Patents Represented by Attorney Tiajoloff and Kelly
  • Patent number: 7015163
    Abstract: It is an object of the present invention to provide a glass member resistant against plasma corrosion suitably used as a jig material in producing semiconductors, which exhibits excellent resistance against plasma corrosion, and which is free from the generation of particles. The above problem is solved by a glass member resistant to plasma corrosion, comprising a portion to be exposed to plasma gas, which is made of a glass material containing, as the essential component, one compound component selected from the group consisting of compounds expressed by one of the chemical formulae SiO2—Al2O3—CaO, SiO2—Al2O3—MgO, SiO2—BaO—CaO, SiO2—ZrO2—CaO, SiO2—TiO2—BaO, provided that the constitution ratio of the compound components is within the vitrification range.
    Type: Grant
    Filed: October 11, 2001
    Date of Patent: March 21, 2006
    Assignees: Heraeus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co., Ltd.
    Inventors: Tatsuhiro Sato, Kazuo Koya
  • Patent number: 7015596
    Abstract: A system and method are provided for displaying electronic devices operable when electrical power is supplied to them at respective operating voltages through respective power connectors. The system has a power supply providing input electrical current at a first voltage and cable structures each connected with the power supply and having a respective power connector electrically connecting with the power receiving structure of one of the electronic devices. The cable structures each include a voltage regulator system that receives the input electrical current, converts it to an output electrical current at an output voltage, and transmits it to the power connector, so as to transmit an operating electrical current to the associated electronic device. The voltage regulator system sets the output voltage of the output electrical current such that the operating electrical current delivered to the associated electronic device has a voltage that corresponds to the operating voltage of that device.
    Type: Grant
    Filed: July 1, 2004
    Date of Patent: March 21, 2006
    Inventor: Opher Pail
  • Patent number: 7007510
    Abstract: An object of the present invention is to provide an improved blank such that an optical member of a high homogeneity can be obtained therefrom, and to provide a vessel and a heat treatment method for heat-treating a highly uniform synthetic quartz blank. In a first aspect of the invention a special designed blank is provided showing a concave shaped outer surface. In a second aspect of the invention a special designed vessel for heat-treating blanks is provided, whereby the degree of heat emission at the center is set higher than that of the surroundings.
    Type: Grant
    Filed: December 9, 2003
    Date of Patent: March 7, 2006
    Assignees: Heraeus Quarzglas GmbH Co. KG, Shin-Etsu Quartz Products Ltd.
    Inventors: Tetsuji Ueda, Akira Fujinoki, Hiroyuki Nishimura, Martin Trommer, Stefan Ochs
  • Patent number: 7006552
    Abstract: A resistance furnace has a tubular heating element with a vertically-oriented longitudinal axis. The heating element has a shell surface defined by an upper side and a lower side and surrounding a furnace chamber. The heating element is connected to at least two supply terminals by which heating current is introduced at power supply points into the heating element. The supply terminals include a surrounding upper annular collar adjacent the upper side of the shell surface, and also a surrounding lower annular collar adjacent the lower side of the shell surface.
    Type: Grant
    Filed: January 24, 2002
    Date of Patent: February 28, 2006
    Assignee: Heraeus Tenevo GmbH
    Inventors: Thomas Bogdahn, Oliver Ganz
  • Patent number: 6938443
    Abstract: The invention relates to a method for manufacture of a quartz glass preform for an optical fibre consisting of the following steps: preparation of a hollow cylinder made of porous quartz glass which exhibits an inner layer with a doping substance which increases the refractive index of quartz glass and an outer layer surrounding the inner layer, with a lower refractive index, and collapse of the hollow cylinder characterised by collapse of the porous hollow cylinder onto a quartz glass rod containing the doping substance.
    Type: Grant
    Filed: November 27, 2000
    Date of Patent: September 6, 2005
    Assignee: Heraeus Tenevo GmbH
    Inventor: Heinz Fabian
  • Patent number: 6938442
    Abstract: According to a prior art method for producing a cylindrical component comprised of silica glass, a cylinder comprised of a softened silica glass mass is drawn in a predetermined drawing direction along a drawing axis by means of a drawing device which acts upon said cylinder. The aim of the invention is to provide a method which prevents, to the greatest possible extent, warping of the drawn cylinder and other deviations from the ideal cylinder dimensions and to prevent, to the greatest possible extent, the outer surface of the drawn cylinder from being touched. To these ends, the invention provides that the drawing device comprises a plurality of guide elements which are arranged one behind the other along the drawing axis, and which can be displaced independently of one another in a drawing direction and in a direction opposite thereto.
    Type: Grant
    Filed: March 22, 2000
    Date of Patent: September 6, 2005
    Assignee: Heraeus Tenevo GmbH
    Inventors: Clemens Schmitt, Karsten Bräuer, Uwe Christiansen, Rainer Köppler, Heinz Fabian
  • Patent number: 6923025
    Abstract: The invention concerns a device (1) for sintering of a porous mold body (2) in a gas-tight chamber (3), with the mold body (2) hanging loose from a link chain (7) so that it can be fed continuously to a heating zone (5). In the area of the upper boiler (10), the traction direction of the link chain (7) is reversed by a deviation wheel (11). The tensile force is transmitted via a traction rope (13) that can be taken up on a take-up reel (14), such take-up reel (14) being driven by a drive (16) arranged outside the chamber (3). A drive shaft (15) for the take-up reel (14) provides for easy sealing of the duct (18) towards the chamber (3), because only a rotation and not a simultaneous axial displacement is required for the hoisting movement, and moreover, because the duct (18) is arranged at a spatial distance from the heating zone (5).
    Type: Grant
    Filed: April 11, 2001
    Date of Patent: August 2, 2005
    Assignee: Heraeus Tenevo AG
    Inventor: Uwe Christiansen
  • Patent number: 6916370
    Abstract: An object of the invention is to provide a quartz glass crucible for pulling up silicon single crystal and a method for producing the same, suitable for improving the productivity of the crucible and the quality of the silicon single crystal, which, by forming a crystalline layer on the inner surface of the quartz glass crucible during pulling up silicon single crystal, prevents degradation from occurring on the inner surface of the crucible and increases the ratio of single crystal while preventing the dislocation from forming on the single crystals.
    Type: Grant
    Filed: January 15, 2003
    Date of Patent: July 12, 2005
    Assignees: Heraeus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co. Ltd.
    Inventor: Hiroyuki Watanabe
  • Patent number: 6906725
    Abstract: The present invention provides a simulation for displaying a screen formulated from data, such as a FLIR sensor, relying on color definitions that are more readily supported by common image generators, most preferably 8-bit per channel RGB color processing and video output. The system has an image generator that transmits a video signal of at least two digital data channels, and a display system with a combiner circuit and a visual display device. The bit sets of the channels each represent a respective value of the data variable at a resolution for that channel, and the bit sets of the second channel each represent a respective value of the data variable at a second resolution higher than the resolution of the first channel. Combiner circuitry receives the channels of video output and processes these channels to select the channel which represents the accurate data unaffected by clamping.
    Type: Grant
    Filed: February 22, 2002
    Date of Patent: June 14, 2005
    Assignee: L-3 Communications Corporation
    Inventor: James A. Turner
  • Patent number: 6886364
    Abstract: Problems the invention is to solve: An object of the present invention is to provide a method for producing a quartz glass crucible capable of pulling up a silicon single crystal at a highly improved yield, yet without generating oscillation at the surface of the melt on pulling up silicon single crystal, and free from generating dislocations due to the peeling off of quartz glass fractions.
    Type: Grant
    Filed: May 31, 2001
    Date of Patent: May 3, 2005
    Assignees: Heraeus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co. Ltd.
    Inventors: Yasuo Ohama, Shigeo Mizuno
  • Patent number: 6887576
    Abstract: An object of the present invention is to provide a quartz glass body, especially a quartz glass jig for plasma reaction in producing semiconductors having excellent resistance against plasma corrosion, particularly, excellent corrosion resistance against F-based gaseous plasma; and a method for producing the same. A body made of quartz glass containing a metallic element and having an improved resistance against plasma corrosion is provided that contains bubbles and crystalline phase at an amount expressed by projected area of less than 100 mm2 per 100 cm3.
    Type: Grant
    Filed: August 22, 2001
    Date of Patent: May 3, 2005
    Assignees: Herseus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co., Ltd.
    Inventors: Tatsuhiro Sato, Nobumasa Yoshida, Akira Fujinoki, Kyoichi Inaki, Tomoyuki Shirai
  • Patent number: 6869898
    Abstract: An object of the present invention is to provide a quartz glass jig, which, when employed in a processing apparatus using plasma, is less in generation of abnormal etching and particles and low in contamination with impurities. This object is obtained by a quartz glass jig for a processing apparatus using plasma, wherein a surface of the jig is subjected to grinding or a sandblast processing and has a surface roughness Ra in the range of from 2 ?m to 0.05 ?m, and microcracks of grinding marks formed during the grinding or sandblast processing have a depth of 50 ?m or less.
    Type: Grant
    Filed: July 30, 2001
    Date of Patent: March 22, 2005
    Assignees: Heraeus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co., Ltd.
    Inventors: Kyoichi Inaki, Naoto Watanabe, Tohru Segawa, Hiroyuki Kimura
  • Patent number: 6841210
    Abstract: Disclosed is a multilayer structured quartz glass crucible, for pulling up silicon single crystal, whose structure has at least three layers comprising: a translucent outer layer made of naturally occurring quartz glass and having a large number of pores, a translucent intermediate layer, made of synthetic quartz glass and having a large number of pores, and a transparent inner layer substantially free from pores and made of a synthetic quartz glass. Thermal convection within the silicon melt is suppressed by use of the quartz glass crucible, thereby preventing oscillation on the surface of the silicon melt. A method for producing the quartz glas crucible is also disclosed.
    Type: Grant
    Filed: May 31, 2001
    Date of Patent: January 11, 2005
    Assignees: Heraeus Quarzglas GmbH & Co., KG, Shin-Etsu Quartz Products Co.
    Inventors: Yasuo Ohama, Hiroshi Matsui
  • Patent number: 6830781
    Abstract: In a known method for producing an SiO2 blank, SiO2 particles are formed in a burner flame assigned to a deposition burner and are deposited under the effect of an electrical field on a deposition surface of a carrier rotating about its longitudinal axis, said at least one deposition burner being reciprocated in a predetermined sequence of movement along the developing blank between turn-around points. Starting from said method, in order to obtain blanks of a predetermined, in particular axially homogeneous, density and mass distribution, it is suggested according to the invention that the geometrical shape of the burner flame should be varied by the electrical field in dependence upon the position of the deposition burner during the sequence of movement.
    Type: Grant
    Filed: November 7, 2001
    Date of Patent: December 14, 2004
    Assignee: Heraeus Quarzglas GmbH & Co. KG
    Inventor: Heinz Fabian
  • Patent number: 6810687
    Abstract: In the light of the disadvantages of the prior art technology, an object of the present invention is to provide a method for producing a synthetic quartz glass member for excimer lasers, which comprises, while suppressing the generation of reductive defects which impairs the resistance against laser radiations, incorporating a sufficient amount of hydrogen molecules capable of achieving a high resistance against laser radiation into the quartz glass, yet uniformly incorporating the hydrogen molecules to realize a flat distribution in refractive indices attributed to the distribution in the density of hydrogen molecules. It is also an object of the present invention to provide a synthetic quartz glass member for excimer lasers obtained by the production method above, which yields high resistance against laser radiations and homogeneity.
    Type: Grant
    Filed: February 13, 2002
    Date of Patent: November 2, 2004
    Assignees: Heraeus Quarzglas GmbH & Co. KG., Shin-Etsu Quartz Products Co., Ltd.
    Inventors: Hiroyuki Nishimura, Toru Yokota, Akira Fujinoki
  • Patent number: 6796439
    Abstract: In a vertical type wafer supporting jig, a ring-like support plate is fixed to support pillars by a simple structure without conventional welding and without risk of the ring-like support plate falling off. The vertical type wafer supporting jig is configured for mounting many wafers onto many support plates stacked in a vertical direction and fixed to support pillars with a predetermined wafer mounting interval between the support plates. Support groove portions into which the support plates are inserted and supported are formed in the support pillars with a predetermined interval in the vertical direction between them. A fixing rod is provided adjoining at least one of the support pillars.
    Type: Grant
    Filed: May 8, 2002
    Date of Patent: September 28, 2004
    Assignees: Heraeus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co., Ltd.
    Inventor: Itsuo Araki
  • Patent number: 6755049
    Abstract: Known is a method of producing a quartz glass crucible in which a crucible base body is provided at least in part with an inner layer in which the formation of cristobalite is induced by using a crystallization promoter. On the basis thereof, in order to provide an inexpensive method of producing a quartz glass crucible with reproducible characteristics for long service lives, it is suggested according to the invention that the crystallization promoter and a reducing substance are introduced into the inner layer.
    Type: Grant
    Filed: July 10, 2001
    Date of Patent: June 29, 2004
    Assignee: Heraeus Quarzglas GmbH & Co. KG
    Inventors: Gabriele Korus, Hilmar Laudahn, Martin Arndt, Udo Gertig
  • Patent number: 6746655
    Abstract: In a known method for the cleaning of SiO2 grain, a fill of particles in a reactor having a vertically oriented center axis will be heated and simultaneously exposed to a treatment gas which is passed at a specified flow velocity from the bottom to the top through the reactor and the fill. To provide on this basis an improved cleaning method and a suitable simple device for it, it is proposed according to the invention and with regard to the cleaning method that a chloric treatment gas will be used which is set to a treatment temperature of at least 1,000° C. in the area of the fill, and that the flow velocity is set to at least 10 cm/s. With regard to the device according to the invention for the implementation of the method according to the invention, a gas shower is provided for the gas inlet, the gas shower comprising below the fill a multitude of nozzle openings distributed laterally to the center axis, for introduction of the treatment gas into the fill.
    Type: Grant
    Filed: January 5, 2001
    Date of Patent: June 8, 2004
    Assignee: Heraeus Quarzglas GmbH & Co. KG
    Inventors: Jörg Becker, Joachim Nowak
  • Patent number: 6739151
    Abstract: In a known method of producing a quartz glass tube (22), a cylinder (21) of quartz glass which rotates about a rotational axis (27) is continuously fed to a heating zone (24), softened therein in portions starting from one end, and the softened portion (25) is drawn over a drill head (1) of a drill body arranged to be coaxial to the rotational axis and is thereby formed into the quartz glass tube (22). Starting therefrom, in order to indicate a method for forming a cylinder of quartz glass into a hollow cylinder of quartz glass having an inner bore that is as flawless as possible and straight and dimensionally stable, it is suggested according to the invention that a drill body should be used with a drill head (1) having a contact surface (2) of a convex curvature facing the cylinder (21), preferably a spherically shaped contact surface (2). The drill body according to the invention is characterized by a drill head (1) which has a contact surface (2) of a convex curvature (2).
    Type: Grant
    Filed: September 7, 2001
    Date of Patent: May 25, 2004
    Assignee: Heraeus Quarzglas GmbH & Co. KG
    Inventors: Dagobert Knieling, Rainer Schleich
  • Patent number: D504428
    Type: Grant
    Filed: December 1, 2003
    Date of Patent: April 26, 2005
    Assignee: L-3 Communications Corporation
    Inventors: Erin Napolitano, David Wathen, Daniel Ashcraft