Abstract: A microwave coupling device for generating a microwave field in a circular waveguide for energizing a material including a rectangular input waveguide for carrying microwave energy from a microwave source, a circular output waveguide, and a device for coupling the microwave energy from the input waveguide to the output waveguide for generating in the output waveguide the microwave field. Further included is structure for permitting external monitoring through the output waveguide of the material being energized.

Abstract: A reactive discharge device including an RF cavity with a substantially circular cross-section, with a circular RF field coupled along the longitudinal axis of the cavity. A high volume to surface area ratio volume of reactive gas is created in the cavity. The reactive gas and/or the light created thereby is extracted from the cavity and supplied to a downstream processing area.

Abstract: A microwave plasma generator for producing an axisymmetric plasma, having a waveguide apparatus, means for introducing a microwave source into the waveguide apparatus, and means for generating a circular axisymmetric microwave field from the microwave source. There are means for tuning the field to match the impedance of a plasma load. Further included is a vacuum chamber for containing a gas to be ionized to form the plasma, means for introducing this gas into the vacuum chamber, and means for coupling the microwave field to the vacuum chamber to form the plasma.

Abstract: A microwave reactive gas generator including a microwave power source with a waveguide coupled to the power source for transmitting microwave radiation. A cavity for establishing a microwave mode is attached to the waveguide, and there is passage tube through the cavity transverse to the direction of propagation of the microwave radiation in the waveguide for passing the gas to be excited through the cavity. The generator also includes a device for matching the impedance of the load to the microwave power source. The cavity couples the microwave power from the waveguide to the passage to energize the gas into a reactive state.