Abstract: Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical to a point of use or to another integral block are provided. More particularly, the integral blocks include a recharge container block, a pressurization gas block, a purge gas block, a waste recovery block, a vacuum block, a solvent supply block, a degas block, a control block, and a filtration block. Various integral blocks may be selected to form a chemical delivery system, which is particularly suited for a given application. A chemical delivery system will typically comprise a chemical container block, a chemical delivery block, and a point of use in line with the chemical container block and chemical delivery block, as well as one or more integral blocks.

Abstract: Provided are a method and apparatus for continuously blending a chemical solution for use in semiconductor processing. The method involves the step of mixing a first chemical stream with a second chemical stream in a controlled manner to form a stream of a solution having a predetermined formulation. The apparatus allows one to practice the above method. The method and apparatus can accurately provide chemical solutions of desired concentration in a continuous manner. The invention has particular applicability in semiconductor device fabrication.

Abstract: A method and system for diagnosing, solving, and/or controlling, in particular remotely, a given technical problem likely to arise before, during or after a heat treatment operation on metals, in particular in the welding or cutting field, and to provide the most suitable solution thereto, and to do so by minimizing the time needed to solve this problem and therefore by reducing the loss of productivity likely to occur because of this technical problem.

Abstract: The apparatus and method of the present invention relates use of a warm and dry atmosphere in electronic component storage areas. The warm and dry atmosphere provides the benefit of eliminating the baking process and other moisture management issues by removing moisture from the components. In accordance with one aspect of the present invention, a component storage system includes an enclosed component storage area and a dry gas delivery system for delivery of a dry gas to the storage area to prevent moisture from being absorbed by the components, and a temperature control system for controlling a temperature of the dry gas to about 10° C. to about 60° C.

Abstract: Methods and apparatus are presented for producing carbon black on a substrate. One preferred method includes providing a head assembly including a nozzle, the nozzle including a first injector for injecting a gas such as acetylene, and a second injector for injecting a mixture of a fuel and an oxidant to produce a pilot flame. The head assembly is indexed over a substrate on which is to be deposited carbon black. The acetylene is injected through the first injector, then through a pilot flame emitted from one or more second injectors, and finally toward a substrate to be coated with carbon black, but only when a deposit of carbon black is desired. The method includes ceasing the flow of acetylene, indexing the head assembly away from the substrate on which was just deposited the carbon black after a carbon black deposition sequence, and ceasing fuel gas and oxidant gas flows through the second injector.

Abstract: Methods and apparatus are presented which allow efficient environmental testing of components such as printed circuit boards, integrated circuits, sub-systems and other components. In one method of the invention, a component can be placed into a chamber having an internal space filled with a gaseous atmosphere. The component is indirectly cooled by smartly positioning one or more cooling coils near the component to be tested, and the cooling coils are fed with a cryogenic fluid from a source of cryogenic fluid. The warm cryogenic fluid is recycled by one of two means: a thermosiphon conduit loop, and a storage and compression facility for reusing the warm cryogenic fluid. The internal space is preferably filled with a dry gas.

Abstract: An air separation unit including an air intake, a high pressure cryogenic distillation column receiving air from the air intake and producing an oxygen rich liquid reflux, and a low-pressure cryogenic distillation column. An adaptive controller controls the flow rate of the oxygen-rich liquid from the first distillation column into the second distillation column, wherein during plant upsets, the adaptive controller maintains the level of oxygen-rich liquid in the first distillation column at a substantially constant level by adjusting a flow rate of the oxygen rich liquid into the second distillation column, and wherein the argon content of the argon-rich output stream from the second distillation column remains substantially constant.

Abstract: A method of integrated resin preconditioning and hydrogen peroxide purification is provided. The method includes preconditioning a resin by washing the resin with deionized water to produce a washed resin, and contacting an effective amount of a preconditioning hydrogen peroxide solution with the washed resin to remove impurities from the washed resin, thereby producing a preconditioned resin.

Abstract: Apparatus and process for removing carbon monoxide from a gas stream comprising a major portion of an inert gas and a minor portion of carbon monoxide are provided. The process involves contacting a feed gas stream with at least a primary metal oxide in a reaction zone of a reactor vessel at conditions effective to convert substantially all of the carbon monoxide to carbon dioxide, thus producing a purified gas stream consisting essentially of the inert gas and carbon dioxide and substantially free of carbon monoxide.

Abstract: Provided are slurry compositions suitable for use in a chemical-mechanical planarization process and methods for making same. The compositions include: (a) abrasive particles dispersed in a suspension medium; (b) a peroxygen compound; and (c) a stabilizing agent. The stabilizing agent includes a phosphoric acid, a salt of a phosphoric acid or combinations thereof. The invention has particular applicability to the semiconductor manufacturing industry.

Abstract: A system and method for purifying liquefied corrosive gases of metallic impurities is described. The principle for this purification method relies on vapor-phase transfilling the vapor phase from a source container into a receiving container. This method has been observed to decrease metal concentrations by a factor of at least 1000 and, decreases the metallic impurity levels in the resulting condensate. The vapor transfer is accomplished by controlled differential pressure rather than mechanical pumping, thereby generating no particle or metal impurities.

Abstract: An apparatus and method for generating artificial atmospheres in a furnace for the heat treating of materials. The furnace includes a substantially isolated chamber having a discharge receiving orifice for accepting a bi-phasic cryogen into a hot/work zone of the chamber. A low pressure cryogen source feeds a bi-phasic inert gas into the chamber in order to allow the volumetric expansion of the evaporating liquid constituent of the bi-phasic cryogen to purge a substantial portion of the ambient oxygen from the chamber and to allow a substantial residual concentration of the inert gas to blanket the process area without significant dissipation during the heat treating process. Oxidizable materials heat treated in artificial atmospheres generated by use of bi-phasic cryogens show no signs of scaling or staining through the process and thus do not need to undergo acid bathing prior to subsequent processing.

Abstract: Methods and apparatus for efficient utilization of a cryogen in inerting of solid and molten metals are presented. One method and apparatus of the invention includes providing a source of liquid cryogen; transporting the liquid cryogen through a conduit connected to the source of liquid cryogen to a gas/liquid separator, wherein a portion of the liquid cryogen transforms into gaseous cryogen en route; transporting a portion of the liquid cryogen through a first conduit connecting the gas/liquid separator to a cryogen supply nozzle; transporting the gaseous cryogen through a second conduit connecting the gas/liquid separator to a cryogen supply nozzle; and flowing at least a portion of liquid cryogen and at least a portion of the gaseous cryogen through the cryogen nozzle separately and near a surface of solid or molten metal. Thus liquid that transforms into gaseous cryogen en route from storage is not vented and not wasted, but used in inerting of solid or molten metals.

Abstract: Provided are methods for making a slurry composition, suitable for use in a chemical-mechanical planarization process. Also provided are compositions made by such methods. The methods comprise combining: (a) abrasive particles; (b) a suspension medium; (c) a peroxygen compound; (d) an etching agent; and (e) an alkyl ammonium hydroxide. The methods and compositions of the present invention are particularly applicable to the semiconductor manufacturing industry.

Abstract: A method of determining a concentration of a component of a slurry includes the step of measuring change in refractive index associated with changes in concentration of the component of interest in the slurry.

Abstract: Methods and apparatus are presented which allow efficient environmental testing of components such as printed circuit boards, integrated circuits, sub-systems and other components. In one method of the invention, a component can be placed into a chamber having an internal space filled with a gaseous atmosphere. The component is indirectly cooled by smartly positioning one or more cooling coils near the component to be tested, and the cooling coils are fed with a cryogenic fluid from a source of cryogenic fluid. The warm cryogenic fluid is recycled by one of two means: a thermosiphon conduit loop, and a storage and compression facility for reusing the warm cryogenic fluid. The internal space is preferably filled with a dry gas.

Abstract: Methods are presented to increase the throughput of a recovery boiler equipped with at least primary and secondary levels of injection of air. The methods comprise operating the recovery boiler with a third level of oxidant injection below or at the same level as the secondary level, and oxygen enrichment applied to at least the secondary level and said third level.

Abstract: Provided are a system and method for nitrous oxide purification, wherein the nitrous oxide product for use in semiconductor manufacturing. The system and process involve a first sub-system having a purification tank for holding a liquefied nitrous oxide, therein; a vaporizer in communication with the purification tank to receive, vaporize and convey a nitrous oxide vapor back to the purification tank; a distillation column disposed on a distal end of the purification tank to receive a nitrous oxide vapor; a condenser disposed on the distillation column, wherein light impurities are removed and wherein a nitrous oxide devoid of light impurities is conveyed and converted into vapor in said vaporizer. A second sub-system having a first dry bed vessel is disposed downstream of the vaporizer to receive the vapor and reacting the acid gas therein; a second dry bed vessel downstream of the said first dry bed vessel for removing water and ammonia in the vapor.

Abstract: Provided are ionic purifiers and methods that are suitable for providing an ultra-high-purity chemical to a semiconductor manufacturing process. The ionic purifiers include a vapor inlet introducing a chemical vapor to be purified into a column. A high-purity water inlet continuously introduces high-purity water into the column. The high-purity water contacts the chemical vapor to be purified, thereby forming a purified chemical vapor and contaminated water. A vapor outlet removes the purified chemical vapor from the column. A liquid outlet removes the contaminated water from the column. The invention has particular applicability in the semiconductor manufacturing industry.

Abstract: Provided is a novel system and method for delivery of gas from a liquefied state. The system includes (a) a delivery vessel holding a bulk quantity of liquefied gas therein; (b) a heat exchanger disposed on the delivery vessel to provide or remove energy from the liquefied gas only; and (c) a pressure controller for monitoring and adjusting the energy delivered to the vessel. The system and method allow for controlled delivery of liquefied gas from a delivery vessel at a predetermined flow rate. Particular applicability is found in the delivery of gases to semiconductor process tools.