Patents Represented by Attorney, Agent or Law Firm Polit & Associates, LLC
  • Modular semiconductor workpiece processing tool
    Patent number: 6203582
    Abstract: The present invention provides for a semiconductor workpiece processing tool. The semiconductor workpiece processing tool includes an interface section comprising at least one interface module and a processing section comprising a plurality of processing modules for processing the semiconductor workpieces. The semiconductor workpiece processing tool has a conveyor for transferring the semiconductor workpieces between the interface modules and the processing modules.
    Type: Grant
    Filed: July 15, 1996
    Date of Patent: March 20, 2001
    Assignee: Semitool, Inc.
    Inventors: Robert W. Berner, Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle, Vladimir Zila, Worm Lund