Abstract: Apparatus, and a corresponding method for its use, for producing an enhanced image of a reflective target on a remote object, such as a space vehicle with which docking maneuvers are being carried out. Radiation at two separate wavelengths illuminates the target, and reflected radiation is separated by wavelength to produce two images simultaneously. Because the target is responsive to only one of the wavelengths, but reflections from other objects are received for both wavelengths, subtraction of the two images substantially removes unwanted image components resulting from reflections from objects other than the target. Producing the two images simultaneously, using two cameras, ensures that the unwanted image components are substantially the same in the two images, and can therefore be removed by subtraction during image processing.

Abstract: A planar magnetron sputtering source having a pair of pole pieces configured to produce a uniform coating, excellent step coverage and excellent step coverage uniformity of a wafer. Between the two pole pieces is a gap within which the magnetic field and electric field produce an electron trap. The shape of the gap produces a depth of sputter profile in the target that results in the uniform coating, excellent step coverage and excellent step coverage uniformity.

Abstract: A system for processing modulated signals received, together with at least one interference signal, by an array of antenna elements in a communications receiver. The method of the invention includes demodulating the received signals, and processing the demodulated signals to produce an output signal that is substantially free of any interference signals, while at the same time effectively steering the antenna pattern produced by the array of elements, to move any spurious nulls in the pattern away from a source of information signals. This results in avoidance of any cycle slipping problems that might otherwise arise in receiver tracking control loops, and has the added benefit of significantly improving performance as measured by the signal-to-noise ratio.

Abstract: A method for plasma processing characterized by the steps of disposing a wafer proximate to a cathode within a process chamber, releasing a gas into the chamber, applying R.F. power in the VHF/UHF frequency range to the cathode to form a plasma within the chamber, developing a magnetic field within the chamber having flux lines substantially perpendicular to the surface of the wafer, and varying the strength of the magnetic field until a desired cathode sheath voltage is attained. The apparatus includes a chamber, a wafer-supporting cathode disposed within the chamber, a mechanism for introducing gas into the chamber, an R.F.

Abstract: A device and related method for coupling segments of an extended local area network (LAN) in such a way that message traffic employing inter-network protocols such as TCP/IP will be handled without the difficulties usually associated with bridges, and without the complexity and expense of full IP router capability. The device operates like a bridge for non-TCP/IP traffic. For TCP/IP traffic it operates in a bridge-like manner but maintains a database associating extended LAN segment addresses with port numbers in the device, so that packets can be automatically forwarded over a spanning tree connecting the network segments. A host computer in any network segment can address others in different network segments of the extended LAN as though all were in a single LAN. The device of the invention functions to block the flow of ARP messages and to generate ARP replies that render the device of the invention transparent to hosts within the extended LAN.

Abstract: A piezoelectric actuator/sensor package and corresponding method for its fabrication, and a method of embedding a ceramic actuator/sensor in a laminated structural member, such as a graphite-epoxy laminate. A ceramic actuator/sensor, with lead wires first bonded to it, is encapsulated in a non-conductive fiber composite material, such as fiberglass cloth and epoxy, to form a package that is precured at a suitable temperature, typically room temperature. Encapsulation provides electrical insulation, good strain coupling, protection from mechanical damage, and reduction in thermal stresses, since the coefficient of thermal expansion of the encapsulating material is selected to be between those of the ceramic and the graphite-epoxy laminate. Graphite fibers may be added to the package to enhance voltage-strain performance. The package is embedded in the structural laminate and the composite structure is cured in a manner that minimizes thermally-induced stresses.

Abstract: In a large semiconductor memory having multiple memory modules that are addressable by a logical page address and a word address within each page, a technique for automatically testing the modules to establish a pool of good modules; then allocating each logical page of memory to a group of modules, with each module in the group being assigned to a particular bit position in all of the data words in the page. After allocation of each page, the modules in the page are tested in various ways to verify that they are fully functional. Modules not passing any of the tests are replaced by others from the pool of good modules. If the pool is exhausted, a partial page is de-allocated. Tests performed on the modules making up a logical page include a random access memory test, a test on bus connections to each module, and tests on the other major components of each module.

Abstract: A technique for impeding the formation of mechanical bonds between workpieces, such as semiconductor wafers, and a carrier or susceptor on which they are supported during a deposition or layer formation process, such as in epitaxial processing. In the formation of relatively thick films, greater than approximately 50 microns (50 .mu.m) thick, wafers can become mechanically bonded to the susceptor on which they are supported, and are subject to damage caused by thermal stresses during a cooldown phase of processing. In the disclosed method, the speed or direction of rotation of a rotatable susceptor is abruptly changed at least once, or periodically during processing. Slight movement of the wafers with respect to the susceptor during each rotation speed change or reversal tends to break any bonds before they can develop strength, and production yields of acceptable wafers are significantly improved.

Abstract: Detecting the presence of particles in a vacuum chamber is effected by positioning an in-situ particle monitor downstream of a pump connected to the chamber. The downstream position of the particle monitor is contrary to the normal practice of locating the particle monitor upstream of the pump, i.e. between the pump and the chamber. The invention avoids problems associated with placing the monitor immediately adjacent to the vacuum chamber, where it is subject to errors and possible surface damage caused by the process taking place in the chamber, and where it may have a lower particle detection probability.

Abstract: A method for reducing targeting errors encountered when trying to locate contaminant particles in a high-magnification imaging device, based on estimates of the particle positions obtained from a scanning device. The method of the invention uses three techniques separately and in combination. The first technique includes selecting at least three reference particles, to provide multiple unique pairs of reference particles for computation of an averaged set of coordinate transformation parameters, used to transform particle position coordinates from the coordinate system of the scanning device to the coordinate system of the imaging device. The averaged transformation parameters result in much smaller targeting errors between the estimated and actual positions of the particles. The targeting errors are further reduced by the use of multiple scans of the scanning device.

Abstract: A pseudo-noise (PN) correlation and demodulation method and apparatus, in which received signals are correlated with locally generated PN codes and correlation measurements are maintained for multiple time bins corresponding to signals received over possible multiple paths. Instead of selecting one or a small number of significant correlation measurements to control data demodulation, the method of the invention performs data demodulation over the multiple time bins, and then selects data values corresponding to significant correlation measurements and combines the selected data values, weighting them in accordance with their relative strengths a determined during correlation. Use of the invention provides improved performance in terms of signal quality and continuity in the presence of multipath conditions. Careful selection of design parameters allows the improved performance to be obtained in a compact and easily portable implementation including transmitter and receiver modules.

Abstract: A composite structure of elastic and viscoelastic components in which dynamic loads are effectively damped by transmission through the viscoelastic components. The structure includes a continuous sandwich comprised either of a single elastic layer enclosed by two viscoelastic layers or of a single viscoelastic layer enclosed by two elastic layers such that the sandwich has little stiffness in any intended direction of loading, and two segmented elastic layers having stiffness in a desired loading direction. The segmented layers have alternating segments and gaps and are disposed one on each side of the viscoelastic layer in such a manner that the gaps of one segmented layer overlap the segments of the other segmented layer. Dynamic loads in the loading direction are transmitted back and forth from one segmented layer to the other, through the continuous sandwich layer containing the viscoelastic material, which thereby provides a high degree of damping.

Abstract: A robot having a pair of magnetic couplings that each couple a motor in a cylindrical first chamber to an associated cylindrical ring closely spaced from the cylindrical wall of said first chamber. The robot includes a mechanism to convert rotation of each of these rings into separate motions of the robot. In the preferred embodiment, these separate motions are radial and rotational.

Abstract: A very large memory structure in which the extent and capacitive loading of global buses are reduced by an arrangement in which global data, address and control buses are connected to column buses through a column disable block for each column of memory modules. The column disable blocks also provide for selection of only a subset of data lines for connection between the global data bus and an associated column data bus. Further, a column disable register in each column disable block permits output from the column data bus to be selectively ignored on the basis of bit position. The column disable registers are uniquely addressable by column, for the selective disablement of column data bus lines. In the described embodiment of the invention, the global buses are triply redundant and the column disable blocks also include voting circuitry for processing of signals from the global buses.

Abstract: A light assembly combined into a unitary structure with a liquid circulation fitting, such as a water return fitting, for use underwater or above water in a pool, tub, spa, fountain, or similar large liquid container. The combination is well suited for use as a combined underwater light and return water fitting in pools, tubs, or spas, and especially in above-ground pools, and as a combined ornamental light and fountain jet. The unitary structure eliminates the need for more than one hole in the pool wall and thereby simplifies installation and decreases the chance of leaks. The structure provides for both water and air cooling if the light is installed underwater. Furthermore, the structure is connectable to water supply lines of various sizes, and includes a directionally adjustable port to control water returning to the pool or container.

Abstract: A technique for producing detection and synchronization signals with respect to a received pseudo-random (PN) signal, with optimum signal-to-noise performance and reduced complexity and cost of hardware. Correlation of the received signal with early and late reference signals is performed in such a way that multiplication hardware is time-shared to produce an early/late sum signal for use in signal detection, and an early/late difference signal for use in synchronization, but without the degradation of performance usually resulting from time-sharing of components. In one basic form of the invention, the received signal is multiplied by one of the local reference signals, and the resulting product is demultiplexed over two alternate paths for computation of the required sum and difference signals.

Abstract: A circuit board construction including a circuit board with circuit modules installed on at least one face of the board, and at least one baffle plate connected rigidly to the board. The baffle plate is of approximately the same dimensions as the circuit board and is rigidly connected to it in a parallel, spaced-apart relationship. The baffle plate has openings at selected locations to direct air onto board-mounted circuit modules, and forms one face of an inlet air plenum, the other face of which is one surface of the circuit board to which the baffle plate is attached, or one face of an adjacent surface. The construction thereby provides impingement cooling of its components, and greatly improved structural rigidity of the circuit boards. One of the forms of the device illustrated has a single baffle plate associated with each circuit board, with circuit modules located on either the inner surface or the outer surface of the board.

Abstract: A method, and corresponding apparatus, for matching a generator impedance with an unknown and possibly changing load impedance, to maximize power transferred to the load. The apparatus includes an impedance matching network, and a network model, to estimate the load impedance from known present network values and a measurement of network input impedance, and to estimate optimum network values from the input impedance and the estimated load impedance. A controller computes new network values based on the present and optimum values, and outputs the new values to the network. The process is repeated using the new network values to estimate the load impedance and generate a new set of optimum values. The controller uses a control equation with parameters selected to ensure rapid convergence on the maximum-power condition, without overshoot or instability.

Abstract: An improved memory module structure for use in a large memory in which, before operational use, the memory modules are tested and configured by a process that requires storing logical page addresses into a page register in each module. In this module, page address data are input to the page register from a data input line to the module. Since there is a separate data input line for each module in a column of such modules, and since the data input lines are not used to carry data to the memory in a test and configuration mode, the data input lines can be used to supply page address data simultaneously to the page registers of an entire column of modules. This avoids having to address each module in the column individually, and reduces testing an configuration time by a factor equal to the number of modules in a column. The complexity of each module is also reduced by obviating the need for individual module addressing in the test mode.