Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that cab be made generally available to the scientific community.

Abstract: A method for performing sub-micron optical spectroscopy, using a heated SPM probe and far-field collection optics is described. The enhanced emission characteristics at a sharp heated tip constitute a highly localized wideband IR source. Thus the IR absorption and emission properties of a sample surface adjacent can be observed and measured in the farfield even though the interaction region is sub-micron in scale. . . . providing spatial resolution mapping of sample composition.

Abstract: The invention is a heated thermal probe suitable for use in micro-thermal analysis or other high resolution thermal measurements and actions. The probe is, in the preferred embodiment, a microfabricated cantilever with a sharp probe tip of a type used in Scanning Probe Microscopes (SPM's) which further includes an integral resistive heating element. The heating element is formed by doping regions of the cantilever with an ion implant process to make lower resistance connections and a higher resistance heating element. There is no spatial overlap between the base of the probe tip and the heating element or conductors.