Abstract: A vacuum chamber used for processing articles, such as integrated circuit wafers, display panels, and the like, has a small load lock chamber formed at an opening in a wall of the chamber by a moveable article supporting surface within the chamber and a cover outside of the chamber. The supporting surface and cover are sealed to the chamber wall when urged against it. Articles placed into the load lock chamber, when the cover is opened, are moved into the vacuum chamber for processing by moving the supporting surface away from the wall after the cover has been closed and a vacuum established in the load lock chamber. Articles are removed from the vacuum chamber in a reverse manner. Various mechanisms are describe for moving the articles, including a particular robotic device that simultaneously swaps the positions of two articles between the supporting surface and a processing location within the vacuum chamber by first pulling the articles together and then rotating them in a half-circle.

Abstract: A method of forming a methane product by rejecting nitrogen from a feed gas stream comprising methane and nitrogen is disclosed. After being cooled in a main heat exchanger, the feed gas stream is rectified in a double rectification column comprising a higher pressure column and a lower pressure column. A gas flow is recycled from the lower pressure column to the higher pressure column. Part of the recycle flow is compressed in a compressor, cooled, liquefied in a condenser-reboiler and introduced into the higher pressure column. Another part of the recycle flow is also compressed in the compressor, cooled, liquefied in the main heat exchanger or by expansion, and introduced into the double rectification column in liquid state. At least part of the cooling of both parts of the recycle gas is performed in the main heat exchanger. A liquid methane product is withdrawn from the lower pressure column.

Abstract: Apparatus for supplying natural gas fuel to heat the boilers of an ocean-going tanker for the transport of liquefied natural gas (LNG) comprises a compressor having an inlet communicating with the ullage space of at least one LNG storage tank and an outlet communicating with a conduit leading from the compressor to fuel burners associated with the boilers, and a forced LNG vaporiser having an inlet communicating with a liquid storage region of the said tank and an outlet communicating with the same or a different conduit leading to fuel burners associated with the boilers.

Abstract: Low silicon sodium X zeolite containing little or no sodium A zeolite as by-product, is prepared by direct synthesis from sodium ion-containing hydrogels, the crystallization step being carried out by maintaining the hydrogels at a temperature below about 70° C., and preferably in the range of about 50 to about 70° C. for the duration of the crystallization step. Preferably, the ratios of components in the solutions used to make the hydrogel are such that in the hydrogel the silica/alumina molar ratio will be in the range of about 2.25:1 to about 2.4:1; the sodium oxide to silica molar ratio will be in the range 1.6:1 to about 1.9:1; and the water to sodium oxide molar ratio will be greater than about 60:1.

Abstract: An improved method for preparing monolith adsorbents and activating the adsorbents therein is disclosed. A mixture of lower temperature and higher temperature binders is used in fabricating the paper used to form the monolith structure. The finished monolith structure is heated to a temperature sufficient to remove the lower temperature binder while leaving the higher temperature binder to maintain integrity in the monolith.

Abstract: A gas container is made from metal foam and the spaces defined by the open-celled structure are filled with a solid adsorbent material such as a zeolite or an activated carbon. The container may be made in the form of a panel.

Abstract: Nitrogen is rejected from a feed gas stream comprising methane and nitrogen so as to form a methane product. The feed gas stream is cooled in a main heat exchanger and rectified in a double rectification column comprising a higher pressure column, a lower pressure column and a condenser-reboiler placing the higher and lower pressure rectification columns in heat exchange relationship with each other. At least part of the feed gas stream is expanded through a valve into the higher pressure rectification column and the feed gas stream is partially liquefied upstream of the double rectification column. Over a period of time, the mole fraction of nitrogen in the feed gas stream may increase. The operating pressure of the lower pressure rectification column is periodically increased in response to increases in the mole fraction of nitrogen. A back pressure valve may be periodically adjusted to effect the increase in pressure.

Abstract: Zeolites exchanged with lithium, rubidium, cesium cations and trivalent cations are prepared by first partially, fully or excessively ion-exchanging a sodium-containing zeolite, a potassium-containing zeolite or a sodium- and potassium-containing zeolite with trivalent cations, then calcining the partially, fully or excessively trivalent cation-exchanged zeolite, and then ion exchanging the calcined zeolite with lithium rubidium, cesium cations, thereby replacing hydrogen and any sodium and/or potassium cations remaining in the zeolite with lithium, rubidium, cesium cations, whereby trivalent cations present in the zeolite will not be substantially replaced by the lithium ions.

Abstract: A process for regenerating a spent catalyst having coke deposits thereon in a catalyst regeneration vessel having a dense phase and a dilute phase, wherein the process comprises the steps of: (a) contacting the spent catalyst with a primary oxygen-containing gas in the dense phase, thereby combusting the coke, resulting in the formation of a combustion gas comprising nitrogen oxides and carbon monoxide which further reacts, thus reducing a majority of the nitrogen oxides to form elemental nitrogen; and (b) contacting the combustion gas with a secondary oxygen-containing gas, and typically a shield gas, at a location just above the interface between the dense phase and the dilute phase and also in the dilute phase, thereby oxidizing the remaining CO to CO2 without significant temperature rise in the dilute phase due to the after burn.

Abstract: A gas mixture comprised of nitric oxide and one or more impurities selected from nitrous oxide, nitrogen dioxide, nitrous acid, sulfur dioxide, carbonyl sulfide, water vapor and carbon dioxide is purified by pressure swing adsorption or temperature swing adsorption using a porous, metal-free polymer adsorbent that does not promote the disproportionation of nitric oxide to nitrogen dioxide and nitrogen or nitrous oxide. The adsorption step is preferably carried out at tempereatures in the range of about −120 to about 0° C.

Abstract: Methods for synthesizing extra low-k CVD precursors and forming extra low-k dielectric films on the surfaces of semiconductors wafers and integrated circuits are disclosed. An asymmetric organocyclosiloxane compound is applied to the surface where it will react with and form a film that will have a dielectric constant, k, from 2.0 to 2.5.

Abstract: A process and a metal catalyst are provided for the partial oxidation of hydrocarbons to produce hydrogen and carbon monoxide. The process is conducted by contacting a mixture of a hydrocarbon-containing gas and an oxygen-containing gas in the presence of a metal catalyst. The metal catalyst is a transition or noble metal supported on a ceria monolith substrate. Partial oxidation of hydrocarbons can be carried out at low initiation temperatures with high product yields.

Abstract: A two bed vacuum swing adsorption process for the production of oxygen is disclosed. Efficient use of air blowers and vacuum pumps maximizes the machine utilization and product gas purges in low flow and high flow modes to increase productivity while lessening power consumption.

Abstract: A method of separating a first gaseous component from a gas mixture comprising a first gaseous component and a second gaseous component comprising passing the gaseous mixture into an adsorption zone containing an adsorbent material capable of preferentially adsorbing at least one of the gaseous components in the gaseous mixture, to separate the first gaseous component from the second gaseous component wherein the adsorbent material is a monolithic wheel having a plurality of channels throughout, the channels being aligned parallel to the direction of flow of the gaseous mixture and having a wall thickness of less than 1 mm and recovering the non-preferentially adsorbed gaseous component from the adsorption zone. Preferably, the adsorption zone comprises multiple layers of monolithic structures in the shape of a wheel stacked one upon the other in a direction parallel to the direction of the flow of the gaseous mixture and formed by spirally winding a sheet of corrugated adsorbable material about a hub.

Abstract: A feed gas stream containing hydrogen sulphide is subjected in a furnace 6 to reactions in which part of the hydrogen sulphide is burned to form sulphur dioxide, and is which the sulphur dioxide reacts with residual hydrogen sulphide to form sulphur vapor. The sulphur vapor is condensed from the gas stream exiting the furnace 6 in a sulphur condenser 16. Residual sulphur dioxide is reduced back to hydrogen sulphide by hydrogen in a reactor 22. Water vapor is removed from the reduced gas in a quench tower 28 to form a water vapor-depleted gas stream. One part of the water vapor-depleted gas stream is sent to an adsorber vessel 30 in which hydrogen sulphide is absorbed in an absorbent. The resulting hydrogen sulphide-depleted gas stream is vented from the vessel 30 as a purge stream. Another part of the water vapor-depleted gas stream and a hydrogen sulphide-rich gas formed by desorbing hydrogen sulphide from the absorbent in a vessel 38 are returned as recycle streams to the furnace 6.

Abstract: A process for producing a purified gaseous product from a gaseous feedstream such as air containing impurities is disclosed. The impurities such as hydrogen, water vapor, carbon monoxide and carbon dioxide are removed from the gaseous feedstream in a vessel having layers of adsorbents and oxidation catalysts. The placement of the hydrogen to water vapor conversion catalyst downstream of the step of contacting the feedstream with a catalyst to convert the carbon monoxide to the carbon dioxide and the step of removing the carbon dioxide from the feedstream improves not only performance but also the economies of the purification system.

Abstract: Sulphur is recovered from a first gas stream comprising hydrogen sulphide and at least 50% by volume of ammonia and from a second gas stream comprising hydrogen sulphide but essentially no ammonia, the first gas stream, the second gas stream, and combustion supporting gas comprising at least one stream of essentially pure oxygen or oxygen-enriched air are fed to a single combustion zone or a plurality of combustion zones in parallel with each other without premixing of first gas stream or the second gas stream with oxygen or air, and creating in the or each combustion zone at least one region in which thermal cracking of ammonia takes place, and taking from the reactor an effluent gas stream including sulphur vapor, sulphur dioxide, and hydrogen sulphide, but essentially no residual ammonia.

Abstract: The present invention relates to a process for removing nitrogen oxides from gas streams such as furnace or utility boiler flue gas streams. An adsorber system is used to adsorb nitrogen oxides from the flue gas streams. An oxygen/ozone gas stream contacts the nitrogen oxides to convert the nitrogen oxides to N2O5 which will exit the adsorber with the oxygen stream.

Abstract: A process for separating a gas component from a gas mixture is disclosed. A gas mixture is passed through an adsorption zone which contains an adsorbent which will selectively adsorb a gaseous component from the gas mixture. The adsorption zone contains a layer of monolithic adsorbent and a layer of adsorption beads. Optionally, a third monolithic layer may be employed. The adsorption zone is typically contained in an adsorption vessel.

Abstract: The present invention provides for methods and compositions for gas separation and purification utilizing a metallo-organic polymer adsorbent in processes for separating carbon dioxide, water, nitrogen oxides and hydrocarbons from gas streams.