Abstract: A gas discharge laser capable of operating at pulse rates in the range of 4,000 Hz to 6,000 Hz at pulse energies in the range of 5 mJ to 10 mJ or greater.

Abstract: A protein skimmer for removal of protein contaminates from protein contaminated water. An injector is used for spraying protein contaminated water into a water bubble chamber. The spraying motion causes bubble generation in the water bubble chamber. Contaminates in the water attach themselves to the bubbles and rise to the surface of the water as foam. A hollow foam riser is attached to the top of the water bubble chamber and provides an exit pathway for the contaminated foam. As foam is generated, it rises through the foam riser and carries with it contaminates. A foam collection cup is attached to the top of the foam riser and collects the contaminated foam. Consequently, the water left behind in the mixing chamber is substantially more pure. The substantially more pure water exits the mixing chamber through a purified water exit aperture.

Abstract: A fluid flow monitoring device. A laser source produces a laser beam having a beam frequency that is transmitted through an optical fiber and absorbed in a small quantity of thermally conductive material having high optical absorption at the beam frequency. A temperature sensor is embedded in the light absorbing material. The light absorbing material is placed in a fluid flow and the light absorbing material is heated with energy in the laser beam. Voltage produced by the temperature sensor is monitored as an indication of the fluid flow. The flow-measuring device can be made extremely unintrusive using very thin temperature sensor wire and very thin optical fiber, both of which are contained within a very thin probe. The device is calibrated under known flow conditions. The flowing fluid cools the material. Using the calibration information, speed of the flowing fluid is determined by measuring the voltage produced by the temperature sensor.

Abstract: A chamber/optics support structure for a laser having a laser chamber with a vibration source. The chamber and the laser resonance cavity optical elements are supported on a platform. The chamber is supported by a plurality of wheels which in turn rests on two tracks on track supports mounted on the platform. A vertical vibration isolator isolates vertical vibrations originating in the chamber from the laser optics. A flexible clamp flexibly clamps the chamber in a horizontal position to align it with the resonance cavity optical elements and to substantially decouple vibration between the chamber vibration source to the optical elements in a frequency range of concern. The invention is especially useful for positioning the heavy laser chamber of a narrow band excimer laser and for decoupling vibrations resulting from its blower from the lasers line narrowing module and output coupler.

Abstract: A gas discharge laser having a laser chamber with two elongated erodable electrode elements, at least one of said electrode element having a generally blunt blade-shaped portion comprised of a material having high electrical conductivity with a flow shaping dielectric fairing positioned on each of two sides of said blunt blade-shaped portion. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 10 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.

Abstract: An electric discharge laser with an associated programmable controller which (1) will permit an operator to specify beam quality parameters based on historical data (2) will monitor those parameters and (3) will provide a notification signal to the operator informing him when the beam quality is adequate for integrated circuit fabrication. The controller is programmed to indicate an out-of-control condition when one or more quality parameters exhibit certain specified non-random behavior such as two out of three quality measurements deviating by more than 4 standard deviations and/or three out of four quality measurements deviating by more three standard deviations. In a preferred embodiment the program is designed to detect poor quality by looking for these “runs” of bad quantity data and to produce false indication of system out of control, on the average, no more than once each two months.

Abstract: A portable PV modular solar generator. A plurality of wheels are attached to the bottom of a rechargeable battery container. At least one rechargeable battery is contained inside the rechargeable battery container. A power conditioning panel is connected to the rechargeable battery container. At least one photovoltaic panel is pivotally connected. In a preferred embodiment, the rechargeable battery container is a waterproof battery enclosure having a knife switch connection. A mast having a rotation bar is supported by the waterproof battery enclosure. At least one solar panel support brace for supporting the photovoltaic panel is attached to the rotation bar. The power conditioning panel is waterproof, is attached to the mast and has a door. When the door is opened, at least one safety switch is opened, breaking an electric circuit. The waterproof power conditioning panel has a charge controller and an inverter.

Abstract: The present invention includes a system and method for characterizing the wavelength of a beam of radiation using a known reference transition. The invention comprises a vapor including a material having a transition which absorbs radiation of a known wavelength, the vapor being contained in a container. The container includes an optical path along which the beam of radiation can propagate through the vapor. A dispersive optical element is aligned along the optical path. A detector is aligned along the optical path after the dispersive element. Wavelength information about the beam of radiation is determined from the position of a dip in the detector signal that is correlated to the known reference transition. This method is most useful when the laser bandwidth substantially exceeds the transition bandwidth.

Abstract: A portable laser beam monitor utilizes a plurality of optical trains to monitor ultraviolet laser beam profiles at a plurality of positions along a laser beam path. A preferred embodiment useful for monitoring beam profiles of lithography lasers measures the beam profile at the front aperture, the rear aperture, the shutter plane and at infinity (the divergence plane). The beam profiles are imaged on a fluorescent screen which is monitored by a visible light camera. Images of the profiles may be discharged on the screen of a lap top computer.

Abstract: A cart for the changeout of modules such as a laser chamber module. In one example, the cart includes at least two platforms that are movable with respect to a frame of the cart and that are coupled together such that an upward force for a vertical movement with respect to the frame of one platform provides a vertical movement with respect to the frame of a second platform at an elevated position. The platforms are coupled to each other with chains, wire, or linkage structures. With some carts, the platforms are removable from the rest of the frame. Also with some carts, an upper platform is collapsible on a lower platform. Some carts include two wheel bases that are foldable with respect to one another so as to allow the cart to traverse a surface obstacle by folding one wheel base down over the surface obstacle and transferring a load to that wheel base from another wheel base located on the opposite side of the surface obstacle.

Abstract: A lithograph quality optimization process for controlling laser beam parameters when changing operating modes. The laser is programmed to automatically conduct an optimization procedure preferably in less than one minute to adjust laser operating parameters such as blower speed, total gas pressure and F2 partial pressure in order to optimize beam quality parameters.

Abstract: A bicycle with a torsional shock absorber comprised of a torsion spring assembly. The elements of the torsion spring assembly include: housing, a shaft positioned within the housing, a rubbery substance positioned between the interior surface of the housing and the outer surface of the shaft. The torsional shock absorber is mounted on the bicycle such that shock forces are converted into rotational forces tending to rotate the shaft within the housing. These rotational forces are resisted by the spring force created by the rubbery substance within the torsion spring assembly; thereby absorbing the shock forces. In a preferred embodiment, the rubbery substance is bonded to the interior surface of the housing and the outer surface of the shaft. In a preferred embodiment, the front and rear portions of the bicycle frame pivot about the pedal spindle axis.

Abstract: A tunable injection seeded very narrow band F2 lithography laser. The laser combines modular design features of prior art long life reliable lithography lasers with special techniques to produce a seed beam operated in a first gain medium which beam is used to stimulate narrow band lasing in a second gain medium to produce a very narrow band laser beam useful for integrated circuit lithography. In a preferred embodiment, two tunable etalon output couplers are used to narrow band an F2 laser and the output of the seed laser is amplified in an F2 amplifier.

Abstract: A tunable injection seeded very narrow band F2 lithography laser. The laser combines modular design features of prior art long life releasable lithography lasers with special F2 line narrowing and tuning techniques applied to a seed beam operated in a first gain medium which beam is used to stimulate narrow band lasing in a second gain medium to produce a very narrow band laser beam useful for integrated circuit lithography.

Abstract: A surgical plate and process for preventing screw backout of repaired bones. At least one pawl is provided on a surgical plate adjacent to a screw hole. A screw having a ratchet wheel is inserted through the hole and screwed into the bone. The pawl engages the ratchet wheel to prevent rotational movement of the screw to prevent the screw from backing out. In a preferred embodiment, a pawl plate comprising a base portion is rigidly connected to the surgical plate and a torsion bar is pivotally connected to the base portion. The pawl is positioned at the end of the torsion bar. In the preferred embodiments, several of these special screw holes with pawls, and several screws (each with a ratchet wheel) are used in bone repair.

Abstract: A digital camera that combines the functions of the retinal camera and corneal camera into one, single, small, easy to use instrument. The single camera can acquire digital images of a retinal region of an eye, and digital images of a corneal region of the eye. The camera includes a first combination of optical elements for making said retinal digital images, and a second combination of optical elements for making said corneal digital images. A portion of these elements are shared elements including a first objective element of an objective lens combination, a digital image sensor and at least one eyepiece for viewing either the retina or the cornea. The retinal combination also includes a first changeable element of said objective lens system for focusing, in combination with said first objective element, portions or all of said retinal region at or approximately at a common image plane.

Abstract: A long life laser chamber for a halogen containing gas discharge laser. In a preferred embodiment electrode erosion caused by excited fluorine (i.e., atomic fluorine and fluorine ions) is reduced by forcing the excited fluorine away from the discharge footprint of the electrodes. Preferred embodiments include electrodes with a large number of small holes in the discharge footprint through which laser gas flows to remove the excited fluorine from the footprint region in the time period between electric discharges.

Abstract: An automated machine for filling a plurality of microplates. The automated machine includes at least one input stacking chamber for stacking empty microplates, at least one output stacking chamber for stacking filled microplates, and a microplate filling assembly disposed between the at least one input stacking chamber and the at least one output stacking chamber. The microplate filling assembly has a walking beam indexer, a lid lifter for lifting the lid off each microplate to permit the microplate to be filled, and after filling to replace the lid, and a fill mechanism in communication with a media source and positioned to fill the empty microplates after their lids have been lifted off.

Abstract: A first double pass etalon based spectrometer. In a preferred embodiment a second etalon matched to the first double pass etalon is used to produce extremely precise fringe data. Spectral components of a diffused beam are angularly separated as they are transmitted through an etalon. A retroreflector reflects the transmitted components back through the etalon. Twice transmitted spectral components are directed through a second etalon and focused onto a light detector which in a preferred embodiment is a photo diode array. The spectrometer is very compact producing the extremely precise fringe data permitting bandwidth measurements with precision needed for microlithography for both &Dgr;&lgr;FWHM and &Dgr;&lgr;95%.

Abstract: A single chamber gas discharge laser system having a pulse power source for producing electrical discharges at the rate of at least 1000 pulses per second. The discharge along with laser optics create two short lived gain media, one for producing a seed beam and the other for amplifying the seed beam. Laser gas circulation around a chamber circulation path is provided and the electrodes and discharges are arranged so that debris from one of the gain media is not circulated to the other gain media during discharges until the debris has made a loop around at least 90% of the chamber circulation path.