Abstract: An illumination source or condenser used to project the image of a reticle onto a photosensitive substrate used in photolithography having a first reflective fly's eye, faceted mirror, or mirror array with predeterminedly positioned facets or elements and a second reflective fly's eye, faceted mirror, or mirror array having predeterminedly positioned facets or elements for creating a desired radiant intensity, pupil fill, or angular distribution. A source of extreme ultraviolet electromagnetic radiation is provided to a first fly's eye or mirror array with arcuate shaped facets or elements. The arcuate shaped facets or elements are positioned to create an image of the source at corresponding facet in a second reflective fly's eye or mirror array. A desired shape and irradiance together with a desired radiant intensity, pupil fill, or angular distribution is obtained. An arcuate illumination field or image is formed with high efficiency in a compact package.
Type:
Grant
Filed:
January 27, 1999
Date of Patent:
February 27, 2001
Assignee:
SVG Lithography Systems, Inc.
Inventors:
Donald G. Koch, James P. McGuire, Joseph M. Kunick
Abstract: A tubular applicator handle having an applicator integrally formed on either end. The applicable integrally formed on either end may be a brush, foam pad, fuzzy ball or other similar or equivalent applicator, for applying a liquid, paste or powder. The applicator may be use in a method of coating a post hole with a dental material. The present invention has particular adaptability in the dental field for applying dental materials.
Abstract: A storage rack having a plurality of shelves between end frames. Each of the plurality of shelves has U-shaped retainers that are snap fit, press fit, or friction fit onto a vertical member of the tubular end frame. A lateral support member attached to the end frames determines the different shelf heights with a side member resting on the frame cross members. In one embodiment, an angled end placed on the side members contacts the frame cross members, securely holding the bottom portion of a shelf. The top of the shelf being held by the U-shaped side end retainers and the bottom of the shelf being held by the angled ends results in a secure, rigid, easily assembled storage rack structure. In another embodiment, the storage rack has a triangular shape. The storage rack of the present invention can be easily assembled without any tools and is easily manufactured and shipped unassembled.
Abstract: An optical projection reduction system used in photolithography for the manufacture of semiconductor devices having a first mirror pair, a second field mirror pair, and a third mirror pair. Electromagnetic radiation from a reticle or mask is reflected by a first mirror pair to a second field mirror pair forming an intermediate image. A third mirror pair re-images the intermediate image to an image plane at a wafer. All six mirrors are spherical or aspheric and rotationally symmetrical about an optical axis. An annular ring field is obtained, a portion of which may be used in a step and scan photolithography system. In another embodiment, weak refracting elements are introduced to further reduce residual aberrations allowing a higher numerical aperture. In the catoptric embodiment of the present invention, a numerical aperture of 0.25 is obtained resulting in a working resolution of 0.03 microns with electromagnetic radiation having a wavelength of 13 nanometers.
Abstract: A stage used for positioning and aligning a wafer, as used in photolithography or microlithography in semiconductor manufacturing having a plurality of interferometer laser gauges placed on a movable wafer stage associated with a pair of stationary orthogonal return mirrors. A beam of light parallel to the X axes is directed through a penta prism to an interferometer laser gauges placed on the wafer stage near the wafer plane through a plurality of beamsplitters and fold mirrors. The present invention is less sensitive to rotation or twisting of the wafer stage and eliminates or reduces certain errors introduced by the rotation. Additionally, large stable return mirrors may be used, increasing the travel distance permitted by the wafer stage while reducing weight on the wafer stage. The wafer stage can be more accurately positioned and accommodate larger wafer sizes with improved positioning and alignment accuracies.
Abstract: A tray having wells or depressions therein for holding a medicament or material and an applicator for applying the medicament or material. The applicator well has one open end from which a portion of the applicator extends. A cover seals the medicament or material well and the applicator well and a portion of the applicator. In one embodiment, the cover is a thin sheet or film that adheres or is heat sealed to substantially the entire surface of the tray. The portion of the applicator extending beyond the applicator well is used to facilitate the removal of the cover whereby the extended portion of the applicator acts as a lever to pry the cover form the body of the tray. Additionally, packaging material required to form the tray can be substantially lessened in those cases where the applicator that is relatively large in comparison with the amount of material to be packaged. Therefore, a larger applicator that is easy to use is associated with the material without unnecessary packaging.
Abstract: An improved tooth and gum paste formed as a stable, single component composition that includes a non-aqueous carrier containing urea, hydrated silica, fluoride, sodium bicarbonate, pyrophosphate, and a peroxide, one or more of the ingredients being microencapsulated and which in use functions as an aid in preventing periodontal disease by reducing incidents of plaque as well as controlling tartar formation, and also as an aid in preventing dental caries and oral odors; and the method of compounding such improved tooth and gum paste.
Abstract: The present invention aims at reducing the thickness of a floppy disk drive by minimizing a vertical movement of a floppy disk-retaining disk holder and reducing the height of a chassis. The disk holder is provided on both side surfaces of its rear end portion with support shafts, which are connected to the chassis so that the support shafts can be turned. The disk holder becomes pivotable around these support shafts as fulcrums, i.e., the front portion of the disk holder is turned vertically. The upper and lower magnetic heads are formed so that they can be engaged with and disengaged from the floppy disk in conjunction with a pivotal movement of the disk holder.
Abstract: A method and apparatus for enhancing venous circulation in persons having venous insufficiencies and/or for effecting muscular massage for preventing muscle atrophy. This is attained by a wrap or sleeve adapted to circumscribe the portion of the body to be treated which includes an inflatable flexible tubing or tube which is inflated and deflated for producing a smooth, progressive massaging force on the body portion being treated. In operation, a fluid pressure inflates the respective tubes in a progressive manner whereby a massaging force is progressively applied against the body part as the tubes are sequentially inflated and which massaging force is relieved when the tubes are deflated. A control circuit is provided to control the inflation and deflation of the flexible tubing to effect a repetitive cycle in a predetermined time sequence.
Abstract: This invention relates to a mechanical solution applicating device and method for cleaning and/or lubricating a raw stock material as it is being fed to a production machine or station. The applicating device is in the form of a holding tank having a reservoir portion for containing a supply of treating solution. Disposed within the reservoir portion and separated from the treating solution is a bathing tank through which the raw stock material is fed and treated. The feed of the raw stock material is utilized to effect rotation of a scoop wheel which scoops the treating solution out of the reservoir portion and into the bathing tank where the raw stock material is bathed or coated with the treating solution as it is fed therethrough. The rotation of the scoop wheel is effected by a driving wheel journaled thereto disposed in driving relationship with the raw stock material being fed through the bathing tank.
Abstract: A method and apparatus for flavoring coffee with a particular flavoring ingredient in situ within the package. The apparatus includes a hopper for containing a supply of coffee and a connected feed tube through which the coffee is delivered in measured amounts into the lower end of a tube of sheet material or web which is being continuously formed about the coffee feed tube to define the package for the coffee. A flavoring feed tube connected in communication to a reservoir containing a supply of flavoring material is disposed along the coffee feed tube and through which the flavoring material is circulated for injecting a predetermined amount of flavoring material into the coffee being delivered into the lower end of the continuously formed tube. The lower end of the continuous tube containing the predetermined amount of coffee and flavoring material is thereafter sealed and separated from the remainder of the continuous tube to define an individual package of flavored coffee, and the sequence repeated.
Abstract: A control for brushless motors having polyphase moving coil armatures, sinusoidal commutation, and integral linear hall effect commutation sensors providing a correction signal such that the sum of the squares of the commutation signals is maintained at a predetermined constant. A sum squared correction means is used to provide an error correction signal feedback to magnetic field sensors or hall effect commutation sensors used to provide a sinusoidal commutation signal for each phase of a three phase moving coil armature such that the sum of the squares of each signal representative of the commutation signal is forced to be a predetermined constant. This has the effect of substantially reducing the motor force or torque variations typically occurring with such brushless electric motors having sinusoidal commutation. The motor force or torque variations are due in part to the hall effect sensor or magnetic field sensor gain and offset errors.
Abstract: This disclosure is directed to a dental imaging matrix band for making a dental prosthetic restoration such as a 3/4 crown, full crown, or fixed bridge with the use of a CAD-CAM machine. This is attained by encircling a tooth or teeth prepared for receiving the prosthetic restoration by an imaging matrix band having an actual enlarged beaded peripheral edge or an illusion of an enlarged beaded portion which can be optically read by a scanner of a CAD-CAM machine. The optical image of the tooth or teeth encircled by such an imaging matrix band is transformed by the CAD-CAM machine into a signal which controls the operation of the forming or milling portion of the CAD-CAM machine to shape a block of dental material into the shape of a prosthetic restoration to be fitted to the prepared tooth or teeth in accordance with the optical image of the prepared tooth or teeth.
Abstract: A disposable capsule for dispensing a dental material and a method of making the capsule wherein the capsule includes a reservoir portion containing a predetermined amount of material to be dispensed, and which reservoir is connected in communication with a discharge tip. Connected to the end of the tip and projecting therethrough is a needle cannula through which the material is ejected. A displaceable piston may be provided when material is desired to be sealed within the reservoir portion, and which forces the material through the cannula when displaced within the reservoir portion. The method of forming such capsule includes the step of flaring one end of the cannula radially outwardly and inserting the cannula with the flared end trailing into the reservoir and through the discharge tip. A force is then applied to the cannula to force the flared end to be imbedded into the material of the capsule adjacent the end of the discharge tip.
Abstract: A disposable barrel dental impression syringe having a rotatable malleable needle cannula. A disposable barrel is fitted with a malleable needle cannula that is seated to permit easy rotation thereof. A handle is threaded onto the open end of the barrel. A plunger is fitted through the handle and barrel forming a syringe for the extrusion of dental impression material. The needle cannula is positioned within the discharge end of the barrel in such a way to permit easy rotation, yet prevent pushing or pulling the needle cannula through the discharge end of the barrel. This permits exact positioning of the needle cannula for placement of dental impression material. Additionally, only the barrel portion of the syringe being disposable, the precision and feel of a high quality impression syringe is maintained.
Abstract: A readily adjustable belt and a link construction wherein a plurality of links of similar construction are detachably connected in end to end relationship to define an endless torque transmitting belt. Each link is formed of an injection molded plastic part having a female end portion and a male end portion arranged such that the male portion of one link can be readily snap-fitted to the female portion of the next adjacent link. The respective links are identical in structure and are provided in complementary interlocking structure to facilitate attachment and to insure positive interlocking engagement of adjacent links, and yet render the links readily detachably connected so as to facilitate rendering a belt readily adjustable. The respective links are also provided with transversely extending indentations formed in the upper and lower surfaces thereof to impart flexibility thereto. Tapering side surfaces are provided with a non-slip textured surface.