Abstract: A method for providing an actinic illumination energizes solid-state light sources in an array, wherein each solid-state light source emits actinic light of a predetermined wavelength, directs the emitted actinic light from the solid state light sources through one or more compound parabolic concentrators, and forms a field conjugate to an objective lens by directing the concentrated actinic light from each compound parabolic concentrator through one or more lens elements in a lens array. Emission of one or more of the solid state light sources is adjusted to obtain a predetermined illumination pupil envelope function.

Abstract: A telecentricity corrector is incorporated into a microlithographic projection system to achieve telecentricity targets at the output of the microlithographic projection system. The telecentricity corrector is located between an illuminator and a projection lens of the projection system, preferably just in advance of a reticle for controlling angular distributions of light illuminating the reticle.

Abstract: An optical system is described herein which has a compact, all reflective design that has multiple fields of view for imaging an object. The optical system also has identical viewing directions and can have several different configurations for adding laser range finding and designating components.

Abstract: A multiple field of view reflective telescope is described herein which has a laser and associated components inserted therein. In addition, a method is described herein for using the multiple field of view reflective telescope to range an object (e.g., target) or to designate-highlight an object (e.g., target).

Abstract: An optical apparatus has a primary optical element having a primary spherical optical surface with a primary center of curvature, wherein the primary spherical optical surface has a peripheral portion that extends outside a usable aperture of the optical apparatus, and a secondary optical element. A mount suspends the secondary optical element spaced apart from the primary optical element, wherein the mount comprises a number of leg sections, each leg section extending between the primary and secondary optical elements. Each leg section terminates in a spherical mating surface that rests against the peripheral portion of the primary optical element. The spherical mating surface has a mating surface center of curvature that is substantially concentric with the primary center of curvature.

Abstract: An optical system for producing a pattern of focused spots, such as a maskless lithographic projection system, includes an illuminator, a pattern generator, and an imager. The illuminator includes a light source for generating a light beam, a homogenizer for evenly dispersing light within the light beam, and a condenser for coupling the light source to the homogenizer. The pattern generator has individually addressable elements illuminated by the light beam from the illuminator. The imager images the addressable elements of the pattern generator onto corresponding focusing elements for forming focused spots that are conjugate to aperture stops in both the imager and the illuminator. The illuminator underfills the imager aperture stop for reducing the size of the focused spots. The condenser underfills the illuminator aperture stop for further controlling the size and shape of the focused spots.

Abstract: An optical element mount has an inner member suspended within an outer member by a number of flexures. A first translational actuator is movable within the outer member and coupled to the inner member by a first shaft and is actuable to translate the inner member along a first substantially linear travel path within a translation plane that is orthogonal to an optical axis. A second translational actuator is movable within the outer member and coupled to the inner member by a second shaft and is actuable to translate the inner member along a second substantially linear travel path within the translation plane. A rotational actuator is movable within the outer member and coupled to the inner member by a third shaft and actuable to rotate the inner member about an instant point of rotation that is defined at the intersection of the first and second linear travel paths.

Abstract: Systems (50) and methods are disclosed for detecting defects (DEF1-DEF5) in a ceramic filter body (10) having a honeycomb structure (12) that defined multiple channels (20). Plugs (30) are used to seal select channel ends (22, 24). The methods include using a first light source unit (52) and a first detector unit (62) operably arranged at respective first and second ends (16, 18) of the honeycomb structure so as to be capable of being in optical communication. Light beams (LB) are transmitted from the first light source unit to the first detector unit through multiple channels. Defects in a given plug allow a detectable portion (LBD) of the corresponding light beam to be detected. Multiple detector elements (64) are used to detect the detectable light beam portion to provide location and intensity variation information, which helps deduce the precise location and nature of the defect.

Abstract: A pneumatic brake system for a motor vehicle includes a compressed air system including a plurality of compressed air reservoirs containing compressed air. A service brake system in fluid communication with the compressed air system is operably engaged by application of the compressed air from the compressed air system. A parking brake system in fluid communication with the compressed air system is operably engaged upon the engagement of a spring brake component. A compressed air release system is coupled to the compressed air system and the parking brake system. The compressed air release system is configured to receive a command and in response to the command drain compressed air from the compressed air system if the parking brake system is engaged.

Abstract: A frequency scanning interferometer is arranged for simultaneously measuring multiple surfaces of a test object through a wide range of expected offsets. Knowledge of the expected locations of the test surfaces is compared with a sequence of ambiguity intervals based on a synthetic measurement wavelength to center the test surfaces within the ambiguity intervals.

Abstract: An optical system is described herein which has a compact, all reflective design that has multiple fields of view for imaging an object. The optical system also has identical viewing directions and can have several different configurations for adding laser range finding and designating components.

Abstract: An optical element mount has an inner member suspended within an outer member by a plurality of flexures. A first and a second translational adjustment apparatus are disposed to translate the inner member within a translation plane that is orthogonal to an optical axis, wherein each translational adjustment apparatus has an actuator movable within the outer member along a linear travel path that is parallel to the translation plane and a shaft extending between the outer and inner members, the shaft coupled to the actuator with a first ball-and-socket joint and coupled to the inner member with a second ball-and-socket joint. The linear travel path of the actuator for the first translational adjustment apparatus is substantially orthogonal to the linear travel path of the actuator for the second translational adjustment apparatus.

Abstract: An apparatus for obtaining energy from a polychromatic radiant energy source has a light concentrator for concentrating and redirecting incident radiant energy, having an optical axis, and a spectral separator disposed along the optical axis, apart from the light concentrator and in the path of concentrated, redirected radiant energy. The spectral separator has a first planar surface treated to reflect a first spectral band of light toward a first focal region and to transmit a second spectral band and a second planar surface spaced apart from the first planar surface and oblique with respect to the first planar surface. The second planar surface is treated to reflect the second spectral band back through the first planar surface and toward a second focal region spaced apart from the first focal region. First and second light receivers are disposed nearest each respective focal region for receiving the first and second spectral bands.

Abstract: An optical reader system and method are described herein that can detect a lateral and/or angular misalignment of one or more biosensors so that the biosensors can be properly re-located after being removed from and then reinserted into the optical reader system. In one embodiment, the biosensors are incorporated within the wells of a microplate.

Abstract: An optical element mount has an outer member and an inner member. The inner member has a central axis and is suspended within the outer member by a plurality of fold flexures. Each fold flexure has a fold that lies along a line that intersects the central axis at one common point, where the common point serves as a pivot point for rotational movement of the inner member.

Abstract: A monolithic optical element mount has an inner member suspended within an outer member and movable with respect to the outer member along an axis. A first set of fold flexures extends from the inner member to the outer member, so that each fold flexure in the first set has a fold that lies on a tangent to a first circle lying in a first plane that is orthogonal to the axis. A second set of fold flexures extends from the inner member to the outer member, so that each fold flexure in the second set has a fold that lies on a tangent to a second circle lying in a second plane that is parallel to the first plane. With respect to a view taken along the axis, the folds for the first set do not align with the folds for the second set.

Abstract: A swept wavelength imaging optical interrogation system and a method for using the same to interrogate one or more biosensors are described herein. The swept wavelength imaging optical interrogation system is built upon a swept wavelength optical interrogation technology where a 2-D label free image is extracted from a series of high speed spectral images of the biosensor(s) without the need of performing mechanical scanning.

Abstract: Local data maps of an optical imaging system are stitched together into a composite global data map based on a merit function supporting closed-form processing. Overlapping regions of the local data maps are defined as difference maps that are given a parametric description. Corrective orientations of the local data maps are derived by collectively matching parametric descriptions of the corrective orientations for the overlapping local data maps to the parametric descriptions of the corresponding difference maps.

Abstract: A catadioptric imaging system for micro-lithographic projection features a high numerical aperture objective where most of the focusing power is produced by reflection and refraction angles are limited to avoid additional aberration. A field correcting optic is appended to a Mangin mirror in an immersive configuration for raising the numerical aperture. The optical connection between the Mangin mirror and the field correcting optic is arranged to control refraction angles by limiting angles of incidence or refractive index differences. A radially symmetric polarizing effect is achieved in a pupil to improve image contrast.

Abstract: Semiconductor-on-insulator (SOI) structures, including large area SOI structures, are provided which have one or more regions composed of a layer (15) of a substantially single-crystal semiconductor (e.g., doped silicon) attached to a support substrate (20) composed of an oxide glass or an oxide glass-ceramic. The oxide glass or oxide glass-ceramic is preferably transparent and preferably has a strain point of less than 1000° C., a resistivity at 250° C. that is less than or equal to 1016 ?-cm, and contains positive ions (e.g., alkali or alkaline-earth ions) which can move within the glass or glass-ceramic in response to an electric field at elevated temperatures (e.g., 300-1000° C.). The bond strength between the semiconductor layer (15) and the support substrate (20) is preferably at least 8 joules/meter2. The semiconductor layer (15) can include a hybrid region (16) in which the semiconductor material has reacted with oxygen ions originating from the glass or glass-ceramic.