Abstract: Ion sources, systems and methods are disclosed.
Type:
Grant
Filed:
February 2, 2009
Date of Patent:
February 7, 2012
Assignee:
ALIS Corporation
Inventors:
Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
Abstract: Methods that include using a noble gas ion beam to determine dopant information for a sample are disclosed, the dopant information including dopant concentration in the sample, dopant location in the sample, or both.
Abstract: In one aspect the invention provides a gas field ion microscope that includes an ion source in connection with an optical column, such that an ion beam generated at the ion source travels through the optical column and impinges on a sample. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the invention provides methods for using the ion microscope to analyze samples and enhancing the performance of a gas field ion source.
Type:
Grant
Filed:
March 20, 2006
Date of Patent:
October 13, 2009
Assignee:
ALIS Corporation
Inventors:
Billy W. Ward, Louis S. Farkas, III, John A. Notte, IV, Randall G. Percival
Abstract: Ion sources, systems and methods are disclosed.
Type:
Grant
Filed:
November 15, 2006
Date of Patent:
February 3, 2009
Assignee:
ALIS Corporation
Inventors:
Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz