Abstract: The present invention concerns a coating installation with a substrate carrier that consists essentially of a plate made from glass-ceramic. Glass-ceramic material is less expensive and has a shorter delivery time than CFC material conventionally used so far. The coating installation can thus be operated more economically.

Abstract: The present invention concerns a device and a method for coating substrates by means of sputtering a coating material in the form of a target, wherein the target is cooled during sputtering by means of a cooling medium fed at the target or past the region of the target or through the target, and the cooling medium has a feed temperature of less than 20° C.

Abstract: The present invention concerns a device for transporting substrates through vacuum chambers, especially coating machines with a substrate carrier on or at which the substrates can be arranged, wherein the substrate carrier has at least one guide raid which extends along at least one side of the substrate carrier, and wherein the guide rail is kept spaced apart from the substrate carrier by one or just a few spaced bearings.

Abstract: The present invention concerns a cathode arrangement, preferably for a magnetron cathode, especially for operation in the case of medium-to-high frequency alternating voltage or currents with a rotatable cathode, of which at least one part is arranged rotatably and vacuum-tight in at least one fixed component, and an insert, which is provided between the rotatable part and fixed component(s), with the insert made from an isolator.

Abstract: An expander roller for the wrinkle-free guidance of webs in closed chambers comprises two stationary supporting bodies (7, 8) which are oriented with respect to one another at an obtuse angle in the proximity of a center plane (E—E). On both sides of the center plane (E—E) on the supporting bodies (7, 8) are disposed roller sections (12) with surfaces in the form of truncated cones with shell lines (M1, M2) and which during their rotation pass through positions in which said shell lines (M1, M2) are aligned with one another. The surfaces (12a) of the rollers are herein steplessly in line one with the other in succession and the rollers are supported via roller bearings in groups (10, 11) on the two supporting bodies (7, 8).

Abstract: The invention relates to a drive mechanism for a vacuum treatment apparatus by which substrate holders can be transported around an axis (A—A) from an entrance airlock to an exit airlock. A stationary supporting column (1) is disposed in the center and on it a rotatory drive chamber (6) is borne which has control rods (9) for a rotation and a radial displacement of the substrate holders. In the rotatory drive chamber (6), a motor (4) and rotatory displacement drives for the control rods (9) are arranged on the supporting column (1), the control rods being in active connection each with a corresponding substrate holder.

Abstract: Gas is introduced prior to a flooding process of a vacuum chamber of a vacuum installation, into coverings of elements, which coverings can be ventilated such that solid bodies are blown out of said coverings thereby preventing a penetration of said solid bodies into the coverings.