Patents Represented by Attorney Bruce D. Riter
  • Patent number: 8237609
    Abstract: Methods and apparatus are presented for determining a position of an antenna of a GNSS rover from observations of GNSS signals collected at the antenna over multiple epochs and from correction data for at least one of the epochs. A first-epoch rover position relative to a base location is determined for a first epoch using a single-differencing process based on one of (i) fixed carrier-phase ambiguities and (ii) a weighted average of carrier-phase ambiguity candidates which is converged to a predetermined threshold. A second-epoch rover position relative to a base location is determined for a second epoch using a single-differencing process. A second-epoch update of the first-epoch rover position relative to the base location is determined for the second epoch using a single-differenced delta phase process and the first-epoch rover position is combined with the second-epoch update to obtain a second-epoch delta phase rover position relative to a moving base location of the second epoch.
    Type: Grant
    Filed: February 20, 2010
    Date of Patent: August 7, 2012
    Assignee: Trimble Navigation Limited
    Inventors: Nicholas Charles Talbot, Ulrich Vollath
  • Patent number: 8217350
    Abstract: A particle optical arrangement providing an electron microscopy system 3 and an ion beam processing system 7 comprises an objective lens 43 of the electron microscopy system having an annular electrode 59 being a component of the electron microscopy system arranged closest to a position 11 of an object to be examined. Between the annular electrode and a principal axis 9 of the ion beam processing system 7 a shielding electrode 81 is arranged.
    Type: Grant
    Filed: November 23, 2007
    Date of Patent: July 10, 2012
    Assignee: Carl Zeiss NTS GmbH
    Inventor: Dirk Preikszas
  • Patent number: 8212998
    Abstract: A device (1) for the determination of distance by means of light pulses is disclosed. The device (1) comprises a light source (2) for emitting light pulses with a specified frequency, a detector (8) for receiving the light pulses emitted and reflected by the light source, and a controller (4) which is in communication with the light source (2) and the detector (8) and which can control said light source and detector by means of signals. The device (1) further comprises at least two timers (Z1, Z2, Z3) which are connected to the controller (4) and the detector (8). Said controller (4) is designed in such a way that when a light pulse is emitted by the light source (2), the controller (4) generates a start signal which triggers the time measurement by each one of the at least two timers, in order, and beginning again from the start.
    Type: Grant
    Filed: February 29, 2008
    Date of Patent: July 3, 2012
    Assignee: Trimble Germany GmbH
    Inventor: Peter Rindle
  • Patent number: 8143594
    Abstract: A process of preparing a lamella from a substrate includes manufacturing a protection strip on an edge portion of the lamella to be prepared from the substrate, and preparing the lamella, wherein the manufacturing the protection strip includes a first phase of activating a surface area portion of the substrate, and a second phase of electron beam assisted deposition of the protective strip on the activated surface area portion from the gas phase.
    Type: Grant
    Filed: February 5, 2010
    Date of Patent: March 27, 2012
    Inventors: Heinz Wanzenboeck, Wolfram Buehler, Holger Doemer, Carl Kuebler, Daniel Fischer, Gottfried Hochleitner, Emmerich Bertagnolli
  • Patent number: 8130143
    Abstract: Methods and apparatus are present for determining position of a rover from observations of GNSS signals. Observations of GNSS signals are obtained at a rover location, and observations of the GNSS signals are obtained at a plurality of reference stations, each reference station defining a respective baseline between the rover location and a reference station location. For each reference station, a respective differentially-corrected rover position is determined, wherein at least one of the differentially-corrected rover positions is based on one of (i) a multiple-frequency ionosphere-free observable combination, (ii) a multiple-frequency code-phase observable combination, and (iii) a single-frequency carrier-phase and code-plus-carrier-phase combination. A weighted combination of the differentially-corrected rover positions is prepared.
    Type: Grant
    Filed: January 26, 2009
    Date of Patent: March 6, 2012
    Assignee: Trimble Navigation Limited
    Inventors: Junjie Liu, Ulrich Vollath, Peter Ian West, Soeren Ulf Klose
  • Patent number: 8097847
    Abstract: A particle-optical arrangement comprises a charged-particle source for generating a beam of charged particles; a multi-aperture plate arranged in a beam path of the beam of charged particles, wherein the multi-aperture plate has a plurality of apertures formed therein in a predetermined first array pattern, wherein a plurality of charged-particle beamlets is formed from the beam of charged particles downstream of the multi-aperture plate, and wherein a plurality of beam spots is formed in an image plane of the apparatus by the plurality of beamlets, the plurality of beam spots being arranged in a second array pattern; and a particle-optical element for manipulating the beam of charged particles and/or the plurality of beamlets; wherein the first array pattern has a first pattern regularity in a first direction, and the second array pattern has a second pattern regularity in a second direction electron-optically corresponding to the first direction, and wherein the second regularity is higher than the first re
    Type: Grant
    Filed: June 25, 2009
    Date of Patent: January 17, 2012
    Assignees: Carl Ziess SMT AG, Applied Materials Isreal Ltd
    Inventors: Rainer Knippelmeyer, Oliver Kienzle, Thomas Kemen, Heiko Mueller, Stephan Uhlemann, Maximilian Haider, Antonio Casares
  • Patent number: 8058614
    Abstract: The disclosure relates to a method for manufacturing an object with miniaturized structures. The method involves processing the object by supplying reaction gas during concurrent directing an electron beam onto a location to be processed, to deposit material or ablate material; and inspecting the object by scanning the surface of the object with an electron beam and leading generated backscattered electrons and secondary electrons to an energy selector, reflecting the secondary electrons from the energy selector, detecting the backscattered electrons passing the energy selector and generating an electron to microscopic image of the scanned region in dependence on the detected backscattered electrons; and examining the generated electron microscopic image and deciding whether further depositing or ablating of material should be carried out. The disclosure also relates to an electron microscope and a processing system which are adapted for performing the method.
    Type: Grant
    Filed: January 11, 2010
    Date of Patent: November 15, 2011
    Assignee: Carl Zeiss NTS GmbH
    Inventors: Johannes Bihr, Friedhelm Panteleit, Tobias Clauss, Michael Budach
  • Patent number: 8039813
    Abstract: The present invention relates to a particle-optical component comprising a first multi-aperture plate, and a second multi-aperture plate forming a gap between them; wherein a plurality of apertures of the first multi-aperture plate is arranged such that each aperture of the plurality of apertures of the first multi-aperture plate is aligned with a corresponding aperture of a plurality of apertures of the second multi-aperture plate; and wherein the gap has a first width at a first location and a second width at a second location and wherein the second width is by at least 5% greater than the first width. In addition, the present invention pertains to charged particle systems and arrangements comprising such components and methods of manufacturing multi aperture plates having a curved surface.
    Type: Grant
    Filed: September 6, 2006
    Date of Patent: October 18, 2011
    Assignees: Carl Zeiss SMT GmbH, Applied Materials Israel Ltd
    Inventors: Antonio Casares, Thomas Kemen, Rainer Knippelmeyer, Thomas Bayer, Georg Fritz, Johann Greschner, Samuel Kalt
  • Patent number: 8026495
    Abstract: A charged particle beam exposure system has a blanking aperture array (31) having groups of apertures (53) controlled by shift registers (75), wherein different inputs (C) to the shift registers influence a different number of apertures. Charged particle beamlets traversing the apertures are scanned across a charged particle sensitive substrate in synchronism with a clock signal of the shift registers.
    Type: Grant
    Filed: October 28, 2005
    Date of Patent: September 27, 2011
    Assignee: Carl Zeiss SMS GmbH
    Inventor: Elmar Platzgummer
  • Patent number: 7982667
    Abstract: Methods and apparatus for processing of data from GNSS receivers are presented. (1) A real-time GNSS rover-engine, a long distance multi baseline averaging (MBA) method, and a stochastic post-processed accuracy predictor are described. (2) The real-time GNSS rover-engine provides high accuracy position determination (decimeter-level) with short occupation time (2 Minutes) for GIS applications. The long distance multi baseline averaging (MBA) method improves differential-correction accuracy by averaging the position results from several different baselines. This technique provides a higher accuracy than any single baseline solution. It was found, that for long baselines (more than about 250 km), the usage of non-iono-free observables (e.g. L1-only or wide-lane) leads to a higher accuracy with MBA compared to the commonly used iono-free (LC) combination, because of the less noisy observables and the cancellation of the residual ionospheric errors.
    Type: Grant
    Filed: November 14, 2008
    Date of Patent: July 19, 2011
    Assignee: Trimble Navigation Limited
    Inventors: Ulrich Vollath, Soeren Ulf Klose
  • Patent number: 7973916
    Abstract: Apparatus and methods for detecting inclination employ a point source of light from which light is emitted through a lens toward a reflective surface of a liquid contained in a vessel. Light reflected from the surface passes through the lens to form a defocused image of the point source on a two-dimensional array of detector elements. Data acquired from the array represents intensity of the light incident on each of the detector elements. A center of gravity representing inclination of the vessel is determined from the data.
    Type: Grant
    Filed: February 14, 2010
    Date of Patent: July 5, 2011
    Assignee: Trimble Navigation Limited
    Inventor: Andreas Glimm
  • Patent number: 7868290
    Abstract: A material processing system for processing a work piece is provided. The material processing is effected by supplying a reactive gas and energetic radiation for activation of the reactive gas to a surrounding of a location of the work piece to be processed. The radiation is preferably provided by an electron microscope. An objective lens of the electron microscope is preferably disposed between a detector of the electron microscope and the work piece. A gas supply arrangement of the material processing system comprises a valve disposed spaced apart from the processing location, a gas volume between the valve and a location of emergence of the reaction gas being small. The gas supply arrangement further comprises a temperature-adjusted, especially cooled reservoir for accommodating a starting material for the reactive gas.
    Type: Grant
    Filed: September 26, 2008
    Date of Patent: January 11, 2011
    Assignees: Carl Zeiss NTS GmbH, Nawotech GmbH
    Inventors: Hans W. P. Koops, Peter Hoffrogge
  • Patent number: 7868820
    Abstract: Methods and apparatus which characterize the ionospheric error across a network of GNSS reference stations are presented. The method relies on dual-frequency phase measurements in a geometry-free linear combination. The data are filtered for ambiguities and the characteristic parameters of the ionosphere. In combination with filter results from other combinations of phase measurements (ionosphere free combination), the physically-based model provides rapid and reliable ambiguity resolution.
    Type: Grant
    Filed: September 5, 2006
    Date of Patent: January 11, 2011
    Assignee: Trimble Navigation Limited
    Inventor: Peter F. Kolb
  • Patent number: 7755542
    Abstract: Methods and apparatus for processing of data from a network of GNSS reference stations are presented. An ionosphere-free, federated geometry filter is employed so that computation time increases only linearly with the increase in number of reference stations, significantly reducing processing time as compared to a centralized filter approach.
    Type: Grant
    Filed: March 7, 2007
    Date of Patent: July 13, 2010
    Assignee: Trimble Navigation Limited
    Inventors: Xiaoming Chen, Ulrich Vollath
  • Patent number: 7746272
    Abstract: Methods and apparatus are provided for factorized processing of a set of GNSS signal data derived from signals having at least three carriers. A geometry filter is applied to the set of GNSS signal data using a geometry carrier-phase combination to obtain an array of ambiguity estimates for the geometry carrier-phase combination and associated statistical information. A bank of ionosphere filters is applied to the set of GNSS signal data using a geometry-free ionosphere carrier-phase combination to obtain an array of ambiguity estimates for the ionosphere carrier-phase combination and associated statistical information. At least one bank of Quintessence filters is applied to the set of GNSS signal data using a geometry-free and ionosphere-free carrier-phase combination to obtain an array of ambiguity estimates for the geometry-free and ionosphere-free carrier-phase combination and associated statistical information.
    Type: Grant
    Filed: September 30, 2008
    Date of Patent: June 29, 2010
    Assignee: Trimble Navigation Limited
    Inventor: Ulrich Vollath
  • Patent number: 7711480
    Abstract: Method and apparatus for providing GPS pseudorange correction and carrier phase correction information for navigation or surveying activities over a selected geographic region S of arbitrary size. In a navigation mode, a virtual reference station (VRS), positioned near a selected location L, receives differential GPS (DGPS) correction signals, translates these signals into a selected format, and broadcasts this DGPS information in this format for use by a local user. In a survey mode, the VRS receives corrected GPS information, translates this information into a selected format and broadcasts this translated and corrected GPS information and the VRS location, for use by a mobile station in forming a baseline vector from the GPS mobile station to the VRS location.
    Type: Grant
    Filed: June 27, 2005
    Date of Patent: May 4, 2010
    Assignee: Trimble Navigation Limited
    Inventor: James E. Robbins
  • Patent number: 7692578
    Abstract: Three new methods are presented to improve floating solutions and ambiguity resolution for multiple global satellite navigation systems (GNSS), one of which may be an FDMA-based GNSS such as GLONASS: (1) modeling of the hardware-related differential clock error between two (or more) different GNSS, (2) modeling the frequency-dependent biases present in frequency-division multiple access (FDMA) GNSS, and (3) an ambiguity resolution method called Scoreboard Partial Fixing (SPF). The methods presented are independent of the number of carrier frequencies tracked for each satellite navigation system. Their application results in quicker and more reliable ambiguity resolution. The benefits of combining observations of multiple GNSS are exploited in a very efficient way, in contrast to known algorithms which often result in degraded performance with multiple GNSS. The frequency-dependent bias method has been found effective with GNSS observations from a combination of substantially dissimilar hardware, e.g.
    Type: Grant
    Filed: March 31, 2009
    Date of Patent: April 6, 2010
    Assignee: Trimble Navigation Limited
    Inventors: Ulrich Vollath, Kenneth Donald Doucet
  • Patent number: 7688433
    Abstract: Apparatus and methods for detecting inclination employ a point source of light from which light is emitted through a lens toward a reflective surface of a liquid contained in a vessel. Light reflected from the surface passes through the lens to form a defocused image of the point source on a two-dimensional array of detector elements. Data acquired from the array represents intensity of the light incident on each of the detector elements. A center of gravity representing inclination of the vessel is determined from the data.
    Type: Grant
    Filed: June 16, 2008
    Date of Patent: March 30, 2010
    Assignee: Trimble Jena GmbH
    Inventor: Andreas Glimm
  • Patent number: 7645989
    Abstract: The disclosure relates to a method for manufacturing an object with miniaturized structures. The method involves processing the object by supplying reaction gas during concurrent directing an electron beam onto a location to be processed, to deposit material or ablate material; and inspecting the object by scanning the surface of the object with an electron beam and leading generated backscattered electrons and secondary electrons to an energy selector, reflecting the secondary electrons from the energy selector, detecting the backscattered electrons passing the energy selector and generating an electron microscopic image of the scanned region in dependence on the detected backscattered electrons; and examining the generated electron microscopic image and deciding whether further depositing or ablating of material should be carried out. The disclosure also relates to an electron microscope and a processing system which are adapted for performing the method.
    Type: Grant
    Filed: September 19, 2007
    Date of Patent: January 12, 2010
    Assignee: Carl Zeiss NTS GmbH
    Inventors: Johannes Bihr, Friedhelm Panteleit, Tobias Clauss, Michael Budach
  • Patent number: 7589668
    Abstract: Three new methods are presented to improve floating solutions and ambiguity resolution for multiple global satellite navigation systems (GNSS), one of which may be an FDMA-based GNSS such as GLONASS: (1) modeling of the hardware-related differential clock error between two (or more) different GNSS, (2) modeling the frequency-dependent biases present in frequency-division multiple access (FDMA) GNSS, and (3) an ambiguity resolution method called Scoreboard Partial Fixing (SPF). The methods presented are independent of the number of carrier frequencies tracked for each satellite navigation system. Their application results in quicker and more reliable ambiguity resolution. The benefits of combining observations of multiple GNSS are exploited in a very efficient way, in contrast to known algorithms which often result in degraded performance with multiple GNSS. The frequency-dependent bias method has been found effective with GNSS observations from a combination of substantially dissimilar hardware, e.g.
    Type: Grant
    Filed: November 12, 2007
    Date of Patent: September 15, 2009
    Assignee: Trimble Navigation Limited
    Inventors: Ulrich Vollath, Kenneth Donald Doucet