Abstract: An apparatus and a method are disclosed for supporting a substrate at a position with high precision. The substrate is placed on a stage which is configured to be traversable in a plane in two spatial directions oriented perpendicular to each other. The substrate is supported on three point-like support elements. At least one of the support elements is configured to be moveable in the plane.

Abstract: A moving apparatus including a first movable body which moves in a first direction in a horizontal plane, a second movable body arranged in a location different from a location of the first movable body in a vertical direction, which moves in a second direction intersecting with the first direction in the horizontal plane, a first linear motor which moves the first movable body in the first direction, a second linear motor which moves the second movable body in the second direction, a third movable body which is moved in the first direction and is moved in the second direction, a vacuum container which puts the first, second and third movable bodies in a vacuum, driving force transmission rods, and a sealing mechanism for sealing the driving force transmission rods and the vacuum container.

Abstract: An impact absorbing mechanism, provided to a foot 5 of an extremity of each of two movable legs 2 of a bipedal walking robot 1 having the two movable legs 2, includes: an upper base plate 5-a joined to a foot joint 4 of each of the movable legs 2; a lower base plate 5b positioned below the upper base plate, and being opposite to the upper base plate; and three elastic members 6 anisotropic in terms of elasticity, which are arranged at equal intervals in the circumferential direction about the yaw axis YA extending in a direction perpendicular to the upper base plate 5a, between the upper base plate 5a and the lower base plate 5b, each of which allows the lower base plate 5b to make elastic displacement relative to the upper base plate 5a in the same direction as axis YA extends, while each of which inhibits the lower base plate 5b from making elastic displacement relative to the upper base plate 5a in directions orthogonal to the yaw axis direction, and which join the upper base plate 5a and the lower base pl

Abstract: A guide includes a brittle material layer and a magnetically attracting magnetic body, e.g., a metal layer. A recess and a projection are formed on the metal layer. The brittle material layer is made of, e.g., a sprayed ceramic material and covers the recess formed on the magnetically attracting metal layer. A movable body moves as it levitates above the surface of the brittle material layer.

Abstract: A magnetic transmission having an input shaft and an output shaft with two or more gear assemblies, each gear assembly having an input sprocket affixed to the input shaft, an output armature with peripheral electromagnets affixed to the output shaft, a transfer drum concentric with the output armature and having electromagnets inset from the inside surface of the transfer drum and a drum sprocket on the periphery of the transfer drum, and a transfer chain engaging the input sprocket and the drum sprocket. A gear assembly actuator is used to select and energize a desired gear assembly. A hysteresis clutch can also be used in lieu of the output armature and the transfer drum.

Abstract: An active hinge apparatus is disclosed which can be used to raise a micromechanical structure (e.g. a plate or micromirror) on a substrate. The active hinge apparatus utilizes one or more of teeth protruding outward from an axle which also supports the micromechanical structure on one end thereof. A rack is used to engage the teeth and rotate the axle to raise the micromechanical structure and tilt the structure at an angle to the substrate. Motion of the rack is provided by an actuator which can be a mechanically-powered actuator, or alternately an electrostatic comb actuator or a thermal actuator. A latch can be optionally provided in the active hinge apparatus to lock the micromechanical structure in an “erected” position.

Abstract: An actuator system for making a nanoscale movement of an object is provided. In the actuator system, a platform supports the object. A Z-axis actuator connects the platform to the object in a Z-axis direction, and moves the object in the Z-axis direction by Z-axis direction transformation. A frame supports the platform around the platform. An X-axis actuator connects the frame to the platform in an X-axis or Y-axis direction perpendicular to the Z-axis, and moves the object in the X-axis direction by transformation in the direction perpendicular to the Z-axis.

Abstract: In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.

Abstract: A motion mechanism for achieving motion in two directions that are at right angles to each other includes two linear actuator assemblies arranged parallel to each other, a carriage assembly mounted on each of the linear actuator assemblies, and a head slidably linked on opposite sides thereof to the carriage assemblies via slide assemblies that have slide members that are linearly movable with respect to each other along equal but opposite angles with respect to the direction of movement of the carriages.

Abstract: Machine for machining large parts of the type that comprises a parallel kinematics machining device that moves freely in the X, Y and Z Cartesian axes, characterized in that the said device is mounted on a platform which moves in the Z axis and is in turn mounted on a bridge that slides along corresponding guides in the X and Y axes. The invention put forward affords the significant advantage of combining the high machining precision and speed of the parallel kinematics machine with the fact that the machine can access large work areas owing to the support platform which is mounted on the bridge.

Abstract: In order to improve a machine tool for machining a workpiece by a relative movement between the workpiece and a tool, comprising a first receiving device for the workpiece or the tool, a compound slide system with a second receiving device for the tool or the workpiece and comprising a drive device for moving the second receiving device in relation to the first receiving device, which drive device acts at at least two spaced-apart points of application by at least three drive struts extending parallel to at least two different directions and each with a pivot joint, and with which drive device the at least two points of application can be positioned by means of the at least three drive struts, in such a way that exact positioning of the second slide element can be achieved by structural measures, it is proposed that four drive struts of invariant length, each with a pivot joint, act on the slide element, each of which struts is pivotally connected to a guiding slide, which is guided in a linearly movable mann

Abstract: A system for controlling an axial movement of an article is presented. The system comprises a support stage assembly and a spring suspension arrangement mounted on the support stage assembly. The spring suspension arrangement comprises first and second assemblies arranged in a coaxial relationship one inside the other. The first assembly is attached to the support stage assembly. The second assembly serves for supporting an article-carrying member and is driven for movement along the axis with respect to the first assembly. The outer one of the first and second assemblies is configured to define two spaced-apart parallel planes perpendicular to said axis. The first and second assemblies are attached to each other by first and second membrane-like members arranged in a spaced-apart parallel relationship along said axis.

Abstract: Provided is a stage on which to place a sample, which is capable of performing a high-precision positioning at a short time, and which prevents an image drift of a measuring object. The stage includes: a base having a guiding unit; a table which moves in a movement direction along the guiding unit; a motion unit which provides motion in the movement direction in order to cause the table to move; and a transmission unit for transmitting the motion to the table. In the stage, the transmission unit includes a table block fixed to the table, and a motion block fixed to the motion unit; and the table block and the motion block contact each other at two points forward and backward in the movement direction while in motion, and are separated away from each other while not in motion.

Abstract: An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage formed between the holding member and the magnet.

Abstract: An imaging system for obtaining images of a specimen that includes a novel filtering system for filtering radiation emitted from the specimen. The imaging system includes a camera and a novel filter grid that is controllably movable relative to the camera in a manner to move a selected emission filter of a plurality of emission filters carried by the grid into position between the camera and the specimen. The filter carrying grid of the system resides in a plane having X and Y coordinates and the system includes a novel positioning mechanism for controllably moving the filter carrying grid along the X and Y coordinates of the plane in a manner to position a selected one of the emission filters carried by the grid into position between the camera and the specimen.

Abstract: A displacement apparatus for two-dimensional displacement of an object in relation to a fix-point includes a frame that is symmetrical in relation to a center of the frame and adapted to receive first and second actuators, each of which exerts a force along respective first and second axes extending through the center of the frame for deformation of respective first and second specific parts of the frame.

Abstract: Provided is an ultra-precision positioning system. The system comprises a base, a motion stage movably provided to the top of the base, and first to sixth feeding mechanisms for moving the motion stage to have six degrees of freedom. The first to sixth feed mechanisms are fixed to the base and the motion stage, respectively. Each of the first to third feeding mechanisms has a piezo actuator and two elastic hinges provided at both sides of the piezo actuator. Each of the fourth to sixth feeding mechanisms has a piezo actuator, three hinge members, and a lever member with a notch hinge which operatively cooperates with the hinge members.

Abstract: A single degree of freedom positioner resistant to axial and rotational motion on two axes, and to rotation around a third axis, but permitting axial movement along the third axis. The axes are orthogonally related. The positioner is characterized by support of a stage by a plurality of stiffly flexible end supported shear webs that bend in a rolling motion to enable the said axial motion.

Abstract: A shock absorbing apparatus in a positioning apparatus including a stage apparatus is disclosed. The positioning apparatus includes a main body apparatus for mounting the stage apparatus thereto, and a chamber for maintaining a region, in which the stage apparatus is disposed, under a condition of vacuum or purged ambience. The shock absorbing apparatus includes a shock absorber provided at a stroke end of the stage apparatus, and a support member provided separately from the stage apparatus, to which the shock absorber is fixed. In the shock absorbing apparatus of the present invention, the shock absorbing apparatus is fixed to the support member provided separately from the stage apparatus including a driving system, and accordingly an increase in size of the stage apparatus can be prevented, and high-speed and highly-precise positioning of an object to be positioned can be performed in a non-atmospheric ambience.

Abstract: In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.

Abstract: An XY platen positioning system includes a fixed base rigidly coupled to a essentially planar surface. An XY intermediate plate is slidably coupled to the fixed base, such that the XY intermediate plate is slidable in the X axis along the fixed base. An XY stage is slidably coupled to the XY intermediate plate, such that the XY stage is slidable in the Y axis along the XY intermediate plate. A platen is flexibly coupled to the XY stage, such that the platen, with respect to the XY stage, is essentially constrained in the X and Y axes and moveable in the Z axis.

Abstract: An XY stage includes a movable frame having a rectangular space inside thereof and movable on a reference base along one of X and Y axes, a first drive source provided in the reference base for moving the movable frame, a rectangular movable base mounted in the rectangular space of the movable frame, which is movable on the reference base along the other of the X and Y axes and stopped on the reference base, and a second drive source provided in the movable frame, for moving the movable base.

Abstract: An apparatus for mounting semiconductors contains a bonding station, whereby the bonding station comprises a wafer table for presenting the semiconductor chips, a substrate table and a pick and place system with a bondhead with a chip gripper. Part of the wafer table is located underneath the substrate table. The pick and place system has a first linear motor that comprises a rigidly arranged stator and a shuttle that can be moved in a first direction guided by first guide elements, and a second linear motor that comprises a rigidly arranged stator and a shuttle that can be moved in a second direction. The shuttle of the first linear motor has second guide elements that guide the shuttle of the second linear motor. The bondhead with the chip gripper is arranged on the shuttle of the second linear motor.

Abstract: There is provided a transfer apparatus capable of increasing the length of a transfer arm when it is extended, without increasing the size of the transfer arm when it is contracted. The transfer apparatus 4 comprising a transfer arm 17 which comprises: two rotating shafts 5 and 6 arranged coaxially or in parallel; a pair of first arms 7 and 8, one end portions of which are fixed to the rotating shafts 5 and 6, respectively; a pair of second arms 10 and 11, one end portions of which are connected to the other end portions of the pair of first arms 7 and 8 by means of pins, respectively; and a holding portion 14 for holding an object w to be processed, the holding portion 14 being connected to each of the other end portions of the pair of second arms 10 and 11 by means of pins, wherein the second arms 10 and 11 cross each other.

Abstract: A robotic portion 1 has X-axis, Y-axis and Z-axis modules 2, 3, 4 and can move in three axial directions. This robotic portion 1 is mounted in such a manner as to move on a second base 10 in the X-axis direction. Furthermore, the second base is mounted in such a manner as to move on a first base 12 in the Y-axis direction. Then, the robotic portion 1 can be moved on either the first or second base 12, 10 on pins 7, 8 provided on the Z-axis module 4 which act as fulcrums by moving the robotic portion 1 in the Y-axis direction or the X-axis direction with the pins 7, 8 being inserted into hole portions 14, 11 formed in the first or second base 12, 10.

Abstract: A positioning stage system for precise and accurate movement of an article in an electron beam lithography system. The positioning stage system includes a support platform for supporting the article, an X-direction linear motor coupled to an X-member, a Y-direction linear motor coupled a Y-member, and a slide attached to the support platform and slidably engaged to the X-member and the Y-member. The X-member and Y-member, upon actuation of the X-direction and Y-direction linear motors, cause the support platform to move in an X-direction and a Y-direction, respectively.

Abstract: Provided is an ultra-precision feeding apparatus. The feeding apparatus comprises an actuator horizontally positioned between a base and a motion stage movably provided to the top of the base, first hinge member which is fixed to the base and one end of the actuator, second hinge member which is fixed to the other end of the actuator, third hinge member with two hinges which is fixed to the motion stage, and a lever member with a notch hinge which is fixed to the base and cooperates with the second hinge member and the third hinge member.

Abstract: A machine tool for at least triaxial machining of work pieces comprises a column of the type of a casing with side walls. In an interior space, provision is made for a work spindle which projects into a working area and which is connected via couplers and hinges to a driving skid that is displaceably guided on each side wall straight in a y direction. The driving skids are displaceably guided on two guides which are spaced from each other in the z direction. Provided between the guides are linear motors, a first part of which is mounted on the driving skid and a second part on the side wall.

Abstract: An alignment apparatus moves an X-Y slider together with X and Y beams. Electromagnetic guides (electromagnetic mechanisms) are interposed between the X-Y slider, the X beam, and the Y beam. The electromagnetic guides include alignment and acceleration electromagnets attached to the X-Y slider, and targets attached to the X and Y beams. The alignment electromagnet is feedback-controlled, whereas the acceleration electromagnet is feedforward-controlled.

Abstract: The XY stage mechanism comprises a Y slide shaft 2 penetrating through only one side surface of the wall surfaces of a vacuum chamber 1 for holding a stage base plate in a cantilevered manner, a Y air slide bearing 4 for guiding the Y slide shaft 2, an X air slide plate 5, a first air slide bearing 6 for supporting the X air slide plate 5, a coupling portion 8, and a second X air slide bearing 9 serving as the guide of the coupling portion 8, whereby, in a state where not only the Y slide shaft is floated up but also the X air slide plate and coupling portion are floated up, the XY stage is driven.

Abstract: An apparatus for displacing two displaceable members, including a first member, a second member which is supported by the first member such that the second member is displaceable relative to the first member, a third member which is supported by the second member such that the third member is displaceable relative to the second member, a first and a second drive source which have respective output members and each of which is not movable relative to the first member, a mechanically motion-transmitting device which is connected to the respective output members of the first and second drive sources and to the second and third members and which mechanically transmits respective motions of the output members to the second and third members while allowing the second and third members to be displaced relative to each other, and a displacement control device which is connected to the first and second drive sources and which controls the first and second drive sources and thereby controls the displacement of each of

Abstract: A multiple degree of freedom platform assembly formed from a plurality of thin films on a substrate can, when activated, move out of the plane of the substrate without additional manufacturing steps. The platform is connected to the substrate by at least three linkages, each linkage being pivotally connected to the platform and the base. At least two of the base connections are to powered traveling devices that are manufactured at one end of a path and which may be moved to locations along the path to cause the platform to move to predetermined positions. The entire assembly, including hinges, is manufactured as planar structures; preferably by a thin film technology such as MEMS.

Abstract: A first slider moves along a guide rail extending in a Y-axis direction and includes a beam extending in an X-axis direction, a T-shaped section, and an arm member. The T-shaped section moves along the guide rail at an end of the beam. The arm member extends in the Y-axis direction at the other end of the beam. A second slider moves in the X-axis direction along the beam. The first slider is supported on the base by static pressure air bearing pads disposed at two positions on the lower surface of the T-shaped section, at at least one position on the lower surface of the beam at the central portion thereof and at the two positions on the lower surface of the arm member. The second slider is supported on the base by static pressure air bearing pads disposed at three positions on the lower surface thereof.

Abstract: A positioning device and method can position a subject of positioning at a higher speed than conventional ones. A positioning device and method for moving a subject of positioning to a desired position, moves the subject of positioning at a desired speed and acceleration, and adjusts the acceleration/deceleration duration of the subject of positioning and the timing of starting the deceleration so as to cancel the residual vibration, in accordance with the vibration period of the residual vibration that occurs immediately after positioning the subject of positioning.

Abstract: The XY stage mechanism comprises a Y slide shaft 2 penetrating through only one side surface of the wall surfaces of a vacuum chamber 1 for holding a stage base plate in a cantilevered manner, a Y air slide bearing 4 for guiding the Y slide shaft 2, an X air slide plate 5, a first air slide bearing 6 for supporting the X air slide plate 5, a coupling portion 8, and a second X air slide bearing 9 serving as the guide of the coupling portion 8, whereby, in a state where not only the Y slide shaft is floated up but also the X air slide plate and coupling portion are floated up, the XY stage is driven.

Abstract: The XY stage mechanism comprises a Y slide shaft 2 penetrating through only one side surface of the wall surfaces of a vacuum chamber 1 for holding a stage base plate in a cantilevered manner, a Y air slide bearing 4 for guiding the Y slide shaft 2, an X air slide plate 5, a first air slide bearing 6 for supporting the X air slide plate 5, a coupling portion 8, and a second X air slide bearing 9 serving as the guide of the coupling portion 8, whereby, in a state where not only the Y slide shaft is floated up but also the X air slide plate and coupling portion are floated up, the XY stage is driven.

Abstract: An apparatus for displacing two displaceable members, including a first member, a second member which is supported by the first member such that the second member is displaceable relative to the first member, a third member which is supported by the second member such that the third member is displaceable relative to the second member, a first and a second drive source which have respective output members and each of which is not movable relative to the first member, a mechanically motion-transmitting device which is connected to the respective output members of the first and second drive sources and to the second and third members and which mechanically transmits respective motions of the output members to the second and third members while allowing the second and third members to be displaced relative to each other, and a displacement control device which is connected to the first and second drive sources and which controls the first and second drive sources and thereby controls the displacement of each of

Abstract: There is disclosed a two-axis positioning mechanism including a single motor to control the position of two orthogonal axes. The motor is in communication with a first drive system to control the position of one axis and a second drive system to control the position of the other of the two axes. Also provided is a mechanically redundant positioning mechanism in which either of two motors may perform the two-axis positioning function.

Abstract: A robotic portion 1 has X-axis, Y-axis and Z-axis modules 2, 3, 4 and can move in three axial directions. This robotic portion 1 is mounted in such a manner as to move on a second base 10 in the X-axis direction. Furthermore, the second base is mounted in such a manner as to move on a first base 12 in the Y-axis direction. Then, the robotic portion 1 can be moved on either the first or second base 12, 10 on pins 7, 8 provided on the Z-axis module 4 which act as fulcrums by moving the robotic portion 1 in the Y-axis direction or the X-axis direction with the pins 7, 8 being inserted into hole portions 14, 11 formed in the first or second base 12, 10.

Abstract: An XY stage for precision movement for use in aligning a wafer in a microlithography system. A main stage supporting the wafer straddles a movable beam that is magnetically driven in a first linear direction in the XY plane. A follower stage, mechanically independent of the main stage, also moves in the first linear (X) direction and its motion is electronically synchronized by a control system with the main stage motion in the X direction. Electromagnetic drive motors include magnetic tracks mounted on the follower stage which cooperate with motor coils mounted on the edges of the main stage to move the main stage in a second linear (Y) direction normal to the X direction. Thus the main stage is isolated from mechanical disturbances in the XY plane since there is no mechanical connections and is lightened by removing the weight of the magnetic tracks from the beam.

Abstract: A coordinate position of a stage for supporting a wafer or a reticle which is driven by a linear motor includes a stator and a mover is measured by a laser interferometer, and a thrust obtained from a deviation between the measured coordinate position and an aimed coordinate position is output to a multiplier. Further, a cosine function corresponding to a phase between the stator and the mover is obtained on the basis of the measured coordinate position and is output to the multiplier. Then, an exciting current is supplied to an armature coil of the linear motor on the basis of an output of the multiplier.

Abstract: The two dimensional drive system is capable of properly supporting a load applied to a slider and improving the positioning accuracy, the resolution, etc. The drive system comprises: a base; a pair of first fixed guides; a pair of second fixed guides; a first moving beam being capable of moving in the first direction; a second moving beam being capable of moving in the second direction; a slider being capable of moving along the first moving beam and the second moving beam; a first ball screw for moving the slider in the first direction; a second ball screw for moving the slider in second direction; first driving means for driving the first ball screw; second driving means for driving the second ball screw; and a third fixed guide being fixed between the first fixed guides and slidably connected to the first moving beam, whereby the third fixed guide guides the first moving beam in the first direction.

Abstract: A stage system includes a movable stage, a guide mechanism for guiding the stage with respect to a predetermined direction, and a preloading mechanism for producing a magnetic attraction force with which the rigidity of the guide mechanism can be increased, wherein a portion to be attracted by the magnetic attraction force is made of a material having a product of a residual magnetic flux density Br and a holding force Hc in a hysteresis curve, not greater than 100 J/m3, this being very effective to reduce the hysteresis force, which is resistance due to the residual magnetic force, as compared with the preloading attraction force, whereby high precision positioning of the stage is accomplished.

Abstract: A two-axis stage assembly includes a generally planar horizontally mounted base plate; a stage plate generally parallel to the base plate, the stage plate having a first axis and second orthogonal axis; a set of spaced bearings depending from a bottom surface of said stage plate, the bearings each having an arcuate bottom surface in rocking contact with a facing support surface of the base plate; a joint attached to the bottom surface of the stage plate and pivotably mounting each bearing, the joint being positioned at the center of curvature of the arcuate bottom surface of the associated bearing; and where an axial movement of the stage plate rocks the bearing arcuate bottom surfaces with respect to the facing support surface of the base plate.

Abstract: The device for displacing a platform includes two carriages driven, simultaneously or separately, on guiding rails oriented along an axis X. The two carriages carry a platform mounting slides engaged with slideways on the carriages. At least one of the slides of the platform carriage and at least one of the slideways of the carriage is oriented at an angle other than 90° relative to an axis X. The displacement along any direction of a plane comprised of the axes X and Z of a tool holder spindle or work piece spindle mounted on the platform can be obtained only by the relative or simultaneous moving of the two carriages on the guiding rails.

Abstract: A new parts handling apparatus is provided which can shorten the index time and increase working ability without increasing the number of components and can restrict the rise of manufacturing cost. X driving member 12 to be moved rightward and leftward in correlation to the rotation of a ball screw 2 by a servomotor 1 is provided with a pair of right and left movable members 7 mounted movably in the Z direction. Two contact hands 5 are attached to each movable member 7 through aligning mechanisms 8 respectively. Each movable member 7 is provided with a Z driving member 6 mounted slidably in the X direction. The Z driving member 6 is engaged with a ball screw 4, and the ball screw 4 is connected to a servomotor 3. When the ball screw 4 is rotated by the servomotor 3, the Z driving member 6 moves vertically in the figure, thereby also moving the movable member 7 vertically.