Patents Represented by Attorney Scheinberg & Griner, LLP
  • Patent number: 8119985
    Abstract: A method and apparatus for determining statistical characteristics of nano-particles includes distributing the nano-particles over a surface and then determining properties of the nano-particles by automatic measurement of multiple particles or by a measurement that determines properties of multiple particles at one time, without manipulating individual nano-particles.
    Type: Grant
    Filed: May 8, 2009
    Date of Patent: February 21, 2012
    Assignee: FEI Company
    Inventors: Diane K. Stewart, Daniel Rosenthal, Michel Epsztein
  • Patent number: 8113236
    Abstract: Systems and method for delivering materials to a tool are disclosed. A material delivery system utilizes two or more sources of the material to be delivered to the tool. One or more of the sources of the tool may be a batch mixer. The material delivery system also includes at least two material delivery recirculation lines providing material to at tool. The material delivery system may be manually or automatically controlled to switch supply of the material from one source to another, and/or to switch from one material delivery recirculation line to another.
    Type: Grant
    Filed: July 17, 2007
    Date of Patent: February 14, 2012
    Assignee: Mega Fluid Systems, Inc.
    Inventors: David Kandiyeli, Todd Graves, Rhey Yang
  • Patent number: 8101928
    Abstract: Charged particles that are in transit through a deflection system when the beam is repositioned do not received the correct deflection force and are misdirected. By independently applying signals to the multiple stages of a deflection system, the number of misdirected particles during a pixel change is reduced.
    Type: Grant
    Filed: July 31, 2009
    Date of Patent: January 24, 2012
    Assignee: FEI Company
    Inventors: Raymond Hill, Steve Ake Rosenberg, Daniel B. Downer
  • Patent number: 8097308
    Abstract: A protective layer is applied to a work piece to protect the surface during charged particle beam processing by directing a fluid toward the surface. The surface is preferably not touched by the applicator. Ink jet print-type print heads are suitable applicators. Ink jet-type print heads allow a wide variety of fluids to be used to form the protective layer. Useful fluids that form protective layers include colloidal silica having small silver particles and hydrocarbon-based inks.
    Type: Grant
    Filed: October 30, 2007
    Date of Patent: January 17, 2012
    Assignee: FEI Company
    Inventors: Jeff Blackwood, Stacey Stone
  • Patent number: 8093558
    Abstract: The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a sample (6) placed inside the environmental cell. The environmental cell according to the invention is characterized in that a part of the environmental cell (14) is transparent to secondary radiation such as back-scattered electrons or X-rays. This enables the detection of this radiation by a detector placed outside the environmental cell and thus a much simpler construction of the cell.
    Type: Grant
    Filed: March 27, 2009
    Date of Patent: January 10, 2012
    Assignee: FEI Company
    Inventor: Bart Buijsse
  • Patent number: 8095231
    Abstract: A graphical programming system allows a user to place geometric shapes onto a scaled image, the shape having associated behavior that operates on the image or on the object of which the image is formed. In a preferred embodiment, the shapes are objects in the Visio program by Microsoft Corporation. The shapes are dragged from a stencil onto an image provided by ion beam or electron microscope image. The shape invokes software or hardware to locate and measure features on the image or to perform operations, such as ion beam milling, on the object that is imaged.
    Type: Grant
    Filed: February 1, 2010
    Date of Patent: January 10, 2012
    Assignee: FEI Company
    Inventors: David J. Tasker, Henri J. Lezec, David A. Head
  • Patent number: 8092128
    Abstract: A fastener suitable for use in airplane manufacture or repair that is coated with a pre-mixed moisture cure sealant. The sealant layer is coated with a frangible moisture barrier that will break apart when the fastener is installed, thus exposing the sealant to atmospheric moisture. Once exposed to moisture, the sealant will begin to cure. Preferred embodiments also provide a moisture indicator that provides a visual indication that the outer moisture resistant layer has been damaged.
    Type: Grant
    Filed: February 20, 2008
    Date of Patent: January 10, 2012
    Inventors: Alan V. Bray, Denise Dama Deppe, Gary Schmidt, John Lee Massingill, Clois E. Powell, Pulinkumar Navinbhai Patel, Vijaykumar Madhawrao Mannari
  • Patent number: 8087379
    Abstract: A method of localized plasma processing improves processing speed and reduces work piece damage compared to charged particle beam deposition and etching. In one embodiment, a plasma jet exits a plasma generating chamber and activates a reactive gas. A jet of plasma and reactive gas impacts and processes the work piece. Because the plasma and the ions in the reactive gas can have low kinetic energy, there can be little or no surface damage. This is particularly useful for deposition processes. When it is desired to etch material, the reactive ions can be more energetic to enhance etching.
    Type: Grant
    Filed: August 24, 2005
    Date of Patent: January 3, 2012
    Assignee: FEI Company
    Inventors: Clive D. Chandler, Noel Smith
  • Patent number: 8080791
    Abstract: Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
    Type: Grant
    Filed: June 29, 2009
    Date of Patent: December 20, 2011
    Assignee: FEI Company
    Inventors: Hanno Sebastian von Harrach, Bert Freitag, Pleun Dona
  • Patent number: 8076650
    Abstract: The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using different ion species to create or alter submicron features of a work piece. The system preferably uses an inductively coupled, magnetically enhanced ion beam source, suitable in conjunction with probe-forming optics sources to produce ion beams of a wide variety of ions without substantial kinetic energy oscillations induced by the source, thereby permitting formation of a high resolution beam.
    Type: Grant
    Filed: July 16, 2007
    Date of Patent: December 13, 2011
    Assignee: FEI Company
    Inventors: Noel Smith, Clive D. Chandler, Mark Utlaut, Paul P. Tesch, Dave Tuggle
  • Patent number: 8071954
    Abstract: The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result the phase plate according to the invention resembles a Boersch phase plate for electrons scattered to such an extent that they pass outside the central structure (15) and resembles a Zernike phase plate for scattered electrons passing through the bore of the central structure. Comparing the phase plate of the invention with a Zernike phase plate is has the advantage that for electrons that are scattered over a large angle, no electrons are absorbed or scattered by a foil, resulting in a better high resolution performance of the TEM. Comparing the phase plate of the invention with a Boersch phase plate the demands for miniaturization of the central structure are less severe.
    Type: Grant
    Filed: June 4, 2009
    Date of Patent: December 6, 2011
    Assignee: FEI Company
    Inventors: Raymond Wagner, Hendrik Nicolaas Slingerland, Frank Jeroen Pieter Schuurmans, Peter Christiaan Tiemeijer
  • Patent number: 8065762
    Abstract: A hammock support is provided that includes an arched structure supported by tripod leg supports. The arched support is preferably a truss structure that provides multiple attachment points to support a hammock bed for varying the types, lengths, and heights of hammocks. In some embodiments, the arched truss structure includes multiple interlocked truss sections that can be assembled and disassembled without tools. The tripod leg supports provide stability for use in wet, uneven, or otherwise inhospitable terrain. The arched structure provides attachment locations for one or more accessories, such as mosquito netting, tents, tables, drink holders, lights, and other accessories. Additionally, the hammock support assembly of the invention is adapted to be used with one or more hammock support assemblies to create larger structures to create tents or bivouacs for camping or emergency shelter.
    Type: Grant
    Filed: September 27, 2005
    Date of Patent: November 29, 2011
    Inventor: Jay Ewing
  • Patent number: 8059918
    Abstract: An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing. This invention demonstrates a method where high accuracy navigation to the site of interest within a relatively large local area (e.g. an area 200 ?m×200 ?m) is possible even where the stage/navigation system is not normally capable of such high accuracy navigation. The combination of large area, high-resolution scanning, digital zoom and registration of the image to an idealized coordinate system enables navigation around a local area without relying on stage movements. Once the image is acquired any sample or beam drift will not affect the alignment. Preferred embodiments thus allow accurate navigation to a site on a sample with sub-100 nm accuracy, even without a high-accuracy stage/navigation system.
    Type: Grant
    Filed: October 11, 2009
    Date of Patent: November 15, 2011
    Assignee: FEI Company
    Inventors: Richard J. Young, Chad Rue, Peter D. Carleson
  • Patent number: 8053725
    Abstract: Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within an ion beam column a filter that removes the low energy ions from the beam.
    Type: Grant
    Filed: June 29, 2009
    Date of Patent: November 8, 2011
    Assignee: FEI Company
    Inventors: Gregory A. Schwind, Jonathan H. Orloff
  • Patent number: 8021058
    Abstract: A method of forming a waveguide or an optical assembly includes molding a waveguide material, optionally in alignment with one or more optical components. The one or more optical components are aligned in a precision mold that is also used to form the waveguide. A cladding and encapsulation material can also be molded. The molded materials can be used to hold the components together in alignment in a single assembly. A connector structure can be molded as part of the assembly or can be prefabricated and incorporated into the molded assembly to facilitate connecting the assembly to other components without requiring active alignment or polishing of optical fiber ends.
    Type: Grant
    Filed: August 18, 2008
    Date of Patent: September 20, 2011
    Inventors: Kenneth Noddings, Daniel Marshall Andrews, Thomas Alan Bishop, Michael Anthony Olla
  • Patent number: 8011259
    Abstract: The invention relates to a composite structure of a sample carrier 20 and a sample holder 30 for use in a TEM, for example. The sample carrier is hereby separately embodied from the sample holder. Although such compositions are already known, the known compositions are very fragile constructions. The sample carrier according to the invention can be formed from a strip of metal, and is a simple and cheap element. Using resilient force, it clamps onto or into the sample holder. The portion of the sample holder to which the sample carrier couples also has a simple form. The sample carrier can couple to the sample holder in vacuum using a coupling tool.
    Type: Grant
    Filed: May 25, 2010
    Date of Patent: September 6, 2011
    Assignee: FEI Company
    Inventor: Pleun Dona
  • Patent number: 8013311
    Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.
    Type: Grant
    Filed: October 9, 2009
    Date of Patent: September 6, 2011
    Assignee: FEI Company
    Inventors: Raymond Hill, Lawrence Scipioni, Colin August Sanford, Mark DiManna, Michael Tanguay
  • Patent number: 8005875
    Abstract: Automatic transmission of information is generated when the content of a posted electronic form matches a predefined criteria. An interface allows the user to create a criterion template to specify the match criterion without requiring the user to have the skills of a professional programmer. The person to be notified and the form and content of the notification can also be defined by the user and can be dependent on the content of the posted form. In one application, individuals associated with an institution of higher learning are automatically notified when a student submits an electronic profile form showing that the student meets a pre-specified criteria.
    Type: Grant
    Filed: November 3, 2008
    Date of Patent: August 23, 2011
    Assignee: CollegeNet, Inc.
    Inventors: Matthew W. Hickey, James H. Wolfston, Susan E. Malveau
  • Patent number: 7999225
    Abstract: The invention describes a particle source in which energy selection occurs. The energy selection occurs by sending a beam of electrically charged particles 103 eccentrically through a lens 107. As a result of this, energy dispersion will occur in an image formed by the lens. By projecting this image onto a slit 109 in an energy selecting diaphragm 108, it is possible to allow only particles in a limited portion of the energy spectrum to pass. Consequently, the passed beam 113 will have a reduced energy spread. Deflection unit 112 deflects the beam to the optical axis 101. One can also elect to deflect a beam 105 going through the middle of the lens toward the optical axis and having, for example, greater current. The energy dispersed spot is imaged on the slit by a deflector 111. When positioning the energy dispersed spot on the slit, central beam 105 is deflected from the axis to such an extent that it is stopped by the energy selecting diaphragm.
    Type: Grant
    Filed: May 26, 2009
    Date of Patent: August 16, 2011
    Assignee: FEI Company
    Inventor: Alexander Henstra
  • Patent number: D648912
    Type: Grant
    Filed: May 20, 2010
    Date of Patent: November 15, 2011
    Inventor: Maria Dolores Cantu