Jointed Arm Patents (Class 901/15)
  • Patent number: 6933695
    Abstract: The present invention generally relates to surgical devices, systems, and methods, especially for minimally invasive surgery, and more particularly provides structures and techniques for aligning a robotic surgery system with a desired surgical site. The present invention describes techniques for mounting, configuring and arranging set-up arms for the surgical manipulators and endoscope drive mechanisms of a telesurgical system within an operating theater. The various aspects of the invention improve and optimize space utilization in the conduct of a surgical procedure, especially in the telesurgical systems which provide for concurrent operation by two surgeons using multiple robotic arm assemblies. In one aspect, the invention includes a method and apparatus for ceiling-height mounting of surgical set-up arms, and in another aspect, the invention includes a method and apparatus for the mounting of surgical setup arms to the table pedestal or floor below an operating table.
    Type: Grant
    Filed: April 21, 2004
    Date of Patent: August 23, 2005
    Assignee: Intuitive Surgical
    Inventor: Stephen J. Blumenkranz
  • Patent number: 6923613
    Abstract: A manipulator is provided that includes a foot part and a number of members connected to the foot part and to each other respectively, and at least a gripper part, such that the members, the gripper and the foot part form an arm. One or more motors are provided in the foot part for moving at least a one of the members and the gripper.
    Type: Grant
    Filed: May 2, 2001
    Date of Patent: August 2, 2005
    Inventor: Henricus Johannes Adrianus Stuyt
  • Patent number: 6925358
    Abstract: A toy robot system includes a toy robot and a surface over which the robot can move. The surface is constructed from a number of modules of various types that may be joined together. Each module (except for spacer modules) includes at least one track segment along which the robot may move. Each module is square and each track segment extends from the center of the module to one side. A code readable by the robot is provided at the beginning of each segment so that the robot knows what type of module it is entering, and a code is provided at the center of each module so that the robot can calculate its position.
    Type: Grant
    Filed: February 26, 2003
    Date of Patent: August 2, 2005
    Inventor: Shun Pui Andrew Chiu
  • Patent number: 6917855
    Abstract: Embodiments provide a strategy for computing the motions of a mobile robot operating in an obstacle-laden environment without requiring prior knowledge of the distribution of obstacles in the environment or knowing the trajectory of a target tracked by the robot. Embodiments provide an algorithm that governs the motion of the observer robot based on measurements of the target's position and the location of obstacles in the environment. The algorithm computes a description of the geometric arrangement between the target and the observer's visibility region produced by the obstacles and computes a continuous control rule using this description. Embodiments employ an escape-path tree data structure to categorize the target's possible modes of escaping from the observer robot's sensors and use the escape-path tree to determine the target's shortest escape path.
    Type: Grant
    Filed: May 12, 2003
    Date of Patent: July 12, 2005
    Assignees: Honda Motor Co., Ltd., The Board of Trustees of the Leland Stanford Junior University
    Inventors: Hector Gonzalez-Banos, Cheng-Yu Lee, Jean-Claude Latombe
  • Patent number: 6898485
    Abstract: A robot to operate accurately while canceling an affect of pitch-axis, roll-axis, and yaw-axis moments, these moments being applied on the robot body during a leg-moving operation such as walking. First, by calculating a pitch-axis moment and/or a roll-axis moment generated on the robot body at a preset ZMP by set motions of upper limbs, a trunk, and lower limbs, motions of the lower limbs and the trunk for canceling the pitch-axis moment and/or the roll-axis moment are obtained. Then, by calculating a yaw-axis moment generated on the robot body lying at the preset ZMP by the calculated motions of the lower limbs and the trunk, a motion of the upper limbs for canceling the yaw-axis moment is obtained.
    Type: Grant
    Filed: November 16, 2001
    Date of Patent: May 24, 2005
    Assignees: Sony Corporation
    Inventors: Yoshihiro Kuroki, Tatsuzo Ishida, Jinichi Yamaguchi
  • Patent number: 6893204
    Abstract: A robot for carrying a substrate in which minimum turning radius is small when the arm is retracted although a plurality of forks are provided and installation area can be minimized. The robot comprises a fixed base, a first turnable arm linked with the fixed base, a second turnable arm linked with the first arm, and a turnable fork linked with the second arm, wherein the fork comprises a plurality of first and second independent forks. The first and second forks are fixed coaxially and vertically in two stages to the forward end part of the second arm such that they can turn independently and first and second fork drive motors are disposed in the second arm.
    Type: Grant
    Filed: September 17, 2001
    Date of Patent: May 17, 2005
    Assignee: Kabushiki Kaisha Yaskawa Denki
    Inventors: Takeo Suzuki, Masaru Ogasawara, Toshio Omata
  • Patent number: 6889119
    Abstract: A robotic device for moving at least one object between locations, including a servo motor system having a single servo axis for effecting motion in at least two directions of motion. The robotic device includes a link arm rotationally coupled to said servo motor system for lifting and placing said at least one object, a head assembly having gripper arms for gripping and releasing said at least one object at said locations. The head assembly includes a leveling mechanism for maintaining said at least one object in a desired orientation, and a split ring sensing mechanism, disposed between said gripper arms, for determining the presence of said at least one object.
    Type: Grant
    Filed: October 31, 2002
    Date of Patent: May 3, 2005
    Assignee: Thermo CRS, Ltd.
    Inventors: Michael Paul Riff, Thomas Ian Hatherley
  • Patent number: 6884019
    Abstract: A conveying arm of the invention includes a first pivotable shaft connected to a first arm which is also pivotably connected to a third arm having an intermediate pivotable portion. The third arm is also pivotably connected to a fifth arm which is also pivotably connected to a seventh arm which has a holding portion for an object to be conveyed. The conveying arm also includes a second pivotable shaft connected to a second arm which is also pivotably connected to a fourth arm having an intermediate pivotable portion. The fourth arm is also pivotably connected to a sixth arm which is also pivotably connected to the seventh arm. With respect to both the third and fourth arms, a line linking one-side end portion to an intermediate pivotable portion is substantially perpendicular to a line linking the other-side end portion to the intermediate pivotable portion.
    Type: Grant
    Filed: April 18, 2003
    Date of Patent: April 26, 2005
    Assignee: Tokyo Electron Limited
    Inventor: Hiroaki Saeki
  • Patent number: 6859682
    Abstract: Image data obtained by image-capturing by a pet robot is stored in a memory, and any of conditions whether the memory capacity is scarce, a captured image transfer instruction is made, or the battery capacity of the pet robot is scarce is satisfied, the pet robot is controlled to move to the charging apparatus. When the pet robot arrives at the charging apparatus, the image data is transferred to the charging apparatus. When the completion of transfer of the image data is detected, the image data already transferred is erased depending upon selection by the user.
    Type: Grant
    Filed: March 27, 2003
    Date of Patent: February 22, 2005
    Assignee: Fuji Photo Film Co., Ltd.
    Inventors: Yoji Naka, Hiroshi Endo, Yoshihiro Ito
  • Patent number: 6853881
    Abstract: A robot controller executes an operating program, calculates a position and posture of a robot, and sends the position and posture information to a personal computer (PC). At the PC side, on the basis of this position and posture information, animation display information of a work cell including the position and posture of the robot is created and then sent to a teaching pendant. In the teaching pendant, the animation display information is received, and an animation image is displayed on a display section. Until the operating program is terminated, this operation is performed so that an operating animation of the robot is displayed on the display section of the teaching pendant.
    Type: Grant
    Filed: April 2, 2002
    Date of Patent: February 8, 2005
    Assignee: Fanuc Ltd.
    Inventors: Atsushi Watanabe, Tetsuya Kosaka, Yoshiharu Nagatsuka
  • Patent number: 6840732
    Abstract: This invention provides a transport apparatus having a simple configuration that can reduce its turning radius and transport semiconductor devices at high speed. The transport apparatus comprising the first and second arms having at a first end of each thereof a rotary drive shaft being arranged coaxially, and third and fourth arms rotatably linked at respective the first ends thereof to the respective second ends of the first and second arms. The second ends of the third and fourth arms are supported around centers of coaxially arranged spindles, respectively. The transport apparatus further comprises an articulating mechanism having an attitude control mechanism adapted to apply rotary forces with opposite phases to the respective spindles arranged at the third and fourth arms.
    Type: Grant
    Filed: October 23, 2001
    Date of Patent: January 11, 2005
    Assignee: ULVAC, Inc.
    Inventors: Hirofumi Minami, Junpei Yuyama
  • Patent number: 6826977
    Abstract: A robot drive assembly for moving a working tool in x, y, z and theta directions comprising three independent, coaxially nested tubes, each tube being driven around a common central axis by drive belts attached to separate drive motors located in a mounting flange associated with the outermost tube. The motors, and the tubes which they drive, provide horizontal rotary motion to a robot arm attached to the upper end of the outer tube and the wrist and elbow of that arm. A fourth motor controls vertical motion of the whole assembly. The robot system also includes motor position adjustment structure and belt tension structure designed for ease of use and to eliminate movement of tensioned components once locked in position.
    Type: Grant
    Filed: March 3, 2003
    Date of Patent: December 7, 2004
    Assignee: Innovative Robotic Solutions
    Inventors: Gaylen Grover, Dennis Wightman, Tomas Melendez
  • Patent number: 6820318
    Abstract: A system for manufacturing interstitial radiation seed strand implants is provided. The system includes a seed dispenser, a member for handling an elongated half-shell member; and a controller in communication with the seed dispenser. The controller commands the seed dispenser to place the radioactive seed elements at desired locations in a first elongate half-shell member. The first half-shell member is mated with a second half-shell member to form a seed strand implant. The seed strand implant is axially stiff and longitudinally flexible, and constructed from bioabsorbable material.
    Type: Grant
    Filed: June 4, 2002
    Date of Patent: November 23, 2004
    Assignee: IdeaMatrix, Inc.
    Inventors: Richard A. Terwilliger, Gary A. Lamoureux
  • Patent number: 6795750
    Abstract: The present invention concerns an industrial robot (1) comprising an upper arm (2) that can be rotated around a first axis (A), a wrist (6) supported by the upper arm that can be rotated around a second axis (B), a hollow turning device (3, 30) supported by the wrist that can be rotated around a third axis (C) that at its front end comprises a turning disk (8, 33) for attachment of a tool, at least one supply line (K) that runs along the upper arm, that the turning device (3, 30) comprises a collar section (10, 36) with a conical envelope surface (12, 45) attached to the turning disk (8, 33), through which at least one opening (14,40) is arranged for the reception of supply lines (K) that pass through the turning device, whereby the opening has an axial extension along a normal (16) perpendicular to the envelope surface (12), where the supply lines are arranged to run through the opening in a direction that has a component parallel to the third axis (C), which opening is arranged to control in a transverse di
    Type: Grant
    Filed: September 9, 2002
    Date of Patent: September 21, 2004
    Assignee: ABB AB
    Inventor: Ove Kullborg
  • Patent number: 6788018
    Abstract: The present invention generally relates to surgical devices, systems, and methods, especially for minimally invasive surgery, and more particularly provides structures and techniques for aligning a robotic surgery system with a desired surgical site. The present invention describes techniques for mounting, configuring and arranging set-up arms for the surgical manipulators and endoscope drive mechanisms of a telesurgical system within an operating theater. The various aspects of the invention improve and optimize space utilization in the conduct of a surgical procedure, especially in the telesurgical systems which provide for concurrent operation by two surgeons using multiple robotic arm assemblies. In one aspect, the invention includes a method and apparatus for ceiling-height mounting of surgical set-up arms, and in another aspect, the invention includes a method and apparatus for the mounting of surgical setup arms to the table pedestal or floor below an operating table.
    Type: Grant
    Filed: December 20, 2001
    Date of Patent: September 7, 2004
    Assignee: Intuitive Surgical, Inc.
    Inventor: Stephen J. Blumenkranz
  • Patent number: 6786896
    Abstract: A robotic apparatus has eight actuators (M0-M7) and a linkage (LINK 0-LINK 5) that actuates an end effector. Three serial macro freedoms have large ranges of motion and inertias. Four serial micro freedoms have small ranges of motion and inertias. Translation of the end effector in any direction is actuated by at least one micro joint. The apparatus can be part of a master and slave combination, providing force feedback without any explicit force sensors. The slave is controlled with an Inverse Jacobian controller, and the master with a Jacobian Transpose controller. A slave having more degrees-of-freedom (DOFs) than the master can be controlled. A removable effector unit actuates its DOFs with cables. Beating heart surgery can be accomplished by commanding the slave to move with a beating heart, and cancelling out any such motion in the motions perceived by the master.
    Type: Grant
    Filed: July 17, 2000
    Date of Patent: September 7, 2004
    Assignee: Massachusetts Institute of Technology
    Inventors: Akhil Jiten Madhani, J. Kenneth Salisbury, Gunter D. Niemeyer
  • Patent number: 6764271
    Abstract: A substrate conveyer robot inserts and removes a substrate to and from a an arbitrarily positioned container. A base is rotatably driven by a first motor which defines a pivotal center. A first spindle is rotated by a second motor independent of rotation of the base, is positioned coaxially with the pivotal center, and one end of a first arm is attached to the first spindle. A second spindle on the other end of the first arm is rotated by a gear ratio 2:1, and one end of a second arm is attached to the second spindle. A third spindle is carried on the other end of the second arm and is rotated by a gear ratio 1:2. One end of a third arm is attached to the third spindle, and a hand for holding a substrate is attached on the other end of the third arm.
    Type: Grant
    Filed: November 13, 2001
    Date of Patent: July 20, 2004
    Assignee: Hirata Corporation
    Inventor: Itaru Momoki
  • Patent number: 6760645
    Abstract: A clicker-training technique developed for animal training is adapted for training robots, notably autonomous animal-like robots. In this robot-training method, a behaviour (for example, (DIG)) is broken down into smaller achievable responses ((SIT)-(HELLO)-(DIG)) that will eventually lead to the desired final behaviour. The robot is guided progressively to the correct behaviour through the use, normally the repeated use, of a secondary reinforcer. When the correct behaviour has been achieved, a primary reinforcer is applied so that the desired behaviour can be “captured”. This method can be used for training a robot to perform, on command, rare behaviours or a sequence of behaviours (typically actions). This method can also be used to ensure that a robot is focusing its attention upon a desired object.
    Type: Grant
    Filed: April 29, 2002
    Date of Patent: July 6, 2004
    Assignee: Sony France S.A.
    Inventors: Frédéric Kaplan, Pierre-Yves Oudeyer
  • Patent number: 6752584
    Abstract: Transfer devices for handling microelectronic workpieces, apparatus for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a lift assembly carried by the transport unit. The transfer device can also include an arm assembly having an arm actuator carried by the lift assembly to move along a lift path and an arm carried by the arm actuator to rotate about the lift path. The arm can include a first extension projecting from one side of the lift path and a second extension projecting from another side of the lift path. The arm actuator can rotate the arm about the lift path. The transfer device can also include a first end-effector and a second end-effector.
    Type: Grant
    Filed: June 5, 2001
    Date of Patent: June 22, 2004
    Assignee: Semitool, Inc.
    Inventors: Daniel J. Woodruff, Randy Harris
  • Patent number: 6748819
    Abstract: A robot is disclosed in which load torque imposed on motors is reduced and therefore small-sized motors can be used. In the robot, an arm member, a first link, a second link and a third link constitute a parallel linkage, and the first link and the third link are coaxially pivotally supported on a base. With a pivotal shaft for pivotally connecting the second link and the third link, one end of a fourth link having shorter link length than the link length of the third link is pivotally connected to the second and third links and one end of a fifth link having the same link length as that of the fourth link is pivotally connected to the other end of the fourth link. The other end of the fifth link is pivotally supported on the base with a pivotal shaft to which the rotary shaft of the motor is coupled, so that the fifth link can move according to the rotation of the motor.
    Type: Grant
    Filed: July 29, 2002
    Date of Patent: June 15, 2004
    Assignee: Kawasaki Jukogyo Kabushiki Kaisha
    Inventors: Yuji Maeguchi, Hiroyuki Takayama, Takahiro Inada
  • Patent number: 6738691
    Abstract: A method and system for controlling an intelligent assist device, robot, or other powered system that is partially or fully directed by the intent of a human operator. The method and system includes measuring a force or motion imparted by the human operator to a control. The measurement is determined with respect to the motion of the machine at a point of the machine that allows the benefit of collocation of sensing and actuation, or of approximation of such collocation. The system includes a support attached to the machine at the beneficial point, and a plurality of sensors to measure the force, torque, or motion imparted by the human operator to the support with respect to the beneficial point. The method and system provide improved stability of control of the system, and improved responsiveness to the intent of the human operator.
    Type: Grant
    Filed: May 16, 2002
    Date of Patent: May 18, 2004
    Assignee: The Stanley Works
    Inventors: J. Edward Colgate, Michael A. Peshkin, Julio Santos-Munné, Alex Makhlin, Paul F. Decker, Stephen H. Klostermeyer
  • Patent number: 6708081
    Abstract: The invention is directed to electronic equipment, such as a pet robot, with an autonomous emotion-based function. The electronic equipment executes environment detection processing, emotion-production processing for producing an emotion, and movement determination processing for determining a movement based on the emotion. The movement determination processing is arranged such that actions representing the emotion by the movement of given parts of the pet robot are performed prior to main actions based on the emotion. Therefore, a user can understand the emotion of the pet robot by intuition and thereby predict the subsequent movement naturally and effectively, providing the user feeling that the movement of the pet robot is reasonable.
    Type: Grant
    Filed: July 27, 2001
    Date of Patent: March 16, 2004
    Assignee: Yamaha Hatsudoki Kabushiki Kaisha
    Inventor: Makoto Yoshida
  • Patent number: 6705177
    Abstract: A robot arm mechanism includes a handling member for supporting and handling an object, a robot arm made up of a plurality of links, and a robot arm driving mechanism for driving the robot arm to assume its contracted and extended position. The robot arm comprises first and second arm links, a link retaining mechanism pivotably retaining the first and second arm links and a link operating mechanism to operate one of the first and second arm links by a motion of the other of the first and second arm links. The link operating mechanism comprises a crank, a coupling link and a connecting link. The crank integrally connected to the coupling link is pivotably connected to one of the first and second arms and to the link retaining mechanism. The connecting link is pivotably connected to the other of the first and second arms. This leads to the advantage that the robot arms can be contracted and extended and rotated by only two electric motors.
    Type: Grant
    Filed: April 4, 2002
    Date of Patent: March 16, 2004
    Assignee: Teijin Seiki Co., Ltd.
    Inventors: Chohei Okuno, Hiroki Mori, Tetsuya Watanabe
  • Patent number: 6699003
    Abstract: In most cases, a hot, corrosive atmosphere is created in, for example, a semiconductor wafer processing chamber. When an arm including belts, such as steel belts, is moved into such a semiconductor wafer processing chamber, the belts are exposed to the hot, corrosive atmosphere. Belts, such as steel belts, have limited heat resistance and corrosion resistance and the hot, corrosive atmosphere in the processing chamber shortens the life of the belts. A carrying device of the present invention has a frog leg type arm (3) and a wafer holder (4) connected to the frog leg type arm (3). The wafer holder (4) is pivotally connected to front end parts of a first front arm (8A) and a second front arm (8B) by coaxial joints (10). The wafer holder (4) is linked to the first front arm (8A) and the second front arm (8B) by a posture maintaining linkage (5) including two antiparallel linkages capable of controlling the turning of the wafer holder (4) relative to the first and the second front arms (8A, 8B).
    Type: Grant
    Filed: August 15, 2002
    Date of Patent: March 2, 2004
    Assignee: Tokyo Electron Limited
    Inventors: Hiroaki Saeki, Keisuke Kondoh
  • Patent number: 6697709
    Abstract: The stability of attitude of a robot can be recovered by an ambulation control apparatus and an ambulation control method if it is lost in the course of a gesture for which the upper limbs take a major role. The apparatus and the method obtain the pattern of movement of the entire body for walking by deriving the pattern of movement of the loins from an arbitrarily selected pattern of movement of the feet, the trajectory of the ZMP, the pattern of movement of the trunk and that of the upper limbs. Therefore, a robot can determine the gait of the lower limbs so as to realize a stable walk regardless if the robot is standing upright or walking. Particularly, if the robot is made to gesture, using the upper body half including the upper limbs and the trunk while standing upright, it can determine the gait of the lower limbs so as to make a stable walk in response to such a gait of the upper body half.
    Type: Grant
    Filed: July 15, 2002
    Date of Patent: February 24, 2004
    Assignees: Sony Corporation
    Inventors: Yoshihiro Kuroki, Tatsuzo Ishida, Jinichi Yamaguchi
  • Patent number: 6697708
    Abstract: A robot apparatus includes a command controller (101) for outputting an output command associated with an input command, management units (102), (103) and (104) for outputting data associated with the commands output by the command controller (101), a command transmitter (105) for controlling the transmission of the data output by the management units (102), (103) and (104) and controllers (106), (107) and (108) for controlling action units (109), (110) and (111), such as a motor, based on data output by the command transmitter (105). The command transmitter (105) sends the action control data for synchronization, output by the management units (102), (103) and (104), in synchroneity to the action units (109), (110) and (111).
    Type: Grant
    Filed: September 24, 2002
    Date of Patent: February 24, 2004
    Assignee: Sony Corporation
    Inventors: Tsuyoshi Takagi, Kohtaro Sabe, Takayuki Sakamoto, Kazufumi Oyama
  • Patent number: 6684731
    Abstract: A robot with at least partly externally located cables, particularly robot tool supply cables having a length reserve in the area of the A3 axis of the robot is characterized by a base part located on the robot and having elements for guiding the supply cables and with a leg pivotable against the latter on which is located at least one of the elements for supply cable guidance.
    Type: Grant
    Filed: May 12, 2000
    Date of Patent: February 3, 2004
    Assignee: Kuka Roboter GmbH
    Inventor: Stefan Karlinger
  • Patent number: 6685422
    Abstract: The present invention generally provides a robot that can transfer workpieces, such as silicon wafers, at increased speeds and accelerations and decelerations. More particularly, the present invention provides a robot wrist associated with the robot arm for mechanically clamping a workpiece to a workpiece handling member attached to the arm. The wafer clamp selectively applies sufficient force to hold the workpiece and prevent slippage and damage to the workpiece during rapid rotation and linear movement of the handling member. In a particular embodiment, a clamp for securing silicon wafers uses a flexure assembly to position and hold the wafer with minimal particle generation and wafer damage. The clamp is designed so that the wafers are normally clamped near full extension of the workpiece handling member to deliver or pick up a wafer.
    Type: Grant
    Filed: October 23, 2001
    Date of Patent: February 3, 2004
    Assignee: Applied Materials Inc.
    Inventors: Satish Sundar, Ned G. Matthews
  • Patent number: 6678582
    Abstract: A method of avoiding collisions between a robot and at least one other object such as another robot is provided in which the user does not need to make any provisions in a robot program for avoiding collisions and defining common work-areas. Furthermore, the method allows for automatic configuration of the workcell from a collision avoidance standpoint. It determines automatically which components have potential collisions with which other components. Since the inventive method is based on predicting the configurations of the moving components over a period of time sufficient enough to allow the machines to stop safely and checks for interference, a priori knowledge of trajectories is not required. If a collision is predicted the machines are commanded to a stop on or off their paths. In this way the inventive collision avoidance method can also be used as a safeguard with other explicit methods.
    Type: Grant
    Filed: May 30, 2002
    Date of Patent: January 13, 2004
    Assignee: Kuka Roboter GmbH
    Inventor: El-Houssaine Waled
  • Patent number: 6675068
    Abstract: A working robot is used in space for inspecting the state of a structure of a house module in space or for replacing M/D shields. A robot body is provided with four multifunctional arms (or two moving arms and two multifunctional arms), which are equipped with manipulation tools at their leading ends. The robot is moved by the manipulation tools of each of the multifunctional arms gripping a working socket or the head of a bolt of an M/D shield and by the arms extending/contracting themselves. The M/D shield is fixed and lifted by the multifunctional arms 10 by inserting the manipulation tool into a T-handle socket. The bolts are removed by the manipulation tool of the multifunctional arms.
    Type: Grant
    Filed: July 17, 2001
    Date of Patent: January 6, 2004
    Assignee: Mitsubishi Heavy Industries, Ltd.
    Inventor: Shuichi Kawasaki
  • Patent number: 6672820
    Abstract: A transport system for manipulating a semiconductor wafer in a processing tool is set forth. The system includes a transport unit guide disposed within the processing tool for supporting a wafer transfer unit as the unit moves between a first position and a second position. The transport unit guide comprises a frame, a lateral guide rail mounted on the frame, and a series of magnetic segments arranged upon the transport unit guide proximate the lateral guide rail. The wafer transfer unit includes a tram translatably attached to the lateral guide rail and a wafer transfer arm assembly for manipulating the semiconductor wafer. An electromagnet is mounted on the tram in cooperative relation with the magnetic segments for moving the transfer unit along the guide rail. Actuators are used for controlling the position of the transfer unit and transfer arm assembly, and sensors are used for determining the position of the transfer unit and the transfer arm assembly.
    Type: Grant
    Filed: December 15, 1997
    Date of Patent: January 6, 2004
    Assignee: Semitool, Inc.
    Inventors: Kyle Hanson, Mark Dix, Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle
  • Patent number: 6675069
    Abstract: An arm operation mechanism for an industrial robot includes a support, a first arm, a second arm, a link base, a parallel link and a conversion mechanism. The first arm has a base end pivotally connected to the support for rotation relative to the support. The second arm has a base end pivotally connected to a tip end of the first arm for rotation relative to the first arm. The link base is pivotally connected to the first arm for rotation relative to the first arm. The parallel link keeps a constant posture of the link base upon the rotation of the first arm. The conversion mechanism converts the rotation of the link base relative to the first arm into the rotation of the second arm relative to the link base.
    Type: Grant
    Filed: April 23, 2002
    Date of Patent: January 6, 2004
    Assignee: Daihen Corporation
    Inventor: Takafumi Uratani
  • Patent number: 6655901
    Abstract: A transfer robot includes a machine base, at least one hand for holding a workpiece, a hand moving mechanism for moving the hand horizontally reciprocally at least in an X direction, a first arm pivotally connected to the machine base for rotation about an axis extending in the X direction. The robot further includes an intermediate arm pivotally connected to the first arm for rotation about another axis extending in the X direction, a second arm pivotally connected to the intermediate arm for rotation about a further axis extending in the X direction. The second arm is also connected to the hand moving mechanism which is rotatable about a still another axis extending in the X direction. A driving mechanism is provided for rotating the first arm, the second arm, the intermediate arm and the hand moving mechanism about the respective axes.
    Type: Grant
    Filed: November 5, 2001
    Date of Patent: December 2, 2003
    Assignee: Daihen Corporation
    Inventors: Ryusuke Tsubota, Kohta Hoshijima
  • Patent number: 6641667
    Abstract: A robot arm with a coating gun mounted on a distal end thereof houses therein a first color changing valve mechanism for supplying a base compound, an electropneumatic transducer, and a second color changing valve mechanism for supplying a hardener, which are successively arranged in the order named toward the coating gun. The base compound and the hardener supplied from these mechanisms controlled by the electropneumatic transducer can be mixed highly accurately at a desired mixing ratio, and applied to coat a workpiece with a high-quality coating layer.
    Type: Grant
    Filed: August 22, 2001
    Date of Patent: November 4, 2003
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Hiroshi Ochiai, Hiroyoshi Nozaki, Hidenori Taguchi, Shinobu Tokin
  • Patent number: 6634851
    Abstract: A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab. The robot includes a base comprising a rigid backbone for providing a significant degree of structural stability to the robot. The base further includes a mast, a linear drive system for translating the mast, and a shoulder drive system for rotating the mast. The shoulder drive system includes a harmonic drive reduction system for providing a stiff, smooth and precise output rotation of the mast section. The robot further includes a proximal link fixedly mounted to the mast for rotation with the mast, and a distal link rotatably mounted to the proximal link. An end effector for supporting various workpieces is rotationally mounted to the distal end of the distal link.
    Type: Grant
    Filed: January 14, 2000
    Date of Patent: October 21, 2003
    Assignee: Asyst Technologies, Inc.
    Inventors: Anthony C. Bonora, Roger G. Hine, Michael Krolak, John F. Grilli
  • Patent number: 6601468
    Abstract: A robot drive assembly for moving a working tool in x, y, z and theta directions comprising three independent, coaxially nested tubes, each tube being driven around a common central axis by drive belts attached to separate drive motors located in a mounting flange associated with the outermost tube. The motors, and the tubes which they drive, provide horizontal rotary motion to a robot arm attached to the upper end of the outer tube and the wrist and elbow of that arm. A fourth motor controls vertical motion of the whole assembly. The robot system also includes motor position adjustment structure and belt tension structure designed for ease of use and to eliminate movement of tensioned components once locked in position.
    Type: Grant
    Filed: October 19, 2001
    Date of Patent: August 5, 2003
    Assignee: Innovative Robotic Solutions
    Inventors: Gaylen Grover, Dennis Wightman, Tomas Melendez
  • Patent number: 6597971
    Abstract: An interference avoiding device for determining occurrence of an interference in a robot operation in advance and automatically avoiding the interference, to be suitably applied to an automatic picking-up operation of randomly stored workpieces. A position/orientation of a workpiece and a position/orientation of a tool for getting hold of the workpiece in a teaching operation, and shapes/dimensions of the tool and the storage box are determined and stored in a storage device. A command position/orientation Ta of the tool for getting hold of an objective workpiece is determined based on a detected position/orientation Wa of the workpiece and it is determined whether or not an interference between the tool an the storage box will occur based on the position/orientation Ta and the stored information.
    Type: Grant
    Filed: May 9, 2002
    Date of Patent: July 22, 2003
    Assignee: Fanuc Ltd.
    Inventor: Ichiro Kanno
  • Publication number: 20030121351
    Abstract: A manipulator (10) for receiving and displacing an object, comprising a moving portion (11), adapted for receiving the object. Three articulated support legs (A, B, C) each extend between the moving portion (11) and a ground (12) for supporting the moving portion (11). The articulated support legs (A, B, C) are connected to the ground (12) by a first joint member (JA1, JB1, JC1) and to the moving portion (11) by a second joint member (JA3, JB3, JC3). The first joint member (JA1, JB1, JC1) and the second joint member (JA3, JB3, JC3) in the articulated support legs (A, B, C) are interconnected by a third joint member (JA2, JB2, JC2).
    Type: Application
    Filed: July 8, 2002
    Publication date: July 3, 2003
    Inventors: Clement Gosselin, Xianwen Kong
  • Patent number: 6575691
    Abstract: A conveying arm of the invention includes a first pivotable shaft connected to a first arm which is also pivotably connected to a third arm having an intermediate pivotable portion. The third arm is also pivotably connected to a fifth arm which is also pivotably connected to a seventh arm which has a holding portion for an object to be conveyed. The conveying arm also includes a second pivotable shaft connected to a second arm which is also pivotably connected to a fourth arm having an intermediate pivotable portion. The fourth arm is also pivotably connected to a sixth arm which is also pivotably connected to the seventh arm. With respect to both the third and fourth arms, a line linking one-side end portion to an intermediate pivotable portion is substantially perpendicular to a line linking the other-side end portion to the intermediate pivotable portion.
    Type: Grant
    Filed: January 19, 2001
    Date of Patent: June 10, 2003
    Assignee: Tokyo Electron Limited
    Inventor: Hiroaki Saeki
  • Patent number: 6571657
    Abstract: The present invention provides an apparatus and associated method in which the apparatus comprises a multiple blade robot and a compensating device. The multiple blade robot includes at least one set of robot blades. The compensating device adjusts for differences in spacing between the set of robot blades and spacing between two or more cells. In different embodiments, the compensating device may be coupled to one or more of the process cells, one or more of the substrate holder systems, or one or more of the robot blades.
    Type: Grant
    Filed: September 18, 2000
    Date of Patent: June 3, 2003
    Assignee: Applied Materials Inc.
    Inventors: Donald J. Olgado, Avi Tepman, Timothy J. Franklin
  • Patent number: 6558107
    Abstract: A robot arm mechanism includes a handling member for supporting and handling an object, a robot arm made up of at least four arm links, and a robot arm driving mechanism for driving the robot arm to assume its contracted and extended position. The robot arm comprises first and second arm links and a link retaining mechanism pivotably retaining the first and second arm links. The link retaining mechanism comprises first and second joint cross linkages similar in shape and each having two arms crossed to each other. The first joint cross linkage is integrally connected with one of the first and second arm links of the robot arm. The second joint cross linkage is integrally connected with the other one of the first and second arm links of the robot arm.
    Type: Grant
    Filed: November 1, 1999
    Date of Patent: May 6, 2003
    Assignee: Teijin Seiki Co., Ltd.
    Inventor: Chohei Okuno
  • Patent number: 6547510
    Abstract: A substrate transport apparatus having a drive section and a movable arm assembly connected to the drive section. The drive section has a coaxial drive shaft assembly with independently rotatable drive shafts. The movable arm assembly has two scara arms. Each scara arm has an inner arm connected to a separate respective one of the drive shafts. An outer arm of each scara arm is connected to a rotationally stationary pulley on the drive section by respective transmission belts.
    Type: Grant
    Filed: May 4, 1998
    Date of Patent: April 15, 2003
    Assignee: Brooks Automation Inc.
    Inventor: David R. Beaulieu
  • Patent number: 6540471
    Abstract: A device for relative movement of two elements (1, 2) comprises two link arrangement (5, 6) coupled in series by means of a connection arrangement (4). A first link arrangement (5) comprises at least three links (9, 14), which have substantially equal length and which are substantially parallel, said links (9, 14) being oriented in a substantially triangular relation, viewed along the longitudinal direction of the links, between the connection arrangement (4) and the element (2). The second link arrangement (6) comprises at least one parallelogram acting between the connection arrangement (4) and the element (1). First the second force-applying arrangements (17, 18) are adapted to cause the first link arrangement (5) to pivot. A third force-applying arrangement (33) is adapted to cause the second link arrangement (6) to pivot.
    Type: Grant
    Filed: September 2, 1999
    Date of Patent: April 1, 2003
    Assignee: ABB AB
    Inventor: Torgny BrogÄrdh
  • Patent number: 6540458
    Abstract: The invention relates to a machine-tool, especially a milling center, comprising a housing (2), a holder (54) for tools and/or workpieces, a coupling guide departing from the housing (2) to guide the holder (54) and a drive device departing from the housing (2) to move and fix the holder (54) guided by the coupling guide. The invention is characterized in that the coupling guide has first means for guiding the holder (54) on a first plane where it brushes over the surface and second means for pivoting the holder 54) on a second plane where it cuts the first plane, wherein the drive device has third means for moving and fixing the holder (54) guided by the coupling guide in an area.
    Type: Grant
    Filed: March 7, 2001
    Date of Patent: April 1, 2003
    Assignee: Heckert Werkzeugmaschinen GmbH
    Inventor: Achim Ponisch
  • Patent number: 6539283
    Abstract: A robot device 1 has a sensor 101 for detecting information of a user, a user identification section 120 for identifying one user from a plurality of identifiable users on the basis of the information of the user detected by the sensor 101, and an action schedule section 130, an action instruction execution section 103 and an output section 104 as action control means for manifesting an action corresponding to the one user identified by the user identification section 120.
    Type: Grant
    Filed: March 29, 2001
    Date of Patent: March 25, 2003
    Assignee: Sony Corporation
    Inventor: Tsuyoshi Takagi
  • Patent number: 6533530
    Abstract: A wafer transferring robot capable of restraining the vibration of wafers during the transfer. The robot comprises a rotating base (2) rotatable on a base (1), two horizontally extensible robot arms (3A, 3B) arranged laterally symmetrically to each other on the rotating base (2) and comprising first arms (32A, 32B), second arms (33A, 33B), and third arms (34A, 34B), respectively, and chucks (4A, 4B), fixed to the third arms (34A, 34B), respectively; wherein the lower surface of the second arm (33B) of one robot arm (3B) is higher than the upper surface of the wafer (WA) held over the third arm (34A) of the other robot arm (3A) via the chuck. Accordingly, the rigidity of transferring parts can be so enhanced that the vibration of wafers (WA, WB) can be prevented.
    Type: Grant
    Filed: June 26, 2000
    Date of Patent: March 18, 2003
    Assignee: Kabushiki Kaisha Yasakawa Denki
    Inventor: Hideharu Zenpo
  • Patent number: 6532403
    Abstract: A robot alignment system (10) includes a sensor system (12). The sensor system (12) is designed to attach to an end effector of a robot arm (14). A rough alignment target (16) is attached to a work station. A fine alignment target (22) is placed on a work surface of the work station. The sensor system (12) first determines the rough alignment target (16). The robot arm (14) is then moved to detect the fine alignment target (22).
    Type: Grant
    Filed: April 18, 2001
    Date of Patent: March 11, 2003
    Assignee: MicroTool, Inc
    Inventors: Gordon Haggott Beckhart, Patrick Rooney Conarro, Kevin James Harrell, Michael Charles Krause, Kamran Michael Farivar-Sadri
  • Patent number: 6522951
    Abstract: A method and a device for controlling a robot on the basis of data from sensors with their own sensor data structures. For solving the problem of adapting to different sensors and their data structures and consequently permitting in simple manner the use of different sensors without intervening in the actual robot control program, according to the system the sensor data are processed to robot control data with a control data structure usable by a system control program and a processing device suitable for the same is provided.
    Type: Grant
    Filed: December 8, 2000
    Date of Patent: February 18, 2003
    Assignee: Kuka Roboter GmbH
    Inventors: Hans Born, Johannes Stelter, Bernhard-Michael Steinmetz, Jens Bunsendahl, Ralf Koeppe
  • Patent number: 6519506
    Abstract: With a robot and a control method for it, information is read in from the outside, based on which a particular object is detected, and it is judged upon detecting the object whether or not the object satisfies given conditions, based on the judgment results of which a robot generates predetermined actions. Thus, a robot can be realized that acts naturally like a living thing. Consequently, its entertaining quality for human beings can be increased greatly.
    Type: Grant
    Filed: December 19, 2001
    Date of Patent: February 11, 2003
    Assignee: Sony Corporation
    Inventor: Hiroshi Osawa
  • Patent number: 6514032
    Abstract: A substrate transfer system employs a robot hand which is composed such that a sum length of a first arm and a third arm equal a length of a second arm, and a length of the first arm becomes longer than a length of the third arm. A ratio between arm lengths is determined such that a distal end portion of the first arm, a distal end portion of the second arm, a distal end portion of the third arm, and a distal end portion of the workpiece held by the end effector are inscribed in a track circle around a rotational axis of the first arm as a center. The ratio of the first, second and third arm lengths is approximately 1:({square root over ( )}5+1)/2:({square root over ( )}5−1)/2. This optimized ratio of the arm lengths allows the arm rotational radius to be smaller than the conventional value, and makes it possible to achieve a longer transfer distance in an equal installation area.
    Type: Grant
    Filed: October 12, 2000
    Date of Patent: February 4, 2003
    Assignee: Tazmo Co., Ltd.
    Inventors: Kousaku Saino, Takahiro Kobiki