Abstract: A dry-etching method comprises the step of dry-etching a metal thin film as a chromium-containing half-tone phase-shift film, wherein the method is characterized by using, as an etching gas, a mixed gas including (a) a reactive ion etching gas, which contains an oxygen-containing gas and a halogen-containing gas, and (b) a reducing gas added to the gas component (a), in the process for dry-etching the metal thin film. The dry-etching method permits the production of a half-tone phase-shift photomask by forming patterns to be transferred to a wafer on a photomask blank for a chromium-containing half-tone phase-shift mask. The photomask can in turn be used for manufacturing semiconductor circuits. The method permits the decrease of the dimensional difference due to the coexistence of coarse and dense patterns in a plane and the production of a high precision pattern-etched product.

Abstract: A data management system includes a computer and memory devices. The memory devices can be configured such that their memory areas form a continuous memory area. Each memory device includes a memory area for storing memory configuration information, including information on whether the memory area of the memory device is to be used to form the continuous memory area. Memory devices may be connected to and disconnected from the system without stopping operation of the system. When a memory device is disconnected from the system or a new memory device is connected to the system, the system reforms the continuous memory area based on the memory configuration information stored in each memory device. The system further determines whether data previously stored in the memory devices can be used by the system.

Abstract: A surface light source device includes a light guide plate disposed on an upper surface of a liquid crystal panel unit and a linear light source disposed extending in a direction parallel to a side surface of the light guide plate. A plurality of linear prisms are formed on an upper surface of the light guide plate in a manner of extending in a direction oblique to the side surface. A light irradiated from the linear light source to the light guide plate through the side surface is reflected by a reflecting surface formed by each of linear prisms to be irradiated onto the liquid crystal panel unit provided below a lower surface of the plate. A height of the reflecting surface of each of linear prisms is changed in a lengthwise direction thereof.

Abstract: An output node NO is, on one hand, connected through a PMOS transistor TP1 and an NMOS transistor TN1 to ground, and on the other hand, connected through a PMOS transistor TP2 and an NMOS transistor TN2 to a node N6 which is selectively set to ground and VDD. The output node NO is connected through a capacitor C1 to the input of a driving inverter 11 in order to step-up or step-down the voltage of the output node NO. When the output node NO is set to −1V, the control circuit 10 turns off the PMOS transistors TP1 and TP2. It is also allowed to connect the output node through a first PMOS transistor to a second PMOS transistor whose back gate is connected to a power supply voltage VDD, and to connect the back gate of the first PMOS transistor to one end of a current path thereof on the side of the second PMOS transistor.

Abstract: In an information access device, an information access method and an information storage medium access system which are suited to quickly and reliably detect a deviation in frame management associated with erroneous detection of a synchronous mark and to perform an operation of redetecting a synchronous mark, an Even synchronous mark erroneous detector outputs a count-up signal if a synchronous mark LSY from an LPP pattern comparing portion is “111” when an Even/Odd identification signal from a frame counter assumes 1. An Odd synchronous mark erroneous detector outputs a count-up signal if the synchronous mark LSY is “110” when the Even/Odd identification signal assumes 0. An erroneous detection counter counts the number of the outputted count-up signals, which is compared with a count value set by a redetection level portion in a comparator. Then a redetection instruction signal for redetecting an LPP access synchronous mark is outputted.

Abstract: A shaft member 1 and an outer peripheral member 2 disposed on the outer periphery of the shaft member 1 are joined together by splines 3 through which the teeth 31 of the shaft member 1 and the teeth 32 of the outer peripheral member 2 are fitted together. At one axial end of each spline 3, a trough 31 in the tooth 31 of the shaft member 1 is diametrically increased to provide a diametrically increased region S1. In this diametrically increased region S1, there is defined a fit region F for the tooth 31 of the shaft member 1 and the tooth 32 of the outer peripheral member 2.

Abstract: The method for the production of multilayers comprises: applying a coating solution (I) which comprises a dissolved or dispersed proton-conductive polymer and a solvent (Is) containing water in amounts from 25 to 60 wt % and an organic solvent in amounts from 75 down to 40 wt %, on an electrode, applying a coating solution (II) which comprises a dissolved or dispersed proton-conductive polymer and a solvent (IIs) containing water in amounts from 0 to less than 25 wt % and an organic solvent in amounts above 75 wt %, on the wet first coating without any drying of the first coating; and drying the coatings to form an electrolyte membrane. The methods can provide multilayers capable of satisfactory power generation properties as an electrode structure by forming an electrolyte membrane on an electrode without causing any penetration of electrolyte into the electrode.

Abstract: A plasma display panel for color displaying is provided which is so formed that it is possible to improve the contrast and color purity of the display panel while at the same time controlling the brightness drop to a minimum level. In particular, it is possible to effectively inhibit a contrast drop usually caused due to neon emission. In practice, an optical filter capable of attenuating light components each having a wavelength within a range of 560-590 nm is provided on the front side of the plasma display panel. Such plasma display panel includes an electric discharge space containing a discharge gas mainly comprising neon gas and xenon gas.

Abstract: An engine lubrication system has an arrangement in which the base of a crankcase is used to form an oil reservoir, and a part of an oil slinger that is driven by a crankshaft via a transmission system is immersed in the oil within the oil reservoir. An oil pump that is driven by the transmission system is immersed in the oil within the oil reservoir, and a discharge port of the oil pump communicates with a lubricating-oil passage within the crankshaft. It is thereby possible to provide an engine lubrication system based on a splash-type lubrication system while at the same time using a forced-type lubrication system, thus reducing the capacity of the oil pump and simplifying the drive system, and effectively suppressing an increase in the overall cost.

Abstract: First and second voltage generators generate a first internal power supply voltage to be supplied to a first internal power supply line and a second internal power supply voltage to be supplied to a second internal power supply line, respectively. A short circuit shorts the first and second internal power supply lines when operations of both the first and second voltage generators are suspended. The first and second internal power supply lines become floating, and charges stored in the respective internal power supply lines drain out gradually. Here, since the charges are redistributed to both of the internal power supply lines, the first and second internal power supply voltages become equal in value as they drop off. Consequently, the first and second internal power supply voltages can be prevented from inversion, and internal circuits connected to both the first and second internal power supply lines can be precluded from malfunctioning.

Abstract: A control system for an internal combustion engine having an exhaust system, an intake system, and an exhaust gas recirculation mechanism for recirculating exhaust gases from the exhaust system to the intake system is disclosed. The exhaust system is provided with an adsorbent for adsorbing hydrocarbon. When the adsorbent has adsorbed the hydrocarbon and the engine is operating in an idling condition, an intake air amount of the engine is increased and an ignition timing of said engine is retarded, and at the same time, the exhaust gas recirculation is performed to recirculate the hydrocarbon desorbed from the adsorbent to the intake system.

Abstract: Metal which forms a crystalline insulation layer is sputtered at a target and deposited as a film on a silicon substrate, the metal is chemically combined with reactive gas around the silicon substrate to thereby grow a crystal layer of a crystalline insulation substance, and a voltage is applied to the substrate so that ions of the reactive gas around the substrate are attracted to a surface of the silicon substrate and chemically combined with silicon, whereby an insulation silicon compound layer is formed. As a result, a structure is obtained in which a crystalline insulation layer is formed on a crystalline silicon layer through an amorphous insulation film which is formed by a silicon compound which has an excellent insulation characteristic.

Abstract: A variable speed ratchet wrench comprising a main handle portion with an opening for receiving a planetary gear mechanism, a planetary gear mechanism with a locking device attached to an output shaft for driving wrench fittings, and a planetary gear housing cover. The planetary gear housing cover comprises an attached secondary handle that allows the planetary gears to revolve relative to the sun gear in a non-locked position and prevents the planetary gears from revolving about the sun gear when locked in a locked position, thereby providing a geared speed increase in the driven speed of the output shaft. The planetary gear mechanism includes a sun gear, a first and second planetary gear, and an inner ring gear for driving the output shaft.

Abstract: In a bearing apparatus for a wheel in which a hub, a constant velocity universal joint and double rows of bearings are united and one inner raceway of double rows of inner raceways, of the double rows of bearings is integrally formed with an outer joint member of the constant velocity universal joint, a stem portion of the outer joint member is fitted to the hub, an unevenness portion is formed on an inner peripheral surface of the hub or an outer peripheral surface of the stem portion or both thereof, and the hub and the outer joint member are plastically connected by expanding the hollow stem portion from an inner diameter side to an outer diameter side by caulking. Accordingly, the fitted portions of the hub and the outer joint member are prevented from being loosened.

Abstract: There is provided a return pipe type ball screw capable of accurately positioning and fixing return pipes on and to a nut member even when a troublesome positioning operation is not carried out, and circulating balls endlessly and smoothly for a long period of time without the possibility that dust enters the interior of the nut member. In such a ball screw, ball passing holes formed so as to extend through the nut member are inclined at an angle equal to a lead angle of a ball rolling groove of a screw shaft, and each of the return pipes is formed by combining together a pair of return pieces adapted to be fitted in the ball passing holes.

Abstract: Rotary type fluid machine includes a casing 7, a rotor 31 and a plurality of vane-piston units U1-U12 which are disposed in a radiate arrangement on the rotor 31. Each of the vane-piston units U1-U12 has a vane 42 sliding in a rotor chamber 14 and a piston 41 placed in abutment against an on-slide side of the vane 42. When it functions as an expanding machine 4, the expansion of a high pressure gas is used to operate the pistons 41 thereby to rotate the rotor 31 via vanes 42 and the expansion of a low pressure gas caused by a pressure reduction in the high pressure gas is used to rotate the rotor 31 via the vanes 41. On the other hand, when it functions as a compressing machine, the rotation of rotor 31 is used to supply a low pressure air to the side of pistons 41 via vanes 42 and further, the pistons 41 are operated by the vanes 42 to convert the low pressure air to the high pressure air.

Abstract: A system for manufacturing a thin-film magnetic head having a means for cutting a wafer into bars, each bar having a plurality of thin-film magnetic head sliders which are sequentially coupled with each other, a means for identifying the bar to be worked to generate an identification signal which indicates identity of said bar, a means for obtaining data of said bar in a unit of bar depending upon said identification signal, and a means for processing at least one working of said bar on the basis of said obtained data of said bar.

Abstract: A mixer for a multicylinder gas engine is provided in which a plurality of intake passages extend to a plurality of cylinders. A plurality of gaseous fuel nozzles, each having a nozzle orifice opening in a venturi part of the corresponding intake passage, are provided in a mixer main body. The plurality of gaseous fuel nozzles are connected to a gaseous fuel supply device, wherein a common surge tank housing the plurality of gaseous fuel nozzles and having a fuel intake pipe opening therein is provided on the mixer main body. The fuel intake pipe extends to the gaseous fuel supply device. Intake pressure pulsations that have passed through the gaseous fuel nozzles are attenuated within the surge tank, thereby achieving uniform distribution of a gaseous mixture to each cylinder, minimizes the number of parts, and prevents fluctuations in the fuel concentration of the gaseous mixture.

Abstract: A part of a refrigerant in the low-temperature state is circulated by a cryogenic cooling system for superconductive electric machines comprising a refrigerant transfer system and circulation means for internal circulation within the cryogenic area, thereby enabling improvement in the cooling efficiency.