Patents Represented by Attorney Tiajoloff and Kelly
  • Patent number: 7691766
    Abstract: The invention is concerned with a material which shows low absorption for UV radiation having a wavelength below 250 nm, low birefringence, high chemical resistance and high radiation resistance and which is therefore particularly usable for making optical components for microlithography. According to the invention the material consists of synthetically produced quartz crystallites which form a polycrystalline structure and have a mean grain size in the range between 500 nm and 30 ?m. The method according to the invention for making a blank from the material comprises providing granules consisting of synthetically produced quartz crystals having a mean grain size in the range between 500 nm and 30 ?m, and sintering the granules to obtain a blank of polycrystalline quartz.
    Type: Grant
    Filed: April 18, 2007
    Date of Patent: April 6, 2010
    Assignee: Heraeus Quarzglas GmbH & Co. KG
    Inventors: Bodo Kuehn, Stefan Ochs
  • Patent number: 7686887
    Abstract: An object of the invention is to provide a quartz glass crucible reduced in the generation of vibration occurring on the surface of a silicon melt and free from the generation of rough surface and cristobalite spots, yet capable of pulling up single crystal silicon stably and at high yield even in long-term operations; it is also an object to provide a method for producing the same. In a quartz glass crucible for pulling up single crystal silicon comprising a crucible base body having a bottom part and a straight shell part with an inner layer provided to the inner surface thereof, the quartz glass crucible is characterized by that said inner layer comprises a synthetic quartz glass layer from the lowest end to at least a height of 0.25 H; a naturally occurring quartz glass layer or a mixed layer of naturally occurring quartz glass and synthetic quartz glass extended in a range of from at least 0.5 H to 0.
    Type: Grant
    Filed: July 30, 2003
    Date of Patent: March 30, 2010
    Assignees: Heraeus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co., Ltd.
    Inventors: Yasuo Ohama, Takayuki Togawa
  • Patent number: 7681416
    Abstract: The production of an optical component from quartz glass, by elongation of a coaxial arrangement of a core rod and a hollow cylinder of a given length, is known. The arrangement is thus introduced into a heating zone with a vertical orientation, such that the lower end begins to partly soften and the component is drawn downwards from the softened part. The hollow cylinder has an inner passage, provided with a restriction in the region of the lower end thereof, on which the core rod is supported. Several methods are disclosed for formation of the restriction in which the inner passage (55) is mechanically machined to a final dimension and, in one version of the method, the restriction in the inner passage (55) is generated by means of softening the lower end face of the hollow cylinder, swaged against a tool and thus folded inwards with formation of a peripheral bead ring.
    Type: Grant
    Filed: July 18, 2004
    Date of Patent: March 23, 2010
    Assignee: Heraeus Quarzglas GmbH & Co. KG
    Inventors: Oliver Ganz, Rene Sowa, Peter Bauer, Norbert Cibis, Ralph Sattmann, Jan Vydra, Clemens Schmitt
  • Patent number: 7660036
    Abstract: A particle analysis system has an optical imaging device, e.g., a reflecting light stereomicroscope, that images a particle accumulation onto a substantially planar substrate. An illuminating device that includes a ring light on a lens barrel of the stereomicroscope illuminates at least part of the particle accumulation. The system includes a polarization device with an optical polarizer and an optical analyzer, and a positioning device displacing an illuminated measurement area of the particle accumulation grid by grid. An evaluating device with an electrical adjusting device obtains and evaluates imaging data on each measurement area. The optical polarizer and the optical analyzer are adjustable using the electrical adjusting device relative to each other in two polarizer positions. The imaging device generates imaging data of the particle accumulation with the polarizer positions in a software-controlled manner on each measurement area.
    Type: Grant
    Filed: October 18, 2006
    Date of Patent: February 9, 2010
    Assignee: JOMESA Messsysteme GmbH
    Inventor: Johann Metzger
  • Patent number: 7637126
    Abstract: The invention relates to a method for the economic production of a blank for a component made from laser-active quartz glass in any form or dimension. The method comprises the following method steps: a) preparation of a dispersion with a solids content of at least 40 wt. %, comprising SiO2 nanopowder and doping agents, including a cation of the rare earth metals and transition metals in a fluid, b) granulation by agitation of the dispersion, with removal of moisture to form a doped SiO2 granulate of spherical porous granular particles with a moisture content of less than 35 wt. % and a density of at least 0.95 g/cm3, c) drying and purification of the SiO2 granulate, by heating to a temperature of at least 1000° C. to form doped porous SiO2 grains with an OH content of less than 10 ppm and d) sintering or fusing the doped SiO2 grains in a reducing atmosphere to give the blank made from doped quartz glass.
    Type: Grant
    Filed: November 30, 2004
    Date of Patent: December 29, 2009
    Assignee: Heraeus Quarzglas GmbH & Co. KG
    Inventors: Rainer Koeppler, Bodo Kuehn, Waltraud Werdecker, Ulrich Kirst, Walter Lehmann
  • Patent number: 7633520
    Abstract: A scalable architecture for providing real-time multi-camera distributed video processing and visualization. An exemplary system comprises at least one video capture and storage system for capturing and storing a plurality of input videos, at least one vision based alarm system for detecting and reporting alarm situations or events, and at least one video rendering system (e.g., a video flashlight system) for displaying an alarm situation in a context that speeds up comprehension and response. One advantage of the present architecture is that these systems are all scalable, such that additional sensors (e.g., cameras, motion sensors, infrared sensors, chemical sensors, biological sensors, temperature sensors and like) can be added in large numbers without overwhelming the ability of security forces to comprehend the alarm situation.
    Type: Grant
    Filed: June 21, 2004
    Date of Patent: December 15, 2009
    Assignee: L-3 Communications Corporation
    Inventors: Supun Samarasekera, Rakesh Kumar, Keith Hanna, Harpreet Sawhney, Aydin Arpa, Manoj Aggarwal, Vincent Paragano
  • Patent number: 7600399
    Abstract: In a known method for producing a cylindrical glass body in a vertical drawing process, a glass blank is softened in a heating zone and drawn off as a glass strand by means of a draw-off device at a controlled drawing speed, the draw-off device comprising a first draw-off unit with rolling bodies rolling on the glass strand and being distributed around the circumference thereof, the rolling bodies being formed by a reference rolling body and at least one auxiliary rolling body, the drawing speed being controlled via the speed of the reference rolling body.
    Type: Grant
    Filed: January 23, 2002
    Date of Patent: October 13, 2009
    Assignee: Heraeus Quarzglas GmbH & Co. KG
    Inventors: Thomas Bogdahn, Oliver Ganz
  • Patent number: 7593026
    Abstract: A system displays video to a user and has a display device with a field of pixels. It displays video to the user in the form of a series of discrete sequential frame images each made up of a first predetermined number of bit planes in which the pixels of the display are either off or have a color and intensity that is uniform over the field of pixels. The apparatus detects when a movement condition is present, such as rapid head movement or an object in the video crossing the display rapidly, in which condition the user's eye may tend to track across the display device at a rate at which perception of the video displayed may be reduced in quality, and it generates a condition-present signal when such a movement condition is detected. Responsive to generation of said condition-present signal, the apparatus causes the display device to display the frame images using fewer bit planes for each frame image than when said movement condition is not detected.
    Type: Grant
    Filed: May 11, 2005
    Date of Patent: September 22, 2009
    Assignee: L-3 Communications Corporation
    Inventor: James A. Turner
  • Patent number: 7587912
    Abstract: The present invention refers to a method for producing a quartz glass crucible for use in pulling silicon single crystal, said crucible having at least a double-layer structure comprising a pore-free transparent inner layer and an opaque base body or outer layer having pores, characterized in that at least the base body is formed with a silica powder maintained in a gas having a mixing ratio of 0.0005 to 0.0065 kg/kg (dry gas), and a quartz glass crucible produced by said production method. The obtained crucible has an average OH group concentration of 50 ppm or lower and is capable of suppressing the vibration occurring on the surface of silicon melt during pulling the silicon single crystal. Further the obtained crucible suffers less deformation of the crucible on pulling the silicon single crystal.
    Type: Grant
    Filed: February 20, 2004
    Date of Patent: September 15, 2009
    Assignees: Heraeus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co., Ltd.
    Inventors: Yasuo Ohama, Hiroshi Matsui
  • Patent number: 7563512
    Abstract: In a known component having a reflector layer, the surface of a base body of quartz glass is covered at least in part with a reflector layer. Starting from this, to provide a component, particularly for use in lamp and reflector manufacture, which is equipped with an efficient, chemically and thermally resistant and, nevertheless, inexpensive reflector layer, it is suggested according to the invention that an SiO2 cover layer should be provided which acts as a diffuse reflector and consists of at least partly opaque quartz glass.
    Type: Grant
    Filed: January 6, 2005
    Date of Patent: July 21, 2009
    Assignee: Heraeus Quarzglas GmbH & Co. KG
    Inventors: Armin Maul, Thorsten Herbert, Jürgen Weber, Sven Linow, Stefan Fuchs
  • Patent number: 7552601
    Abstract: Starting from an optical component of quartz glass for transmitting ultraviolet radiation of a wavelength between 190 nm and 250 nm, with a glass structure essentially without oxygen defects, a hydrogen content ranging from 0.1×1016 molecules/cm3 to 5.0×1016 molecules/cm3, and with a content of SiH groups of less than 5×1016 molecules/cm3, to provide such a component which is particularly well suited for use with linearly polarized UV laser radiation, the present invention suggests that the component should have a content of hydroxyl groups ranging from 10 to 250 wt ppm and a fictive temperature above 1000° C.
    Type: Grant
    Filed: March 30, 2005
    Date of Patent: June 30, 2009
    Assignee: Heraeus Quarzglas GmbH & Co. KG
    Inventors: Bodo Kühn, Stephan Thomas, Steffen Kaiser
  • Patent number: 7522186
    Abstract: A method and apparatus for providing immersive surveillance wherein a remote security guard may monitor a scene using a variety of imagery sources that are rendered upon a model to provide a three-dimensional conceptual view of the scene. Using a view selector, the security guard may dynamically select a camera view to be displayed on his conceptual model, perform a walk through of the scene, identify moving objects and select the best view of those moving objects and so on.
    Type: Grant
    Filed: July 24, 2002
    Date of Patent: April 21, 2009
    Assignee: L-3 Communications Corporation
    Inventors: Aydin Arpa, Keith J. Hanna, Rakesh Kumar, Supun Samarasekera, Harpreet Singh Sawhney, Manoj Aggarwal, David Nister, Stephen Hsu
  • Patent number: 7501367
    Abstract: To provide an optical component of quartz glass for use in a projection lens system for immersion lithography with an operating wavelength below 250 nm, which is optimized for use with linearly polarized UV laser radiation and particularly with respect to compaction and birefringence induced by anisotropic density change, it is suggested according to the invention that the quartz glass should show the combination of several properties: particularly a glass structure essentially without oxygen defects, a mean content of hydroxyl groups of less than 60 wt ppm, a mean content of fluorine of less than 10 wt ppm, a mean content of chlorine of less than 1 wt ppm. A method for producing such an optical component comprises the following method steps: producing and drying an SiO2 soot body under reducing conditions and treating the dried soot body before or during vitrification with a reagent reacting with oxygen defects of the quartz glass structure.
    Type: Grant
    Filed: April 13, 2006
    Date of Patent: March 10, 2009
    Assignee: Heraeus Quarzglas GmbH & Co. KG
    Inventors: Bodo Kuehn, Stephan Ochs, Steffen Kaiser, Denis Kassube
  • Patent number: 7497095
    Abstract: The invention provides a method for producing a quartz glass jig for use in semiconductor industries, which enables increasing the surface layer cleanliness simply and surely at low cost; it also provides a quartz glass jig improved in surface layer cleanliness. The inventive means for resolution are a method comprising processing a quartz glass raw material into a desired shape by a treatment inclusive of fire working, annealing for stress removal, and cleaning treatment to obtain the final product, the method is characterized by that it comprises performing gas phase etching step and gas phase purification step on the surface layer of the quartz glass jig after applying the annealing treatment for stress removal but before the cleaning treatment, wherein the gas phase purification step is carried out continuously after the gas phase etching step.
    Type: Grant
    Filed: April 13, 2004
    Date of Patent: March 3, 2009
    Assignees: Heraeus Quarzglas GmbH & Co. KG, Shin-Estu Quartz Products Co., Ltd.
    Inventor: Tatsuhiro Sato
  • Patent number: 7387000
    Abstract: The invention relates to a method for producing a silica glass tube which is characterized by depositing SiO2 particles on an elongate support that rotates about its longitudinal axis, thereby producing a porous with a cylindrical inner bore. Said blank is vertically aligned, suspended in a furnace using a suspension that engages with a constriction in the upper zone of the inner bore of the blank, and vitrified. The aim of the invention is to provided a method with which also heavy blanks can be secured safely and substantially without any danger of contaminations of the inner bore without using complicated securing devices. To this end, the constriction (6b) is generated by shaping the inner bore (7) when the SiO2 particles are deposited. For vitrification a suspension (8; 9; 10) is used that supports itself on the constriction (6b) and that otherwise projects into the cylindrical inner bore (7) without having any contact therewith.
    Type: Grant
    Filed: December 18, 2001
    Date of Patent: June 17, 2008
    Assignee: Heraeus Quarzglas GmbH & Co. KG
    Inventors: Gerhard Kotulla, Klaus Ruppert
  • Patent number: 7350378
    Abstract: In a device (5) for the manufacture of a quartz glass crucible (2), one section (14, 15) of a wall (13) of the rotating quartz glass crucible (2) is heated at one time by means of at least two electrode arrangements (7, 8) distributed uniformly at the circumference of the quartz glass crucible (2) and generating a first and another electric arc. By providing several electrode arrangements (7, 8), the cooling-down phase of the sections (14, 15) until their reaching the subsequent heating zone (11, 12) can be shortened, and thus an undesirable high temperature difference of the wall (13) can be avoided. Moreover, the required thermal output of each individual electrode arrangement (7, 8) can be reduced, so that evaporation phenomena and connected bubble formation can be reduced. In addition to the higher quality that can be reached in this way, the duration of the manufacturing process is reduced.
    Type: Grant
    Filed: July 9, 2001
    Date of Patent: April 1, 2008
    Assignee: Heraeus Quarzglas GmbH & Co. KG
    Inventors: Johann Leist, Rolf Göbel, Helmut Fritz
  • Patent number: 7330794
    Abstract: A toxicant detection system comprises at least one watertight chamber containing a mollusk. Water to be screened is introduced into the chamber. The mollusk is preferably supported on a mounting structure which facilitates quick mounting of the mollusk in the device, comprising a releasable element affixed to the shell of the mollusk, e.g., a bolt which is screwed into a nut affixed to the mollusk's shell. A sensing apparatus is provided which includes a movable member supported in the chamber so that it engages the shell of the mollusk, and moves when the shell opens and closes. The sensing apparatus detects the position of the mollusk shell based on the position of the movable member. The sensing apparatus preferably includes a Hall effect transducer which co-acts with a magnet carried on the movable member.
    Type: Grant
    Filed: July 30, 2001
    Date of Patent: February 12, 2008
    Assignee: Aqueous Solutions, Inc.
    Inventors: Jason Ezratty, Robert Morgan, David Eddy, Donald Morgan
  • Patent number: D567570
    Type: Grant
    Filed: August 14, 2007
    Date of Patent: April 29, 2008
    Assignee: Sunbeam Corporation Limited
    Inventor: Nick O'Loughlin
  • Patent number: D587330
    Type: Grant
    Filed: January 16, 2008
    Date of Patent: February 24, 2009
    Inventor: George J. Ruggeri
  • Patent number: D590651
    Type: Grant
    Filed: September 21, 2007
    Date of Patent: April 21, 2009
    Assignee: Sunbeam Corporation Limited
    Inventor: Nick O'Loughlin