Abstract: A scanning system is calibrated to correct for possible panel misalignments errors. A reference slide or data point is used to obtain a series of measurements with the scanning system. These measurements are compared with the expected results to determine systematic alignment errors in the scanning system. A model is created to correct the alignment errors during the scanning process, thus providing a plurality of more accurate scans. The plurality of scans may then be assembled to create a complete image of the scan area.

Abstract: A system and method of controlling the relationship between two surfaces (such as a primary surface and a reference surface) and correcting any deviation from the desired or ideal relationship generally employ a plurality of actuators and flexural assemblies. The actuators may be driven in unison to translate the primary surface in one-dimension; the actuators may also be driven independently, accommodating fine adjustment in pitch, roll, or both, of the primary surface. Flexural assemblies may be implemented to minimize lateral cross-coupling between the linear actuators.

Abstract: Expression profiling using DNA microarrays is an important new method for analyzing cellular physiology. In “spotted” microarrays, fluorescently labeled cDNA from experimental and control cells is hybridized to arrayed target DNA and the arrays imaged at two or more wavelengths. Statistical analysis is performed on microarray images and show that non-additive background, high intensity fluctuations across spots, and fabrication artifacts interfere with the accurate determination of intensity information. The probability density distributions generated by pixel-by-pixel analysis of images can be used to measure the precision with which spot intensities are determined. Simple weighting schemes based on these probability distributions are effective in improving significantly the quality of microarray data as it accumulates in a multi-experiment database. Error estimates from image-based metrics should be one component in an explicitly probabilistic scheme for the analysis of DNA microarray data.

Abstract: A plurality of panels are assembled into a single image. Each of the panels may have different intensities throughout the panel, as well as non-uniformities between panels. The panels are modified using flat-field calibration, panel flattening, and panel connecting techniques. These techniques correct for non-uniformities and provide a cleaner, single image.

Abstract: A system and method employing photokinetic techniques in cell biology imaging applications are disclosed. Systems and methods of acquiring image data of an object may comprise: selectively inducing photoactivation of material at a site on the object; performing an optical axis integration scan; simultaneously executing a time delay integration scan sequence; and processing acquired image data in accordance with one or more desired analyses. Various methodologies and applications may include, inter alia, selective photobleaching of a site on the object, diffusion rate, velocity, and wave-front propagation analyses, multi-dimensional analyses of dispersion characteristics, biomolecular binding in cellular organelles, and photoactivation assisted systematic image segmentation for the study of cellular components.

Abstract: By examining scrub mark properties (such as position and size) directly, the performance of a wafer probing process may be evaluated. Scrub mark images are captured, image data measured, and detailed information about the process is extracted through analysis. The information may then be used to troubleshoot, improve, and monitor the probing process.

Abstract: A high-precision, low backlash linear actuator drive mechanism characterized by minimal positional repeatability error irrespective of the direction from which a selected or target position is approached may comprise a bellows coupling operative to transmit rotational motion from a motor to a drive spindle. Rotation of the drive spindle causes linear translation thereof in an axial direction.

Abstract: A Z-axis stage for use in, e.g., an orthogonal motion microscope stage, includes a carrier plate, an actuator plate, and a base. Three or more upper camming elements with downwardly directed camming surfaces are mounted to the underside of the carrier plate using a semi-kinematic mounting technique. Three or more lower camming elements with upwardly directed camming surfaces are mounted to the top surface of the base using a semi-kinematic mounting technique. The actuator plate includes apertures to accommodate the lower camming elements and the upper and lower camming surfaces of adjacent camming elements are mated. Linear slides are interposed between the mated camming surfaces and the lower camming elements and the base. Movement of the actuator plate in an X-Y reference plane translates into movement of the carrier plate along the Z-axis (i.e., the optical axis) in response to the relative, sliding motion of the mated camming elements.

Abstract: A precision controlled fast valve includes a diaphragm, a piezo actuator, and a plunger. The plunger is adapted to engage the diaphragm to create a seal which closes the valve. The piezo actuator is attached to the plunger and adapted to receive control signals which define the distance and speed of travel of the plunger. A control signal is received by the piezo actuator which causes the plunger to rapidly travel to a first position which is proximate to the diaphragm but does not create a seal. A second control signal is received by the piezo actuator which causes the plunger to pinch the diaphragm and creates a seal (due to the blocked force generated by the piezo). Creating the seal without excessive forces reduces the wear on the seal, allowing longer intervals between maintenance.

Abstract: A probe card inspection system uses a fiduciary plate having a plurality of targets deposited thereon by photolithography and vapor deposition. A plurality of semiconductor probe card probe tips are contacted with the fiducial pattern on the plate. An electronic imaging system determines the position of geometric centroids of the probe tips with respect to an index mark in the fiducial pattern. A central processor determines the position of each imaged probe tip(s) with respect to the index mark, and calculates the relative positions of each probe tip from that data.

Abstract: A method for quantitatively determining probe card errors relying on merging data sets from a probe card analysis machine and a scrub mark analysis machine. Minimizing error values related to the data sets provides an indication of probe card/probe machine combination tolerance.

Abstract: A method for quantitatively determining probe card errors relying on merging data sets from a probe card analysis machine and a scrub mark analysis machine. Minimizing error values related to the data sets provides an indication of probe card/probe machine combination tolerance.