement of a template during an imprint lithography process are described. The systems include an orientation stage having an inner frame, and outer frame, and a plurality of actuators coupled between the inner frame and the outer frame to vary translational motion and impart angular motion about a plurality of axes.

Abstract: This invention provides a precise positioning platform by using of toggle type principle, wherein the positioning platform can be single toggle type, double toggle type, or combination with multi-link to enhance positioning platform precision.

Abstract: A bistable MEMS platform. The bistable MEMS platform converts a rotational input into an ortho-planar displacement and can maintain either it's up or down position without an input force due to bi-stability. The bistable MEMS platform generally includes three components. The first component is a pair of quadrantal bistable mechanisms (QBM). The second is a compliant version of a micro helico-kinematic platform (HKP) that serves to coordinate the motion of the QBM. The third component is an aerial platform, which is a variation of a scissor lift mechanism that attaches to the output of the QBM and amplifies the out-of-plane displacement.

Abstract: A special path generating device includes a base, a first axis slide assembly, a second axis slide assembly, a working portion, a driving portion, a first cam and a second cam. This first axis slide assembly includes a first bar and a first slide. The second axis slide assembly includes a second bar and a second slide. This working portion is mounted on the second slide that has two contacting portions. The driving portion is mounted on the base. When the driving portion drives the driving shaft rotating, the first cam and the second cam rotate accordingly and makes the working portion generating a special path. It can generate a constant-speed circular movement. It is easy to control. In addition, its volume is small.

Abstract: The invention relates to a device for swiveling an object around a stationary axis (16) which lies outside the space occupied by the device. The inventive device is characterized by unusually great rigidity. A supporting coupler (5) and a guiding coupler (10) are guided parallel to the frame (1) with the aid of cross-sliding elements. The supporting coupler (5) and the guiding coupler (10) are connected to a crank (4) by means of one respective revolute joint, the crank (4) guiding the supporting coupler (5) and the guiding coupler (10) along concentric, non-identical circular paths. The supporting coupler (5) and the guiding coupler (10) are provided with a second revolute joint located at the same distance from the first revolute joint, i.e. a revolute joint (5b) for the supporting coupler at the output end and a revolute joint (10b) for the guiding coupler at the output end, via which the two couplers (5, 10) are jointly connected to an output member (9).

Abstract: An X-Y linear slide mechanism includes a first block member having opposing exterior and interior surfaces, a second block member having a planar interior surface, a pair of cylindrical rods secured together along their axial lengths. The interior surfaces of the first and second block members each have elongate grooves formed therein. The elongate grooves have a length longer than the pair of cylindrical rods, a width to receive one of the cylindrical rods and a depth slightly greater than the diameter of one of the cylinder rods. Each of the pair of cylindrical rods are disposed in one of the elongate grooves providing X and Y linear motion of the second block member relative to the first block member.

Abstract: An advancing means for a multi-coordinate measurement table including a drive unit having a friction rod and a motor for each coordinate axis (x, y). The motor contacts one side of the friction rod with its motor shaft and at least one press roller contacts the other side of the friction rod. At least one pressing means is provided biasing the press roller, the friction rod and the motor shaft against each other with a pressing force, whereby the motor shaft frictionally engages the friction rod and converts the rotational movement of the motor into a linear movement of the friction rod. A method for controlling such an advancing means is disclosed as well.

Abstract: Systems and methods are disclosed for x-y tables wherein rolling elements of rolling-element bearings are transferring electrical energy between a fixed part of the x-y table and a movable part of the x-y table. The electrical energy transferred could be power to electrical devices as well as signals to and from devices on the movable part of the x-y table. Electrically conducting rolling elements are moving on electrically conducting grooves on the fixed and movable part of the x-y table. Conductor tracks on the fixed and movable part are connected to the grooves and to devices on the movable platform. In a preferred embodiment of the invention the x-y table is part of a camera wherein linear motors, preferably with integrated position sensing, are moving the x-y table back to a home position in case of a dislocation due to a mechanical shock. The invention allows an exact and fast positioning of an x-y table without requiring a flexible cable.

Abstract: Provided is an XY table actuator that, while building-in a drive means for freely moving an object placed on a table within an XY-plane and positioning the object, can be significantly reduced in size and that helps to suppress an increase in table height.

Abstract: This invention provides a precise positioning platform by using of toggle type principle, wherein the positioning platform can be single toggle type, double toggle type, or combination with multi-link to enhance positioning platform precision.

Abstract: A multi-axis robot for high-speed applications comprises a first and a second guide rail arranged substantially parallel to each other for defining a first axis of motion. A crossbar having a first end and a second end is moveably supported on the guide rails. A carriage is moveably coupled to the crossbar for moving along a second axis of motion. A first drive system having first and second drives and a first belt running along a first H-shaped belt path provides for a movement of the carriage along the first and second axis of motion. Second and third belts extend at least partially along the crossbar and the guide rails. The second and third belts run along different second and third belt paths, with one of the second and third belts entering the crossbar with a right-hand turn and leaving the crossbar with a left-hand turn, and the other one of the second and third belts entering the crossbar with a left-hand turn and leaving the crossbar with a right-hand turn.

Abstract: A nanopositioning system for producing a coupling interaction between a first nanoparticle and a second nanoparticle. A first MEMS positioning assembly includes an electro-static comb drive actuator configured to selectively displace a first nanoparticle in a first dimension and an electrode configured to selectively displace the first nanoparticle in a second dimensions. Accordingly, the first nanoparticle may be selectively positioned in two dimensions to modulate the distance between the first nanoparticle and a second nanoparticle that may be coupled to a second MEMS positioning assembly. Modulating the distance between the first and second nanoparticles obtains a coupling interaction between the nanoparticles that alters at least one material property of the nanoparticles applicable to a variety of sensing and control applications.

Abstract: An X-Y table includes a platform and a frame which has an X and Y-truck trough. An X-plane truck is slideably held in the X-truck trough. A Y-plane truck is slideably held in the Y-truck trough. As the motor/actuator with drive mechanisms moves the frame in an X-direction the Y-truck moves through the Y-trough and as the motor/actuator with drive mechanisms moves the frame in a Y-direction the X-truck moves through the X-trough, thereby moving the frame in both the X-direction and the Y-direction.

Abstract: A toggle-type positioning platform including a first platform, a motor, a screw rod, a second platform and a linkage is provided. The motor and the screw rod are disposed on the first platform; the motor is coupled to the screw rod and suitable for driving the screw rod to rotate. The second platform is above the first platform and is suitable for moving back and forth alternately along a predetermined path, wherein an included angle exists between an extended direction of the predetermined path and the screw rod. The linkage is disposed between the first platform and the second platform, and is connected between the second platform and the screw rod. The linkage is driven by the rotation of the screw rod, to drive the second platform to move along he predetermined path. Accordingly, the positioning precision of the toggle-type positioning platform is enhanced.

Abstract: A hollow yoke is inserted into a bore section of a frame. The yoke is connected to a slider via a slit in the frame. A timing belt is inserted into a belt hole of the yoke. Further, a pair of guide members are provided on both side surfaces of the yoke, which engage with guide grooves of the frame. The yoke is displaced along the guide grooves by the timing belt, under a driving action of a driving section. Accordingly, the slider is displaced in the axial direction along the frame.

Abstract: A machine tool comprises a first travelling assembly (10) which carries in its turn a second travelling assembly (22). The first assembly (10) is adapted to position the second assembly (22) in a relatively wide space (S1) and with movements at relatively low speeds and accelerations. The second assembly (22) carries in its turn a tool which is provided with actuators for positioning the tool in a relatively narrow space (S2) and with movements at relatively high speeds and accelerations. The machine includes means for controlling the movements of the two assemblies (10, 22) which are so arranged to obtain s global movement of the tool without solutions of continuity in all the space of movement (S1) of the first assembly (10). The invention also relates to a manipulator device which can be used independently or be installed as a second assembly (22) on a travelling structure of a machine tool.

Abstract: One pair each of a Y linear motor (a total of four) on the +X side and the ?X side that drive a reticle stage include one pair each of a stator section (a total of four) and three each of a mover section (a total of six) on the +X side and the ?X side. In this case, the three each of the mover sections on the +X side and the ?X side configure one each of a mover. The mover section located in the center in the Z-axis direction of each of the movers is used in common by each pair of the Y linear motors. Therefore, the weight of the mover section (reticle stage) of the reticle stage device is reduced, which allows a higher acceleration. Further, the mover section located in the center in the Z-axis direction of each of the movers coincides with a neutral plane of the reticle stage.

Abstract: A multi-segmented spine includes a plurality of rigid segments joined with a flexible coupling and governed by a plurality of integrated actuators. Motion is generated in the multi-segmented spine via an intelligent activation sequence for the actuators, which can be in the form of shape memory alloys activated via resistance heating from electric current.

Abstract: A linear axle includes at least one vertical guide rail, a guide block having a housing and being movable along the at least one guide rail, at least one brake wedge associated with each guide rail and being movable in a longitudinal direction of the respective guide rail, a linear drive moving the at least one brake wedge into an out-of-operation position during normal operation, and a mechanical energy storing device configured to move the at least one brake wedge into an effective position, if the linear drive becomes ineffective during a service interruption. In an alternative embodiment, the guide block associated with a linear axle of the aforedescribed type may be stationary, whereas the respective guide rail may be movable along its longitudinal direction.

Abstract: A lithographic apparatus includes a support constructed to support a patterning device, the patterning device being capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate on a central area; and a projection system configured to project the patterned radiation beam onto a target portion of the substrate in a first direction. The apparatus further includes a positioning device to position the substrate table, wherein the positioning device includes a plurality of actuators arranged to, in use, exert forces to position the substrate table, the forces substantially being directed in a plane substantially perpendicular to the first direction and wherein the plurality of actuators are arranged outside a central volume of the substrate table, the central volume being obtained by projecting the central area along the first direction.

Abstract: Provided is an XY table actuator that, while building-in a drive means for freely moving an object placed on a table within an XY-plane and positioning the object, can be significantly reduced in size and that helps to suppress an increase in table height.

Abstract: A supporting unit in a moving table device, easily connected to a base and a table, is provided. A supporting unit (U?) has a pair of planar bearing plates. Inside the planar bearing plates are positioned spherical bearing plates, respectively. Further, a spherical axial member is sandwiched between the spherical bearing plates (34a, 34b). A planar bearing is formed between each of the planar bearing plates and each of the spherical bearing plates. A spherical bearing is formed between each of the spherical bearing plates and the spherical axial member. Thus, the supporting unit (U?) is provided with a certain degree of movability in five-axis directions. With the high degree of movability, the supporting unit (U?) can be easily connected to a base and a table.

Abstract: In order to improve a machine tool for machining a workpiece by a relative movement between the workpiece and a tool, comprising a first receiving device for the workpiece or the tool, a compound slide system with a second receiving device for the tool or the workpiece and comprising a drive device for moving the second receiving device in relation to the first receiving device, which drive device acts at least two spaced-apart points of application by at least three drive struts extending parallel to at least two different directions and each with a pivot joint, and with which drive device the at least two points of application can be positioned by means of the at least three drive struts, in such a way that exact positioning of the second slide element can be achieved by structural measures, it is proposed that four drive struts of invariant length, each with a pivot joint, act on the slide element, each of which struts is pivotally connected to a guiding slide, which is guided in a linearly movable manner

Abstract: A three-axis displacement platform comprises a first-axis linear device, a second-axis linear device, a third-axis linear device, a support frame and a balance weight. The three-axis displacement platform is formed by superposing the first-axis linear device, the second linear device, the support frame and the third-axis linear device on upon another, thus reducing the assembly space of the three-axis displacement platform. The balance weight is superposed on the support frame to balance weight, thus improving the displacement accuracy.

Abstract: Robotized device to move an object, comprising a manipulator having gripping elements lying on a determinate plane of manipulation, a first electric motor with which a first movement unit is associated, in turn associated with the manipulator, and a second electric motor with which a second movement unit is associated, in turn associated with the manipulator, wherein the first movement unit and the second movement unit define with the respective motor and with the manipulator a pantograph mechanism. The first movement unit comprises connection elements able to keep the gripping elements substantially parallel to the plane of manipulation during the functioning of the pantograph mechanism.

Abstract: A device for high precision generation and measurement of forces (both pressure and tension) and displacements along a single axis includes a shaft for transferring the forces along an axis X. At least two biased first leaf springs are attached to the shaft and clamped at each end. The device has great rigidity in an axis Y perpendicular to the axis X in which the forces and displacements are generated.