Patents Assigned to Acorn Technologies, Inc.
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Patent number: 8212336Abstract: FET configurations in which two (or more) facets are exposed on a surface of a semiconductor channel, the facets being angled with respect to the direction of the channel, allow for conformal deposition of a convex or concave S/D. A convex tip of the S/D enhances electric fields at the interface, reducing the resistance between the S/D and the channel. In contrast, a S/D having a concave tip yields a dual-gate FET that emphasizes reduced short-channel effects rather than electric field enhancement. The use of self-limiting, selective wet etches to expose the facets facilitates process control, control of interface chemistry, and manufacturability.Type: GrantFiled: August 27, 2009Date of Patent: July 3, 2012Assignee: Acorn Technologies, Inc.Inventors: Andreas Goebel, Paul A. Clifton, Daniel J. Connelly, Vaishali Ukirde
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Patent number: 8003486Abstract: The present invention relates to creating an active layer of strained semiconductor using a combination of buried and sacrificial stressors. That is, a process can strain an active semiconductor layer by transferring strain from a stressor layer buried below the active semiconductor layer and by transferring strain from a sacrificial stressor layer formed above the active semiconductor layer. As an example, the substrate may be silicon, the buried stressor layer may be silicon germanium, the active semiconductor layer may be silicon and the sacrificial stressor layer may be silicon germanium. Elastic edge relaxation is preferably used to efficiently transfer strain to the active layer.Type: GrantFiled: January 14, 2010Date of Patent: August 23, 2011Assignee: Acorn Technologies, Inc.Inventors: R. Stockton Gaines, Daniel J. Connelly, Paul A. Clifton
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Patent number: 7972916Abstract: The process forms a FET with a channel region that has in plane compressive stress in one direction and in plane tensile stress in a perpendicular direction. The process deposits a germanium silicon sacrificial stressor layer on a silicon substrate so that the germanium silicon is in a state of compressive stress. Etching trenches forms silicon pillars covered by the stressor layer and transfers tensile strain to the upper portion of the pillar. The process fills the trenches with stiff insulating material to maintain the strain in the pillar and etching removes the stressor layer. More etching creates recesses on either side of a channel region in the upper portion of the pillar. Doped germanium silicon layers fill the recesses, apply lateral compressive stress to the pillar's channel region and act as source and drain electrodes. A gate is formed above the strained channel region.Type: GrantFiled: October 22, 2008Date of Patent: July 5, 2011Assignee: Acorn Technologies, Inc.Inventors: Daniel J. Connelly, Paul A. Clifton, R. Stockton Gaines
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Process for fabricating a self-aligned deposited source/drain insulated gate field-effect transistor
Patent number: 7902029Abstract: Processes for forming self-aligned, deposited source/drain, insulated gate, transistors and, in particular, FETs. By depositing a source/drain in a recess such that it remains only in the recess, the source/drain can be formed self-aligned to a gate and/or a channel of such a device. For example, in one such process a gate structure of a transistor may be formed and, in a material surrounding the gate structure, a recess created so as to be aligned to an edge of the gate structure. Subsequently, a source/drain conducting material may be deposited in the recess. Such a source/drain conducting material may be deposited, in some cases, as layers, with one or more such layers being planarized following its deposition. In this way, the conducting material is kept within the boundaries of the recess.Type: GrantFiled: June 23, 2005Date of Patent: March 8, 2011Assignee: Acorn Technologies, Inc.Inventors: Daniel E. Grupp, Daniel J. Connelly, Paul A. Clifton, Carl M. Faulkner -
Patent number: 7884003Abstract: An electrical device in which an interface layer is disposed between and in contact with a metal and a Si-based semiconductor, the interface layer being of a thickness effective to depin of the Fermi level of the semiconductor while still permitting current to flow between the metal and the semiconductor. The interface layer may include a layer of a passivating material (e.g., made from nitrogen, oxygen, oxynitride, arsenic, hydrogen and/or fluorine) and sometimes also includes a separation layer. In some cases, the interface layer may be a monolayer of a semiconductor passivating material. The interface layer thickness corresponds to a minimum specific contact resistance of less than or equal to 10 ?-?m2 or even less than or equal to 1 ?-?m2 for the electrical device.Type: GrantFiled: August 25, 2008Date of Patent: February 8, 2011Assignee: Acorn Technologies, Inc.Inventors: Daniel E. Grupp, Daniel J. Connelly
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Patent number: 7883980Abstract: A transistor includes a semiconductor channel disposed nearby a gate and in an electrical path between a source and a drain, wherein the channel and at least one of the source or the drain are separated by an interface layer so as to form a channel-interface layer-source/drain junction in which a Fermi level of the semiconductor channel is depinned in a region near the junction and the junction has a specific contact resistance of less than approximately 1000 ?-?m2. The interface layer may include a passivating material such as a nitride, a fluoride, an oxide, an oxynitride, a hydride and/or an arsenide of the semiconductor of the channel. In some cases, the interface layer consists essentially of a monolayer configured to depin the Fermi level of the semiconductor of the channel, or an amount of passivation material sufficient to terminate all or a sufficient number of dangling bonds of the semiconductor channel to achieve chemical stability of the surface.Type: GrantFiled: April 11, 2006Date of Patent: February 8, 2011Assignee: Acorn Technologies, Inc.Inventors: Daniel E. Grupp, Daniel J. Connelly
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Patent number: 7851325Abstract: The present invention relates to creating an active layer of strained semiconductor using a combination of buried and sacrificial stressors. That is, a process can strain an active semiconductor layer by transferring strain from a stressor layer buried below the active semiconductor layer and by transferring strain from a sacrificial stressor layer formed above the active semiconductor layer. As an example, the substrate may be silicon, the buried stressor layer may be silicon germanium, the active semiconductor layer may be silicon and the sacrificial stressor layer may be silicon germanium. Elastic edge relaxation is preferably used to efficiently transfer strain to the active layer.Type: GrantFiled: September 12, 2008Date of Patent: December 14, 2010Assignee: Acorn Technologies, Inc.Inventors: R. Stockton Gaines, Daniel J. Connelly, Paul A. Clifton
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Patent number: 7816240Abstract: A metal source/drain field effect transistor is fabricated such that the source/drain regions are deposited, multilayer structures, with at least a second metal deposited on exposed surfaces of a first metal.Type: GrantFiled: February 23, 2007Date of Patent: October 19, 2010Assignee: Acorn Technologies, Inc.Inventors: Carl M. Faulkner, Daniel J. Connelly, Paul A. Clifton, Daniel E. Grupp
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Patent number: 7756196Abstract: A CDMA radio system uses an adaptive filter in a receiver to mitigate multipath radio propagation and to filter out interfering signals. Characteristics of an initial stage of the filter preferably are determined by cross correlation of a generated pilot signal and the input signal with the integration of the correlation performed over a time period selected to be an integral number of symbol periods. The integration causes the portions of the cross correlation corresponding to the user subchannels to average substantially to zero, so that the pilot channel signal correlation is the primary contribution to the signal used to characterize the channel to establish the coefficients of the adaptive filter for the receiver.Type: GrantFiled: April 4, 2005Date of Patent: July 13, 2010Assignee: Acorn Technologies, Inc.Inventors: Alvin M. Despain, R. Stockton Gaines
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Patent number: 7700416Abstract: The process uses a sacrificial stressor layer to provide tensile strained surface regions for bulk silicon or silicon on insulator (SOI) substrates. The process deposits a sacrificial layer of silicon germanium on the surface of the substrate and then patterns the workpiece to form trenches extending through the silicon germanium stressor layer into the semiconductor substrate. The process fills the trenches with insulating materials and then removes the silicon germanium stressor layer, for example using wet etching, leaving a strained silicon or SOI substrate with a pattern of shallow trench isolation structures. The trench fill material is selected to stress the regions of silicon between the trenches to provide a tensile strained surface region to the semiconductor substrate. Such a strained semiconductor surface region can have improved mobility properties and so is advantageous for forming devices such as MOSFETs.Type: GrantFiled: April 25, 2008Date of Patent: April 20, 2010Assignee: Acorn Technologies, Inc.Inventors: Paul A. Clifton, Daniel J. Connelly, R. Stockton Gaines
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Patent number: 7639738Abstract: A communication system includes a channel shortening filter to reduce intersymbol interference and facilitate recovery of communications. The channel shortening filter preferably includes a energy concentration filter that optimizes SNR or SINR or other performance criterion and a impulse response tail canceller filter that eliminates energy or, equivalently, cancels coefficients outside the allowed delay-spread window for the channel. Preferably the filters are calculated using signal decomposition.Type: GrantFiled: June 21, 2006Date of Patent: December 29, 2009Assignee: Acorn Technologies, Inc.Inventor: Fernando Lopez de Victoria
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Patent number: 7615402Abstract: A transistor operated by changing the electrostatic potential of an island disposed between two tunnel junctions. The transistor has an island of material which has a band gap (e.g. semiconductor material). Source and drain contacts are provided. The transistor has a first tunnel junction barrier disposed between island and source, and a second tunnel junction barrier disposed between island and drain. The island is Ohmically isolated from other parts of the transistor as well as a substrate. A gate electrode is capacitively coupled to the island so that a voltage applied to the gate can change the potential of the island. The transistor has n- and p-type embodiments. In operation, applying a gate voltage lowers (e.g., for positive gate bias) or raises (e.g., for negative gate bias) the conduction band and valence band of the island. When the conduction band or valence band aligns with the Fermi energy of the source and drain, tunneling current can pass between the source, island and drain.Type: GrantFiled: July 7, 2000Date of Patent: November 10, 2009Assignee: Acorn Technologies, Inc.Inventor: Daniel E. Grupp
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Patent number: 7612365Abstract: A thin blanket epitaxial layer of SiGe is grown on a silicon substrate to have a biaxial compressive stress in the growth plane. A thin epitaxial layer of silicon is deposited on the SiGe layer, with the SiGe layer having a thickness less than its critical thicknesses. Shallow trenches are subsequently fabricated through the epitaxial layers, so that the strain energy is redistributed such that the compressive strain in the SiGe layer is partially relaxed elastically and a degree of tensile strain is induced to the neighboring layers of silicon. Because this process for inducing tensile strain in a silicon over-layer is elastic in nature, the desired strain may be achieved without formation of misfit dislocations.Type: GrantFiled: February 25, 2008Date of Patent: November 3, 2009Assignee: Acorn Technologies, Inc.Inventor: Paul A. Clifton
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Patent number: 7599426Abstract: A code division multiple access (CDMA) radio system uses an adaptive filter in a receiver to mitigate multipath radio propagation and to filter out interfering signals. Characteristics of an initial stage of the filter preferably are determined by cross correlation of a generated pilot signal and the input signal with the integration of the correlation performed over a time period selected to be an integral number of symbol periods. The integration causes the portions of the cross correlation corresponding to the user subchannels to average substantially to zero, so that the pilot channel signal correlation is the primary contribution to the signal used to characterize the channel to establish the coefficients of the adaptive filter for the receiver.Type: GrantFiled: July 19, 2004Date of Patent: October 6, 2009Assignee: Acorn Technologies, Inc.Inventor: Alvin M. Despain
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Patent number: 7462860Abstract: An electrical device in which an interface layer is disposed between and in contact with a metal and a Si-based semiconductor, the interface layer being of a thickness effective to depin of the Fermi level of the semiconductor while still permitting current to flow between the metal and the semiconductor. The interface layer may include a layer of a passivating material (e.g., made from nitrogen, oxygen, oxynitride, arsenic, hydrogen and/or fluorine) and sometimes also includes a separation layer. In some cases, the interface layer may be a monolayer of a semiconductor passivating material. The interface layer thickness corresponds to a minimum specific contact resistance of less than or equal to 10 ?-?m2 or even less than or equal to 1 ?-?m2 for the electrical device.Type: GrantFiled: July 13, 2005Date of Patent: December 9, 2008Assignee: Acorn Technologies, Inc.Inventors: Daniel E. Grupp, Daniel J. Connelly
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Patent number: 7382021Abstract: A transistor includes one or more channel taps containing a stack consisting at least in part of a semiconductor an interfacial III-VI layered compound and a conductor. The III-VI compound consists primarily of atoms from Groups IIIA-B and from Group VIA of the Periodic Table of the Elements in an approximate 1:1 ratio. These materials may be formed as layers of covalently bonded elements from Groups IIIA-B and covalently bonded Group VIA elements, adjacent and respective planes of which may be bonded by Van der Waals forces (e.g., to form a single bilayer consisting of a single plane of atoms from Groups IIIA-B and a single plane of Group VIA atoms). One particular III-VI material from which the interfacial layer is made, especially for p-channel transistors, is GaSe. Other III-VI compounds, whether pure compounds or alloys of pure compounds, may also be used.Type: GrantFiled: December 9, 2004Date of Patent: June 3, 2008Assignee: Acorn Technologies, Inc.Inventors: Carl Faulkner, Daniel J. Connelly, Daniel E. Grupp
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Patent number: 7356196Abstract: A computationally efficient, adaptive multistage Wiener filter employs two modules, a linear filter module that operates at the input data rate and an update module that operates at a plurality of rates but performs many calculations at only the update rate. This filter is especially useful when the channel conditions vary slowly so that the filter's update rate can be considerably less than the input data rate. Separating the calculations, preferably performing appropriate calculations at different rates and preferably substituting scalar operations for vector operations can provide improved computational efficiency while maintaining high levels of performance.Type: GrantFiled: January 11, 2007Date of Patent: April 8, 2008Assignee: Acorn Technologies, Inc.Inventor: Alvin M. Despain
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Patent number: 7338834Abstract: A thin blanket epitaxial layer of SiGe is grown on a silicon substrate to have a biaxial compressive stress in the growth plane. A thin epitaxial layer of silicon is deposited on the SiGe layer, with the SiGe layer having a thickness less than its critical thicknesses. Shallow trenches are subsequently fabricated through the epitaxial layers, so that the strain energy is redistributed such that the compressive strain in the SiGe layer is partially relaxed elastically and a degree of tensile strain is induced to the neighboring layers of silicon. Because this process for inducing tensile strain in a silicon over-layer is elastic in nature, the desired strain may be achieved without formation of misfit dislocations.Type: GrantFiled: March 17, 2006Date of Patent: March 4, 2008Assignee: Acorn Technologies, Inc.Inventor: Paul A. Clifton
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Patent number: 7181085Abstract: A computationally efficient, adaptive multistage Wiener filter employs two modules, a linear filter module that operates at the input data rate and an update module that operates at a plurality of rates but performs many calculations at only the update rate. This filter is especially useful when the channel conditions vary slowly so that the filter's update rate can be considerably less than the input data rate. Separating the calculations, preferably performing appropriate calculations at different rates and preferably substituting scalar operations for vector operations can provide improved computational efficiency while maintaining high levels of performance.Type: GrantFiled: January 21, 2003Date of Patent: February 20, 2007Assignee: Acorn Technologies, Inc.Inventor: Alvin M. Despain
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Patent number: 7176483Abstract: An electrical junction that includes a semiconductor (e.g., C, Ge, or an Si-based semiconductor), a conductor, and an interface layer disposed therebetween. The interface layer is sufficiently thick to depin a Fermi level of the semiconductor, yet sufficiently thin to provide the junction with a specific contact resistance of less than or equal to approximately 1000 ?-?m2, and in some cases a minimum specific contact resistance.Type: GrantFiled: January 7, 2004Date of Patent: February 13, 2007Assignee: Acorn Technologies, Inc.Inventors: Daniel E. Grupp, Daniel J. Connelly