Abstract: An electronic-carrier-controlled photochemical etching process for carrying out patterning and selective removing of material in semiconductor device fabrication includes the steps of selective ion implanting, photochemical dry etching, and thermal annealing, in that order. In the selective ion implanting step, regions of the semiconductor material in a desired pattern are damaged and the remainder of the regions of the material not implanted are left undamaged. The rate of recombination of electrons and holes is increased in the damaged regions of the pattern compared to undamaged regions. In the photochemical dry etching step which follows ion implanting step, the material in the undamaged regions of the semiconductor are removed substantially faster than in the damaged regions representing the pattern, leaving the ion-implanted, damaged regions as raised surface structures on the semiconductor material.
Type:
Grant
Filed:
June 16, 1988
Date of Patent:
November 14, 1989
Assignee:
The United States of America as represented by the United States Department of Energy
Inventors:
Carol I. H. Ashby, David R. Myers, Frederick L. Vook
Abstract: Submicron size particles are produced by using a sputtering process to deposit particles into a liquid. The liquid is processed to recover the particles therefrom, and the particles have sizes in the range of twenty to two hundred Angstroms. Either metallic or non-metallic particles can be produced, and the metallic particles can be used in "metallic inks".
Type:
Grant
Filed:
May 11, 1988
Date of Patent:
October 10, 1989
Assignee:
The United States of America as represented by the United States Department of Energy
Inventors:
Roy S. Bourne, Clarence C. Eichman, William W. Welbon
Abstract: Polymerization of acetylenic monomers is achieved by using a catalyst which is the reaction product of a tungsten compound and a reducing agent effective to reduce W(VI) to W(III and/or IV), e.g., WCl.sub.6.(organo-Li, organo-Mg or polysilane). The resultant silylated polymers are of heretofore unachievable high molecular weight and can be used as precursors to a wide variety of new acetylenic polymers by application of substitution reactions.
Type:
Grant
Filed:
September 22, 1986
Date of Patent:
September 12, 1989
Assignee:
The United States of America as represented by the United States Department of Energy
Abstract: A column of explosive in a low-voltage detonator which makes it spark-safe ncludes an organic secondary explosive charge of HMX in the form of a thin pad disposed in a bore of a housing of the detonator in an ignition region of the explosive column and adjacent to an electrical ignition device at one end of the bore. The pad of secondary charge has an axial thickness within the range of twenty to thirty percent of its diameter. The explosive column also includes a first explosive charge of CP disposed in the housing bore in the ignition region of the explosive column next to the secondary charge pad on a side opposite from the ignition device. The first CP charge is loaded under sufficient pressure, 25 to 40 kpsi, to provide mechanical confinement of the pad of secondary charge and physical coupling thereof with the ignition device.
Type:
Grant
Filed:
July 1, 1988
Date of Patent:
August 22, 1989
Assignee:
The United States of America as represented by the Department of Energy
Abstract: Laser light from a common source is split and conveyed through two similar optical fibers and emitted at their respective ends to form an interference pattern, one of the optical fibers having a portion thereof subjected to a strain. Changes in the strain cause changes in the optical path length of the strain fiber, and generate corresponding changes in the interference pattern. The interference pattern is received and transduced into signals representative of fringe shifts corresponding to changes in the strain experienced by the strained one of the optical fibers. These signals are then processed to evaluate strain as a function of time, typical examples of the application of the apparatus including electrodeposition of a metallic film on a conductive surface provided on the outside of the optical fiber being strained, so that strains generated in the optical fiber during the course of the electrodeposition are measurable as a function of time.
Type:
Grant
Filed:
January 21, 1988
Date of Patent:
June 27, 1989
Assignee:
The United States of America as represented by the Department of Energy
Abstract: Method and apparatus for preparing highly pure homogeneous precursor powder mixtures for metal oxide superconductive ceramics. The mixes are prepared by instantaneous precipitation from stoichiometric solutions of metal salts such as nitrates at controlled pH's within the 9 to 12 range, by addition of solutions of non-complexing pyrolyzable cations, such as alkyammonium and carbonate ions.
Type:
Grant
Filed:
February 25, 1988
Date of Patent:
June 13, 1989
Assignee:
The United States of America as represented by the United States Department of Energy
Inventors:
Bruce C. Bunker, Diana L. Lamppa, James A. Voigt
Abstract: A low density, open-celled microcellular carbon foam is disclosed which is prepared by dissolving a carbonizable polymer or copolymer in a solvent, pouring the solution into a mold, cooling the solution, removing the solvent, and then carbonizing the polymer or copolymer in a high temperature oven to produce the foam. If desired, an additive can be introduced in order to produce a doped carbon foam, and the foams can be made isotropic by selection of a suitable solvent. The low density, microcellular foams produced by this process are particularly useful in the fabrication of inertial confinement fusion targets, but can also be used as catalysts, absorbents, and electrodes.
Type:
Grant
Filed:
June 20, 1988
Date of Patent:
May 23, 1989
Assignee:
The United States of America as represented by the United States Department of Energy
Inventors:
Charles Arnold, Jr., James H. Aubert, Roger L. Clough, Peter B. Rand, Alan P. Sylwester
Abstract: An electrically conductive composite material is disclosed which comprises a conductive open-celled, low density, microcellular carbon foam filled with a non-conductive polymer or resin. The composite material is prepared in a two-step process consisting of first preparing the microcellular carbon foam from a carbonizable polymer or copolymer using a phase separation process, then filling the carbon foam with the desired non-conductive polymer or resin. The electrically conductive composites of the present invention has a uniform and consistant pattern of filler distribution, and as a result is superior over prior art materials when used in battery components, electrodes, and the like.
Abstract: A gettering device for hydrogen isotopes and gaseous hydrocarbons based on the interaction of a plasma and graphite used as cathodic material. The plasma is maintained at a current density within the range of about 1 to about 1000 mA/cm.sup.2. The graphite may be heated to a temperature greater than 1000.degree. C. The new device offers high capacity, low noise, and gas species selectivity.
Type:
Grant
Filed:
October 14, 1987
Date of Patent:
April 11, 1989
Assignee:
The United States of America as represented by the United States Department of Energy
Abstract: Polymerization of acetylenic monomers is achieved by using a catalyst which is the reaction product of a tungsten compound and a reducing agent effective to reduce W(VI) to W(III) and/or IV), e.g., WCl.sub.6.(organo-Li, organo-Mg or polysilane). The resultant silylated polymers are of heretofore unachievable high molecular weight and can be used as precursors to a wide variety of new acetylenic polymers by application of substitution reactions.
Type:
Grant
Filed:
November 9, 1987
Date of Patent:
March 14, 1989
Assignee:
The Unites States of America as represented by the United States Department of Energy
Abstract: A shock-activated electrochemical power supply is provided which is initiated extremely rapidly and which has a long shelf life. Electrochemical power supplies of this invention are initiated much faster than conventional thermal batteries. Power supplies of this invention comprise an inactive electrolyte and means for generating a high-pressure shock wave such that the shock wave is propagated through the electrolytes rendering the electrolyte electrochemically active.
Type:
Grant
Filed:
April 20, 1987
Date of Patent:
November 8, 1988
Assignee:
The United States of America as represented by the United States Department of Energy
Inventors:
William B. Benedick, Robert A. Graham, Bruno Morosin
Abstract: A detector for detecting energetic hydrogen ions and atoms ranging in energy from about 1 eV up to 1 keV in an evacuated environment includes a Schottky diode with a palladium or palladium-alloy gate metal applied to a silicondioxide layer on an n-silicon substrate. An array of the energetic-hydrogen detectors having a range of energy sensitivities form a plasma energy analyzer having a rapid response time and a sensitivity for measuring fluxes of energetic hydrogen. The detector is sensitive to hydrogen and its isotopes but is insensitive to non-hydrogenic particles. The array of energetic-hydrogen detectors can be formed on a single silicon chip, with thin-film layers of gold metal applied in various thicknesses to successive detectors in the array. The gold layers serve as particle energy-filters so that each detector is sensitive to a different range of hydrogen energies.
Type:
Grant
Filed:
October 31, 1986
Date of Patent:
November 1, 1988
Assignee:
The United States of America as represented by the United States Department of Energy
Inventors:
Robert J. Bastasz, Robert C. Hughes, William R. Wampler
Abstract: A method for synthesizing ultrafine powder materials, for example, ceramic and metal powders, comprises admitting gaseous reactants from which the powder material is to be formed into a vacuum reaction chamber maintained at a pressure less than atmospheric and at a temperature less than about 400.degree. K. (127.degree.C.). The gaseous reactants are directed through a glow discharge provided in the vacuum reaction chamber to form the ultrafine powder material.
Type:
Grant
Filed:
January 21, 1988
Date of Patent:
September 6, 1988
Assignee:
The United States of America as represented by the United States Department of Energy
Abstract: A method for preparing highly hydrogen-reactive surfaces on metals which normally require substantial heating, high pressures, or an extended induction period, which involves pretreatment of said surfaces with either a non-oxidizing acid or hydrogen gas to form a hydrogen-bearing coating on said surfaces, and subsequently heating said coated metal in the absence of moisture and oxygen for a period sufficient to decompose said coating and cooling said metal to room temperature. Surfaces so treated will react almost instantaneously with hydrogen gas at room temperature and low pressure. The method is particularly applicable to uranium, thorium, and lanthanide metals.
Type:
Grant
Filed:
November 28, 1986
Date of Patent:
August 16, 1988
Assignee:
The United States of America as represented by the United States Department of Energy
Abstract: Batteries are improved, especially with respect to voltage regulation properties, by employing as anode and cathode compositions, those which fall in a thermodynamically invariant region of the metallurgical phase diagram of the combination of the constituent components. The invention is especially useful in the Li/FeS.sub.2 system.
Type:
Grant
Filed:
June 10, 1986
Date of Patent:
August 2, 1988
Assignee:
The United States of America as represented by the United States Department of Energy
Abstract: A thermal diffusion counterflow method and apparatus for separating isotopes in solution in which the solution is confined in a long, narrow, vertical slit which tapers from bottom to top. The variation in the width of the slit permits maintenance of a stable concentration distribution with relatively long columns, thus permitting isotopic separation superior to that obtainable in the prior art.
Type:
Grant
Filed:
December 4, 1985
Date of Patent:
May 24, 1988
Assignee:
The United States of America as represented by the United States Department of Energy
Abstract: A catalytic igniter which can ignite a hydrogen-air mixture as lean as 5.5% hydrogen with induction times ranging from 20 s to 400 s, under conditions which may be present during a loss-of-liquid-coolant accident at a light water nuclear reactor comprises (a) a perforate catalytically active substrate, such as a platinum coated ceramic honeycomb or wire mesh screen, through which heated gases produced by oxidation of the mixture can freely flow and (b) a plurality of thin platinum wires mounted in a thermally conductive manner on the substrate and positioned thereon so as to be able to receive heat from the substrate and the heated gases while also in contact with unoxidized gases.
Type:
Grant
Filed:
June 10, 1986
Date of Patent:
May 3, 1988
Assignee:
The United States of America as represented by the United States Department of Energy
Inventors:
William J. McLean, Lawrence R. Thorne, Joanne V. Volponi
Abstract: A large-area liquid ion source comprises means for generating, over a large area of the surface of a liquid, an electric field of a strength sufficient to induce emission of ions from a large area of said liquid. Large areas in this context are those distinct from emitting areas in unidimensional emitters.
Type:
Grant
Filed:
May 27, 1986
Date of Patent:
March 15, 1988
Assignee:
The United States of America as represented by the Department of Energy
Abstract: In a method for preparing lithiated, particulate FeS.sub.2 useful as a catholyte material in a lithium thermal battery, whereby the latter's voltage regulation properties are improved, comprising admixing FeS.sub.2 and an amount of a lithium-containing compound whereby the resultant total composition falls in an invariant region of the metallurgical phase diagram of its constituent components, an improvement comprises admixing said lithium-containing compound and FeS.sub.2 together with a solid electrolyte compatible with said catholyte, and heating the mixture at a temperature above the melting point of said electrolyte and at which said mixture reaches its thermodynamic equilibrium number of phases.
Type:
Grant
Filed:
June 10, 1986
Date of Patent:
March 15, 1988
Assignee:
The United States of America as represented by the United States Department of Energy
Abstract: For batteries containing strong oxidizing electrolyte and a membrane separating two electrolyte solutions, e.g., a zinc ferricyanide battery, an improved membrane is provided comprising an oxidative resistant, conductive, ion-selective membrane fabricated from a catenated aromatic polymer having an absence of tertiary hydrogens, e.g., a sulfonated polysulfone.
Type:
Grant
Filed:
October 14, 1986
Date of Patent:
December 22, 1987
Assignee:
The United States of America as represented by the United States Department of Energy