Abstract: The present invention generally provides an apparatus and a method for separating components of a processing system which are mounted to one another and may adhere after being subjected to processing conditions. In one aspect, the invention provides a removal screw that can be threaded into a removal hole on a first component and an abutment screw that can be threaded into an attachment hole on a second component. To separate the first component from the second component, the abutment screw is first threaded into the attachment hole on the second or stationary component, and then the removal screw is threaded into the removal hole on the first component. An important aspect of this invention is that the removal screw does not contact, and damage, the contact surface between the first and second components to separate the components.

Abstract: An optical data storage system 100 utilizes optical fibers 102 for transfer of information to and from storage media 107. The storage media 107 comprises magneto-optical storage disks. The optical fibers 102 are low-birefringence optical fibers. As compared to the prior art, a polarization state conveyed by the optical fiber 102 is accurately reproduced with reduced noise.

Abstract: A counter balance assembly for a lid assembly comprising a spring inside a housing assembly. The counter balance assembly is mounted to a lid, whose displacement generates an external force substantially along a longitudinal axis of the spring. A restoring force is generated by the spring to counteract an inertia force arising from the lid displacement.

Abstract: The invention provides a substrate support member and a purge guide for directing purge gas past the edge of a substrate and towards the outer perimeter of the chamber. The purge guide includes a plurality of holes disposed around the inner perimeter thereof to provide a purge gas passage and to prevent purge gas from interfering with the deposition chemistry on the surface of the substrate. A substrate support member is also provided having a vacuum chuck for securing a substrate to the upper surface thereof. The substrate support member preferably includes a shoulder on which the purge guide is supported during processing. The invention also provides a method for shielding an edge of a substrate by flowing a purge gas adjacent the edge of the substrate and then through a plurality of purge holes on a purge guide.

Abstract: The present invention provides a method and apparatus for filling contacts, vias, trenches, and other patterns, in a substrate surface, particularly patterns having high aspect ratios. Generally, the present invention provides a method for removing oxygen from the surface of an oxidized metal layer prior to deposition of a subsequent metal. The oxidized metal is treated with a plasma consisting of nitrogen, hydrogen, or a mixture thereof. In one aspect of the invention, the metal layer is Ti, TiN, Ta, TaN, Ni, NiV, or V, and a subsequent wetting layer is deposited using either CVD techniques or electroplating, such as CVD aluminum (Al) or electroplating of copper (Cu). The metal layer can be exposed to oxygen or the atmosphere and then treated with a plasma of nitrogen and/or hydrogen in two or more cycles to remove or reduce oxidation of the surface of the metal layer and nucleate the growth of a subsequent metal layer thereon.

Abstract: A method and apparatus for managing both link and disk bandwidth utilization within the context of a multiple subscriber or user information distribution system by selectively providing variable bitrate and constant low bitrate information streams to one or more subscribers.

Abstract: A hydrodynamic bearing having a shaft relatively rotatable with rest to a surrounding sleeve and having a thrust plate of or near one end thereof. The shaft and sleeve define a journal bearing extending substantially the full length of the two relatively rotating parts.

Abstract: A conductive feed-through providing a conductive path through a dielectric body while maintaining differences in pressure between volumes separated by the dielectric body. A conductive feed-through of the present invention employs a hollow conductive tube created by first drilling a bore through the dielectric material. A first electrode is used to cover one end of the bore, and a vacuum-tight seal is formed around this first electrode. A second electrode is attached to the dielectric body at the other end of the bore. The inside surface of the bore is then coated with an electrically conductive material, and the coating provides a conductive path between the first electrode and the second electrode. In an alternative embodiment, the electrically conductive material coating is deposited such that it extends over the surface of the dielectric body so as to function as an electrode as well.

Abstract: A layer of material is formed on a substrate in a partially formed integrated circuit on a wafer. The substrate undergoes a plasma annealing, during which the substrate is bombarded with ions. The plasma annealing may be performed by exposing the substrate to plasma that is generated from a nitrogen containing gas which is infused with energy. After the substrate is plasma annealed, a layer of a refractory metal nitride is deposited on the substrate. The layer of refractory metal nitride is then bombarded with a first set of ions. The bombardment of the refractory metal by the first set of ions may be achieved by performing a plasma annealing. The refractory metal nitride may be further bombarded by a second set of ions.

Abstract: A method of creating an improved hydrodynamic fluid bearing is provided which is relatively insensitive to shock vibration changes in load and rotational speed. The hydrodynamic bearing motor in which the bearing is open at both the upper and lower ends, and in which the balance of fluid flow within the bearings is maintained. The assembly of the hydrodynamic bearing is more easily assembled, and the gaps are easily adjusted. In the design of the hydrodynamic bearing, the tolerances for assembly of the various components is minimized; that is, the critical nature of many of the gaps is diminished.

Abstract: The present invention provides a solvent extraction purification method for aromatic polycarboxylic acids or derivatives that meet or exceed polymer-grade specification. The method includes dissolving a crude aromatic polycarboxylic acid or derivative in a base compound; removing impurities and excessive base compound; and removing residual base compound while making purified product. The purification method removes not only the impurities from the crude acid or derivative, but also the residual base compound from finished product that otherwise will contaminate the product. The salt in the cake is converted to product by acid-substitution, thermal decomposition, or electrolysis. The method uses base-extraction solvents to extract base compound and impurities from the salt. The residual base compound in the recovered product is then removed by leaching, stripping, thermal agitating with electromagnetic waves, or evaporation with thermal decomposition.

Abstract: The present invention removes unwanted deposited material from a substrate backside by chemically dissolving the material, while substantially preventing dissolution of the material from the substrate front side. Preferably, the dissolving process is included with a spin-rinse-dry process and uses a greater flow rate of rinsing fluid directed onto the front side compared to the flow rate of dissolving fluid directed onto a substrate backside to protect the substrate front side while the unwanted backside material is removed. The present invention includes the method of dissolving the unwanted material from the backside and edge and the associated apparatus.

Abstract: The present invention provides a carbon based etch stop, such as a diamond like amorphous carbon, having a low dielectric constant and a method of forming a dual damascene structure. The low k etch stop is preferably deposited between two dielectric layers and patterned to define the underlying interlevel contacts/vias. The second or upper dielectric layer is formed over the etch stop and patterned to define the intralevel interconnects. The entire dual damascene structure is then etched in a single selective etch process which first etches the patterned interconnects, then etches the contact/vias past the patterned etch stop. The etch stop has a low dielectric constant relative to a conventional SiN etch stop, which minimizes the capacitive coupling between adjacent interconnect lines. The dual damascene structure is then filled with a suitable conductive material such as aluminum or copper and planarized using chemical mechanical polishing.

Abstract: The present invention provides an HDP-CVD tool using simultaneous deposition and sputtering of doped and undoped silicon dioxide capable of excellent gap fill and blanket film deposition on wafers. The tool of the present invention includes: a dual RF zone inductively coupled plasma source; a dual zone gas distribution system; temperature controlled surfaces within the tool; a symmetrically shaped turbomolecular pumped chamber body; a dual cooling zone electrostatic chuck; an all ceramic/aluminum alloy chamber; and a remote plasma chamber cleaning system.

Abstract: An information storage system is disclosed. The information storage system includes a rigid information storage medium, at least one read/write head, an actuator, and a lubricant. The read/write head comprises a transducer for information introduction and/or retrieval from the storage medium. The actuator supports at least one read/write head for moving the transducer relative to the storage medium. The lubricant which includes a perfluoroacrylate ester polymer is disposed on the surface of the storage medium.

Abstract: A storage server for efficiently retrieving data from a plurality of disks in response to user access requests. The server comprises a plurality of processors coupled to disjoint subsets of disks, and a custom non-blocking packet switch for routing data from the processors to users. By tightly coupling the processors to disks and employing an application-specific switch, congestion and disk scheduling bottlenecks are minimized. By making efficient use of bandwidth, the architecture is also capable of receiving real-time data streams from a remote source and distributing these data streams to requesting users. The architecture is particularly well suited to video-on-demand systems in which a video server stores a library of movies and users submit requests to view particular movies.

Abstract: The present invention generally provides a leak detector having at least two partial pressure analyzers. The leak detector comprises a pumping system, a trace gas detector, and a residual gas analyzer. The leak detector is attachable to a test object, such as a vacuum system, and the pumping system operates to draw a vacuum therein. The residual gas analyzer determines the presence of oxygen, nitrogen, and other components of air in the test object. A trace gas, such as helium, provided to the exterior of the test system is monitored by the trace gas detector which may be a magnetic sector mass spectrometer. The residual gas analyzer and the trace gas detector may be operated simultaneously or independently.

Abstract: A method and apparatus for depositing a low dielectric constant film by reaction of an organosilane or organosiloxane compound and an oxidizing gas at a low RF power level from 10-250 W. The oxidized organosilane or organosiloxane film has good barrier properties for use as a liner or cap layer adjacent other dielectric layers. The oxidized organosilane or organosiloxane film may also be used as an etch stop or an intermetal dielectric layer for fabricating dual damascene structures. The oxidized organosilane or organosiloxane films also provide excellent adhesion between different dielectric layers. A preferred oxidized organosilane film is produced by reaction of methylsilane, CH3SiH3, or dimethylsilane, (CH3)2SiH2, and nitrous oxide, N2O, at an RF power level from about 10 to 200 W or a pulsed RF power level from about 20 to 250 W during 10-30% of the duty cycle.

Abstract: The present invention generally provides a robot that can transfer workpieces, such as silicon wafers, at increased speeds and accelerations and decelerations. More particularly, the present invention provides a robot wrist associated with the robot arm for mechanically clamping a workpiece to a workpiece handling member attached to the arm. The wafer clamp selectively applies sufficient force to hold the workpiece and prevent slippage and damage to the workpiece during rapid rotation and linear movement of the handling member. In a particular embodiment, a clamp for securing silicon wafers uses a flexure assembly to position and hold the wafer with minimal particle generation and wafer damage. The clamp is designed so that the wafers are normally clamped near full extension of the workpiece handling member to deliver or pick up a wafer.

Abstract: An optical disc storage system (10) includes an optical disc (12) having a data surface (70) and a transducing element (30) adjacent the data surface (70). An actuator (22) coupled to the transducing element (30) positions the transducing element (30) relative to the data surface (70). The system (10) includes a spindle motor (90) and a controller (34) coupled to the transducing element (30), the actuator (22) and the spindle motor (90) for reading and writing information on the data surface (70). A hub insert (72) is coupled to the optical disc (12) and has a stiffness which is greater than a stiffness of the optical disc (12). An attachment mechanism (94, 96, 98) couples the hub insert (72) to the spindle motor (90) and stress due to the attachment mechanism (94, 96, 98) remains substantially in the hub insert (72) to thereby limit stress applied to the optical disc (12) and the resultant distortion of the optical disc (12).