Abstract: With a robot and a control method for it, information is read in from the outside, based on which a particular object is detected, and it is judged upon detecting the object whether or not the object satisfies given conditions, based on the judgment results of which a robot generates predetermined actions. Thus, a robot can be realized that acts naturally like a living thing. Consequently, its entertaining quality for human beings can be increased greatly.

Abstract: A transfer system used in transferring a semiconductor from one process to another process during manufacture, and comprising first and second upper arms and first and second forearms assembled to form a frog-legs like structure, with the first and second forearms being linked to a forearm link, and a transfer hand attached to the forearm link; wherein the transfer hand is moved by associating the first upper arm motion with the first and second forearm motions, and by associating the second upper arm motion with the first and second forearm motions.

Abstract: A robot apparatus that is able to perform jumping. In a leg structure 110 of the robot apparatus, connecting bars 113, 114 and pivots 112a to 112d constitute a four-point link mechanism. A rod 117 is inserted into an opening formed in the distal end of a leg part 116. A coil spring 118 as an elastic member is provided between one end of the rod 117 and the distal end of the leg part 116. A bar member 120 is connected and secured to a preset point of a connecting member 115 as a knee joint. The coil spring 118 is extended/contracted by the stretching/contraction of the connecting member 115. By the operation of the four-point link mechanism, the trajectory of the distal end of the leg part is linear. The coil spring 118 is mounted at a position such that the distance between a driving shaft 101 and the distal end of the bar member 120 has a substantially linear relationship with respect to the force virtually operating between a driving shaft 101 and the distal end of the bar member 120.

Abstract: An article transfer apparatus suitable for an operation requiring a large vertical working distance. The apparatus includes a first link driven by a motor, at least one second link coupled to the first link, and a mounting member coupled to the last one of the second link and loaded with an article to transfer. The individual links are pivotally moved using a combination of a supporting shaft, a rotating shaft and a swiveling shaft which are provided on the previous link, and the mounting member is moved upward by the shafts provided on the last link. Bevel gears are provided on the ends of the supporting shaft and the swiveling shaft and on both ends of the rotating shaft, and engaged with one another. The gear ratio between the bevel gear of the rotating shaft and that of the swiveling shaft is 2:1 on the first link and 1:2 on the last link. The other bevel gears are engaged with each other at a gear ratio of 1:1.

Abstract: A first base-side pulley is disposed at the base portion of a first arm portion; a first distal-side pulley is disposed at the distal portion of the first arm portion; a second base-side pulley is disposed at the base portion of a second arm portion; a second distal-side pulley is disposed at the distal portion of the second arm portion; the first base-side pulley is fixed to the support base; the chuck is fixed to the second distal-side pulley; the first distal-side pulley and the second base-side pulley are connected to each other via a connection shaft; the first base-side pulley and the first distal-side pulley are connected to each other via a first rotation transmission section; and the second base side pulley and the second distal-side pulley are connected to each other via a second rotation transmission section. Thus, an articulated robot arm having first and second arm portions is constructed.

Abstract: A substrate transport apparatus comprising a drive section and an articulated arm assembly. The articulated arm assembly is pivotably mounted to the drive section. The arm assembly has a first end connected to the drive section and a second end opposite the first end. An end effector is supported from the second end of the arm assembly. The articulated arm comprises a pair of opposing forearms on opposite sides of an axis of translation of the end effector. The axis of translation extends substantially over a center of the first end of the drive assembly. When the arm assembly is retracted to a home position the second end of the arm assembly is over the center of the first end of the arm assembly. Also, when the arm assembly is retracted to its home position, the opposing forearms are angled relative to the axis of translation at an angle of about 90°.

Abstract: In most cases, a hot, corrosive atmosphere is created in, for example, a semiconductor wafer processing chamber. When an arm including belts, such as steel belts, is moved into such a semiconductor wafer processing chamber, the belts are exposed to the hot, corrosive atmosphere. Belts, such as steel belts, have limited heat resistance and corrosion resistance and the hot, corrosive atmosphere in the processing chamber shortens the life of the belts. A carrying device of the present invention has a frog leg type arm (3) and a wafer holder (4) connected to the frog leg type arm (3). The wafer holder (4) is pivotally connected to front end parts of a first front arm (8A) and a second front arm (8B) by coaxial joints (10). The wafer holder (4) is linked to the first front arm (8A) and the second front arm (8B) by a posture maintaining linkage (5) including two antiparallel linkages capable of controlling the turning of the wafer holder (4) relative to the first and the second front arms (8A, 8B).

Abstract: A robotic loader for machinery includes an elongate column configured for being fixedly secured to a support structure or surface. A first motor is attached to the end of the column. The first motor drives a first gearbox. A first arm is fixedly secured to the first gearbox and extends perpendicularly relative to the column. The first arm is rotated in a horizontal plane when the first motor drives the first gearbox. A second motor is attached to the end of the first arm. The second motor drives a second gearbox. A stub arm is attached to the second gear box. The stub arm is parallel with the first arm. The stub arm is rotated in a horizontal second plane when the second motor drives the second gearbox. A third motor is attached to the stub arm and drives a third gearbox. A link arm is attached to the third gearbox and extends therefrom in a parallel manner relative to the first arm. The link arm is rotated in a vertical plane when the third motor drives the third gearbox.

Abstract: A multiblock robot system with to each other compatible-and plug connectable, stationary and mobile earth, sea, aviation, planetary and space flight capable multiblock robot system standard cells, multiblock robot flange plug booster units and multiblock robots. Reconstructable with minimal expenditure of development and construction and by optional combinations between each other and with the total spectrum of all multiblock robot standard parts, objective-directed used for stationary and mobile multiblock robot individual systems and total complexes for mainland, sea, aviation, planetary and space flight fields, always exchangeable to each other, removeable, disintegrateable and re-plug connectable to the most different multiblock robot system solutions.

Abstract: A system for manipulating a workpiece in an industrial robot system having a manipulator device for manipulating the workpiece, a tooling adapter coupled to the manipulator device for manipulating the workpiece, and an image referencing system for acquiring image data corresponding to the workpiece without interference from the manipulator device.

Abstract: A power assist apparatus includes an autonomously mobile base on which a manipulator for holding a load is mounted. The movement of the mobile base is controlled such that when the manipulator tip is within a prescribed operating region relative to the mobile base, the mobile base is maintained stationary, but when the manipulator tip moves outside the operating region, the mobile base is moved to decrease the distance between the mobile base and the manipulator tip. The power assist apparatus assists with the carrying of loads by amplifying an operational force applied to the manipulator.

Abstract: A method and apparatus for control of pivoting machine members propelled by linear actuators so as to permit coordinated motion of the pivoting members with translating machine members. Position commands for the pivoting machine members are given in angular units. The propelling linear actuators are controlled by servomechanism control providing position and velocity control. Position measurements for the pivoting members measure linear displacement of the propelling actuator. Position commands for the pivoting members are compensated according to the non-linear relationship between displacement of the propelling actuator and the angular displacement of the pivoting member.

Abstract: A device for relative movement of two elements (1, 2) comprises three link arrangements (A, B, C) and drives (3, 4, 5) for these arrangements. The link arrangements have forearm and upper arm components hinged to the upper arm components and to the second element respectively.

Abstract: The present invention comprises a material handling device and method for transferring material from one location to another. More specifically, the present invention relates to a device for placing material onto a pallet and/or removing material from a pallet. The device has a pedestal with a working arm pivotally connected to the pedestal. The working arm is driven by a horizontal motion actuator. Connected to the working arm and horizontal motion actuator is a cam follower that is received in a cam track on a cam track plate. The cam track plate can be easily removed and replaced with another plate with the cam tracks in a different arrangement. The horizontal motion actuator moves the cam follower along the cam track, resulting in movement of the working arm along a pre-selected path. At the end of the working arm is a material holder used for grasping and releasing the material to be transferred.

Abstract: A haptic pointing device includes a plurality of rigid, elongated proximal members, each connected to a separate rigid, elongated distal member through an articulating joint. The other end of each proximal member is coupled to an actuator such as a motor, causing that member to swing within a separate plane perpendicular to the shaft of the motor in response to a control signal. An end-effector is interconnected to the second end of each distal member through an articulating joint, such that as the actuators move the proximal members, the end-effector moves in space. In a preferred embodiment, the device includes at least three proximal members and three distal members, and the end-effector is coupled to a user-graspable element such as a stylus which retains a preferred orientation in space as the members are driven by the actuators.

Abstract: A pair of five-bar mechanisms having their pivotal axes parallel are each mounted at one end to a base and are interconnected at their other ends by a crankshaft to obtain a manipulator generating three degrees of freedom planar motion of an end-effector. Redundant actuation may be used to generate an unlimited rotation range and an extensible link in the crankshaft may be used to provide adjustable torque capabilities during operation.

Abstract: An object oriented motion system for controlling the movement of a robotic manipulator is presented. The motion system includes a trajectory generator object for producing a stream of machine joint commands. A kinematics object is operable to provide a set of robotic arm specific functions for the trajectory generator object. A servo object provides an interface to the servo system. The stream of machine motor commands are converted by the servo object to a stream of signals that drive the servo system, thereby controlling the trajectory of the robot arm.

Abstract: A system and an associated method for positioning a substrate includes transferring a substrate along a path intersecting a plane of a sensor beam; determining a center point and an orientation indicator of the substrate utilizing signals from the sensor beam; and positioning a substrate according to the center point and the orientation indicator of the substrate.

Abstract: The present invention generally provides a robot that can transfer workpieces, such as silicon wafers, at increased speeds and accelerations and decelerations. More particularly, the present invention provides a robot wrist associated with the robot arm for mechanically clamping a workpiece to a workpiece handling member attached to the arm. The workpiece clamp selectively applies sufficient force to hold the workpiece and prevent slippage and damage to the workpiece during rapid rotation and linear movement of the handling member. In one embodiment, a clamp for securing silicon wafers uses two clamp fingers connected to a single flexure member to position and hold the wafer with minimal particle generation and wafer damage. The clamp is designed so that wafers are normally clamped except near full extension of the workpiece handling member to deliver or pick up a wafer.

Abstract: An improved conveyor system for transporting a microelectronic workpiece within a processing tool is set forth. The conveyor system includes a transport unit slidably guided on a conveyor rail for transporting and manipulating the workpieces. The transport unit includes a vertical member which is connected to a base end of a two section robot arm. The robot arm includes an end effector at a distal end thereof which is actuated to grip a surrounding edge of a workpiece. A first rotary actuator is arranged to rotate the vertical member about its axis to rotate the entire robot arm. A second rotary actuator is positioned to rotate the second section of the robot arm, via a belt, with respect to the first section of the robot arm. A third rotary actuator is arranged to rotate the end effector about its horizontal axis. The third rotary actuator permits the end effector to flip the microelectronic workpiece between a face up and a face down orientation.

Abstract: An articulated robot comprises a movable first transferring portion and a second transferring portion movably supported in relation to the movable first transferring portion by a joint portion. A workpiece is positioned at a position, where a workpiece positional deviation detecting means is located, by a hand portion formed at an end of the second transferring portion. The workpiece positional deviation detecting means detects the amount of deviation in the position of the workpiece. A positioning portion of the workpiece and a sensor portion for detecting deviations of the workpiece are formed either at the first transferring portion of the second transferring portion which form the articulated robot. A detecting operation by the sensor portion and transferring of the first and second transferring portions are enabled when the workpiece is positioned at the positioning portion of the articulated robot.

Abstract: A substrate processing apparatus having a supply of substrates, a substrate transport module, and a substrate processing module. The transport module has a movable arm assembly and two substrate holders mounted to the movable arm assembly. The substrate holders each have two separate holding areas for simultaneously holding two substrates. The movable arm assembly has two pairs of driven arms. Each pair of driven arms is connected to a separate one of the holders for extending and retracting the holders along a radial path relative to a center of the movable arm assembly.

Abstract: A substrate handling system comprises a robot containing mico-environment in communication with a plurality of processing stations. The robot has a robot arm comprising an end effector linkage mounted to an extensible linkage. Each of the linkages is independently actuatable using an associated motor, with the extensible linkage serving to convey the end effector linkage to the vicinity of a target processing station for delivery or retrieval of a substrate. Motion of the linkages may be synchronized to reduce travel time, and multiple end effectors may be mounted to the extensible linkage for increasing throughput.

Abstract: The present invention generally provides a robot that can transfer workpieces, such as silicon wafers, at increased speeds and accelerations and decelerations. More particularly, the present invention provides a robot wrist associated with the robot arm for mechanically clamping a workpiece to a workpiece handling member attached to the arm. The wafer clamp selectively applies sufficient force to hold the workpiece and prevent slippage and damage to the workpiece during rapid rotation and linear movement of the handling member. In a particular embodiment, a clamp for securing silicon wafers uses a flexure assembly to position and hold the wafer with minimal particle generation and wafer damage. The clamp is designed so that the wafers are normally clamped near full extension of the workpiece handling member to deliver or pick up a wafer.

Abstract: A DSP of a servo control circuit obtains a movement value of a servomotor for each axis for each position-speed feedback processing cycle in accordance with a move command value for each axis delivered from a main processor with every distribution cycle, and also obtains a position correction value in accordance with pressure information detected by a sensor. The DSP of the servo control circuit carries out position-speed feedback processing with the use of a move command value which is obtained by correcting the movement value with the obtained position correction value, and drives the servomotor.

Abstract: A wafer handling robot system (10) operates in a wafer chamber (40) and comprises two independent robot blades, an upper blade (18) surmounting a lower blade (26). A pair of wafers (28, 32) are supported and positioned at the outer ends (78) of the upper and lower blades (18, 26). The upper robot blade (18) keeps an upper wafer (28) at a level just above the level at which the lower robot blade (26) keeps a lower wafer (32). Because the wafers are virtually at the same level, the same wafer lift mechanism can be used in the wafer chamber to lift and remove or replace the wafers on the two blades. By offsetting the height of the wafers by minimal amounts, the throughput of the system can be increased by up to a factor of two over a single robot blade system, particularly if the robot is the limiting factor on throughput. This throughput enhancement represents a substantial gain with a relatively simple and inexpensive addition to the equipment.

Abstract: In the invention, the structure of an articulated robot is a hollow structure, and the entire body of the arms and closing cover is formed as an enclosed structure. Therefore, an air flow communication passage is maintained, so that dust formed in the robot can be discharged outside of the clean room. Moreover, by forming two or more openings, the pressure level in the robot can be controlled, and without causing adverse effects on the speed reducer or bearing in the slide parts of the articulated robot, it is possible to prevent dust particles of the slide parts generated during operation of the arm, or volatile vapor of lubricant, from flowing out of the robot body.

Abstract: Techniques and structures are provided for aligning robotic elements with an internal surgical site and each other. Manually positionable linkages support surgical instruments. These linkages maintain a fixed configuration until a brake system is released. While the brake is held in a released mode, the linkage allows the operating room personnel to manually move the linkage into alignment with the surgical site. Joints of the linkage translate the surgical instrument in three dimensions, and orient the surgical instrument about three axes of rotation. Sensors coupled to the joints allow a processor to perform coordinate transformations that can align displayed movements of robotically actuated surgical end effectors with a surgeon's hand inputs at a control station.

Abstract: A compliant controller implements a biological model of a primate muscle so as to provide simultaneous position and force control with nonlinear damping for an actuator. The compliant controller uses one or more position sensors but does not require the use of a force sensor to provide force control. The compliant controller implements a force determining algorithm that is a function of an initial actuator position, a subsequently sensed actuator position, a desired actuator position and a position calculated from a nonlinear damping function. The algorithm updates or resets the initial actuator position or the calculated position depending upon the amount of actuator movement sensed. The compliant controller in accordance with the force determining algorithm and resetting of the various position values allows a desired position to be quickly attained while allowing the controller to compliantly respond to the presence or removal of an unknown or unexpected disturbing force.

Abstract: A process for guiding an instrument in space, in which the instrument is arranged at the free end of an articulated arm whose arm sections are caused to pivot and/or travel with respect to each other by drive units. The instrument is caused to travel in a limited movement region under the control of a control device. For predetermination of the movement region for points that are situated in the movement region, a respective pivot angle and/or travel position between the respective arm sections is set. The respective position and attitude of the instrument is sensed by at least a first measuring device. For hand-controlled guiding of the instrument, an actuating force exerted on the instrument and/or the articulated arm is sensed by a second measuring device.

Abstract: A substrate transport apparatus having a movable arm assembly, two substrate holders and a coaxial drive shaft assembly. In a first embodiment, the movable arm assembly has a general X-shaped section that has its center connected to the coaxial drive shaft assembly. The substrate holders are connected to different pairs of arm sections of the X-shaped section. The coaxial drive shaft assembly moves the arms of the X-shaped section relative to each other to move the two substrate holders in reverse unison motion between extended and retracted positions. A second embodiment the movable arm assembly has two generally wide V-shaped arms at a common axis of rotation. Each arm has two arm sections that are angled relative to each other at the common axis of rotation.

Abstract: A robot may be taught to perform a task by recording information regarding the positions and attitudes of the joints of the robot body as it performs the task. When this information is subsequently replayed, the robot performs the task in the manner as taught. In particular, the robot may be taught either by an operator situated near the robot body or by an operator situated at a remote location. At the remote location, the robot may be taught by an operator even though the operator cannot see the robot body. More particularly, at the remote location, information regarding the current position and attitude of the joints of the robot body is displayed to the operator, and the operator may adjust this information in order to control the movement of the robot body. As a safety measure, when an operator is located near the robot body, only an operator situated near the robot body can control the robot body.

Abstract: An element including a first processing circuit conducting a real time processes for controlling a robot body and a man-machine interface element including a second processing circuit for operating the robot body are connected through the common storage device. It enables for application programs that can run with a general OS to easily refer to data relating to the robot. It also enables to easily construct necessary software.

Abstract: The present invention relates to a robot path planning method for determining the path of a robot, taking into consideration the bending effect of the robot path when heavy tools are load onto the robot. Specifically, straight line P'-Q' to be actually drawn by the distal end of the robot tool is calculated by using the positions P and Q of the distal end of the tool at the start point and at the end point of the straight line recognized by the robot controller. And, the interpolation points H1', H2', H3', . . . are set on this line P'-Q'. Then, the bending amount .DELTA..theta.pj and .DELTA..theta.qj at the start point P' and at the end point Q' of this line P'-Q' are respectively determined. And, the bending amount at each interpolation point H1', H2', . . . are calculated from these bending amounts .DELTA..theta.pj and .DELTA..theta.qj, and the position on the line P'-Q' of each interpolation point. Then, the values obtained by subtracting from each interpolation point H1', H2', . . .

Abstract: The present invention provides a robot and a method of using the robot for transferring objects, namely substrates, through a process system. The robot provides a pair of movable arms mounted to a drive member adapted to move the arms in a rotational path to produce coordinated movements of extension, retraction, and rotation. A pair of upper struts pivotally mounted to the arms at one end pivotally connect to a first blade at their apogee ends to form a frog-leg type assembly. Likewise, a pair of lower struts pivotally mounted to the arms at one end pivotally connect to a second blade, which is radially aligned with the first blade, at their apogee ends to form a frog-leg type assembly. The pivotal connection of the upper struts to the arms are offset from the pivotal connections of the lower struts to the arms to produce a different rate of radial movement of the first blade to the second blade during extension and retraction of the blades.

Abstract: In cases where every sampling time has elapsed, a position of the joint which will occur at a moment of end of a next sampling time is calculated on the basis of a speed pattern. Calculation is made as to a drive torque designed to move the joint to the calculated position. In cases where the calculated drive torque exceeds a predetermined limit value, a speed change ratio designed to reduce the drive torque is calculated. In addition, calculation is made as to a corrected sampling time on the basis of the calculated speed change ratio. The corrected sampling time is shorter than a normal sampling time. In cases where the calculated drive torque does not exceed the predetermined limit value, the calculated position is set as a command position and the joint is controlled to move to the command position after a predetermined unit control time elapses.

Abstract: Articulating workpiece transfer apparatus comprises a pair of identical housings each of which has a circular flange projecting from one side of the housing and abutting one another. Each flange has adjacent its periphery a beveled edge. A circular clamp has a concave groove in which the peripheral edges of the flanges are accommodated, and such clamp is operable to apply a clamping force on each flange urging the latter into face-to-face engagement with one another. Each housing has a cylindrical opening for the accommodation of an elongate transfer arm which is linearly slideable and rotatable about the axis of the arm. Each housing includes a clamp which enables and disables relative movement between the associated arm and the housing. The housings are rotatable relative to each other about an axis which passes through both flanges and which is normal to the axis of rotation of the respective transfer arms.

Abstract: A mechanism for orienting an end member utilizes paired five-bar linkages wherein two joints on each five-bar linkage may be actuated. Preferably the actuators are mounted at the base-link of the five bar linkages, such base-links being collinearly aligned. Two or three rotational and one translational degrees of freedom are available. This mechanism in its three or two degrees of rotational freedom variants has exceptional motion range, free of singularities, superior structural properties, and is easy to manufacture. This orienting mechanism can be mounted as an end member on a positioning mechanism having four main links herein three joints are actuated. The diagonally oppose joints of the positioning mechanism are respectively spherical and revolute. This positioning mechanism can operate with two actuators that are grounded and one that is elevated.

Abstract: A two-armed transfer robot is provided which includes an upper arm mechanism and a lower arm mechanism which is substantially identical to the upper arm mechanism. Each arm mechanism is provided with a handling member for carrying a workpiece to be processed. Each arm mechanism is also provided with a pantograph assembly consisting of a base arm, an outer link, a pair of intermediate links and an inner link. The handling member of each arm mechanism is arranged to be spaced from a central driving shaft when the handling member is retreated closer to the shaft. The base arm of the pantograph assembly is inclined away from the handling member when the handling member is retreated closer to the shaft. At the same time, the intermediate links are also inclined away from the handling member.

Abstract: A two-armed transfer robot is provided which includes a first double-pantograph mechanism and a second double-pantograph mechanism which is substantially similar in arrangement to the first double-pantograph mechanism. Each double-pantograph mechanism includes a first pantograph assembly and a second pantograph assembly. The first pantograph assembly is provided with an inner link, a pair of first intermediate links and an outer link. The second pantograph assembly is provided with the outer link in common with the first pantograph assembly, a pair of second intermediate links and a hand-supporting link. The transfer robot also includes a stationary base member, first to fourth shafts coaxially supported by the base member for rotational movement about a vertical axis, first to fourth driving devices for actuating the first to the fourth shafts, respectively. The driving devices are fixed to the base member.

Abstract: A robot assembly including multiple independently operable robot assemblies are provided for use in semiconductor wafer processing. The robot assembly includes independent co-axial upper and lower robot assemblies adapted to handle multiple objects. The upper robot is stacked above the lower robot and the two robots are mounted concentrically to allow fast wafer transfer. Concentric drive mechanisms may also be provided for imparting rotary motion to either rotate the robot assembly or extend an extendable arm assembly into an adjacent chamber. Each robot can be either a single blade robot or a dual blade robot. Also provided is an apparatus for processing semiconductor wafers comprising a pre/post process transfer chamber housing multiple independent robot assemblies and surrounded by a plurality of pre-process chambers and post process chambers. Within each process, pre-process and post-process chamber is an apparatus for holding a plurality of stacked wafers.

Abstract: A two-armed transfer robot includes a first arm mechanism and a second arm mechanism. Each arm mechanism has a handling member for carrying a workpiece. The robot further includes a stationary base member and four shafts rotatable about a common vertical axis. Driving devices for the respective shafts are attached to the base frame. The first and second arm mechanisms are actuated upon rotation of the shafts driven by the driving devices. When the shafts are rotated in a same direction, the handling members of the arm mechanisms are caused to pivot about the common vertical axis. When the shafts are rotated in opposite directions, the handling members are caused to linearly move toward or away from the axis. The two arm mechanisms are vertically spaced from each other, so that they do not interfere with each other.

Abstract: A robot 100 has a pedestal 1, upper and lower arms 5, 12 and a quill 21. A drive train comprises motors in the pedestal 100 coupled to three concentric drive tubes 3, 6, 9. The outer drive tube is coupled to the upper arm 5. Driven tubes 11, 14 extend from the upper arm 5 to the lower arm 14. A twisted belt in the lower arm couples the driven tube 14 to the quill 21. The articulator 400 has three housings 21, 44,45; 61,61a each with an axis of rotation transverse to the its neighbors. Brakes A, B, and C selectively lock two housing together to rotate the third housing.

Abstract: A tilting elevator is set forth. A rigid frame has a base, a structurally rigid structure extending upwardly from the base, and a flange attached to the structure top. The flange is generally parallel to the base. A movable elevatable structure is telescopically mounted to the rigid frame. The elevatable structure comprises upper and lower spaced apart generally parallel plates. At least three generally parallel rods extend between the plates and are connected to them by universal joints. A motor system is supported rigidly relative to the base. Each of the rods is movable relative to the plates independently of each other rod. A robotic arm having R-, .theta.- and Z-motion can be mounted to the elevator. A mechanism is preferably attached to the bottom plate of the elevatable structure for increasing the stability of the system. With the addition of a sensor and using microprocessor control, canted workpieces can be readily picked up.

Abstract: A substrate processing apparatus comprises a substrate transfer section, connection modules attached to the substrate transfer section, and a first substrate transfer robot in the substrate transfer section capable of transferring substrates to the connection modules. The connection module comprises a substrate processing chamber, first and second intermediate chambers between the substrate processing chamber and the substrate transfer section. The second intermediate chamber is provided with a first substrate holder, the substrate processing chamber is provided with a second substrate holder, and the first intermediate chamber is provided with a substrate transfer device capable of mounting a plurality of the substrates held being stacked in the vertical direction by the first substrate holder, onto the second substrate holder such that the substrates are arranged side by side in the horizontal direction.

Abstract: An improvement is set forth in a robotic arm structure which includes at least two links. .theta. motion is provided about a primary axis at the proximal end portion of the proximalmost of the links. R motion proceeds radially from the primary axis whereby the distal end portion of the distalmost of the links can be moved in a radially extending straight line. An end effector is pivotally mounted for rotation relative to the distal end portion of the distalmost link about an end effector axis which is parallel to the primary axis. The structure is improved by adding one or more a yaw motor, a roll motor and a pitch motor for rotating the wrist of the arm about the respective axes. A sensor array senses the R, .theta., Z and yaw, roll and/or pitch motions and creates and transmits electronic signals representative thereof to a computer controller which monitors and controls the R, .theta., Z and yaw, roll and/or pitch motions.

Abstract: A substrate transferring device including a pair of support arms for supporting LCD substrates substantially horizontally, expandable multi-joint link mechanisms for moving the support arms in a horizontal plane, a first motor for extending and retracting the link mechanisms, a rotary base on which the link mechanisms are mounted, and a second motor for rotating the rotary base, wherein one of the support arms is provided so that an LCD substrate supported by the support arm is, at least partially, overlapped with an LCD substrate supported by the other support arm when the link mechanism is retracted.

Abstract: A method for assembling a linkage assembly for a 3-D Digitizing Probe Apparatus. A linkage assembly for incorporation into the probe apparatus includes a linkage and a joint member provided at each end of the linkage. Joint fixtures for receiving and holding the joints are provided at a desired distance and orientation apart. The joint members are loosely coupled to the linkage and are moved relative to the linkage so that the joint members fit in the joint fixtures and so that the linkage provides a desired length between the joints. The joint members are bonded to the linkage while the assembly is in the fixtures, thus fastening the components of the assembly together with minimal stress to the assembly and providing a precise linkage length and orientation of joints in the assembly.

Abstract: A transfer device for press systems has cross traverses with at least one suction unit swivellably held thereon. The suction unit has an electric drive for coordinating the swivel movement with the transfer curve (horizontal and vertical movement) to be travelled. As may be required, two or more suction units can be independently swivellable on a cross traverse. A retrofitting and retooling of existing cross traverses can be carried out by the replacement of non-swivellable suction units used so far by swivellable suction units. Other changes on the mechanical structure of the transfer device are not required.

Abstract: An article positioning apparatus which includes a positioning arm structure on a rigid base structure and elevator structure. The base structure includes an upper flange and a lower flange secured to the upper flange by rigid members extending between the upper flange and the lower flange. The upper flange includes a bore therein. The elevator structure is positioned between the upper flange and the lower flange and itself includes an upper plate and a lower plate. The elevator structure coupled to the positioning arm structure through the bore in the upper flange. The elevator structure includes lead screw members having a respective upper end portion and a lower end portion, extending from the upper plate to the lower plate. In addition, the elevator structure includes a plurality of universal joints supported by the upper plate, one of said plurality of universal joints being associated with one of the lead screw members and being arranged to universally mount the upper plate to a respective lead screw.