Abstract: A logic gate circuit includes a resistance divider input to the base of an input transistor and a multiple emitter output transistor in an emitter follower configuration. The circuit has favorable switching speed and power dissipation characteristics and reduces the effect of both capacitive loading and series resistance in signal interconnections. An efficient layout of one such logic circuit has intercell wiring channels formed across the circuit and has the inputs and outputs of the circuit arranged in two lines each of which crosses perpendicular to the wiring channels.

Abstract: Ultrasonic agitation in a liquid is used in two ways in the fabrication of small semiconductor diodes. First, a silicon-containing metal layer such as platinum-silicide is removed by exposing it to a silicon etchant and then ultrasonically agitating it. Second, an array of diodes connected by a gold film back contact is separated into individual devices by ultrasonically agitating the array to break up the gold film.

Abstract: In pattern generating apparatus of the type employing a reciprocating laser beam for scanning a substrate surface, three scan lines are formed simultaneously. During reciprocation in one direction, the beam is deflected upwardly at an angle of arccot (1/3) with respect to the reciprocating direction, and during reciprocation in the opposite direction, the beam is deflected downwardly at an angle of arccot (1/3).

Abstract: A table is reciprocated along a straight line by a force that does not precisely control movement direction. Accurate motion constraint is provided by two separated air bearings arranged along a common axis. A third air bearing, displaced from the common axis, supports the table on a sleeve that is free to rotate on its axis.