Patents Assigned to Applied Materials GmbH & Co. KG
  • Patent number: 8961690
    Abstract: A process of coating at least one substrate with a plurality of deposition sources, a method of tooling, a carrier unit and a deposition system are described. The systems and methods provide for or allow for exposing a first substrate portion 112a of said at least one substrate 112 to a first deposition source 118a through an aperture 122 of a carrier unit 110, 510, depositing a first layer 126a over the first substrate portion, said first layer including material from said first deposition source, varying a relative position between said at least one substrate and said aperture for exposing a second substrate portion of said at least one substrate, or another substrate, to a second deposition source, and depositing a second layer 126b over the second substrate portion 112b, said second layer including material from said second deposition source.
    Type: Grant
    Filed: May 10, 2011
    Date of Patent: February 24, 2015
    Assignee: Applied Materials GmbH & Co. KG
    Inventors: Uwe Hoffmann, Jose Manuel Dieguez-Campo
  • Patent number: 8715471
    Abstract: To be able to realize a relatively wide magnetron sputter cathode, it is proposed that on the vacuum side of a carrier (2) is disposed the sputter target (4) with a backing plate (3), which maintains a gap (14) from the carrier (2). The backing plate (3) is developed as a cooling plate. In it are located cooling means channels (15), which, via an inlet (16) through the carrier (2), are supplied with cooling fluid, which can flow out again via an outlet (17) through the carrier (2). On the atmospheric side is located a magnet configuration (5).
    Type: Grant
    Filed: November 21, 2005
    Date of Patent: May 6, 2014
    Assignee: Applied Materials GmbH & Co KG
    Inventors: Jörg Krempel-Hesse, Andreas Jischke, Uwe Schüssler, Hans Wolf
  • Patent number: 8499784
    Abstract: An air-lock valve (1), especially for a band processing plant, provided for closing a gap-like opening (3), traversed by a flexible band substrate (4), between two different plant sections, featuring at least one moveable sealing body (7), cooperating with a sealing surface (5), when it closes said opening (3), and eventually said band substrate (4) is being firmly mounted between said body (7) and sealing surface (5) during the closing operation of said air-lock valve (1), is characterized, according to the invention, in that the sealing surface (5) surrounds opening (3) in frame-like fashion, and in order to close opening (3), said body (7) may be pressed in such a fashion upon sealing surface (5) and/or upon band substrate (4), traversing said opening (3), that it obstructs said opening (3) at least due to indirect juxtaposition at the edges of said sealing surface (5).
    Type: Grant
    Filed: May 25, 2004
    Date of Patent: August 6, 2013
    Assignee: Applied Materials GmbH & Co. KG
    Inventor: Stefan Hein
  • Patent number: 8475897
    Abstract: The invention relates to a laminate comprising two plastic films and in between a metal or metaloxide layer and a crystalline triazine layer, the laminate having a lamination strength of about 2 N/inch or more as measured in a 90 degree tensile testing at 30 mm/min. The invention further relates to a composite layer, comprising a metal or metal oxide, and a triazine layer comprising a triazine compound suitable for said laminate. The invention further relates to a process for the preparation of a composite layer, comprising the step of applying a triazine layer on a substrate with a metal or metal oxide layer by vapor deposition of the triazine compound, wherein the process comprises (a) applying to the metal or metal oxide layer a compound other than a triazine compound, (b) vapor depositing the triazine compound on the metal or metal oxide layer while the compound is at least in part in a liquid state.
    Type: Grant
    Filed: July 7, 2008
    Date of Patent: July 2, 2013
    Assignees: DSM IP Assets B.V., Biofilm S.A., Applied Materials GmbH & Co. KG
    Inventors: Shahab Jahromi, Gerardus Johannes Paulus Krosshof, Alexandra Lorena Quiceno Gomez, Gerd Hoffmann
  • Patent number: 8361230
    Abstract: Aspects of the present invention are directed to a mask holder for especially large-surface substrates, especially for the micro-structuring of organic electroluminescent materials (OLED) for the production of OLED screens, displays and the like by means of vacuum-coating processes, with a substrate carrier for receiving the substrate during coating processes, with the substrate carrier comprising one or more magnets and the mask features a frame of magnetic material, such that the frame of the mask is held by means of the magnets of the substrate carrier relative to the substrate to be coated.
    Type: Grant
    Filed: April 19, 2006
    Date of Patent: January 29, 2013
    Assignee: Applied Materials GmbH & Co. KG
    Inventor: Dieter Manz
  • Patent number: 8323734
    Abstract: A Fabry-Perot filter is applied as a thin coating on a film, for example, a packaging film, and permits interesting color effects. The coating has a layered construction in which both reflecting layers of the filter may be made of aluminum and the intermediate layer between the reflecting layers may be made of aluminum oxide.
    Type: Grant
    Filed: December 9, 2010
    Date of Patent: December 4, 2012
    Assignee: Applied Materials GmbH & Co. KG
    Inventors: Gerd Hoffmann, Rainer Ludwig, Hans-Georg Lotz, Gerhard Steiniger
  • Patent number: 8282089
    Abstract: The present invention concerns a device for transporting substrates through vacuum chambers, especially coating machines with a substrate carrier on or at which the substrates can be arranged, wherein the substrate carrier has at least one guide rail which extends along at least one side of the substrate carrier, and wherein the guide rail is kept spaced apart from the substrate carrier by one or just a few spaced bearings.
    Type: Grant
    Filed: February 21, 2007
    Date of Patent: October 9, 2012
    Assignee: Applied Materials GmbH & Co. KG
    Inventors: Oliver Heimel, Andreas Jischke, Dieter Haas
  • Patent number: 8192548
    Abstract: The invention relates to an arrangement for the coating of substrates, which comprises an evaporation source and a vapor barrier between the evaporation source and the substrate. The vapor barrier is maintained at a temperature which is at least equal to or above the vaporization temperature of the material to be vaporized. The vapor barrier is implemented as a quartz valve, which includes a spherical closure part connected with a movable rod. In a first position this spherical closure part closes a vapor conducting tube, which is connected with the evaporation source, and, in a second position, the spherical closure part abuts a spherical calotte which seals off a quartz tube.
    Type: Grant
    Filed: October 20, 2005
    Date of Patent: June 5, 2012
    Assignee: Applied Materials GmbH & Co. KG
    Inventors: Uwe Hoffmann, Manfred Schreil, Jose Manuel Dieguez-Campo, Marcus Bender
  • Patent number: 8168002
    Abstract: The invention relates to a vacuum treatment plant comprising an evaporator (1) for vacuum coating facilities. The evaporator (1) according to the invention comprises a device for guiding a supply line (4) movable in a gripping direction (A) and intended for gripping and positioning an evaporation boat (3) having a base (22) and further comprises two spacers (18, 19) which the movable supply line (4) flexibly connects to the base (22), with the spacers (18, 19) being disposed on one side each with the movable supply line (4) and with the other side on the base (22), thus enabling the first supply line (4) to be forcibly guided, and with the spacers (18, 19) having such a length and configuration between the first supply line (4) and the base (22) that the guidance direction (B) is essentially parallel to the gripping direction (A) at least across a small deflection range of the spacers (18, 19).
    Type: Grant
    Filed: July 27, 2005
    Date of Patent: May 1, 2012
    Assignee: Applied Materials GmbH & Co. KG
    Inventors: Stefan Hein, Wolfgang Klein
  • Patent number: 8137510
    Abstract: This invention relates to a coater for the coating, in particular, of large-area substrates by means of cathode sputtering, the coater having a coating chamber and, provided therein, a cathode assembly (2) where the material to be sputtered is located on a target (4) with a curved surface, the material to be sputtered being located, in particular, on the lateral surface of a cylinder, there being in a single coating chamber for a coherent coating zone at least three, preferably more, cathode assemblies (2) with rotatable, curved targets (4) positioned one beside the other.
    Type: Grant
    Filed: May 4, 2005
    Date of Patent: March 20, 2012
    Assignee: Applied Materials GmbH & Co. KG
    Inventors: Stefan Bangert, Frank Fuchs, Ralph Lindenberg, Andreas Lopp, Uwe Schüssler, Tobias Stolley
  • Publication number: 20120048186
    Abstract: Carriers for substrates and to methods for assembling the same in the field of vacuum deposition of thin films. In particular, a carrier for a substrate to be coated in a vacuum chamber includes a first frame comprising two vertical sections and two horizontal sections being dimensioned to surround the substrate; a second dimensioned to define an area of the substrate to be coated, and to cover at least a first part of the first frame to prevent the first part of the first frame from being coated when the second frame is mounted to the first frame. The second frame is detachably mounted to the first frame.
    Type: Application
    Filed: September 3, 2010
    Publication date: March 1, 2012
    Applicant: Applied Materials GmbH & Co. KG
    Inventors: Andre Brüning, Oliver Heimel, Reiner Hinterschuster, Hans Georg Wolf
  • Patent number: 8083912
    Abstract: A carrier for a substrate, wherein at least a part of the carrier contains a material with a coefficient of thermal expansion which is higher than the coefficient of thermal expansion of the substrate, wherein in a specified region of the carrier a bar is centrally fastened whose coefficient of thermal expansion is lower than that of the region on which it is fastened.
    Type: Grant
    Filed: October 20, 2005
    Date of Patent: December 27, 2011
    Assignee: Applied Materials GmbH & Co. KG.
    Inventors: Thomas Klug, Oliver Heimel
  • Patent number: 8012260
    Abstract: An apparatus for coating an areal substrate, for example a rectangular plate comprises a vaporizer source and a distributor system for the supply of vaporized material onto the substrate. The distributor system comprises a line source, with this line source and the substrate is movable relative to one another. The apparatus serves preferably for the production of flat screens with organic light-emitting diodes.
    Type: Grant
    Filed: June 6, 2002
    Date of Patent: September 6, 2011
    Assignee: Applied Materials GmbH & Co. KG
    Inventors: Uwe Hoffmann, Jutta Trube, Dieter Haas
  • Patent number: 7972486
    Abstract: A machine for coating a transparent substrate for the production of display screens comprises a coating chamber that has a modular design. Each of the modules 1 features a chamber section 2, a first support 3 that is arranged removably in or at the chamber section 2, and a second support 4 that is arranged removably at the first support 3. Whereas the first support 3 bears the cathodes, the second support 4 is formed as a cover at which are arranged the pumps for producing a vacuum in the coating chamber. Carriers 3 and 4 can be removed laterally from the chamber section 2 to such an extent that areas 11a, 11b accessible to persons can be formed between the module components. In this way, the components of the machine are readily accessible, for example for maintenance purposes. Work can be done simultaneously on the cathodes and in the chamber interior.
    Type: Grant
    Filed: April 7, 2006
    Date of Patent: July 5, 2011
    Assignee: Applied Materials GmbH & Co. KG
    Inventors: Hans Buchberger, Andreas Geiss, Jörg Krempel-Hesse, Dieter Haas
  • Patent number: 7899308
    Abstract: The invention relates to an evaporator device with a receptacle for holding material to be evaporated. With this evaporator device an oil film can be applied onto specific sites of a sheet to be coated, this sheet being coated with aluminum or zinc in a further step. At the sites at which the oil film is located, no aluminum or zinc is deposited. With the aid of a rod valve, precise application of the oil onto the sheet is ensured. This rod valve is driven by a stepping motor, which can release percentage fractions of oil vapor.
    Type: Grant
    Filed: June 2, 2006
    Date of Patent: March 1, 2011
    Assignee: Applied Materials GmbH & Co. KG
    Inventor: Karl-Heinrich Wenk
  • Patent number: 7882946
    Abstract: A guide arrangement (1) for guiding webs in evacuatable web treatment installations comprises at least one guide roller (2) with an axis (5), whose spatial position is settable. To solve the problem of compensating in modular installations with several chambers either misalignments of the chambers relative to one another and/or to avoid completely adjustable roller frames, whose adjustment would require the repositioning of treatment and coating sources and of separating gaps on the circumference of coating rollers, the invention proposes that the guide roller (2) is supported between two pivot bearings (11, 12), of which at least one is adjustable relative to the other transversely to the axis (5). This is preferably carried out thereby that the adjustable pivot bearing (12) comprises a slide guide (15), fastened to a chamber wall (14), on which a slide (16) with the pivot bearing (12) is guided, and that the adjustable pivot bearing (12) comprises a remotely operated adjustment drive (21).
    Type: Grant
    Filed: March 17, 2005
    Date of Patent: February 8, 2011
    Assignee: Applied Materials GmbH & Co. KG
    Inventors: Stefan Hein, Peter Skuk, Karl-Heinz Wenk, Reiner Kukla, Rainer Ludwig
  • Patent number: 7842167
    Abstract: A sputter apparatus with a pipe cathode is arranged such that the supply of power, cooling fluid and other media to the pipe cathode takes place via flexible lines or tubes which can be wound about a receptor. If the pipe cathode completes a pendulum movement, the lines and/or tubes are wound onto the receptor or wound from it. The pendulum movement of the pipe cathode is preferably such that the pipe cathode is rotated by a certain first angle in a first direction and subsequently by a certain second angle in a second direction, the second angle differing from the first angle. Methods for operating the sputter apparatus are also disclosed.
    Type: Grant
    Filed: August 3, 2006
    Date of Patent: November 30, 2010
    Assignee: Applied Materials GmbH & Co. KG
    Inventors: Jurgen Henrich, Andreas Sauer, Andreas Geiss, Felix Brinckmann
  • Patent number: 7837799
    Abstract: An arrangement for transporting a flat substrate through a coating installation, wherein the coating installation comprises, e.g., several and different sputter cathodes, to which the flat substrate, for example a glass pane, is transported one after the other in vacuo. So that no abrasion is generated between glass pane and contact, the glass pane is kept spaced apart from the contact by means of gas pressure. The gas pressure is herein built up through relatively few and small holes in a gas channel. Since during flooding of the coating installation to atmospheric pressure or during evacuation, due to the small holes, no fast pressure equalization between gas channel and the remaining coating installation is possible, the gas channel is decoupled in terms of gas from the remaining coating installation and provided with a separate gas line, via which gas can be introduced into the gas channel or pumped out of it.
    Type: Grant
    Filed: December 10, 2003
    Date of Patent: November 23, 2010
    Assignee: Applied Materials GmbH & Co. KG
    Inventors: Stefan Bangert, Frank Fuchs, Uwe Schuessler, Ralph Lindenberg, Tobias Stolley
  • Patent number: 7808183
    Abstract: An arrangement for the regulation of the electron beam power of an electron gun, which comprises a filament cathode, a block cathode and an anode. Between the filament cathode and the block cathode is applied a first voltage, while between the block cathode and the anode a second voltage is applied. With the aid of a first closed-loop regulated system the filament cathode is regulated to a constant current value, which has a filament temperature sufficient for the maximum beam power of the block cathode. A second closed-loop regulated system, such including a block power regulator, which is acted upon by the difference between instantaneous block power value and nominal block power value, regulates the voltage between the filament cathode and the block cathode.
    Type: Grant
    Filed: March 10, 2006
    Date of Patent: October 5, 2010
    Assignees: Applied Materials GmbH & Co. KG, ALD Vacuum Technologies GmbH
    Inventors: Günter Klemm, Andreas Thiede, Hans-Jürgen Schneider
  • Patent number: 7771574
    Abstract: A sputtering cathode (1) for coating processes in a vacuum chamber (18) comprises one at least single-piece target plate (2) mounted on a metallic diaphragm (3). On the side of the diaphragm (3) facing away from the target plate (2) is disposed a cooling agent channel with an inflow line (9) and an outflow line (10) for a cooling agent and a hollow space (7) for at least one magnet system (5). The magnet system (5) is disposed in a supporting tub (6) sealed against the diaphragm (3) and not exposed to the cooling agent. The entire configuration is disposed on a supporting structure (12).
    Type: Grant
    Filed: July 13, 2004
    Date of Patent: August 10, 2010
    Assignee: Applied Materials GmbH & Co. KG
    Inventors: Jürgen Ulrich, Peter Sauer