Abstract: The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present invention can reproduce various surfaces including spherical, aspherical (e.g. parabolic, hyperbolic, elliptical, etc.), anamorphic, other than rotational symmetric profiles. With the newly introduced non-fixed underlying structure, the present invention makes possible for a micromirror array to generate a desired optical surface profile by simple motion controls and to improve structural stability, simplicity, flexibility, and efficiency in motion and motion control.

Abstract: A discretely controlled micromirror device provides multiple motions of a micromirror using stepper plate and micromirror bottom support. The discretely controlled micromirror device can be controlled in a low driving voltage. Also, simple motion control is applied by digital controlling and only single voltage is needed for driving the micromirror motion.

Abstract: A discretely controlled micromirror array lens (DCMAL) consists of many discretely controlled micromirrors (DCMs) and actuating components. The actuating components control the positions of DCMs electrostatically. The optical efficiency of the DCMAL is increased by locating a mechanical structure upholding DCMs and the actuating components under DCMs to increase an effective reflective area. The known microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. The lens can correct aberrations by controlling DCMs independently. Independent control of each DCM is possible by known microelectronics technologies. The DCM array can also form a lens with arbitrary shape and/or size, or a lens array comprising the lenses with arbitrary shape and/or size.

Abstract: The present invention provides a three-dimensional imaging system for robot vision, which is capable of three-dimensional positioning of objects, object identification, searching and tracking of an object of interest, and compensating the aberration of the system. The three-dimensional imaging system for robot vision comprises one or more camera systems, each of which has at least one variable focal length micromirror array lens, an imaging unit, and an image processing unit. The variable focal length micromirror array lens used in the three-dimensional imaging system for robot vision has unique features including a variable focal length, a variable focal axis, and a variable field of view with a fast response time.

Abstract: This invention provides the two types of Discretely Controlled Micromirror (DCM), which can overcome disadvantages of the conventional electrostatic micromirrors. The first type micromirror is a Variable Supporter Discretely Controlled Micromirror (VSDCM), which has a larger displacement range than the conventional electrostatic micromirror. The displacement accuracy of the VSDCM is better than that of the conventional electrostatic micromirror and the low driving voltage is compatible with IC components. The second type of DCM, the Segmented Electrode Discretely Controlled Micromirror (SEDCM) has same disadvantages with the conventional electrostatic micromirror. But the SEDCM is compatible with known microelectronics technologies.

Abstract: This invention provides a discretely controlled micromirror array device comprising a plurality of micromirrors. The discretely controlled micromirror array device forms multiple surface profiles, wherein the rotational and translational motion of each micromirror is discretely controlled by selectively activating different groups of segmented electrodes using a control circuitry. The discretely controlled micromirror array device is compatible with known semiconductor electronics technologies and provides structural stability and efficiency in motion.

Abstract: This invention provides the two types of Discretely Controlled Micromirror (DCM), which can overcome disadvantages of the conventional electrostatic micromirrors. The first type micromirror is a Variable Supports Discretely Controlled Micromirror (VSDCM), which has a larger displacement range than the conventional electrostatic micromirror. The displacement accuracy of the VSDCM is better than that of the conventional electrostatic micromirror and the low driving voltage is compatible with IC components. The second type of DCM, the Segmented Electrode Discretely Controlled Micromirror (SEDCM) has same disadvantages with the conventional electrostatic micromirror. But the SEDCM is compatible with known microelectronics technologies.

Abstract: The present invention discloses a micromirror device with multi-axis rotational and translational motion. Newly introduced structure of the top electrode plate improves structural stability, flexibility, and more motion efficiency of the micromirror device. The invention also improves controllability of micromirror motion by designing the appropriate flexible structure to generate desired motion. With side-by-side arrangement of the micromirror devices, the micromirror devices are built as an array to form a micromirror array lens.

Abstract: A beam focusing and scanning system using a micromirror array lens (optical system) includes a light source configured to emit light and a micromirror array lens, including at least one micromirror, optically coupled to the light source, configured to reflect the light onto a projection medium (projection plane). The optical system also includes at least one actuating component coupled to the at least one micromirror, configured to move the at least one micromirror to enable the at least one micromirror to focus the light on the projection medium. The advantages of the present invention include high speed variable focusing and scanning, large focal length variation, phase compensation, high reliability and optical efficiency, low power consumption and low cost.

Abstract: A three-dimensional display device includes a two-dimensional display displaying a depthwise image, and a variable focal length micromirror array lens receiving light from the two-dimensional display and forming a corresponding image in the required location in space. Each depthwise image represents a portion of an object or scene having the same image depth, and the two-dimensional display displays one depthwise image at a time. The focal length of the variable focal length micromirror array lens changes according to the depth of the depthwise image being displayed. The variable focal length micromirror array lens has enough speed and focusing depth range for the realistic three-dimensional display.

Abstract: The present invention provides a micromirror array device specially Micromirror Array Lens device structure and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the Micromirror Array Lens by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.

Abstract: The present invention provides an optical micromirror device and their array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the micromirror array device by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.

Abstract: The present invention provides a small and fast zoom system using micromirror array lens (MMAL). Thanks to the fast response and compactness of the MMAL as well as absence of the macroscopic mechanical movements of lenses, the zoom system of the present invention fastens the speed of the zooming and reduces the space and weight for the zoom system. Also the present invention provides magnifying the area not on the optical axis and can compensate the aberration of the zoom system.

Abstract: A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have at least one motion. The Micromirror Array Lens forms at least one optical surface profile reproducing free surfaces by using the motions of the micromirrors. The free surface can be any two or three-dimensional continuous or discrete reflective surface. The Micromirror Array Lens having the corresponding optical surface profile provides optical focusing properties substantially identical to those of the free surface. The Micromirror Array Lens can forms various optical elements such as a variable focal length lens, a fixed focal length lens, an array of optical switches, a beam steerer, a zone plate, a shutter, an iris, a multiple focal length lens, other multi-function optical elements, and so on.

Abstract: The present invention discloses a micromirror device with multi-axis rotational and translational motion. Newly introduced structure of the top electrode plate improves structural stability, flexibility, and more motion efficiency of the micromirror device. The invention also improves controllability of micromirror motion by designing the appropriate flexible structure to generate desired motion. With side-by-side arrangement of the micromirror devices, the micromirror devices are built as an array to form a micromirror array lens.

Abstract: A micromirror control system includes a bottom layer configured to support the micromirror control system including a stopper plate coupled to the bottom layer at a first end, configured to rotate about an axis. The micromirror control system also includes a micromirror, communicatively coupled to the stopper plate on a bottom side, and including a reflective top side configured to reflect light. Rotation of the stopper plate about the axis into contact with the micromirror is configured to adjust an orientation of the micromirror. In one aspect, the micromirror control system also includes an actuating device, communicatively coupled to the stopper plate, configured to control the rotation of the stopper plate about the axis. The advantages of the present invention include the ability to finely control translation and rotation of a discretely controlled micromirror.

Abstract: An optical pick-up device comprising at least one micromirror array lens. The micromirror array lens enables focusing, tracking, and/or tilt compensation in the optical pick-up device without macroscopic motions. The micromirror array lens provides the device with a simple structure, which can reduce the size, weight, and cost of the recording/reproducing system. The device is also durable for vibration. Optical pick-up devices using an array of micromirror array lenses can increase the recording/reading speed without macroscopic motions. The recording/reading speed can be increased by adding more micromirror array lenses to the lens array. The present invention can also be used to record/read information on/from a multi-layered optical disc.

Abstract: The present invention provides an imaging system generating a high resolution image using low resolution images taken by a low resolution image sensor. Also, the imaging system generates a wide angle of view image. Enhancement of resolution and enlargement of angle of view are accomplished by optical axis change, utilizing one or more micromirror array lenses without macroscopic mechanical movements of lenses. The imaging system also provides zoom and auto focusing functions using micromirror array lenses.

Abstract: An optical system includes a refractive lens system and a micromirror array lens with angled positioning to improve light efficiency. The micromirror array lens is optically coupled to the refractive lens system, and has a focal length gradient. The micromirror array lens is configured to focus the light input refracted by the micromirror array lens onto a focal plane, the micromiror array lens is positioned at an acute angle with respect to the light input and the focal plane. The optical system may further include an infrared filter and/or an optical stop to block unwanted light. The advantages of the present invention include improved light efficiency, image quality, and/or focusing.

Abstract: A discretely controlled micromirror array lens (DCMAL) consists of many discretely controlled micromirrors (DCMs) and actuating components. The actuating components control the positions of DCMs electrostatically. The optical efficiency of the DCMAL is increased by locating a mechanical structure upholding DCMs and the actuating components under DCMs to increase an effective reflective area. The known microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. The lens can correct aberrations by controlling DCMs independently. Independent control of each DCM is possible by known microelectronics technologies. The DCM array can also form a lens with arbitrary shape and/or size, or a lens array comprising the lenses with arbitrary shape and/or size.