Abstract: The invention is a transportable and reconfigurable system and method designed for on-site conversion of toxic substances to nontoxic forms. The invention includes an electron beam generator, a reaction chamber and effluent post-processing modules mounted on a carrier for transporting the system from site to site.

Abstract: A vacuum processing system for handling and processing rectangular glass panels for flat panel displays has a cluster configuration. The system includes a central buffer chamber, with multiple processing chambers, a load lock and an unload lock positioned around the buffer chamber and coupled to the buffer chamber through gate valves. The buffer chamber contains a turntable that is rotatable about a vertical axis. The system further includes substrate carriers, each for supporting a substrate in a vertical orientation as it is transported through the system and is processed. The turntable has dual substrate carrier positions for rotating substrate carriers into alignment with a selected processing chamber, the load lock or the unload lock. Multiple substrates can be handled and processed concurrently to achieve a high throughput rate. The system is typically used for sputter deposition of ITO films and metal films on the glass substrate.

Abstract: An electron source includes a negative electron affinity photocathode on a light-transmissive substrate and a light beam generator for directing a light beam through the substrate at the photocathode for exciting electrons into the conduction band. The photocathode has at least one active area for emission of electrons with dimensions of less than about two micrometers. The electron source further includes electron optics for forming the electrons into an electron beam and a vacuum enclosure for maintaining the photocathode at high vacuum. In one embodiment, the active emission area of the photocathode is defined by the light beam that is incident on the photocathode. In another embodiment, the active emission area of the photocathode is predefined by surface modification of the photocathode. The source provides very high brightness from an ultra-small active emission area of the photocathode.

Abstract: A control apparatus for controlling RF power supplied to first and second loads is provided. The control apparatus includes a first symmetric hybrid junction having a first port for receiving input RF power, a second port coupled to the first load and a third port coupled to a dummy load. The control apparatus further includes a second symmetric hybrid junction having a first port coupled to a fourth port of the first symmetric hybrid junction and a third port coupled to the second load. First and second variable shorts are respectively coupled to second and fourth ports of the second symmetric hybrid junction. RF power reflected by the first and second variable shorts is controllably directed through the second symmetric hybrid junction to the second load. The amplitude and phase of the RF power supplied to the second load can be controlled independently.

Abstract: A smooth and monotonic potential energy gradient was established at a p-type (InGa)As--undopad InP heterojunction to efficiently transfer conduction electrons from the (InGa)As:p layer to the InP:.o slashed. layer. This potential energy gradient was established with a compositionally graded p-type semiconductor alloy layer and an n-type InP built-in field layer interposed at the heterojunction. The compositionally graded semiconductor alloy layer spatially distributes the conduction band discontinuity of the (InGa)As--InP heterojunction and the InP:n built-in field layer eliminates potential energy barriers from the conduction band over a wide range of externally-applied biases including no externally applied bias. The smooth and monotonic potential energy gradient thus established promotes efficient transfer of the conduction electrons due to drift from the (InGa)As:p layer to the large bandgap InP collector layer where they contribute to the output current of any number of electronic devices.

Abstract: What is disclosed is a novel toxic waste remediation system designed to provide on-site destruction of a wide variety of hazardous organic volatile hydrocarbons, including but not limited to halogenated and aromatic hydrocarbons in the vapor phase. This invention utilizes a detoxification plenum and radiation treatment which transforms hazardous organic compounds into non-hazardous substances.

Abstract: An electron beam source or generator is described for the treatment of toxic materials in a treatment system in which electron beams are reacted with a flowing influent in a reaction chamber. The system is modular allowing different configurations as demanded by the site and by the clean-up job. It is also portable in that it can be easily moved from place to place. If mounted on a movable base it can be taken from place to place for use.

Abstract: Methods and apparatus for partial regeneration of a cryopump are provided. The cyropump includes first and second stage cryoarrays, a refrigerator for cooling the first and second stage cryoarrays, and typically includes a sorbent material for removing gases by cryosorption. The second stage cryoarray is heated from its operating temperature to a partial regeneration temperature range selected to liberate captured gas from the second stage cryoarray and to retain condensed water vapor on the first stage cryoarray. The partial regeneration temperature range is preferably 100K to 160K and is more preferably 120K to 140K. When the second stage cryoarray has a temperature within the partial regeneration temperature range, gas liberated from the second stage cryoarray is pumped with a turbomolecular pump in fluid communication with the cryopump. The turbomolecular pump removes liberated gases from the cryopump at high speeds and produces a low pressure in the cryopump.

Abstract: High quality epitaxial layers can be grown on a multi-layer substrate which has a crystalline pseudomorphic layer with an exposed surface used for the epitaxial growth. The pseudomorphic layer of the substrate has a thickness at or below the pseudomorphic limit so it will be deformed as stress forces are developed during epitaxial growth of heteroepitaxial structures. A plastically deformable layer is bonded to the pseudomorphic layer, This plastically deformable layer is made of material that plastically flows at epitaxial growth temperatures.

Abstract: A focused electron/bombarded hybrid photomultiplier tube comprising a photocathode, focusing electrodes, and a collection anode disposed in a detector body. The collector anode includes a diode for receiving the focused output electron beam from the photocathode. The current gain between the photocathode output current and the detector output signal from the diode is over 1000 at a tube operating voltage of 7 kV. The noise factor has been determined to be 1.1. A hybrid photomultiplier tube includes a photocathode, a photodiode for collecting and multiplying electrons emitted by the photocathode and providing an output signal and electrodes for focusing the electrons on the photodiode. A vacuum envelope encloses a vacuum region between photocathode and the detector. A conductor disposed on or adjacent to a sidewall of the vacuum envelope reduces the effect of electrical charges on the inside wall of the vacuum envelope on the trajectories of the electrons.

Abstract: This invention relates to a system for handling and processing thin substrates, such as substrates for magnetic disks. The system includes a main chamber, entrance and output load locks, a buffer chamber, substrate load/unload structure, and a plurality of substrate processing stations positioned contiguous with the main vacuum chamber. The system further includes a transport for moving a plurality of cassettes carrying vertically oriented substrates into the entrance load lock, to the buffer chamber where the substrates are transferred into the main chamber, and to the output load lock where processed substrates are placed back in the cassettes. The substrates are transferred to and from the cassettes to and from the substrate load/unload structure by way of dedicated lift blades.

Abstract: An electron beam therapy system and a facility for using an electron beam therapy system. In the preferred embodiment, the electron beam therapy system comprises a linear accelerator, microwave source, and associated electronics disposed in a housing. The housing is mounted on a positioning means such as a C-arm to direct the electron beam to the desired site on the patient. The entire housing and positioning means is mobile and may be moved to different locations in the facility. Connectors are provided at the different locations in the facility to connect the electron beam source to a central power source within the facility.

Abstract: A method of manufacturing a low noise microchannel plate which limits feedback includes creating a conductive layer on the output side of the microchannel plate so that portions of the open areas in the output end are closed off.

Abstract: Apparatus and method for vacuum pumping an enclosed chamber includes a cryogenic pumping device in fluid communication with the chamber for removing gases from the chamber. The cryogenic pumping device includes a cooled pumping surface and an expander for expanding a compressed gas and thereby cooling the pumping surface. The vacuum pumping apparatus further includes a sensor for sensing an operating parameter, such as temperature, of the cryogenic pumping device and a controller responsive to the sensor for controlling the operating speed of the expander to produce a desired value of the operating parameter. Typically, the sensor is a temperature sensor, and the controller controls the speed of the expander motor.

Abstract: A vacuum gate valve includes a valve body having an opening therethrough and a valve seat surrounding the opening, and a swing gate assembly rotatable about a pivot axis between an open position and a closed position. The swing gate assembly includes a swing gate body, a resilient seal gasket mounted to the swing gate body so as to sealingly engage the valve seat in the closed position, and a spreader for flattening the resilient seal gasket in a region that engages the valve seat. The gate valve further includes an actuator for rotating the swing gate assembly between the open position and the closed position. In a preferred embodiment, the seal gasket is a resilient tube, and the spreader is located within the tube. The swing gate assembly may include a mechanism for adjusting the spreader to thereby adjust the tension applied to the seal gasket.

Abstract: A bundle of multiglass fibers are assembled within an outer glass tube. An intermediate glass structure is interposed between the bundle of multifibers and the outer glass tube. The intermediate glass structure has a softening temperature within the range of minus 5% and plus 15% of the softening temperature of the multifibers and less than the softening temperature of the outer glass tube. The assembly is heated and the outer glass tube is pressurized from the outside to produce a uniform compressive force for fusing the multifibers and the intermediate glass structure around the multifibers. The intermediate glass structure may include a glass tube, multiple layers of glass fibers or an inner layer of glass fibers surrounded by a glass tube.

Abstract: An electron beam source or generator is described for the treatment of toxic materials in a treatment system in which electron beams are reacted with a flowing influent in a reaction chamber. The system is modular allowing different configurations as demanded by the site and by the clean-up job. It is also portable in that it can be easily moved from place to place. If mounted on a movable base it can be taken from place to place for use.

Abstract: A focused electron/bombarded (FEB) ion detector comprising an MCP, focusing means, and a collection anode disposed in a detector body. The collector anode includes a diode for receiving the focused output electron beam from the MCP. The gain between the input ion current to the MCP and the detector output signal from the diode is on the order of 1-100 million, depending on the device configuration and applied biasing voltages. A hybrid photomultiplier tube includes a photocathode, a photodiode for collecting and multiplying electrons emitted by the photocathode and providing an output signal and electrodes for focusing the electrons on the photodiode. A vacuum envelope encloses a vacuum region between photocathode and the detector. A conductor disposed on or adjacent to a sidewall of the vacuum envelope reduces the effect of electrical charges on the inside wall of the vacuum envelope on the trajectories of the electrons.

Abstract: A camera attachment converts a standard day-light video camera into a day/night-vision video camera. The attachment device has a threaded input and output to physically and optically interconnect an auto-iris lens to a video camera. The attachment device contains an image intensifier tube and a fiber optic image conduit either of which may be switched into the through optical path to receive and either amplify or simply conduct the light image to a relay lens. The relay lens focuses the output image from either the image tube or the fiber optic image conduit onto the optical input of the video camera. The switching of the image intensifier tube or the fiber optic image conduit is dependent upon the ambient light conditions of the camera so that if there is insufficient lighting for normal daytime viewing the image tube is activated and switched into the through optical path of the camera.

Abstract: A low cost image intensifier tube is provided which has an improved vacuum sealing mechanism and improved optical transmission. Glass windows on both the input and output of the tube are vacuum sealed within the housing by a ring of indium that contacts the interface between each of the windows and the housing. A pair of raised pointed flanges each positioned along the inner housing surface interfacing the windows protrude into the adjacent ring of indium for improving the vacuum seal of both input and output windows and for controlling the spacing of the elements within the tube. Sealing the photocathode from the rest of the tube is a ceramic cathode cork. The cathode cork is a solid sealing ring press fit within the tube housing and colocated between the input window at the outer edge of the photocathode and the microchannel plate.