Abstract: A pattern drawing apparatus includes a first image-pickup device for reading an alignment mark and reading a first pattern image for detecting a positional shift, a second image-pickup device for reading the first pattern image and reading a second pattern image for detecting a positional shift drawn by an irradiation light beam from the optical head while carrying out a relative movement between the table and the optical head, and a positional shift detection unit for obtaining a first coordinate difference between a center of a visual field of the first image-pickup device and a center of the first pattern based on a read image by the first image-pickup device and obtaining a second coordinate difference between the center of the first pattern and a specific position of the second pattern based on a read image by the second image-pickup device.

Abstract: A ring shape lighting device, used for lighting the mark around the CCD camera, has a lighting device, a lighting brightness control device, a lighting height control device, a lighting color control device and a controller. The controller controls these devices and detects the marks using the CCD camera, by changing the lighting brightness at 1 percent step from 1 to 100 percent with different combinations of lighting height and lighting color. The device detects the mark contrasts using a contrast detection/determination device and detects the variance using a variance detection/determination device. The device then determines the best lighting condition based on the variance.

Abstract: X-rays are irradiated at the board 5 from the X-ray generator 11, the image of the standard marks 50, 51 are projected on the fluorescence screen 12, the resulted image is photographed simultaneously by one shot of the visible light CCD camera 13 and finally processed by the control device 9 to simultaneously determine the position of the standard marks 50 and 51. the alignment marks depicted on the photo masks 24 and 25 are imprinted on the dry film resist layers 55 respectively based on the positions of the standard marks 50 and 51 by irradiating X-rays through the sets of mirrors 22, 23 on the dry film resist layers 55.

Abstract: A projection exposure device which can perform high accurate alignment and separate exposures wherein the mask marks 20 overlap with the corresponding board marks 30 in exposure, the mask marks 20 are larger than the board marks 30 so as to shield the board marks 30 from the exposing light, and a diameter ØM of the circular mask mark 20 is larger than a diameter ØB of the circular board mark 30.

Abstract: A projection exposure apparatus and a method for producing a printed circuit board wherein, the whole pattern including pieces 10 and coupons 12 to be exposed on a print circuit board 2 is depicted on a photo mask 1 divided in six areas by divide line 19, the exposure will be made with respect to the each divided area of the photo mask 1 mounted on a movable photo mask stage 5 with using a masking device 3 masking other area than the exposing area.

Abstract: A magnification correction device 1 includes magnification correction optics 2, a pressure adjustment device 3 and a controller 4. The magnification correction optics 2 is formed in a shape of a box with a glass plate 20 and a bottom plate 11 positioned parallel to the glass plate 20 and a frame 10. The inside of the box is an air room 24 connected to a pressure adjustment device 3 via a connecting pipe 12 so that the pressure of the inside can be changed. The cylinder 30 is driven by a motor 35 via a linear movement unit 36 such as a ball screw and the motor 35 is controlled by a controller 4. The moving distance of cylinder 30, which is equal to the moving distance of the piston, is decided by the number of the revolutions of the motor 35, and the capacity of the closed circuit of the pressure adjustment device 3 is also decided.

Abstract: A mask mark is irradiated by an ultra-violet light source, thereby the image of the mark is passed through a lens and a half-mirror, then reflected by a mirror, thereafter further passed through a beam splitter and a lens, forming an image on a CCD. Then the center coordinate of the image is measured by a device, next, a board mark is illuminated by an infrared light source, and its image is passed through the mirror, the half-mirror, the beam splitter, a reflector, a lens, and a beam splitter, forming an image on a CCD. The positional alignment is implemented by moving the mobile stage in the XY? directions based on the board mark on the infrared CCD and the mask mark on the ultra-violet CCD.

Abstract: The Xray irradiation device 1 issues Xrays to board mark 7 and projects the image of the board mark 7 on the fluorescence screen 3, the fluorescence face 39 of which visibly displays the image of the board mark 7 that can be captured by the CCD camera 2. The CCD camera 2 images the board mark 7 and the mask mark 5 depicted on the photo mask 4 overlapping together. The board 6 and the photo mask 4 are aligned by exposure stage 8 so as to the board mark 7 and the mask mark 5 coincide.

Abstract: An optical magnification adjustment system being capable of minutely correcting magnification. A first lens 1 of plano-convex is installed on the side of an object surface 5, and a second lens 2 of concave-plano is installed on the side of a formed image surface 7. By controlling the center space d between the first lens and the second lens, the image is enlarged or reduced. The radii of curvature R2 and R3 of the convex surface of the first lens and the concave surface of the second lens are respectively set according to the following equations. R2=(1−n1)/&phgr;2 R3=(n2−1)/&phgr;3 where, &phgr;2 and &phgr;3 represent optical power, and n1 and n2 represent refraction indexes, respectively.

Abstract: An aligner which enables a uniform close contact between a photo mask and a printed circuit board is provided. The aligner includes: a photo mask (20) provided with tapered portions (21); a mask holder (2) for supporting the photo mask (20) at the tapered portions; a copy frame (1) for supporting the mask holder (2); a load regulating system (3); and a Z-axis moving system (8) having supporting arms (80) on which the mask holder (2) is placed through the load regulating system (3); and a guide system (4) having a guide shaft (40), so that the photo mask (20) can be moved relative to a printed circuit board (B) while maintaining the position in X and Y directions by the guidance of the guide system (4). The photo mask (20) closely contacts with a printed circuit board (B) by a tare weight of the copy frame (1), mask holder (2), and the photo mask (20), and the contact pressure is regulated by the load regulating system (3).

Abstract: Full-contact exposure device that allows high adherence of a photo mask with a board. Upon completion of prescribed processing, a controller controls a moving mechanism to move a platen upward, thereby moving the photo mask and a board closer, and to stop at a position where a sealed space is formed between the two. At the same time a controller starts vacuuming by controlling a vacuum pump. By this vacuum pressure in the space between the photo mask and the board becomes negative, and the photo mask bends downward with its center area sagging and contacting the board. The controller controls a cam drive mechanism to rotate cams while vacuuming, allowing the photo mask to gradually make contact with the board from the center area to its periphery while pushing out the air gradually from the center to the periphery, thereby completing full contact with the board.

Abstract: A print circuit board is demarcated with arbitrary areas. The print circuit board at one area is partly sucked and fixed on an alignment stage. After alignment with a mask, a pattern of the mask is transferred to the board. Next, shift is made to another area to repeat the same operation, thereby sequentially exposing all the areas to light.

Abstract: An optical magnification adjustment system being capable of minutely correcting magnification. A first lens 1 of plano-convex is installed on the side of an object surface 5, and a second lens 2 of concave-plano is installed on the side of a formed image surface 7. By controlling the center space d between the first lens and the second lens, the image is enlarged or reduced. The radii of curvature R2 and R3 of the convex surface of the first lens and the concave surface of the second lens are respectively set according to the following equations. R2=(1−n1)/&phgr;2 R3=(n2−1)/&phgr;3 where, &phgr;2 and &phgr;3 represent optical power, and n1 and n2 represent refraction indexes, respectively.

Abstract: A board stage of an aligner that can avoid bending of a printed circuit board to be exposed and accomplish high accurate exposure. In one preferred mode a suction plate 2 having small holes 20 is mounted on a supporting body on which a space 30 bigger than the small holes is provided. The holes 20 are connected to the space 30 and to a vacuum device via an air passage 31 and a bottom passage 32. The diameter of the suction hole 20 is so less than 0.4 mm not to make at the printed circuit board such bending that causes exposure troubles.

Abstract: A marking apparatus for forming alignment marks, which improves the alignment accuracy of each layer in the production of multi-layered printed circuit boards. An X-ray generator 11 irradiates X-rays at a standard mark 50 in a core board 51 of a board 5, and projects the image of the standard mark 50 on a fluorescence screen 12. The image is captured by a visible light CCD camera 13, thereby the position of the standard mark 50 is detected. Using the detected position of the standard mark 50 as an alignment reference, the apparatus irradiates ultra-violet rays at dry film resist layers 55 via mirrors 22 and 23, and imprints the marks emerged on photo masks 24 and 25 on the dry film resist layers 55, respectively.

Abstract: An apparatus for inspecting a display board or a circuit board in which an inspection terminal 4 of an inspection probe block B is pressed into contact with an electrode pad 3 of a display board or a circuit portion P for inspection. A probe block supporting frame member 2 has an expandable and contractible structure, and when the probe block supporting frame member 2 is expanded, a board supporting frame member 1 can be relatively advanced. Due to the relative advancement of the board supporting frame member 1, the display board or the circuit board P protrudes forward of a distal end of the terminal 4 of the probe block B through an enlarged opening area 16 of the probe supporting frame member 2, so that the display board or the circuit board P supported on the board supporting frame member 1 can be exchanged with another board.

Abstract: A unit has inspection block blocks mounted thereon in parallel, wherein a plurality of inspection probe blocks are inserted into and removed from a guide rail through a slider so that the probe blocks can be loaded or replaced. Each probe block is slidingly moved along the guide rail so that its positional adjustment can be made in an extension length of the guide rail. Only one kind of support base can commonly be used by inserting and removing different probe blocks with respect to the support base and the positional adjustment can be done. The unit with inspection probe blocks mounted thereon in parallel includes a support base and a plurality of inspection probe blocks each having a plurality of blocks and arranged on the support base in parallel.

Abstract: A supporting framework for a display panel or a probe block is capable of properly coping with display panels of different sizes in a testing apparatus. By moving a framework 1 with a display panel supported thereon or by moving frame members 2, 3, 4, 5 of the framework 1 with a probe block supported thereon, an opening (or space) defined by the respective frame members can be enlarged or reduced.

Abstract: The invention provides an aligner enabling to perform high accuracy positioning at manufacturing a multi-layered circuit board. A board alignment mark is photographed by a CCD camera by irradiating X-ray from an X-ray generator at the state removing a photo mask, and position of the board alignment mark is memorized. Then, the photo mask is set on a print circuit board, a mask alignment mark is photographed, and positioning of the mask alignment mark and the print circuit board is performed by comparing with position of memorized board alignment mark and by moving a platen so that the gap becomes zero.

Abstract: A rectangular support framework for a flat panel display as an object to be tested or a testing probe block is disclosed.