Abstract: There is provided an air delivery device and method of moving and filtering air. The air delivery device comprises a housing having an air inlet and an air outlet. Between the air inlet and the air outlet is located an air delivery fan having at least two rotating air moving elements, the rotating air moving elements intersects the flow of air between the air inlet and the air outlet and establishes a higher pressure zone at the air outlet relative to the air inlet. The air delivery fan further comprises at lest one filter element, having at least one upstream filter face and at least one downstream filter face, defining at least one primary flow channel, and rotating along the same axis of rotation as the air moving elements and preferably forming the air moving elements at least in part.

Abstract: A vacuum cleaner having a reduced velocity chamber with a high velocity air inlet, an electric motor, a rotary mechanism driven by the motor for creating a vacuum in the chamber, an outlet for exhausting air from the chamber, which air flows in a selected path from the air inlet, through the chamber and out the air exhaust outlet and a disposable porous sheet filter layer in the chamber for removing large solid particles from the air. The vacuum cleaner also has an improved filter, wherein the improved filter includes a layer of material to remove very fine air particles and a layer of material to remove odors from the air.

Abstract: An air intake apparatus for semiconductor fabricating equipment reduces the inflow of chemical contaminants, such as ozone (O.sub.3), into the equipment. The air intake apparatus includes a fan as an air intake device, and a chemical filter containing activated carbon to remove the chemical contaminants from air drawn in from outside the equipment. The air intake apparatus may further include first and second filters for removing particulate contaminants from the air. By applying the air intake apparatus to chemical vapor deposition (CVD) equipment used to carry out a process for forming hemispherical grains (HSGs), which is sensitive to a native oxide layer, the ozone density inside the CVD equipment is decreased. Accordingly, the semiconductor device produced has a higher capacitance and enhanced performance.

Abstract: The photocatalytic action of titanium dioxide and the anti-odor activity of undecylenic acid or its compounds are combined in an atmospheric scrubbing or renewal system. The invention consists in placing a filter impregnated with these two substances and exposed to a natural or artificial source of ultraviolet radiation in the path of the air.

Abstract: An air filter unit in which the generation of organic substances is restrained by controlling at least the amount of organic substances detected from a square test piece of 5.times.5 cm (25 cm.sup.2) of a filter medium so as to be 100 ng or less in the total amount of organic substances detected from the whole air filter unit at a temperature of 40.degree. C. before using. The air filter unit is assembled by housing a filter medium that has been bent in a waveform in a frame composed of 4 outer frame members and sealing the gap between the frame and the filter medium using a sealing compound. Organic substances adhering to the air filter unit are removed by blowing a cleaned air heated at 80.degree. C. against the air filter unit at a velocity of 50 ml/min for 60 minutes. Then, an air suction port and an air exhaust port of the air filter unit are sealed with a film (for example, a PET film) which keeps the unit from contacting with organic substances and from which organic substances are not generated.

Abstract: Mercury emission from a flue gas such as that generated by a coal fired power plant is controlled by injecting into the flue gas unburned carbon purified from ash such as fly ash or wood ash. The unburned carbon adsorbs the mercury and is later removed from the flue gas by a particle separator. The unburned carbon collected from ash is significantly lower in cost compared to activated carbon presently used in such a process. The unburned carbon is concentrated in the sorbent by one or more separation processes used to remove non-carbon particles from the fly ash. These processes include gravity separation, electrostatic separation, froth flotation, magnetic separation and size classification. Mercury adsorption is further increased by oxidation of the carbon surface.

Abstract: A wet filter which will not foul washing facilities and plumbing systems, and which will not introduce harmful substances into the environment. The filtering element, which mayk be a resilient, open cell foam material or a woven fabric, is coated with a mixture of oil and a tackifying agent. The oil is preferably a vegetable oil, and the tackifying agent is preferably a dimer acid. The oil and acid are mixed in a volatile carrier, such as ninety-nine percent pure isopropyl alcohol. Preferred proportions are fifty percent dimer acid and ten percent vegetable oil, by volume. The filter is saturated in the mixture. The alcohol is permitted to evaporate, thereby leaving the foam filter thinly yet fully coated with oil and acid. The filter may be washed in water and detergent for renewal. Preferably, a biodegradable detergent mixed with an alkaline substance such as soda ash is employed in washing the filter.

Abstract: A filter cartridge includes a cylindrical inner filter, and a removable and replaceable outer filter of media. The removable and replaceable filter includes more than one layer of media therein. One application for the filter cartridge is in a mist collector arrangement.

Abstract: A mist collector cartridge for collecting airborne liquids, and more particularly, a filter media having vertically oriented interconnected pleats treated with a low surface energy material to facilitate agglomeration and drainage of liquid which accumulates on the inner and outer surface of the filter media.

Abstract: A method of processing waste gas exhausted from chemical vapor deposition equipment, which entails:a) contacting a waste gas containing viscous substances with a filtering aid agent,b) passing the waste gas containing the viscous substances exhausted from the chemical vapor deposition equipment, and which has been contacted with the filtering aid agent, through a filtering and dust collecting unit, whereby the viscous substances are condensed with the filtering aid agent on the filtering and dust collecting unit, andc) removing the condensed matter from the surface of the filter, thereby preventing clogging thereof.

Abstract: A method for continuously measuring particulate nitrate in a gas sample, comprising the steps of passing the gas sample through an inertial impactor with a 50% cut off at 2.5 microns, removing ambient pollutant gases from the gas with diffusion denuders, passing the gas through a first path so as to contact the gas with a coated filter so as to convert particulate nitrate to nitric acid vapor or passing the gas through a second path so as to contact the gas with coated filters to trap particulate nitrate and ammonia, and measuring nitric acid vapor and residual ambient pollutant gases produced from the first path and residual ambient pollutant gases produced from the second path with a chemiluminescent monitor, the difference in the signal produced from the gases from the two paths being a measurement of the particulate nitrate in the gas sample.

Abstract: A method for forming a reactive medium for removing homogeneous and heterogeneous impurities from a fluid is provided. The method includes forming a uniform oxide layer, depositing at least one layer of carbon, depositing a precursor metal species, and heating a substrate having the layer including carbon.

Abstract: An odor filter for exhauster hoods, which filter includes an adsorption filter bed regenerable by washing. The filter bed is made of a highly air-permeable substrate material and an adsorbent affixed thereto in the amount of 50 to 400 g/l by an adhesive mass and has a mean particle diameter between 0.2 and 2 mm.

Abstract: A method for the simultaneous control of SO.sub.2, NO.sub.x, HCl, air toxins, metal fumes, and particulate emissions (ash, soot, metal oxides) from fossil fuel burning combustion processes is provided by injecting a sorbent upstream of a filter in the furnace and collecting sorbent and particulates in the filter. Collecting the sorbent in the filter increases its residence time in the process. The sorbent is injected in the post-flame region of a furnace, where it reacts with the SO.sub.2, the NO.sub.x, the HCl, and the air toxics in the effluent gas. A surface filter that can withstand temperatures of approximately 1000.degree. C. is mounted, either fixedly or rotatably, in the furnace downstream of the sorbent injection region. The gas flows through the filter, and the sorbent and other particulates become embedded in the surface layer of the filter.

Abstract: A device for purifying a workstream of contaminants and method of making. One device is made of an inorganic monolithic porous particulate filter and a continuous uninterrupted coating of activated carbon impregnated into the pores of the filter. Preferably the filter has inlet and outlet faces, and a multiplicity of cells separated by porous walls and extending longitudinally and mutually parallel therethrough from inlet to outlet end, a portion of the total number of cells being plugged at the inlet end face, and the remaining portion of the total number of cells being plugged at the outlet end face of the device. Another device can be made entirely of activated carbon having the multicellular structure. A workstream containing contaminants is passed through the device to cause retention of the contaminants. The device can have electrically conducting mechanism for conducting electric current therethrough for removal of the contaminants and regeneration of the device.

Abstract: A process for producing a fabric absorbent that is capable of efficient removal of odorous substances, in particular malodorous substances. The absorbent is obtained by exposing an organic high-molecular weight compound, such as polyolefinic polymers or halogenated polyolefinic polymers, to an ionizing radiation and thereafter graft polymerizing the high-molecular weight compound with a polymerizable monomer that contains ion-exchange groups and/or a polymerizable monomer that can be converted to ion-exchange groups so as to incorporate the ion-exchange groups in the high-molecular weight compound.

Abstract: The invention features a clean room and a chemical air filter suitable for use in the air handling system of the clean room directly upstream of high-efficiency particulate air (HEPA) filters. The chemical filter is of the pleated filter type comprising an air permeable, relatively thick web of non-woven fibrous carrier material of pleated form. The web includes a matrix formed of a large multiplicity of synthetic fibers and is characterized in that activated carbon particles are distributed throughout the web, bound in the interstices of the matrix in a manner preventing loss to the air of particles in quantity substantially detrimental to the performance of the HEPA filter. The activated carbon particles are of the type selected to remove the predetermined gas-phase contaminant from the air from the source. The invention also features a non-off gassing filter casing that may easily be installed into existing clean room air handling systems.

Abstract: An air filtering system for filtering air streams for use in a clean environment to effectively remove a process-limiting molecular contaminant therefrom comprising sequentially arranged upstream and downstream air filtering beds. The upstream air filtering bed is positioned to receive an air stream for use in the clean environment and comprises an upstream reagent selected to effectively remove the process-limiting molecular contaminant from the air stream as the air stream passes through the upstream air filtering bed, the upstream reagent releasing a characteristic volatile component into the air streams. The downstream air filtering bed is positioned to receive the air stream that has passed through the upstream air filtering bed and comprises a downstream reagent selected to remove the characteristic volatile component released by the upstream reagent into the air stream. Clean environments (e.g., a deep UV processing station) incorporating the above-mentioned air filtering system are also disclosed.

Abstract: A regenerative hygroscopic filter having a housing containing an inlet port and an outlet port, and, a hydrophilic filter element positioned within the housing and disposed between the inlet and outlet ports, and operatively arranged to filter solid particulate matter and water when gas passes into the inlet port and through the filter element, and to release water via the inlet port when gas passes from the outlet port through the filter element.

Abstract: The invention relates to a method of treating reticulated foam with a controlled migration treatment medium to produce an improved air filter. Reticulated foam is treated with a highly viscous oil that protects the foam from hydrolytic degradation and increases efficiency of the filter without causing unacceptable air restriction of the foam. An improved air filter made from treated and untreated layers of reticulated foam is also shown.

Abstract: Novel membranes comprise crystals of a zeo-type material carried by a porous support. The crystal growth of the zeo-type material is essentially continuous over the pores of the support and the zeo-type material is crystallized directly from and bonds directly to the support. Membranes may be prepared by immersing the support in a synthesis gel, crystallizing the gel, removing the support, and repeating these steps at least once.

Abstract: An air cleaner comprises a cleaning element having a three-dimensional visco-elastic matrix of material for adsorbing airborne particulate matter and for absorbing volatile liquids and a variety of noxious gases. The three-dimensional visco-elastic matrix of material adsorbs particulate matter of many types and sizes and advantageously draws the particulate matter below the surface of the material. To enhance the cleaning properties of the material, the three-dimensional visco-elastic matrix of material may additionally comprise a zeolite to improve the absorption of gases and a metallic additive, such as copper sulfate, to inhibit biological activity. The material forming the three-dimensional visco-elastic matrix may be acrylamide, siloxane, acrylate, or a cellulosic material and may be in the form of fibers or particles.

Abstract: A method for removing pollutants from a combustor flue gas. The method includes the steps of supplying sorbent to a baghouse having a filter bag therein until the filter bag is coated with a predetermined amount of sorbent and introducing the flue gas into the baghouse. Pollutants in the flue gas are sorbed by the sorbent on the filter bag. A system is provided for performing the method of the invention.

Abstract: A method for reducing gaseous emission of halogen compounds in a fluidized bed reactor in which the fine particles entrained in flue gases are used to form a temporary layer of particles on the baghouse filter to absorb halogen gases.

Abstract: A device and process for increasing analyte concentration in a sorbent from a source of analytes contained in a sample uses means for increasing a temperature differential between the sample and the sorbent. The sorbent can be a polymeric coating on a substrate. The sorbent is located in a headspace of the sample and has internal cooling means such as liquid carbon dioxide so that the sorbent can be cooled relative to the sample. Preferably, the sample is heated to further increase the temperature differential between the sample and the sorbent. As the temperature differential increases, a partition coefficient of the sorbent/sample also increases. Preferably, the sorbent is located in a headspace of the sample. Previously, for certain analytes, the partition coefficient was too low and the concentration of analytes extracted into the sorbent from the sample was insufficient to provide an accurate measurement of concentration.

Abstract: Highly purified ammonia for use in processes for the production of high-precision electronic components is prepared on-site by drawing ammonia vapor from a liquid ammonia reservoir, passing the vapor through a filter capable of filtering out particles of less than 0.005 micron in size, and scrubbing the filtered vapor in a high-pH aqueous scrubber.

Abstract: A mist collector cartridge for collecting airborne liquids, and more particularly, a filter media having vertically oriented interconnected pleats treated with a low surface energy material to facilitate agglomeration and drainage of liquid which accumulates on the inner and outer surface of the filter media.

Abstract: The invention relates to a method of treating reticulated foam with a controlled migration treatment medium to produce an improved air filter. Reticulated foam is treated with a highly viscous oil that protects the foam from hydrolytic degradation and increases efficiency of the filter without causing unacceptable air restriction of the foam. An improved air filter made from treated and untreated layers of reticulated foam is also shown.

Abstract: The present invention entails a kit having comprised of a filter frame, at least one replaceable filter sheet, and fasteners for attaching the filter frame to an air return duct. The filter frame includes an air inlet side that includes a series of spot fasteners formed on the air inlet side wherein the fasteners serve to attach the filter sheet to the air inlet side of the filter frame. The filter sheet can be easily detached from the air inlet side of the filter frame and replaced by a fresh or new filter sheet.

Abstract: A mist collector cartridge for collecting airborne liquids, and more particularly, a filter media having vertically oriented interconnected pleats treated with a low surface energy material to facilitate agglomeration and drainage of liquid which accumulates on the inner and outer surface of the filter media.

Abstract: An improved air diffusion panel, and method of construction and use, is provided which is particularly suitable for use in clean and ultra-clean environments, such as clean rooms and mini-environments facilities. The preferred diffusion panel of the present invention includes a diffusion membrane of a continuous mass of porous polytetrafluoroethylene bonded to one or more support screens of polymer mesh. The composite membrane and screens are mounted in a unique frame which eases the time and effort required for construction of the panels and which can be mounted to reduce vibration of the panel and leakage around its edges. This improved air diffusion panel also significantly filters small and sub-micron particles, resists chemical attack, and blocks liquid droplets.

Abstract: An air filter is provided for removing gaseous impurities from the air such as formaldehyde, acetaldehyde, acrolein, acetone and other chemical compounds. The filter utilizes a plurality of corrugated base sheets which are stacked or nestled and which have entrapped carbon dust for absorption of impurities. The corrugated structure provides very little pressure drop as the air passes through available channels and large, powerful fans are not necessary to move air therethrough.

Abstract: A denuder for collection of gases, consisting of a plurality of generally parallel elongated tubes having a surface formed from an inert non-metallic material, said tubes being configured and arranged to allow recovery of gaseous material collected on each said surface.