Patents Assigned to Asyst Technologies
  • Patent number: 6729462
    Abstract: The present invention is an edge grip aligner with buffering capabilities and a method for increasing the throughput of wafers through the device. According to one embodiment, the present invention has first and second buffer arms, and a chuck arm. A workpiece can be aligned while supported on the chuck arm. Once the workpiece is aligned, the chuck arm transfers the workpiece to the buffer arms so that a second workpiece can be aligned on the chuck arm. While the second workpiece is being aligned, an end effector can transfer the first workpiece away from the buffer arms and retrieve another workpiece to place upon the chuck arm.
    Type: Grant
    Filed: May 22, 2003
    Date of Patent: May 4, 2004
    Assignee: Asyst Technologies, Inc.
    Inventors: Daniel A. Babbs, Jae Hong Kim, Matt W. Coady, William J. Fosnight
  • Patent number: 6709225
    Abstract: A system is disclosed for allowing quick and easy installation, maintenance and removal of components within a piece of equipment which may be attached to a front end of processing tool or stand alone unit in a semiconductor processing fab. In a first embodiment, the system includes a translation assembly and a pair of tracks fixedly mounted in frame of the equipment. The translation assembly in this embodiment includes a trolley having four wheels which ride on a portion of each of the tracks. When a component is to be assembled into the piece of equipment, the component is first bolted to the trolley. The trolley and attached component may then be inserted into the frame. The wheels riding on the tracks allow the robot to be quickly and easily moved to its proper position within the equipment. Once properly located, jackscrews threaded through the trolley are rotated to raise the trolley wheels off of the tracks, and to level the trolley and component.
    Type: Grant
    Filed: February 18, 2000
    Date of Patent: March 23, 2004
    Assignee: Asyst Technologies, Inc.
    Inventors: Leon Pitts, Jeffrey Rydman, Warren Oliver, Michael Neads
  • Patent number: 6704998
    Abstract: An I/O minienvirornent including a port door within an I/O port, and a system for removing the port door and pod door coupled thereto, and setting down the pod and port doors at a convenient location within the I/O minienvironment. After wafer processing has been completed and the wafers have been transferred back through the I/O port to the SMEF pod, the system may retrieve the port and pod doors, and return the port door to their sealing positions within the I/O port and cassette, respectively. In a preferred embodiment, the system for gripping and transporting the port and pod doors may be located on the back end of the end effector of the wafer handling robot within the I/O minienvironment. The back end of the end effector is the end of the end effector opposite that used to transport the wafers and/or cassette.
    Type: Grant
    Filed: December 24, 1997
    Date of Patent: March 16, 2004
    Assignee: Asyst Technologies, Inc.
    Inventors: Anthony C. Bonora, William J. Fosnight, Raymond S. Martin
  • Patent number: 6692176
    Abstract: A ball socket for connection with a wall or plate type structure resists accidental pull-out therefrom. The ball socket includes a socket cup for retaining a ball stud. Snap locks extend from the ball socket to provide a mechanical connection with the structure. A sleeve located initially in the socket cup is driven between the snap locks as the ball stud is placed in the socket cup. This prevents the snap locks from moving in a manner that allows the ball socket to be accidentally pulled from the structure. The structure may be a wall in a headlamp assembly.
    Type: Grant
    Filed: April 2, 2002
    Date of Patent: February 17, 2004
    Assignee: Asyst Technologies LLC
    Inventor: Scott T. Fladhammer
  • Patent number: 6677690
    Abstract: A system is disclosed for safeguarding fab operators and workpieces such as semiconductor wafers from harm as a result of collision between an operator and a transport assembly for the workpieces as the workpieces are transported between tools and storage nests within a tool bay.
    Type: Grant
    Filed: February 2, 2001
    Date of Patent: January 13, 2004
    Assignee: Asyst Technologies, Inc.
    Inventors: William J. Fosnight, Daniel Babbs, Richard Gould, Michael Krolak, David Feindel, Timothy Luong
  • Patent number: 6634851
    Abstract: A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab. The robot includes a base comprising a rigid backbone for providing a significant degree of structural stability to the robot. The base further includes a mast, a linear drive system for translating the mast, and a shoulder drive system for rotating the mast. The shoulder drive system includes a harmonic drive reduction system for providing a stiff, smooth and precise output rotation of the mast section. The robot further includes a proximal link fixedly mounted to the mast for rotation with the mast, and a distal link rotatably mounted to the proximal link. An end effector for supporting various workpieces is rotationally mounted to the distal end of the distal link.
    Type: Grant
    Filed: January 14, 2000
    Date of Patent: October 21, 2003
    Assignee: Asyst Technologies, Inc.
    Inventors: Anthony C. Bonora, Roger G. Hine, Michael Krolak, John F. Grilli
  • Patent number: 6612797
    Abstract: A SMIF interface is disclosed for buffering one or more cassettes within a minienvironment affixed to a process tool. The interface includes a load port formed of a port door and a port plate circumjacent thereabout, and a minienvironment mounted to port plate. The SMIF interface and/or process tool includes at least one shelf for storing a cassette after the load port separates the cassette from its transport pod. In operation, while a first cassette is located within the process tool, a second pod is seated on the load port, the cassette is separated from the pod and the cassette is stored on a storage shelf. When processing on the first cassette is completed, the second cassette is loaded into the processing tool. The first cassette is returned to the pod and removed from the load port. A cassette from a new pod is then seated on the load port, separated from its pod and stored on the storage shelf. This process continues until processing on each scheduled wafer lot is completed.
    Type: Grant
    Filed: May 18, 1999
    Date of Patent: September 2, 2003
    Assignee: Asyst Technologies, Inc.
    Inventors: Anthony C. Bonora, William J. Fosnight, Joshua W. Shenk
  • Patent number: 6591960
    Abstract: The present invention is an edge grip aligner with buffering capabilities and a method for increasing the throughput of wafers through the device. According to one embodiment, the present invention has first and second buffer arms, and a chuck arm. A workpiece can be aligned while supported on the chuck arm. Once the workpiece is aligned, the chuck arm transfers the workpiece to the buffer arms so that a second workpiece can be aligned on the chuck arm. While the second workpiece is being aligned, an end effector can transfer the first workpiece away from the buffer arms and retrieve another workpiece to place upon the chuck arm.
    Type: Grant
    Filed: August 30, 2001
    Date of Patent: July 15, 2003
    Assignee: Asyst Technologies, Inc.
    Inventors: Daniel A. Babbs, Jae Hong Kim, Matt W. Coady, William J. Fosnight
  • Patent number: 6592317
    Abstract: An end effector for a pod loader interface includes a gripper plate that attaches to the articulated arm. A pair of gripper blades are separated from each other along and are coupled to the gripper plate. During gripping of a wafer carrier, the gripper blades initially close toward each other and then draw nearer to the gripper plate. Nested outer and inner U-shaped yokes, which may attach the gripper plate to the articulated arm, are joined by rotational joints to permit their relative rotation for reorienting the wafer carrier. Yet other aspect of the present invention are a mechanical forearm drive that provides substantially linear motion of an articulated arm's wrist joint, and an end effector rotary-drive included in a forearm of the articulated arm.
    Type: Grant
    Filed: June 13, 2000
    Date of Patent: July 15, 2003
    Assignee: Asyst Technologies, Inc.
    Inventors: John M. Rush, Torben Ulander
  • Patent number: 6592679
    Abstract: A system for preventing contaminants and particulates from coming into contact with a back side of a workpiece as the workpiece is vacuum held on a chuck or robotic end effector.
    Type: Grant
    Filed: July 13, 2001
    Date of Patent: July 15, 2003
    Assignee: Asyst Technologies, Inc.
    Inventor: Michael Krolak
  • Patent number: 6591160
    Abstract: A robot calibration system for calibration of a workpiece handling robot relative to a station. The workpiece handling robot includes a sensor mounted on an end effector. The robot calibration system also includes a target, which in coordination with the sensor, allows a control system to determine a center of the target. The target is a wafer in the shape of a disk. A pattern is on at least one side of the workpiece, preferably on a bottom side of the target. The pattern comprises alternating black and white areas. The workpiece handling robot is placed in front of the station which includes a cassette mounted thereon. The cassette has a support surface which supports the target. Once the z-height of the end effector is established with the end effector being in close proximity to a lowermost support surface of the cassette, the end effector proceeds to move in a search pattern searching the pattern for transition points from black to white areas.
    Type: Grant
    Filed: December 4, 2000
    Date of Patent: July 8, 2003
    Assignee: Asyst Technologies, Inc.
    Inventors: Roger G. Hine, Graham L. Hine
  • Patent number: 6591162
    Abstract: A load port assembly capable of monitoring a plurality of performance characteristics of wafer carriers. The load port assembly may include one or more of the following monitoring systems: a torque measurement system, a wafer height measurement system, a carrier identification reader, an information pad, a resistivity measurement system, a cleanliness measurement system, a seal performance detector, and a relative humidity detector. In a preferred embodiment of the present invention, each of the monitoring systems are integrated into either a carrier advance plate or a port door of the load port assembly.
    Type: Grant
    Filed: August 16, 2000
    Date of Patent: July 8, 2003
    Assignee: Asyst Technologies, Inc.
    Inventor: Raymond S. Martin
  • Patent number: 6579052
    Abstract: A storage, delivery and retrieval system having a rear wall to which is affixed a plurality of shelves capable of supporting one or more wafer-carrying pods. The structure further includes a pair of vertical rails lying in a plane spaced from and substantially parallel to the shelf-supporting wall. The horizontal rail extends between and is translationally mounted to the vertical rails, which horizontal rail supports a gripper capable of movement along the horizontal rail. The movement of the horizontal rail along the vertical rails, and the movement of the gripper along the horizontal rail, allows the gripper to be positioned at any location within an X-Z plane including the storage shelves. The system includes a two-dimensional transport system. That is, all transport of the pods by the system occurs without the pods ever leaving the X-Z plane of the shelves. This feature contributes to the overall small footprint of the system.
    Type: Grant
    Filed: July 11, 1997
    Date of Patent: June 17, 2003
    Assignee: Asyst Technologies, Inc.
    Inventors: Anthony C. Bonora, Raymond S. Martin, Robert Netsch, Joshua T. Oen, Terry Mosier, William J. Fosnight
  • Patent number: 6575687
    Abstract: A wafer transport mechanism is disclosed capable of transferring workpiece cassettes between lot boxes and SMIF pods. The transport mechanism includes a frame having a first support platform on a first side of the frame for supporting a SMIF pod, and a second support platform on a second side of the frame for supporting a lot box. The frame further includes a carrier transfer mechanism which resides completely within the frame when in a home position. The transfer mechanism includes an arm and a gripper pivotally mounted to the arm. Once a SMIF pod and lot box are seated on their respective support platforms, the transfer mechanism transfers a cassette between the two containers.
    Type: Grant
    Filed: December 4, 2000
    Date of Patent: June 10, 2003
    Assignee: Asyst Technologies, Inc.
    Inventors: Anthony C. Bonora, Robert R. Netsch, Richard Gould
  • Patent number: 6536813
    Abstract: The present invention includes a latch assembly, such as maybe useful for SMIF pods. SMIF pods are in general comprised of a pod door which mates with a pod shell to provide a sealed environment in which wafers may be stored and transferred. During wafer storage and transport, the pod door is typically held affixed to the pod shell by a latch assembly. When it is desired to separate the pod door from the pod shell, each latch must be actuated outwardly, to withdraw each engagement portion from the pod door, at which time the pod door may be separated. The present invention includes an improved such latch assembly.
    Type: Grant
    Filed: July 10, 2001
    Date of Patent: March 25, 2003
    Assignee: Asyst Technologies, Inc.
    Inventors: Mark V. Smith, Robert P. Wartenbergh, William P. Pennybacker
  • Patent number: 6533101
    Abstract: A system for transporting articles. The transport system includes a conveyor system which includes a transport carrier for carrying one or more articles between workstations and a drive rail and a support rail for supporting the transport carrier. The drive rail includes a drive system for propelling the transport carrier between workstations. At least one shoe carried by the transport carrier rides on the support rail for movably supporting the transport carrier on the support rail. The transport system may also includes a protective container including a housing having an interior compartment for supporting one or more articles. The bottom surface of the housing is configured to engage the drive system such that actuation of the drive system propels the housing along the drive and support rails. At least one shoe carried by the housing is configured to ride on the support rail of the conveyor system to movably support the housing on the support rail.
    Type: Grant
    Filed: April 16, 2002
    Date of Patent: March 18, 2003
    Assignee: Asyst Technologies, Inc.
    Inventors: Anthony C. Bonora, Richard H. Gould
  • Patent number: 6530736
    Abstract: A SMIF load port assembly is disclosed including a port door position compensation assembly capable of dynamically adjusting a relative spacing between a front surface of a port door and a front surface of a pod door loaded onto the load port assembly so as to compensate for any improper positioning of the front surface of the pod. The position compensation assembly includes a plunger translationally mounted in the port door, and a sensor for detecting a position of the plunger. As a pod is loaded onto the load port assembly is advanced toward the port door, the front surface of the pod door contacts the plunger at which point the position compensation assembly in combination with an overall controller can identify the exact position of the pod door. From this identification, the position of the port and/or pod doors may be adjusted to compensate for any improper positioning of the front surface of the pod door on the load port assembly.
    Type: Grant
    Filed: July 13, 2001
    Date of Patent: March 11, 2003
    Assignee: Asyst Technologies, Inc.
    Inventor: Frederick T. Rosenquist
  • Patent number: 6527427
    Abstract: A device for setting the distance between a first and a second component, in particular for the horizontal and vertical setting of motor vehicle headlamps, includes a setting screw which is connected to the first component, and which engages the second component. The drive for the setting screw has a slipping clutch that prevents overadjustment of the distance setting device after a maximum torque is reached. The slipping clutch prevents the transmission of torque to the setting screw by slipping, and thereby prevents damage to the distance setting device.
    Type: Grant
    Filed: October 14, 2000
    Date of Patent: March 4, 2003
    Assignee: Asyst Technologies, LLC
    Inventor: Joachim Schröder
  • Patent number: 6513654
    Abstract: The present invention is a support structure for supporting a reticle or silicon wafer. The support structure includes a support column and a retaining structure. In addition to retaining a wafer, the present invention also creates a discharge path to remove electrostatic charges from the wafer. The retaining structure mechanically engages each support column to create a discharge path from the wafer to a ground. Specifically, electrostatic charges that dissipate from the wafer travel along the support structure to the support column and exit the SMIF pod through the pod door.
    Type: Grant
    Filed: July 10, 2001
    Date of Patent: February 4, 2003
    Assignee: Asyst Technologies, Inc.
    Inventors: Mark V. Smith, Robert P. Wartenbergh, William P. Pennybacker
  • Patent number: 6502869
    Abstract: A system is disclosed for ensuring that the pod door is firmly and securely retained on the port door of a process tool as the pod door is removed from the pod and stowed in the process tool during workpiece transfer between the pod and process tool. The system includes a latch key protruding outwardly from the outer surface of the port door. The latch key is provided to mate within a slot of a door latch assembly within the pod door. Once the latch key is properly seated within the slot, the latch key is rotated by mechanisms within the port door to decouple the pod door from the pod shell. Such rotation at the same time couples the pod door to the port door. According to the present invention, while the latch key rotates, it simultaneously moves in the rearward direction (i.e., back toward the port door) to thereby pull the pod door into a tight engagement with the port door.
    Type: Grant
    Filed: July 14, 1998
    Date of Patent: January 7, 2003
    Assignee: Asyst Technologies, Inc.
    Inventors: Frederick T. Rosenquist, Michael Ng