Abstract: The invention relates to a device for microfluid analyses for a substrate with plane base surface and cover surface, wherein a chamber is integrated in the substrate for receiving liquid with at least two admissions and a semipermeable or permeable membrane is arranged in the chamber, wherein the chamber is subdivided by the membrane into two sectional chambers with at least one admission each.

Abstract: An apparatus for selectively pre-coating a plasma processing chamber, including a chamber wall is disclosed. The apparatus includes a first set of RF electrodes, the first set of RF electrodes configured to strike a first pre-coat plasma, the first set of RF electrodes defining a first plasma chamber zone. The apparatus also includes a first set of confinement rings disposed around the first set of RF electrodes; and a second set of confinement rings disposed between the first set of confinement rings and the chamber wall. The apparatus further includes a gas delivery system configured to apply a first pre-coat layer to the first plasma zone when a first pre-coat gas is delivered and the first set of RF electrodes is energized. The apparatus also includes the gas delivery system configured to apply a second pre-coat layer to the second plasma zone when a second pre-coat gas is delivered and the second set of RF electrodes is energized.

Abstract: A method of determining an endpoint of a process by measuring a thickness of a layer, the layer being deposited on the surface by a prior process is disclosed. The method includes providing a sensor that is coplanar with the surface, wherein the sensor is configured to measure the thickness. The method also includes exposing the plasma chamber to a plasma, wherein the thickness is changed by the exposing, and determining the thickness as a function of time. The method further includes ascertaining a steady state condition in the thickness, the steady state condition being characterized by a substantially stable measurement of the thickness, a start of the steady state condition representing the endpoint.

Abstract: An apparatus for measuring a temperature of a substrate is disclosed. The apparatus includes a phosphor material in thermal contact to the substrate, the phosphor material producing a fluorescent response in a first wavelength range when exposed to a electromagnetic radiation in a second wavelength range, the fluorescent response decaying at a decay rate that is related to a temperature of the phosphor material, and the phosphor material producing a first set of non volatile byproducts when exposed to a plasma.

Abstract: In a plasma processing system, a method of tuning of a set of plasma processing steps is disclosed. The method includes striking a first plasma comprising neutrals and ions in a plasma reactor of the plasma processing system. The method also includes etching in a first etching step a set of layers on a substrate; positioning a movable uniformity ring around the substrate, wherein a bottom surface of the uniformity ring is about the same height as a top surface of the substrate; and striking a second plasma consisting essentially of neutrals in the plasma reactor of the plasma processing system. The method further includes etching in a second etching step the set of layers on the substrate; and wherein the etching in the first step and the etching in the second step are substantially uniform.

Abstract: The invention relates to a method for determining the electric angular speed of a rotor of an induction motor, wherein electric power supplied to phases of a stator of the induction motor affects the rotor, comprising the steps of: switching off the electric power supply to the phases of the stator during a particular period of time, picking-up signals corresponding to voltages at the stator phases within the particular period of time, and determining the electric angular speed of the rotor based on the picked-up signals.

Abstract: A method for processing a substrate in a plasma processing chamber. The substrate is disposed above a chuck and surrounded by an edge ring while the edge ring being electrically isolated from the chuck. The method includes providing RF power to the chuck and providing a edge ring DC voltage control arrangement. The edge ring DC voltage control arrangement is coupled to the edge ring to provide first voltage to the edge ring, with the edge ring potential being one of a positive potential, a negative potential and a ground. The method further includes generating a plasma within the plasma processing chamber to process the substrate. The substrate is processed while the edge ring DC voltage control arrangement is configured to cause the edge ring potential to be less than a DC potential of the substrate in an embodiment and to be substantially equal to the DC potential of the substrate in another embodiment.

Abstract: The invention relates to a fluid separating device with a lower section with a fluid feeding device and a liquid discharging device, an upper section with a fluid feeding device and a gas discharging device, a contact device which is constructed in such a manner that gas, which rises from the lower section into the upper section, comes into contact with liquid which sinks from the upper section into the lower section. Thereby, the rising gases can be depleted of components which are soluble in said liquid. Furthermore, a measuring device for determining the quantity of liquid and/or the alterations thereof is provided.

Abstract: A device for carrying out a cosmetic method or treating skin ageing and the method comprising the following steps: a) connecting an electronic device, able to generate high frequency electric current waves having a distorted sinusoidal wave form by the presence of harmonics, to one or more electrodes of essentially laminar shape; b) applying said one or more electrodes on the skin surface in the area to be treated; c) activating said electronic device in order to transfer said current waves to said one or more electrodes and to maintain said device activated for a predetermined time; d) deactivating said device and removing the electrodes form the contact with the treated area.

Abstract: In embodiments of the present invention, hinge mechanisms for use in a portable computing device having a base and a lid are presented, the hinge mechanism including: a base link pivotally connected with a base such that the base link rotates about a first axis of rotation, the base link being in sliding communication with a lid; a lid link pivotally connected with the lid such that the lid link rotates about a second axis of rotation, the lid link being in sliding communication with the base; and a center pin pivotally connecting the base link with the lid link such that the base link and the lid link rotate about a third axis of rotation wherein the base link, the lid link, and the center pin cooperatively function to translate the lid over at least two planes of motion with respect to the base.

Abstract: An active call handover arrangement for managing a handover between a plurality of telecommunication devices associated with a public extension number is provided. The arrangement includes a mobility server configured to manage a telecommunication session between a telecommunication device of a third-party caller and a first telecommunication device of the plurality of telecommunication devices. The arrangement also includes a switch component configured to be associated with at least one telecommunication device of the plurality of telecommunication devices. At least one telecommunication device is configured to include mobility client software. The switch component is also configured to enable a user to perform the handover between the first telecommunication device and a second telecommunication device of the plurality of telecommunication devices.

Abstract: A targeted data collection system configured to collect processing data in a plasma processing system is provided. The system includes a data collection host and a plurality of plasma processing components having a plurality of sensors such that each of the plurality of plasma processing components having at least one sensor. Each of the sensors implements at least one intelligent targeted data agent that governs sensor data collection behavior. The system further includes a communication network coupling data collection host and plurality of sensors for bi-directional communication such that a given sensor of plurality of sensors receive information from data collection host pertaining to plasma processing system conditions occurring elsewhere from given sensor.

Abstract: An arrangement configured to contain plasma within plasma tube assembly of downstream microwave plasma system. Downstream microwave plasma system is configured to generate plasma within plasma-sustaining region of plasma tube assembly and channeling at least portion of plasma downstream to plasma processing chamber of downstream microwave plasma system. Arrangement includes a first hollow center electrically conductive disk surrounding a cylindrical structure that defines plasma passage of plasma tube assembly. Arrangement also includes a second hollow center electrically conductive disk also surrounding the cylindrical structure. Second hollow center electrically conductive disk is configured to be disposed in a spaced-apart relationship relative to first hollow center electrically conductive disk so as to form a first hollow center disk-shape interstitial region between first hollow center electrically conductive disc and second hollow center electrically conductive disc.

Abstract: A computer-implemented method for performing recipe evaluation is provided. The computer-implemented method includes integrating a plurality of data sources into a single recipe report card framework. The recipe report card framework includes an editor for interacting with the plurality of data sources. The computer-implemented method also includes displaying a plurality of graphical displays. Each graphical display of the plurality of graphical displays is configured to present a signal parameter of a set of signal parameters for at least a substrate. The computer-implemented method further includes providing a plurality of criteria for each of the set of signal parameters. The computer-implemented method yet also includes providing a plurality of ranges for the each of the set of signal parameters. The computer-implemented method yet further includes providing an expert guide, which is configured to provide guidance in analyzing a recipe.

Abstract: According to a method of detecting and compensating for MRI scan errors, MRI scan data are received. At least one statistical boundaries is determined for the generated data. The data are observed in K-space. The observed K-space data are compared to the determined statistical boundary. Data that are likely undesirable, based on the comparison, are removed. The removed data are replaced with substitute data to modify the data set. Images are generated from the modified data set.