Abstract: Heat stable, negative resist compositions are provided for use, particularly in deep ultraviolet light X-ray and electron beams. The composition comprises an acid generating onium salt photoinitiator, a source of polyfunctional activated aromatic rings and a source of polyfunctional carbonium ions, with at least one of said sources being a polymer.
Type:
Grant
Filed:
March 16, 1987
Date of Patent:
January 24, 1989
Assignee:
International Business Machines Corporation
Inventors:
Robert D. Allen, Jean M. J. Frechet, Robert J. Twieg, Carlton G. Willson
Abstract: Circuit writing on a substrate is achieved by selectively exposing to a laser portion of a very thin film of a medium comprising electrically isolated conducting clusters in a dielectric matrix material. The preferred materials are gold in highly crosslinked polytetrafluoroethylene.
Type:
Grant
Filed:
December 9, 1986
Date of Patent:
December 27, 1988
Assignee:
International Business Machines Corporation
Abstract: An iodonium or sulfonium triflate is prepared by dissolving or slurring a iodonium or sulfonium halide in an organic solvent and reacting it with a trimethylsilyl triflate.
Type:
Grant
Filed:
August 24, 1987
Date of Patent:
November 22, 1988
Assignee:
International Business Machines Corporation
Abstract: An optical storage system has an information containing film of a material which has a crystallization temperature between 100.degree. C. and 400.degree. C. and can be switched between the amorphous and the crystalline states. Both the amorphous and crystalline states are substantially a single phase where the stoichiometric ratio of the material remains unchanged. Spots on the film is heated with a circular laser beam with a controlled pulse duration and intensity to melt the material in the spots. The spots are quenched at one rate to produce the amorphous state, and in a second revolution of the disk, at a different rate to produce the crystalline state.
Type:
Grant
Filed:
August 28, 1987
Date of Patent:
November 22, 1988
Assignee:
International Business Machines Corporation
Inventors:
Roger W. Barton, Martin Y. Chen, Charles R. Davis, Grace L. Gorman, Vincent Marrello, Kurt A. Rubin
Abstract: A holographic mirror is used in an optical storage head to diffract a laser beam perpendicularly to the optical medium and also to focus the beam onto the optical medium. The mirror can also function to cause circularization of a collimated laser beam of elliptical cross-section.
Type:
Grant
Filed:
March 13, 1987
Date of Patent:
November 15, 1988
Assignee:
International Business Machines Corporation
Abstract: A substantially aqueous composition for drop on demand ink jet printing comprising a fluid vehicle with greater than 50% by weight water, a water soluble dye in the range of 1-10% by weight, a lower alkylene glycol plasticizer in the range of concentration of 1-20% by weight, and in the range of 1-10% by weight, a water soluble additive which is a low molecular weight heterocyclic, bifunctional monomer or dimer in which the two functional groups are either two imide groups, or a hydantoin bearing a carboxylic acid group, with both the imide groups and the amide groups being capped with hydroxyalkylene units.
Type:
Grant
Filed:
October 22, 1987
Date of Patent:
November 1, 1988
Assignee:
International Business Machines Corporation
Inventors:
Paul L. Gendler, Alfred H. Sporer, Donald A. Stremel
Abstract: A process for generating a capacitive servo pattern on a magnetic storage disk, comprising the steps of: (1) coating the disk with a solution of noble metal compound to form a film of the compound on the disk, (2) exposing said film to radiation through a mask to generate an image on the film, and (3) plating the disk on the areas exposed to radiation.
Type:
Grant
Filed:
October 5, 1987
Date of Patent:
October 4, 1988
Assignee:
International Business Machines Corporation
Inventors:
Thomas H. Baum, Phillip J. Brock, James Economy, Robert L. Jackson, Carl E. Larson, James R. Lyerla, Jr., Christopher R. Moylan
Abstract: A process for making a self-aligned thin film transistor, said process comprising the steps of: (1) providing a gate which comprises a glass substrate, a transparent electrode on top thereof, and a metal electrode on top of said transparent electrode, (2) forming a stack by depositing over said gate a triple layer structure consisting of gate dielectric material, active material and a top passivating dielectric, (3) coating the top of said triple layer with a dual-tone photoresist, (4) exposing said photoresist from the top through a mask having transparent areas, opaque areas and areas transparent to selective wavelengths, using broad band UV light, (5) developing the photoresist by treatment with a solvent, (6) etching the stack with a liquid etchant through to the glass substrate, (7) exposing the photoresist from the bottom through the glass substrate using near UV light, (8) developing the photoresist with a solvent, and (9) etching off the top passivating layer of the stack.
Type:
Grant
Filed:
October 30, 1987
Date of Patent:
August 30, 1988
Assignee:
International Business Machines Corporation
Inventors:
William D. Hinsberg, III, Webster E. Howard, Carlton G. Willson
Abstract: Alkyldiarylsulfonium salts of 9, 10,-dithiophenoxyanthracene are useful as photoinitiators in resist compositions, such as epoxy resin formulations, particularly using long wavelength light.
Type:
Grant
Filed:
February 17, 1987
Date of Patent:
July 26, 1988
Assignee:
International Business Machines Corporation
Abstract: A process for accessing disk tracks in an optical storage disk using a laser beam passed through an acousto-optic deflector which generates an undeflected beam and at least one deflected beam both of which are focussed on the surface of the disk. The deflected beam is used to read or write data and the undeflected beam is used to follow a servoing structure on the disk.
Type:
Grant
Filed:
September 15, 1986
Date of Patent:
July 26, 1988
Assignee:
International Business Machines Corporation
Abstract: An electrophotographic apparatus is provided with an electrically conductive voltage control bar between the photoconductor drum or belt and the developer or developer/cleaner roll. The voltage control bar prevents toner filming on said cleaning roll, and makes it possible for that roll to be made of an insulating material such as molded plastic.
Type:
Grant
Filed:
May 9, 1986
Date of Patent:
March 22, 1988
Assignee:
International Business Machines Corporation
Abstract: Reversible phase change storage material is thermally isolated in a storage medium by means of grooves in the substrate and at least one layer of a thermally conductive dielectric material.
Type:
Grant
Filed:
April 10, 1986
Date of Patent:
March 15, 1988
Assignee:
International Business Machines Corporation
Inventors:
Gary C. Bjorklund, Martin Y. Chen, Victor B. Jipson
Abstract: The magnetic disk contains on a disk substrate a magnetic layer comprising a binder, magnetic particles and abrasion-resistant particles, the abrasion-resistant particles being enveloped with a layer intensifying the bond between binder and abrasion-resistant particles. The enveloping layer either has a large specific surface and consists e.g. of SiO.sub.2 /Al.sub.2 O.sub.3 produced by processing the particles with an alkali metal silicate solution and an aluminum sulphate solution, or it is chemically bonded to the binder by enveloping the particles with poly(tetrafluroethylene) and coupling the latter, via an amino bridge to the binder, e.g. an epoxide resin.The magnetic disk according to the invention minimizes the abrasion of the magnetic layer as well as the damaging of the magnetic layer and of the magnetic head by knocked-out abrasion-resistant particles.
Type:
Grant
Filed:
October 24, 1985
Date of Patent:
December 1, 1987
Assignee:
International Business Machines Corporation
Inventors:
Upali Bandara, Holger Hinkel, Werner Steiner, Gerhard Trippel
Abstract: A process for depositing and tightly binding noble metal seeds onto a substrate by coating the substrate with a very thin layer of a polymer which complexes with a noble metal compound and contacting the layer of polymer with a noble metal compound which forms a complex with the layer of polymer.
Type:
Grant
Filed:
June 16, 1986
Date of Patent:
October 20, 1987
Assignee:
International Business Machines Corporation
Abstract: The reactive ion etching and thermal flow resistance of a resist image is enhanced by contacting the resist image with an alkyl metal compound of magnesium or aluminum.
Type:
Grant
Filed:
August 25, 1986
Date of Patent:
September 1, 1987
Assignee:
International Business Machines Corporation
Inventors:
Hiroyuki Hiraoka, Jeffrey W. Labadie, James H. Lee, Scott A. MacDonald, Carlton G. Willson
Abstract: A positive tone photoresist is obtained without a solvent development step. The resist is a polymer containing masked reactive functionality which is imagewise exposed to unmask the functionality then treated with a non-organometallic reagent to remask that functionality. Following flood exposure, the resist is treated with an organometallic reagent containing an element which forms a non-volatile oxide. It is then developed by means of oxygen reactive ion etching.
Type:
Grant
Filed:
January 14, 1986
Date of Patent:
April 14, 1987
Assignee:
International Business Machines Corporation
Inventors:
Jean M. J. Frechet, Hiroshi Ito, Scott A. MacDonald, Carlton G. Willson
Abstract: An apparatus and process for determining focus correction for a lithographic tool are provided. A periodic surface relief structure containing focus information is illuminated so that diffraction beams are generated. An object is translated orthogonally to the periodic structure to cause a change in the intensity of the diffracted beams. Focus correction is determined based upon the changes in the intensity of the diffracted beams.
Type:
Grant
Filed:
April 26, 1985
Date of Patent:
February 24, 1987
Assignee:
International Business Machines Corporation
Inventors:
Anthony Juliana, Jr., Milton R. Latta, Glenn V. Sincerbox, Carlton G. Willson
Abstract: Pd/Sn seeds for use in electroless copper plating are accelerated by treating them with an alkali metal hydroxide at a pH of about 11.3 and at a temperature above 50.degree. C.
Type:
Grant
Filed:
October 29, 1985
Date of Patent:
February 3, 1987
Assignee:
International Business Machines Corporation
Inventors:
Patrick R. Alnot, Daniel J. Auerbach, Christopher R. Brundle, Dolores C. Miller