Patents Represented by Attorney Stallman & Pollock LLP
  • Patent number: 7515346
    Abstract: Arrangements for combination and fast-axis alignment of fast-axes of diode-laser beams are disclosed. Alignment arrangements include providing each diode-laser with a corresponding alignable fast-axis collimating lens, providing individually alignable mirrors for steering an re-orienting beams from each diode-laser, and providing single diode-laser slab-modules in which the diode-laser beams can be pre-aligned to a common propagation-axis direction, and in which edges and surfaces of the slabs can be used to align the fast and slow-axes of the beams. Beam combination methods include combination by dichroic elements, polarization-sensitive elements, and optical fiber bundles.
    Type: Grant
    Filed: July 18, 2006
    Date of Patent: April 7, 2009
    Assignee: Coherent, Inc.
    Inventors: Sergei V. Govorkov, Douglas William Anthon
  • Patent number: 7510944
    Abstract: In a method of forming MIM capacitor structure, a TiW layer is formed and a capacitor mask is used to define areas of the TiW layer that will be sued in the formation of the MIM capacitor. A capacitor mask is then used to expose surface areas of the TiW layer, followed by deposition of a capacitor dielectric layer. A via mask and etch are then performed to provide a contact via to the bottom plate TiW layer. After the via etch, a Ti/TiN liner stack is deposited. The Ti/TiN multilayer stacked film serves as the capacitor top plate as well as the via contact liner film. Next, Tungsten is deposited to fill the vias and a Tungsten planarization step is performed.
    Type: Grant
    Filed: May 10, 2007
    Date of Patent: March 31, 2009
    Assignee: National Semiconductor Corporation
    Inventors: Venkat Raghavan, Andrew Strachan
  • Patent number: 7508525
    Abstract: An interferometer configured for use in optical coherence domain (OCT) reflectometry systems is disclosed. In the preferred embodiments, efficient routing of light and a balanced detection arrangement provide a high signal to noise ratio. In one set of embodiments, a pair of cascaded 2×2 couplers is used to split light along separate sample and reference paths and also for combining light returning from those paths and supplying the interfered collected light to the detection system. The interferometer can be used with various OCT modalities including time-domain and frequency domain approaches.
    Type: Grant
    Filed: April 28, 2008
    Date of Patent: March 24, 2009
    Assignee: Carl Zeiss Meditec, Inc.
    Inventors: Yan Zhou, Matthew J. Everett, Martin Hacker
  • Patent number: 7507963
    Abstract: The present invention relates to sub-millimeter wave frequency heterodyne imaging systems. More specifically, the present invention relates to a sub-millimeter wave frequency heterodyne detector system for imaging the magnitude and phase of transmitted power through or reflected power off of mechanically scanned samples at sub-millimeter wave frequencies.
    Type: Grant
    Filed: October 1, 2004
    Date of Patent: March 24, 2009
    Assignees: California Institute of Technology, Coherent, Inc.
    Inventors: Peter H. Siegel, Robert Dengler, Eric R. Mueller
  • Patent number: 7508850
    Abstract: The quality of pulses output from laser systems such as super-pulsed CO2 slab lasers can be improved using half-wavelength electro-optic modulators (EOMs), in combination with thin film polarizers (TFPs). A voltage applied across a CdTe crystal of the EOM rotates the polarization of a pulse passing through the EOM by 90°. The polarization determines whether the pulse passes through, or is redirected by, the TFP. The voltage applied to the crystal can be pulsed to prevent a drop in charge, which could allow radiation to leak to the application. A totem pole switch used to apply voltage to the EOM can receive a pulsed voltage for improved performance. Directing by the EOM allows pulses to be clipped at the front/back end(s), split into portions, and/or directed to separate scanners. Directing pulses or pulse portions to different scanners can increase the output of systems such as hole drilling systems.
    Type: Grant
    Filed: September 2, 2004
    Date of Patent: March 24, 2009
    Assignee: Coherent, Inc.
    Inventors: Leon A. Newman, John Kennedy, Joel Fontanella, Phillip J. Gardner
  • Patent number: 7508579
    Abstract: Several examples of double-pass fiber amplifiers including a polarization maintaining (PM) gain-fiber are disclosed. In each example, input and twice-amplified output are separated by an all-fiber, polarization-maintaining polarization splitter combiner. In one example, light is first passed through a gain fiber in a first polarization direction and then is passed through the gain fiber in a second polarization direction. The light exits the splitter combiner in the first polarization direction.
    Type: Grant
    Filed: September 21, 2007
    Date of Patent: March 24, 2009
    Assignee: Coherent, Inc.
    Inventors: Andrei Starodoumov, Paul Crittenden
  • Patent number: 7505142
    Abstract: A system, method and apparatus for anatomical mapping utilizing optical coherence tomography. In the present invention, 3-dimensional fundus intensity imagery can be acquired from a scanning of light back-reflected from an eye. The scanning can include spectral domain scanning, as an example. A fundus intensity image can be acquired in real-time. The 3-dimensional data set can be reduced to generate an anatomical mapping, such as an edema mapping and a thickness mapping. Optionally, a partial fundus intensity image can be produced from the scanning of the eye to generate an en face view of the retinal structure of the eye without first requiring a full segmentation of the 3-D data set. Advantageously, the system, method and apparatus of the present invention can provide quantitative three-dimensional information about the spatial location and extent of macular edema and other pathologies.
    Type: Grant
    Filed: October 18, 2007
    Date of Patent: March 17, 2009
    Assignee: University of Miami
    Inventors: Robert W. Knighton, Shuliang Jiao, Giovanni Gregori, Carmen A. Puliafito
  • Patent number: 7505491
    Abstract: A frequency-tripled laser-resonator has three resonator-branches. The branches are optically connected with each other by one or more polarization-selective devices. Unpolarized fundamental radiation is generated by optically pumping a gain-element in one branch of the resonator. The polarization-selective device provides that radiation in the other branches is plane-polarized, with the polarization planes of radiation entering the branches perpendicular to each other. Two optically nonlinear crystals are located in one of the branches of the resonator in which the fundamental radiation is plane-polarized and arranged to generate third-harmonic radiation. Three-branch resonators including two gain-elements having a optical relay therebetween, and a three-branch ring-laser-resonator are also disclosed.
    Type: Grant
    Filed: August 29, 2007
    Date of Patent: March 17, 2009
    Assignee: Coherent, Inc.
    Inventors: Gary Y. Wang, Norman Hodgson, H. Yang Pang, R. Russel Austin
  • Patent number: 7505664
    Abstract: A series of racksaver components can be used to contain and protect runs of fiber optic cables and/or jumpers. Racksaver components can interconnect with pre-established and dedicated fiber ironwork racking and fiber raceway/fiber guide with no need for additional raceway/fiber guide, eliminating the need for additional supports, bracing, and ironwork infrastructure to support a separate fiber level. Existing copper/power racking and/or cabling can be used for the placement of the racksaver components for fiber optic cable and jumpers. In addition to rigid linear components, racksaver components can include flexible components allowing for bending of the fibers/jumpers and/or non-linear runs, and interoperable components for connecting with other devices.
    Type: Grant
    Filed: October 30, 2007
    Date of Patent: March 17, 2009
    Assignee: Westek Electronics, Inc.
    Inventor: Steven Weinert
  • Patent number: 7502404
    Abstract: A method for optically pumping a gain-medium with partially polarized or unpolarized pump-light having a wavelength at which that gain-medium has an absorption that is dependent on the polarization plane of the pump-light is disclosed. The pump-light is directed into the gain-medium. The strongest-absorbed polarization component of the pump-light is substantially absorbed and the weakest-absorbed polarization component is partially transmitted by the gain-medium. The polarization plane of the transmitted component is rotated through 90 degrees and the polarization-rotated pump-light is directed back into the gain-medium, wherein it is substantially absorbed.
    Type: Grant
    Filed: October 20, 2006
    Date of Patent: March 10, 2009
    Assignee: Coherent, Inc.
    Inventors: Keith M. Murdoch, Steven M. Jarrett, Edward D. Reed
  • Patent number: 7502104
    Abstract: The present invention provides a probe beam profile—modulated optical reflectivity metrology system having a modulated pump source for exciting the sample. A separate probe beam is directed to interact with the sample in a manner so that the rays within the probe beam create a spread of angles of incidence. A detector array simultaneously measures intensities of the rays within the reflected/diffracted probe beam simultaneously at different angles of incidence. The intensity and angle of incidence information is used to analyze the sample.
    Type: Grant
    Filed: August 6, 2007
    Date of Patent: March 10, 2009
    Assignee: KLA-Tencor Corporation
    Inventors: Alex Salnik, Lena Nicolaides, Jon Opsal
  • Patent number: 7502398
    Abstract: A directly cooled diode-laser bar package includes a diode-laser bar bonded to a heat-sink. The operating temperature of the diode-laser bar can be selectively varied by varying the thermal impedance of the heat-sink in or near a region of the heat-sink on which the diode-laser bar is bonded. The thermal impedance is selectively varied by varying the insertion depth of screws inserted into corresponding screw holes extending into the heat-sink close to or immediately adjacent the region on which the diode-laser bar is bonded.
    Type: Grant
    Filed: November 2, 2006
    Date of Patent: March 10, 2009
    Assignee: Coherent, Inc.
    Inventors: David Schleuning, C. David Nabors, R. Russel Austin
  • Patent number: 7499168
    Abstract: A metrology tool for semiconductor wafers is disclosed which combines modulated reflectivity measurement with junction photovoltage measurements. The tool includes an intensity modulated pump beam for periodically exciting the sample. A separate probe beam is used to monitor changes in optical reflectivity of the sample. In addition, capacitive electrodes are provided to measure modulated changes in the voltage across the electrodes. These measurements are combined to evaluate the wafer. These measurement can be particularly useful in characterizing ultrashallow junctions.
    Type: Grant
    Filed: January 23, 2007
    Date of Patent: March 3, 2009
    Assignee: KLA-Tencor Corp.
    Inventors: Alex Salnik, Lena Nicolaides, Jon Opsal
  • Patent number: 7490279
    Abstract: Built-In Self Test (BIST) is a test technique wherein semiconductor integrated circuit devices test themselves during their operation lifetime. BIST techniques do not necessarily require additional hardware; they can be implemented using dedicated software routines. Various BIST algorithms and techniques have been proposed for testing random access memory (RAM) devices. The present invention provides an architecture for the memory-test interface that allows the serial transfer of the test background data from the BIST controller to the interface of the memory-under-test using a single bit with serial-to-parallel data conversion using a shift register in the memory interface. The size of the shift register is equal to the word width of the memory-under-test.
    Type: Grant
    Filed: November 15, 2005
    Date of Patent: February 10, 2009
    Assignee: National Semiconductor Corporation
    Inventors: Rahul Kumar, Partha Ray, Suryanarayana R. Maturi
  • Patent number: 7480059
    Abstract: An accurate measure of eye length can be obtained using concurrent OCT measurements. A position OCT device can be used to continually monitor the position of the front surface of the cornea, while a distance OCT device can determine the apparent distance between the front surface of the cornea and the front surface of the retina. Since the eye is likely to move during the period of time between measurements of the cornea and retina, the monitored position of the cornea can be used to correct the apparent length measurement by the amount of eye movement over that period of time, in order to obtain an accurate measure of eye length.
    Type: Grant
    Filed: June 5, 2008
    Date of Patent: January 20, 2009
    Assignee: Carl Zeiss Meditec, Inc.
    Inventors: Yan Zhou, Keith O'Hara
  • Patent number: 7479660
    Abstract: An LED-based illumination device can use an array of four LEDs to produce high intensity light over a broad color spectrum and a broad range of color temperature. A high quality white light can be produced by using two green LEDs with a single red and a single blue LED.
    Type: Grant
    Filed: November 3, 2005
    Date of Patent: January 20, 2009
    Assignee: PerkinElmer Elcos GmbH
    Inventor: Siegmund Kobilke
  • Patent number: 7478019
    Abstract: Measurement data sets for optical metrology systems can be processed in parallel using Multiple Tool and Structure Analysis (MTSA). In an MTSA procedure, at least one parameter that is common to the data sets can be coupled as a global parameter. Setting this parameter as global allows a regression on each data set to contain fewer fitting parameters, making the process is less complex, requiring less processing capacity, and providing more accurate results. MTSA can analyze multiple structures measured on a single tool, or a single structure measured on separate tools. For a multiple tool recipe, a minimized regression solution can be applied back to each tool to determine whether the recipe is optimized. If the recipe does not provide accurate results for each tool, search parameters and/or spaces can be modified in an iterative manner until an optimized solution is obtained that provides acceptable solutions on each tool.
    Type: Grant
    Filed: January 26, 2005
    Date of Patent: January 13, 2009
    Assignee: KLA-Tencor Corporation
    Inventors: Shahin Zangooie, Youxian Wen, Heath Pois, Jon Opsal
  • Patent number: 7471392
    Abstract: An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.
    Type: Grant
    Filed: September 21, 2007
    Date of Patent: December 30, 2008
    Assignee: Tokyo Electron Limited
    Inventors: Adam E. Norton, Abdurrahman Sezginer, Fred E. Stanke
  • Patent number: 7465307
    Abstract: A hair removal device (22) includes a cooling surface (34) which is used to contact the skin (6) prior to exposure to hair tissue-damaging laser light (74) passing from a radiation source (36) through a recessed window (46). The window is laterally offset from the cooling surface and is spaced apart from the cooling surface in a direction away from the patient's skin to create a gap between the window and the skin. The window preferably includes both an inner window (46) and an outer, user-replaceable window (48). The laser-pulse duration is preferably selected according to the general diameter of the hair.
    Type: Grant
    Filed: November 2, 2005
    Date of Patent: December 16, 2008
    Assignee: Cutera, Inc.
    Inventors: Kevin P. Connors, David A. Gollnick, Michael W. Sasnett, Dean A. MacFarland
  • Patent number: 7466728
    Abstract: In traveling-wave ring-resonator an optically nonlinear crystal for converting visible radiation to ultraviolet (UV) radiation has an input face and two output faces. The visible light propagates through the crystal from the input face to one of the output faces. That output face is coated with a dichroic optical coating that transmits unconverted visible light and reflects the ultraviolet light. The reflected ultraviolet light exits the optically nonlinear crystal via the other output face and is coupled out of the resonator at an angle to the resonator axis.
    Type: Grant
    Filed: July 12, 2006
    Date of Patent: December 16, 2008
    Assignee: Coherent, Inc.
    Inventors: David Clubley, R. Russel Austin