Abstract: A trussed cross-flow blower comprising truss elements on the inside of a cylindrically-shaped cross-flow blower element form at least three trusses which provide rigidity to the blower element. Preferably three trusses are provided, and they are located at radial 120.degree. spacings.

Abstract: A very narrow band excimer laser. The very narrow bandwidth is achieved by using an etalon as an output coupler in combination with a line narrowing element located at the rear of the laser. Preferred embodiments are capable of producing 10 mJ laser pulses at 1000 Hz with a 95% integral bandwidth of less than 1.5 pm.

Abstract: A pulse laser system for providing precise control of laser pulse energy. A fast pulse energy detector having response time in the nanosecond or sub-nanosecond range provides an electrical signal representing pulse energy to a trigger circuit, which integrates the signal and triggers an electro-optic switch when the integrated signal reaches a predetermined level. The operation of the electro-optic switch trims a portion of the pulse energy so that the resulting pulse energy is maintained at a consistent and desired level. In a preferred embodiment, the electro-optic switch includes a Pockels cell and at least one polarizing beam splitter. In this preferred embodiment, an optical delay line provides additional time for the pulse trimming components to operate.

Abstract: A laser having a line-narrowing output coupler. This output coupler reflects a portion of light generated in the gain medium and provides a spectral narrowing of that reflected light. A portion of the line narrowed beam is directed back into the gain medium for further amplification and a portion is transmitted as a part of the laser output. In a preferred embodiment, the laser is line narrowed in the rear as well as by the line narrowing output coupler.

Abstract: An electric discharge gas laser having a laser cavity in which is contained a laser gas and a fan for circulating the laser gas. The fan is supported by an active magnetic bearing system and driven by a brushless DC motor in which the rotor of the motor and at least two magnetic bearings sealed within the gas environment of the laser cavity and the motor stator and the coils of the bearing magnets are located outside the gas environment.

Abstract: A very narrow band KrF excimer laser capable of producing 10 mJ laser pulses at 1000 Hz with a bandwidth of less than 0.6 nm (FWHM). The very narrow bandwidth is achieved by reducing fluorine partial pressure to less than 0.08 and by increasing the reflectance of the output coupler to greater than 25 percent. In a preferred embodiment, prior art fused silica beam expansion prisms used in the prior art line narrowing module were replaced with calcium fluoride prisms.