Abstract: A Micromirror Array Lens with self-tilted micromirrors comprising a plurality of self-tilted micromirrors and configured to form a designed optical surface profile by self-tilted micromirrors. Each self-tilted micromirror comprises a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a micromirror plate having a reflective surface, coupled to the stiction plate elastically and configured to have a required motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the micromirror plate and configured to provide a tilting point or area for the motion of the micromirror plate. The designed optical surface profile determines the required motion of the micromirror plate and a surface profile shape memory is built in the structure of the micro-mechanical elements of the self-tilted micromirrors so that each micromirror plate has the required motion.

Abstract: An array of micromirror array lenses is invented. The micromirror array lens consists of many micromirrors and actuating components. Each micromirror array lens is variable focal length lens with high speed focal length change. The lens can have arbitrary type and/or size as desired and desired arbitrary optical axis and can correct aberration by controlling each micromirror independently. Independent control of each micromirror is possible by known microelectronics technologies. The actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known microelectronics technologies remove the loss in effective reflective area due to electrode pads and wires.

Abstract: A micromirror array lens includes a plurality of micromirrors, and reproduces a predetermined free surface by controlling rotation and/or translation of the micromirrors. The micromirror is controlled by control circuitry, upheld by a mechanical structure, and includes a reflective surface. The predetermined free surface of the lens is changed by controlling rotation and/or translation of the micromirrors. The micromirrors are arranged in one or more concentric circles to form the lens. The micromirror has a fan shape, a hexagonal shape, a rectangular shape, a square shape, or a triangle shape. The reflective surface of the micromirror is substantially flat. The control circuitry is constructed under the micromirrors by using semiconductor microelectronics technologies. The micromirrors are actuated by electrostatic and/or electromagnetic force. The reflective surface of the micromirror is made of materials with high reflectivity.

Abstract: A new three-dimensional imaging device has been needed to overcome the problems of the prior arts that the used variable focal length lenses that are still slow, have small focal length variation and low focusing efficiency, and requires a complex mechanism to control it. The invented three-dimensional imaging system uses the variable focal length micromirror array lens. Since the micromirror array lens has lots of advantages such as very fast response time, large focal length variation, high optical focusing efficiency, large size aperture, low cost, simple mechanism, and so on, the three-dimensional imaging device can get a real-time three-dimensional image with large depth range and high depth resolution.

Abstract: There is a need for a small and fast optical zoom device that can change magnification. Conventional zoom devices require coupled mechanical motions to adjust the axial separations between individual or groups of elements in order to change the optical magnification. The mechanical motions decrease the speed of zooming, increase space and weight for zoom system, may induce unwanted jitter, and require large power consumption. In addition, the mechanical zoom system is restricted to magnifying the area on-axis. To solve problems of conventional zoom system, the zoom system utilizing one or more variable focal length micromirror array lenses without macroscopic mechanical motion of lenses is invented.

Abstract: A micromirror array lens consists of many micromirrors with two degrees of freedom rotation and actuating components. As a reflective variable focal length lens, the array of micromirrors makes all lights scattered from one point of an object converge at one point of image plane. As operational methods for the lens, the actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known semiconductor microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. Independent control of each micromirror is possible by known semiconductor microelectronics technologies. The micromirror array can form a lens with arbitrary shape and/or size, as desired.

Abstract: A variable focal length lens comprising micromirrors with pure translation is invented. The lens consists of many micromirrors and actuating components. The array of micromirrors with pure translation makes all lights scattered from one point of an object have the same periodic phase and converge at one point of image plane by using Fresnel diffraction theory. The actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known semiconductor microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. The lens can correct aberration by controlling each micromirror independently. Independent control of each micromirror is possible by known semiconductor microelectronics technologies.

Abstract: A variable focal length lens comprising micromirrors with one degree of freedom rotation is invented. The lens consists of many micromirrors and actuating components. The array of micromirrors with one degree of freedom rotation makes all lights scattered from one point of an object converge at one point of image plane by using rotation of micromirror. The micromirror has the same function as a mirror. Therefore, the reflective surface of the micromirror is made of metal, metal compound, multi-layered dielectric material, or other materials with high reflectivity. The actuating components control the rotational displacements of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known CMOS technologies can remove the loss in effective reflective area due to electrode pads and wires.

Abstract: A micromirror array lens consists of many micromirrors with two degrees of freedom rotation and one degree of freedom translation and actuating components. As a reflective variable focal length lens, the array of micromirrors makes all lights scattered from one point of an object have the same periodic phase and converge at one point of image plane. As operating methods for the lens, the actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. Semiconductor microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. The lens can correct aberration by controlling each micromirror independently. Independent control of each micromirror is possible by known semiconductor microelectronics technologies.

Abstract: A micromirror array lens consists of many micromirrors with one degree of freedom rotation and one degree of freedom translation and actuating components. As a reflective variable focal length lens, the array of micromirrors makes all lights scattered from one point of an object have the same periodic phase and converge at one point of image plane. As operational methods for the lens, the actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known semiconductor microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. The lens can correct aberration by controlling each micromirror independently. Independent control of each micromirror is possible by known semiconductor microelectronics technologies.