Abstract: To grasp a removable particle contamination and appropriately removing a particle contamination exposing from a surface of a semiconductor layer, this production method of the semiconductor optical device includes a surface treatment step in which particle contaminations removed from a surface of a cap layer 5 by etching are limited to particle contaminations A1, C2 higher than the thickness of a resist layer 22 formed on the surface of the cap layer 5. Therefore, the heights of removable particle contaminations can be preliminarily grasped based on the thickness of the resist layer 22 formed, whereby the particle contaminations exposing from the surface of the cap layer 5 can be appropriately removed by etching just enough. By repeating steps S11-S17 while changing the thickness of the resist layer 22, it is feasible to prevent unnecessary etching of a wafer and to remove the particle contaminations more completely.

Abstract: A light receiving device 1 includes a support substrate 12 provided thereon with a photodetector 11 including a photodetecting portion 111 and a base substrate 112 on which the photodetecting portion 111 is placed; and a transparent substrate 13 disposed so as to oppose the face of the support substrate 12 on which the photodetector 11 is provided. Between the support substrate 12 and the transparent substrate 13, a frame portion 14 is provided so as to surround the photodetector 11. The frame portion 14 is a photo-curing adhesive, and directly adhered to the transparent substrate 13 and the support substrate 12. Such structure provides a light receiving device capable of exhibiting the desired performance, and a method of manufacturing such light receiving device can also be provided.

Abstract: The present invention is a heat processing apparatus comprising: a processing vessel that receives a plurality of objects to be processed in a tier-like manner to subject the objects to be processed to a predetermined heating process; a tubular heater disposed to surround the processing vessel, the tubular heater being capable of heating the objects to be processed; an exhaust heat system for discharging an atmosphere in a space between the heater and the processing vessel; and a cooling unit that blows out a cooling fluid into the space to cool the processing vessel. The heater has a tubular heat insulating member, and a heating resistor arranged on an inner circumference of the heat insulating member. The cooling unit has a plurality of blowing nozzles embedded in the heat insulating member. Each of the blowing nozzles is formed in such a manner that an inlet orifice of the blowing nozzle and an outlet orifice thereof are not linearly aligned to each other.

Abstract: A graphite body comprises aligned graphite flakes bonded with a binder, in which the graphite has an average particle size of >200 ?m. Methods of forming such highly oriented graphite material include:— a) forming a mixture of a mesophase pitch with a graphite powder; b) rolling the mixture to align the graphite powder and to form a body of graphite and pitch; c) carbonising the body; and optionally d) graphitising the body. Pressing rather than rolling may be employed. Such graphite bodies have high thermal conductivity and anisotropy and may be used for thermal management.

Abstract: A buffer tank for use in a liquid treatment apparatus applying a liquid treatment to a substrate surface by supplying thereto a treating liquid from a nozzle, the buffer tank is provided in a flow path of the treating liquid from a supply tank of the liquid to the nozzle, the buffer tank including an inlet port for introducing the treating liquid supplied from the supply tank into a buffer tank body, a first accumulation region in the buffer tank body for holding the treating liquid introduced into the buffer tank, a first vent port for discharging bubbles accumulated in the first accumulation region, a filter through which the treating liquid in the first accumulation region passes, the filter filtering the treating liquid, and a supplying port for supplying the treating liquid filtered with the filter to the nozzle.

Abstract: A control unit extracts stop position candidates P1 to Pn from the white line data and three-dimensional object data recognized and acquires their positions L1 to Ln, and sets, as a target stop position Lt, one of the stop position candidates P1 to Pn that is the closest to the braking distance Lb obtained based on the current braking operation quantity ?p and vehicle speed V. The control unit subtracts a learning value LL from the target stop position Lt to calculate a corrected target stop position Ltc and sets a corrected braking operation quantity value ?pc based on the corrected target stop position Ltc and vehicle speed V. When the absolute value |?p??pc| of the difference between the braking operation quantity ?p and the corrected braking operation quantity value ?pc is within a preset range, the control unit executes braking control based on the corrected braking operation quantity value ?pc.

Abstract: A rocker arm includes a roller brought into contact with a cam to be rotated and an arm body having a storage portion for the roller. The storage portion has an opening edge including a part receiving lubricant oil flowing along an upper surface of the arm body. The part is formed with a receiving opening edge jutting out so that both widthwise ends are located away from a circumferential surface of the roller and so that a widthwise central portion comes closer to the circumferential surface of the roller. The arm body has a lubricant guide path formed by recessing the upper surface thereof and guiding the lubricant oil into the storage portion. The lubricant guide path has a width that is gradually rendered larger as the lubricant guide path gets close to the widthwise central portion of the receiving opening edge.

Abstract: An optical transmitter that multiplexes a plurality of signal light each having less chirp characteristic by the CML technique is disclosed. The optical transmitter comprises a plurality of optical modules, a plurality of TEC controllers each driving the TEC in the optical module, a de-multiplexer that de-multiplexes the output of respective modules, an etalon filter, and a monitoring unit that monitors the component of the signal light output from respective modules. The TEC controller controls the temperature of the LD in the module such that two emission wavelengths of the LD each corresponding to the ON level and the OFF level is set in both side of one of the critical wavelengths of the etalon filter where the transmittance thereof becomes a maximum.

Abstract: In a RLSA microwave plasma processing apparatus that radiates microwave from a microwave generator into a chamber by using a planer antenna (Radial Line Slot Antenna) having many slots formed according to a certain pattern, the chamber contaminated with Na or the like is cleaned by using a cleaning gas containing H2 and O2.

Abstract: An image forming apparatus 10 includes: a body frame 11 including an image forming section 60; and an image reading section 40, as an upper member openably mounted on top of the body frame, that is provided with a document stage on which a document is loaded and that reads an image of the document. The image forming apparatus further includes: first holding member 6 placing the image reading section 40 over the image forming section and holding it in a closed state; and second holding member 1 holding the image reading section rotatably relative to the image forming section and having a guide shaft and guide slots that are in a disengaged state when the image reading section is in the closed state and that engage with each other so as to function as a hinge when the image reading section is rotated from the closed state to the open state, relative to the image forming section.

Abstract: A film formation method for a semiconductor process performs a film formation process to form a silicon-containing insulating film doped with a metal on a target substrate, in a process field inside a process container configured to be selectively supplied with a silicon source gas and a metal source gas. The method includes forming a first insulating thin layer by use of a chemical reaction of the silicon source gas, while maintaining a shut-off state of supply of the metal source gas; then, forming a first metal thin layer by use of a chemical reaction of the metal source gas, while maintaining a shut-off state of supply of the silicon source gas; and then, forming a second insulating thin layer by use of the chemical reaction of the silicon source gas, while maintaining a shut-off state of supply of the metal source gas.

Abstract: A pluggable optical transceiver with a function not affecting the command status of the host system appeared in the internal bus, which is coupled with the command line within the transceiver, even when the transceiver is plugged in the host system. The optical transceiver provides a power supply circuit and a control unit. The power supply circuit, by receiving an external electric power, generates an internal electric power with a substantial time lag from a moment when the optical transceiver is plugged in the host system. The control unit communicates with the host system through the command line pulled up to the external electric power within the optical transceiver.

Abstract: Rather than simply changing a component or module to be installed, a conveyance speed of a conveyance means for conveying a workpiece is modified in response to the specifications of a product when a product with specifications modified in part from common specifications of mass produced products is added to the mass produced products. Furthermore, a condition wherein the speed of the conveyance means is modified in accordance with specifications is displayed in real time such that a worker can identify the condition.

Abstract: An optical transmitter is disclosed in which the wavelength deviation occurred at the turning on from the disabled state to the enabled state by the negating of the Tx_Disable command is suppressed. The optical transmitter includes a semiconductor laser diode (LD) and an automatic temperature controller (ATC) circuit to drive the thermo-electric cooler (TEC). When the transmitter receives the Tx_Disable to start up the operation of the LD, a pulsed signal is generated in synchronizing with the transition of the Tx_Disable signal to momentarily enhance the cooling capacity of the TEC in order to compensate the increase of the temperature of the LD by the self heating, which prevents the output wavelength of the transmitter from deviating.

Abstract: An optical article, having an almost complete isotropy and dimensions equal to or lower than 500 .mu.m, is prepared by a sol-gel procedure comprising a preliminary step wherein the mould is filled cold with a sol containing the desired oxide precursors, sol gelation, gel drying, removal of the gel from the mould and the subsequent miniaturization of the dried gel. The optical article can be used for optic telecommunications.

Abstract: The invention relates to a process for the preparation of L-amino acids, in particular L-threonine.

Abstract: A substrate transfer apparatus 100 includes a substrate transport means 4 having a transport base 5 and a plurality of retention arms 41a-41e for retaining substrates W, an optical sensor 62 that is used to define a horizontal optical axis L, an elevator means 52 for moving the transport base 5 up and down, and a height detection means 54 for detecting the height of the transport base 5 relative to the optical axis L. In accordance with a light-reception/no-light-reception detection result fed from the optical sensor 62 and the height of the transport base 5, a judgment means 72a of a control section 7 judges whether the postures of the retention arms 41a-41e relative to the horizontal plane are normal. When the judgment means 72a judges that the postures of the retention arms 41a-41e relative to the horizontal plane are abnormal, the control section 7 exercises control to stop the substrate transport means 4.

Abstract: A rinse method for rinsing a substrate having an exposure pattern thereon developed includes presetting conditions for a rinse process according to surface states of the substrate, measuring a surface state of the substrate, selecting a corresponding condition for the rinse process based on the measured surface state of the substrate, and performing the rinse process under the selected condition.

Abstract: The present invention is a film deposition method of a metal film comprising the steps of: placing an object to be processed having a recess formed in a surface thereof, on a stage in a processing vessel; evacuating the processing vessel to create a vacuum therein; ionizing a metal target in the evacuated processing vessel to generate metal particles including metal ions, by means of a plasma formed by making the plasma from an inert gas; and by applying a bias electric power to the object to be processed placed on the stage to draw the plasma and the metal particles into the object to be processed, scraping a bottom part of the recess to form a scraped recess, and depositing a metal film on an entire surface of the object to be processed including surfaces in the recess and in the scraped recess.

Abstract: A hydraulic actuator for a belt type continuously variable transmission, with which a smooth operation is secured and both superior productivity and reduced manufacturing costs can be expected, includes a first cylinder provided on a movable sheave, a drum having a first drum portion that covers the first cylinder and a second drum portion that is fitted to a boss portion of the movable sheave and formed with a plurality of projections, a first plunger having a cylindrical portion that is fitted to the first cylinder and the second drum portion to form a first hydraulic chamber, and a second plunger fitted to the cylindrical portion and the first cylinder to form a second hydraulic chamber. An oil passage connecting the first hydraulic chamber and the second hydraulic chamber is formed by a gap between the second drum portion and cylindrical portion, which are fitted together.