Abstract: A universal interface and transfer apparatus is disclosed which may be configured either as an indexer or a load port opener. In each configuration, the universal interface and transfer apparatus includes a port plate having a central opening, and a port door fitting within and sealing the central opening when no pod is present on the apparatus. The apparatus further includes a base and a frame mounted on and extending up from a front of the base. A modular drive assembly is mounted within an exterior side of the frame, which drive assembly includes a linear drive screw, and a motor and torque transmission mechanism for rotating the linear drive screw. A carriage is mounted on the linear drive screw such that rotation of the linear drive screw results in vertical translation of the carriage.

Abstract: A load port opener for separating a pod top from a pod door so that a wafer-carrying cassette may be accessed and/or transferred from the pod into a semiconductor processing station, to which the load port opener is attached. The load port opener comprises a base, an inner support plate seated on the base, an outer support plate surrounding the inner support plate, and mechanisms for raising the outer support plate away from the inner support plate. Initially, a sealed SMIF pod having a wafer-carrying cassette therein is located on top of the load port opener, such that the pod door is supported on the inner support plate, and the pod top is supported on the outer support plate. Once located on the load port opener, the pod top is decoupled from the pod door by mechanisms within the inner support plate, and thereafter the outer support plate is raised upward with the top supported thereon.

Abstract: A valve seated within a SMIF pod support platform is disclosed for activating and deactivating the flow of gas to a pod on the platform. In preferred embodiments, the valve includes a central poppet capable of moving between a first, closed position where the poppet blocks the flow of gas through the valve, and a second, open position where the poppet allows gas flow through the valve. In the absence of a pod on the support platform, pressurized gas from the gas source downstream of the valve biases the poppet into the first position to thereby block gas flow. In this first position, a top portion of the poppet extends slightly above the upper surface of the pod support platform. When a pod is seated on the support platform, the weight of the pod moves the poppet from its first position to its second position where gas is allowed to flow through the valve and into the pod to allow purging of the pod.

Abstract: A system for providing uniform, controlled and efficient purge gas flow rates and gas flow patterns for removing contaminants and/or particulates from wafers within a pod. The purge system includes seals at the interfaces between the gas inlet and removal lines to substantially prevent leakage at the interfaces. The system may establish seals at the inlet and outlet without having to use conventional fluid flow pins extending above the support surface. The negative pressure applied at the outlet controls the flow rate through the pod, and the rate at which gas leaves the pod will limit the rate at which gas may enter the pod. In a preferred embodiment, the inlet flow is approximately equal to the outlet flow. With substantially equal inlet and outlet pressures, the purging gas flows through the upper and lower portions of the pod in a substantially uniform flow pattern so that contaminants and particulates are removed evenly from wafers throughout the pod.

Abstract: An integrated intrabay buffer, delivery, and stocker system including a pair of shuttles, capable, by themselves, of transferring a pod in an X-Z plane between the interbay transport system, the I/O ports of various process tools and a plurality of storage shelves provided along the wall of the tool bay. Advantageously, the present invention integrates together the process tools within a tool bay by providing a single transport mechanism shared by each tool, and by providing a single, large storage and buffer area for pods that is shared by each tool. This increases reliability and flexibility, and simplifies the hardware and software control. Additionally, the storage shelves may be provided above some or all of the process tools within the tool bay. Such an arrangement offers a substantially greater number of spaces to store a pod as compared to conventional tool bays.

Abstract: A rotating and translating support assembly for receiving a front-opening pod according to applicable SEMI standards, and thereafter rotating the pod to a desired orientation. In this way, a number of pods may be received at interface ports of a minienvironment, and each of the pods and ports may be angled toward and aligned with a single, 2-arm pick and place robot. In a preferred embodiment of the present invention, the rotating and translating support assembly comprises a plate rotationally and translationally mounted on a shelf extending from the minienvironment adjacent to a front-opening interface port. In one embodiment, the support plate may be mounted on a shaft attached to a rotating assembly, such as for example a worm and drive gear. The rotating assembly may in turn be mounted on a translating assembly, such as for example a carriage riding on a lead screw.

Abstract: A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.

Abstract: A transportable container for storing and carrying articles such as semiconductor wafers or flat panel display substrates which is adapted for horizontal loading and unloading. The container includes a box and a box door. The box door can be sealably attached to the box to isolate the interior of the box from ambient atmospheric conditions. The container is adapted to mate with a port of a canopy which encloses a semiconductor processing apparatus.

Abstract: A method and apparatus for dry cleaning a semiconductor wafer storage and transport pod. After the pod is located with respect to the cleaning chamber and opened to expose the interior surfaces of the pod to the cleaning chamber, the pod is conditioned in preparation for the cleaning process. The conditioning of the pod includes purging the pod and cleaning chamber with an ionized nitrogen gas to rid the pod and cleaning chamber of airborne contaminants and to neutralize static electrical charges on the pod surfaces. The conditioning process further includes heating the pod surfaces to prevent condensation of moisture and organic contaminants thereon. After the conditioning process, the pod is cleaned with a dry aerosol sprayed onto the pod surfaces. The aerosol spray is comprised of an ionized carbon dioxide/nitrogen (CO.sub.2 /N.sub.2) gas and fine particles of CO.sub.2.

Abstract: A valve mounted in pod door of a SMIF pod for allowing gas flow to and from the sealed pod while the pod is seated on a SMIF port. The valve is provided to allow fluid flow to or from the pod upon the valve be actuated by either a standard registration pin or a specially adapted fluid flow pin. The valve includes a body and a valve stem capable of vertical translation within the valve body. A spring biases the valve stem downward with respect to the valve body such that a top of the valve stem lies in sealing engagement with a O-ring 54. When not engaged by a registration pin or fluid flow pin, the engagement between the valve top and the O-ring prevents passage of fluid into or out of the pod.

Abstract: A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.

Abstract: An adaptor plate for allowing 200 mm SMIF pods carrying one or more semiconductor wafers to be used on an access port of a wafer processing station configured to accept a 300 mm SMIF pod. The adaptor plate has a substantially circular outer circumference conforming substantially in size and shape to the outer circumference of a conventional 300 mm SMIF pod, and a central opening conforming substantially in size and shape to a conventional rectangular 200 mm SMIF pod. The one or more semiconductor wafers are supported on pod door of the pod, and the semiconductor wafers and pod door are lowered through the central opening in the adaptor plate into the wafer processing station. With the adaptor plate supported on the access port, and a cover of the 200 mm SMIF pod supported around the central opening, the access port is entirely covered and entry of contaminants into the processing station through the access port is prevented.

Abstract: A transportable, sealable container, for example a Standard Mechanical Interface (or SMIF) pod, including a box and box door. The box has a first sealing surface and the box door has a second sealing surface. A liner, preferably stainless steel, is attached to the inside surface of the box door. An elastomer sealing material is integrally molded to the liner. The sealing material forms a first seal with the first sealing surface and a second seal with the second sealing surface when the box door is moved in a sealing position with respect to the box.

Abstract: A loadlock chamber for transferring one or more semiconductor wafers from a storage and transfer pod into high-vacuum process chambers in a contaminant free environment. The loadlock chamber includes mechanisms for separating a wafer-carrying cassette from the storage and transfer pod, mechanisms for transferring the cassette into a chamber which may be sealed and evacuated, and mechanisms for allowing transfer of wafers between the cassette and the various process chambers, wherein each of the mechanisms operates in an environment that is sealed against the external environment.

Abstract: A human guided mobile loader stocker developed to mechanically assist in SMIF container movement. The assist includes a pushcart, a semi-motorized transport arm, a processor, and communication devices. A group of containers are placed on the cart using the arm. The cart is pushed to a semiconductor processing tool where the arm is used to transfer containers to and from the port of the processing tool. The processor and communication devices are used for inventory control and guiding the container to the port of the processing tool.

Abstract: A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

Abstract: A transportable, sealable container, which has an improved pod liner. The container includes a box, a box door, and a gasket which forms a seal between the box and the box door. The box door has a conductive liner and a conductive path from the conductive liner to ground potential for electrostatic discharge protection. A membrane for isolating the gasket from the interior region of the container is bonded to the gasket and the conductive liner. The membrane may be impervious to gasses to prevent outgassing of the gasket or impervious to particles but not gasses to prevent particulate matter generated by the gasket from entering the interior region of the container.

Abstract: A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

Abstract: A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door iself is purged prior to the purging of the environment within the container.

Abstract: A system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.