Abstract: Methods for performing damage etch and texturing of single crystal silicon substrates, particularly for use as solar cells or photovoltaic cells. Damage etch with a TMAH solution followed by texturing using solution of KOH or NaOH mixed with IPA is particularly advantageous. The substitution of some of the IPA with ethylene glycol further improves results. Also disclosed is a process that combines both damage etch and texturing etch into a single step.

Abstract: Precursor source containers to hold precursor materials used in thin film deposition processes, such as ALD and MOCVD methods are described. In particular, the container holds both a liquid precursor or a dissolved precursor solution and a rinse solvent in separate chambers, and reduces the overall space requirement. In one embodiment, a cylinder within a cylinder arrangement provides two separate chambers, one for the precursor solution and the other for the rinse solvent.

Abstract: Processes for forming full graphene wafers on silicon or silicon-on-insulator substrates. The processes comprise formation of a metal carbide layer on the substrate and annealing of the metal carbide layer under high vacuum. For volatile metals, this annealing step results in volatilization of the metal species of the metal carbide layer and reformation of the carbon atoms into the desired graphene wafer. Alternatively, for non-volatile metals, the annealing step results in migration of the metal in the metal carbide layer to the top surface of the layer, thereby forming a metal rich top layer. The desired graphene layer is formed by the carbon atoms left at the interface with the metal rich top layer. The thickness of the graphene layer is controlled by the thickness of the metal carbide layer and by solid phase reactions.

Abstract: The present invention relates to methods and systems for processing an exhaust stream containing a recyclable component mixed with other components and impurities to produce a high purity product that contains all of the recyclable component. One or more waste streams containing none of the recyclable component are also produced. The present invention particularly relates to the recovery of valuable recyclable components used in the manufacture of semiconductor devices.

Abstract: A unique combination of solution stabilization and delivery technologies with special ALD operation is provided. A wide range of low volatility solid ALD precursors dissolved in solvents are used. Unstable solutes may be stabilized in solution and all of the solutions may be delivered at room temperature. After the solutions are vaporized, the vapor phase precursors and solvents are pulsed into a deposition chamber to assure true ALD film growth.

Abstract: Methods and systems enable reuse of water in processing of animals into food. In one method, water used in processing of animals into food is received. The water is treated so as to convert the water into a treated from capable of being reused in the processing of the animals into food. The treating includes reducing the amount of solid particles in the water and adding gas to the water. The treated water is provided to be used in the food processing.

Abstract: The present invention relates to a process for production, shipment, and treatment of a NH4F(HF)x feedstock for local production of fluorine and NF3 for semiconductor chamber cleaning without the need for storage of large quantities of dangerous feeds and intermediate products.

Abstract: A method is described for recovering a noble gas, such as xenon or krypton, from a first gas mixture comprising a plurality of components, one of which is the noble gas and the others are typically helium and/or nitrogen, argon, and relatively light fluorocarbons. The gas mixture is first conveyed to a gas chromatography column for separating the noble gas from the other components of the gas mixture. As the noble gas travels relatively slowly through the column, the other components are exhausted from the column before the relatively slow noble gas. Following the exhaust of these other components, a purge gas is supplied to the column to flush the noble gas therefrom. A second gas mixture comprising the noble gas and the purge gas is conveyed from the column to a membrane separator to separate the second gas mixture into a noble gas-rich gas stream and a purge gas-rich gas stream, which may be recirculated back to the column for re-use.

Abstract: Apparatus and methods useful for removal or reduction of moisture from fluids are described. In one embodiment the apparatus comprises a moisture separation unit comprising a thermally regenerable moisture adsorption material having feed and waste sides, and means for regenerating the thermally regenerable moisture adsorption material. The feed fluid contacts the feed side, while a dry, preferably heated purge gas flows past the waste side. The thermally regenerable moisture adsorption material is regenerated by contacting with the heated dry purge gas. The apparatus and methods are particularly useful in supplying dehydrated electronic specialty gases to semiconductor tools.

Abstract: The present invention provides generally a method and apparatus for purifying a liquid. More particularly, purification of a bulk liquid is performed by introducing a liquid stream to a purification vessel, which comprises both a distillation chamber for forming a purified vapor and an annular chamber for collecting a purified liquid that is condensed from the purified vapor. A refrigerant system provides thermodynamic efficiency in the purification method by directing waste heat generated in one part of the refrigerant system for heating duty in another part of the refrigerant system. The method and apparatus can be applied to producing purified carbon dioxide, nitrous oxide, ammonia and fluorocarbons.

Abstract: The present invention provides a method for selectively removing metal ions of interest from a solution (12), such as the wastewater from a chemical mechanical polishing process. The method comprises contacting a solution (12) containing solid particles, an oxidizing agent and a first concentration of the metal ions with an ion-exchange resin (20), such as a crosslinked poly-4-vinylpyridine resin, that is resistant to damage by the oxidizing agent and that is operative when in contact with the solution (12) to exchange selected ones of the metal ions in the solution for selected preferred ions in the ion-exchange resin thereby to produce a treated solution (22) having a second concentration of the metal ions that is lower than the first concentration. The present invention also relates to an apparatus (100) and system (500) for use with the method of the present invention.

Abstract: A tank comprising a rounded bottom section with an inlet located at the lowest point of the rounded bottom section having openings to direct fluid against the curved side walls to form a circulation cell. An outlet is provided inside the tank located above and in close proximity to the inlet. The design of the tank, inlet and outlet provide a circulation pattern that can mix, maintain and resuspend fluids and slurries.

Abstract: A process for the production of nitrogen trifluoride by reacting fluorine gas and liquid ammonia acid fluoride in a first reaction zone having a relatively low energy input followed by treatment of the resulting reaction product in a second reaction zone having a relatively high energy input. The resulting crude nitrogen trifluoride product may be further treated with fluorine gas under elevated temperatures to improve yield of the desired product.

Abstract: The present invention provides a method for selectively removing metal ions of interest from a solution (12), such as the wastewater from a chemical mechanical polishing process. The method comprises contacting a solution (12) containing solid particles, an oxidizing agent and a first concentration of the metal ions with an ion-exchange resin (20), such as a crosslinked poly-4-v resin, that is resistant to damage by the oxidizing agent and that is operative when in contact with the solution (12) to exchange selected ones of the metal ions in the solution for selected preferred ions in the ion-exchange resin thereby to produce a treated solution (22) having a second concentration of the metal ions that is lower than the first concentration. The present invention also relates to an apparatus (100) and system (500) for use with the method of the present invention.

Abstract: The present invention provides a method and apparatus for purifying effluent wastewater utilizing electrophoretic cross-flow filtration and electrodeionization. The method first comprises filtering the water in a cross-flow direction with a filter membrane (120) in the presence of an electric field that is operative to drive suspended particles away from a surface of the filter membrane (120). The permeate (134) containing dissolved solids is next passed through a mixture (188) of at least one cation-exchange resin and at least one anion-exchange resin disposed between a cation-selective membrane (184) and an anion-selective membrane (181) in the presence of an electric field. The electric field drives cations in the permeate through the cation-selective membrane (184), and drives anions in the permeate through the anion-selective membrane (181), thereby to form deionized water (192). The apparatus includes cell modules adapted to be used in plate-and-frame or radial flow configurations.

Abstract: A process for fluoride removal from wastewater streams produced during industrial operation for further industrial use or to comply with environmental regulations. The process segregates the removal of fluoride and fluorosilicate ions, from the totality of ions in the waste water stream, thus improving treatment efficiency and reducing costs. Ion-exchange chromatography is used to remove the fluoride and fluorosilicate ions by passing the wastewater stream through one or more columns that contain a charged resin which selectively binds cations/anions in the stream. The fluoride ions are washed from the column and then collected for removal or use in other processes.

Abstract: The invention relates to systems and methods of measuring low liquid flow rates. The system provides a controller, flow system components, and one or more load cells coupled to a collection vessel. The collection vessel includes a weir that serves as a passage to allow liquid to rise within the weir until the liquid overflows the weir. After the liquid supplied passes a hydraulic stabilization period the controller captures a load cell signal and opens a timing window. At the end of the timing window the controller captures another load cell signal. A controller calculates the mass of the collected liquid over the collection period and the flow rate such as mass rate and/or the volumetric rate. The duration of the timing window depends on the measurement desired. Since the liquid wells up and overflows the weir, the system can make precise measurements of low flow rates. In another feature, feedback control mechanisms are implemented in the batch constant flow method or steady state constant flow method.

Abstract: The present invention provides a method and apparatus for producing nitrogen trifluoride. The method comprises contacting a fluorine-containing feed stream with liquid ammonium acid fluoride in a reaction zone for time and under conditions sufficient to produce nitrogen trifluoride. During the contacting step, the effective melt acidity value of the liquid ammonium acid fluoride is decreased and a reaction product stream is removed. In one embodiment, a gaseous mixture of elemental fluorine and hydrogen fluoride is contacted with a bulk liquid ammonium acid fluoride, such that the initial effective melt acidity value is greater than the melt acidity value of the bulk liquid ammonium acid fluoride in the reaction zone.

Abstract: A process for treating an industrial waste stream containing a borane compound including contacting the industrial waste stream with a resin carrying an oxidation catalyst that is capable of oxidizing the borane compound to boric acid.

Abstract: The present invention provides system and method for delayed answering of a call to a cellular phone which can operate in either a distributed or a centralized manner. In particular, the system and method according to the present invention allows the cellular phone user upon receiving a call to play a message to the caller, such as informing the caller to “hold on” for a short time and that the user will be available shortly. The present invention provides a number of advantageous alternatives to provide a cellular phone user flexibility in answering incoming calls.