Patents Represented by Attorney, Agent or Law Firm Michael B. Einschlag
  • Patent number: 6566897
    Abstract: Defects in a patterned substrate are detected by inspection with a charged particle beam inspection tool which generates an image of a portion of the patterned substrate and compares the image with a reference in order to identify any defects in the patterned substrate. Parameters of the tool are optimized to improve image uniformity and contrast, particularly voltage contrast. Prior to imaging an area of the substrate, the tool charges an area surrounding the image area to eliminate or reduce the effects caused by asymmetrical charging in the surrounding area. The tool alternates between charging the surrounding area and imaging the image area to produce a plurality of images of the image area, which are then averaged. The result is a highly uniform image with improved contrast for accurate defect detection.
    Type: Grant
    Filed: December 27, 2001
    Date of Patent: May 20, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Chiwoei Wayne Lo, Kenichi Kanai
  • Patent number: 6555759
    Abstract: An embodiment of the present invention is a method for wafer level IC packaging that includes the steps of: (a) forming compliant, conductive bumps on metalized bond pads or conductors; and (b) surrounding the compliant, conductive bumps in a supporting layer.
    Type: Grant
    Filed: February 21, 2001
    Date of Patent: April 29, 2003
    Inventors: George Tzanavaras, Mihalis Michael
  • Patent number: 6555824
    Abstract: The invention provides an objective lens 1 for focusing a charged particle beam 30 on a specimen. The objective lens comprises a first focusing lens 2 positioned between a charged particle source and the specimen for finely focusing the beam of charged particles on the specimen. The objective lens further comprises a second focusing electrostatic lens 20 positioned between the first focusing lens and the specimen for coarsely focusing the beam of charged particles on the specimen.
    Type: Grant
    Filed: September 16, 1999
    Date of Patent: April 29, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Hans-Peter Feuerbaum, Dieter Winkler
  • Patent number: 6545277
    Abstract: A high efficiency enhanced detecting light guide scintillator detector for charged particle beam apparatus, wherein primary beam passes through the light guide scintillator detector. Light guide scintillator detector is formed as a fork-like part having an open area covering effectively the same area in which the shadow of the primary beam shielding causes low efficiency detection of impinging charged particles. There is further provided a conductive grid or mesh-sheet fitted in the open area between the prongs of the fork-like part biased at various electric potentials inducing one out of many desired possible interactions with detected charged particles such as e.g. deflection and generation of SE's.
    Type: Grant
    Filed: August 15, 2000
    Date of Patent: April 8, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Dror Kella, Betsalel Rechav
  • Patent number: 6545275
    Abstract: The present invention provides, according to a first aspect, a method for automatically evaluating the performance of a charged particle device. The method uses a signal coming from a gold-on-carbon reference target. From this signal the spot size of the particle beam is determined. The method according to the present invention has the advantage that it does not depend on operator judgment. Therefore, the method leads to improved consistency, accuracy and reliability of the beam characterization, and, accordingly, to a better characterization of the quality of the system's performance.
    Type: Grant
    Filed: September 3, 1999
    Date of Patent: April 8, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Asher Pearl, Nadav Haas, Yacov Elgar
  • Patent number: 6539106
    Abstract: Methods and apparatus are provided for inspecting a patterned substrate, comprising: preparing a reference image and a test image, extracting features from the reference image and extracting features from the test image, matching features of the reference image and features of the test image; and comparing features of the reference image and of the test image to identify defects. Embodiments include apparatus for inspecting patterned substrates, computer-readable media containing instructions for controlling a system having a processor for inspecting patterned substrates, and computer program products comprising a computer usable media having computer-readable program code embodied therein for controlling a system for inspecting patterned substrates. The images can be electron-beam voltage-contrast images.
    Type: Grant
    Filed: January 8, 1999
    Date of Patent: March 25, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Harry S. Gallarda, Chiwoei Wayne Lo, Adam Rhoads, Christopher G. Talbot
  • Patent number: 6504393
    Abstract: A method of testing a semiconductor structure such as a finished or part-finished semiconductor wafer, a die on such a wafer, part of such a die, or even one functional element (e.g. a transistor or memory cell) of such a die. The method includes the steps of charging at least a part of the semiconductor structure; applying an electric field perpendicular to a surface of the structure while charging so as to determine charging potential and polarity (i.e. charging either positively or negatively); interrogating the structure including the charged part with a charged particle beam, such as an electron beam, so as to obtain voltage contrast data for the structure; and analyzing the data to determine the functionality of the element.
    Type: Grant
    Filed: July 15, 1997
    Date of Patent: January 7, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Chiwoei Wayne Lo, Mariel Stoops, Christopher Graham Talbot
  • Patent number: 6422701
    Abstract: One embodiment of the present invention is a visual field tester that includes: (a) a high intensity light source; (b) an optical fiber; (c) scanning optics, wherein light output from the light source is directed by the optical fiber to impinge upon the scanning optics, and the scanning optics directs the light to form a stimulus at various field positions; and (d) a video display system to output one or more light patterns. Another embodiment of the present invention is a visual field tester that includes: (a) a video display system to output one or more types of light patterns; (b) a background illumination display system; and (c) viewing optics to magnify the field of view of the video display system and the background illumination display system.
    Type: Grant
    Filed: August 10, 2001
    Date of Patent: July 23, 2002
    Assignee: Carl Zeiss, Inc.
    Inventors: Jay Wei, Zheng-wu Li, Shiyu Zhang
  • Patent number: 6406146
    Abstract: Wavefront refractor apparatus and method which records two Hartmann-Shack images simultaneously at different distances from the lenslet array. The two images recorded this way enable each focal spot to be associated with a lenslet forming the spot to identify “bad” spots, “ghost” spots, and to provide more accurate measurements for diverging or converging wavefronts.
    Type: Grant
    Filed: September 21, 2000
    Date of Patent: June 18, 2002
    Assignee: Carl Zeiss, Inc.
    Inventor: Ming Lai
  • Patent number: 6407872
    Abstract: One embodiment of the present invention is an optical path length scanner which includes: (a) a set of prisms mounted evenly along a movable carrier; and (b) a mechanism that drives the movable carrier to move.
    Type: Grant
    Filed: February 16, 2001
    Date of Patent: June 18, 2002
    Assignee: Carl Zeiss, Inc.
    Inventors: Ming Lai, Jay Wei, Manish D. Kulkarni, Kabir M. Arianta
  • Patent number: 6382793
    Abstract: Embodiments of the present invention provide method and apparatus for measuring a wavefront of a beam of radiation. In particular, one embodiment of the present invention is an apparatus for measuring a wavefront of a beam of radiation at a first plane which includes: (a) relay optics adapted to relay the wavefront from the first plane to a second plane; (b) a moving boundary locus apparatus disposed between the first and second planes; (c) a two-dimensional photodetector array comprising—at least 4×4 photodetector elements disposed in the second plane, wherein each photodetector element produces a time varying signal in response to movement of a portion of the moving boundary locus apparatus; (d) a synchronizer adapted to synchronize each of the time varying signals with a position of the portion of the moving boundary locus apparatus; and (e) an analyzer, responsive to synchronized time varying signals output from the synchronizer, to measure the wavefront of the beam.
    Type: Grant
    Filed: May 20, 2000
    Date of Patent: May 7, 2002
    Assignee: Carl Zeiss, Inc.
    Inventors: Ming Lai, Ning Y. Chan, Jay Wei
  • Patent number: 6382795
    Abstract: Embodiments of the present invention advantageously satisfy the above-identified need in the art, and provide method and apparatus for measuring refractive errors of an eye that improve upon wavefront type refractors using a conventional Hartmann-Shack sensor. Specifically, one embodiment of the present invention is an apparatus for measuring refractive errors of an eye which includes: (a) a source of a probe beam; (b) a first Badal lens system adapted to project the probe beam into a subject's eye to form an illumination spot on a retina; (c) a second Badal lens system adapted to image the illumination spot onto an image plane substantially conjugate to the retina; and (d) a spatial filter disposed in the image plane adapted to transmit at least a portion of the image.
    Type: Grant
    Filed: May 20, 2000
    Date of Patent: May 7, 2002
    Assignee: Carl Zeiss, Inc.
    Inventor: Ming Lai
  • Patent number: 6382794
    Abstract: Method and apparatus is disclosed for mapping a corneal contour and thickness profile. In accordance with one aspect of the present invention, a set of narrow, collimated, parallel beams is projected onto a corneal surface at an angle with respect to a predetermined axis (“an instrument axis”) that is substantially aligned with a visual axis of an eye. The set of beams is rotated about the instrument axis. A CCD camera is disposed to view the cornea along the instrument axis. Traces of the rotating set of beams form a set of rings in images obtained by the CCD camera; wherein outer and inner edges of the rings correspond to intersections of the set of beams with anterior and posterior surfaces of the cornea, respectively. Next, a direct triangulation algorithm is used to determine spatial positions of data points along the outer edges of the rings, and these spatial positions are used to reconstruct the anterior surface profile of the cornea.
    Type: Grant
    Filed: September 27, 1999
    Date of Patent: May 7, 2002
    Assignee: Carl Zeiss, Inc.
    Inventors: Ming Lai, Barry T. Kavoussi, Christopher J. R. V. Baker
  • Patent number: 6374225
    Abstract: An embodiment of the present invention is a method for generating a listener-interest-filled work for an audio or audio-visual work, which method comprises the steps of: (a) generating one or more average speed contours for one or more audio or audio-visual works for one or more categories of users; (b) converting the one or more average speed contours to one or more conceptual speed association data structures; and (c) forming a listener-interest-filtered conceptual speed association data structure from the one or more conceptual speed association data structures.
    Type: Grant
    Filed: October 9, 1998
    Date of Patent: April 16, 2002
    Assignee: Enounce, Incorporated
    Inventor: Donald J. Hejna, Jr.
  • Patent number: 6370688
    Abstract: An embodiment of the present invention is a method for broadcasting information from a server to a client which includes the steps of: (a) broadcasting information at predetermined starting times; (b) broadcasting time-scale modified versions of the information for periods of time, at least one period starting before or after one of the predetermined starting times; (c) receiving a request for the information from the client between the predetermined starting times; and (d) transmitting one of the time-scale modified versions to the client.
    Type: Grant
    Filed: May 26, 1999
    Date of Patent: April 9, 2002
    Assignee: Enounce, Inc.
    Inventor: Donald J. Hejna, Jr.
  • Patent number: 6325512
    Abstract: One embodiment of the present invention is an optical coherence tomography (“OCT”) application apparatus that performs an OCT application on an object. The OCT application apparatus includes: (a) an OCT scanning apparatus which outputs a beam of OCT scanning radiation; (b) an active tracking system that generates and projects a beam of tracking radiation onto a region including a reference tracking feature, which active tracking system includes a tracking optical system that is disposed to intercept the beam of tracking radiation and the beam of OCT scanning radiation; and (c) wherein the active tracking system analyzes tracking radiation reflected from the region to detect movement of the object, and to generate a tracking signal which directs the tracking optical system to follow the movement of the object. In one embodiment of the present invention, the OCT application comprises forming an OCT scan image of the object, for example and without limitation, a retina of an eye.
    Type: Grant
    Filed: October 31, 2000
    Date of Patent: December 4, 2001
    Assignee: Carl Zeiss, Inc.
    Inventor: Jay Wei
  • Patent number: 6293674
    Abstract: Embodiments of the present invention provide method and apparatus for diagnosing and monitoring eye disease such as, for example, glaucoma. In particular, embodiments of the present invention analyze OCT scans of a retina to determine one or more of the following measures for diagnosing and monitoring glaucomatous retinal nerve fiber layer (“NFL”) change: an NFL thickness; a ratio of NFL thickness in a vertical quadrant (superior and inferior quadrants in an OCT scan are combined in a vertical average) and a horizontal quadrant (nasal and temporal quadrants in the OCT scan are combined in a horizontal average); and an NFL signal ratio (“NSR”) of a sum of signal strengths in a predetermined portion of the NFL and a sum of signal strengths in a predetermined region below a retina-pigment epithelium (“RPE”) interface.
    Type: Grant
    Filed: July 11, 2000
    Date of Patent: September 25, 2001
    Assignee: Carl Zeiss, Inc.
    Inventors: David Huang, Alan R. Kirschbaum, Jay Wei
  • Patent number: D473315
    Type: Grant
    Filed: July 26, 2002
    Date of Patent: April 15, 2003
    Assignee: Cool Systems, Inc.
    Inventors: Robert H. J. Miros, Tamara L. Schirrmacher
  • Patent number: D473656
    Type: Grant
    Filed: July 26, 2002
    Date of Patent: April 22, 2003
    Assignee: Cool Systems, Inc.
    Inventors: Robert H. J. Miros, Tamara L. Schirrmacher
  • Patent number: D473948
    Type: Grant
    Filed: March 15, 2002
    Date of Patent: April 29, 2003
    Assignee: Cool Systems, Inc.
    Inventors: William Elkins, Robert H. J. Miros