Abstract: A substrate handling system is provided with a robot having the dual function of a removing and replacing substrate-containing pod doors and load lock chamber doors, and of transporting the substrates between the pods and various processing stations. The robot is equipped with an end effector having sockets into which interchangeable tools for implementing the various functions are removably mounted. The tools are retrieved from respective parking locations disposed within the system micro environment, and automatic interchangeability of the tools is facilitated by a novel socket mechanism which engages and disengages the tools to the robot arm without introducing contaminants into the micro environment.

Abstract: A circuit breaker terminal shield with integral securing and installation and removal features apparatus, means and system for use with a circuit breaker assembly having at least one circuit breaker terminal, at least one fastening aperture associated with a circuit breaker projecting end member and another circuit breaker projecting end member, the circuit breaker terminal shield apparatus having at least one terminal shield main frame member having a first terminal shield fastening member adapted to fasten the terminal shield main frame member to the circuit breaker projecting end member of the circuit breaker assembly, and further having a second terminal shield fastening member adapted to further fasten the terminal shield main frame member to the another circuit breaker projecting member of the circuit breaker assembly.

Abstract: A self-powered multiple phase circuit protection device including a plurality of current transformers connected in parallel with each other and associated with one phase of a multiple phase load for providing signals representative of the current flowing in an associated phase. A first switch can be actuated to interrupt power to the multiple phase load, and a fault determining circuit is connected to the circuit transformers and to the first switch for actuating the switch during at least one predetermined condition of the current signals. A second switch can be automatically actuated to reconnect power to the multiple phase load. The fault determining circuit has a timer for delaying the actuation of the first switch, and a warning signal can be issued prior to actuation of the first switch so that the user can take corrective action.

Abstract: An apparatus for moving substrates into and out of a substrate processing device. The apparatus has a frame and a substrate transport. The frame is adapted to be connected to the substrate processing device and can removably receive substrate cassettes. The substrate transport is movably mounted to the frame. The substrate transport has a track movement mechanism and a movable robot arm assembly mounted to the track movement mechanism. The track movement mechanism includes a housing, two pulley spindles rotatably connected to the housing, a drive motor connected to one of the pulley spindles, and flexible connecting elements connected to the frame and looped in a general S shape around the two pulley spindles.

Abstract: The present invention provides a device for connecting two circuit boards together. The device constitutes four side walls joined to define an aperture, a pin array disposed completely within the aperture, at least one resilient finger which acts to retain said pin array within the aperture, and a shoulder on at least one of the four side walls which prevents the pin array from passing through the aperture.

Abstract: A method for adjusting the calibration of a circuit breaker trip mechanism including a terminal element, a bimetal element connected thereto, and a trip bar. Laser energy is applied to lanced or pre-bent surfaces of the terminal element to thermally induce displacement thereof and thereby modify a trip distance between the bimetal element and the trip bar. Where a laser beam is directed to fall on a middle leg of a lanced or pre-bent section of the terminal element, the bimetal element moves in one direction relative to the trip bar. Conversely, where a laser beam is directed to fall on lateral legs of the lanced or pre-bent section of the terminal element, the bimetal element moves in an opposite direction relative to the trip bar. Thus, laser energy may be applied from the same direction, or to the same side of the trip structure, regardless of whether the trip time is to be increased or decreased.

Abstract: A spring guide and spring retainer for switches or toggle mechanisms with cooperating curved surfaces to decrease the rate of wear.

Abstract: The invention provides an apparatus for sealing a corner of a fabric article. The invention includes a conveyor for maneuvering the fabric article along a predetermined path and has an air gun positioned adjacent to the path. The air gun has maneuvering means for motion about the path. The air gun blows air onto the corner of the fabric article as the article is maneuvered along the path adjacent to the air gun.

Abstract: A robotic conformal coating system has a end effector and multiple tiltable valves coupled to the end effector. The end effector is capable of X, Y and Z axis motion, as well as rotation about the Z axis. A programmable controller controls the movement of the end effector and valves, as well as the actual dispensing and/or spraying of conformal coating.

Abstract: A stored energy apparatus for association with an operating handle of a circuit breaker contains springs that store energy when charged and that release energy when discharged. Energy is stored when a movement translation assembly is moved in a charging direction by an operator gear, and stored energy is released when a release apparatus releases the operator gear, causing the movement translation assembly to move in a discharging direction. The circuit breaker operating handle is moved to ON position by the charging movement of the movement translation assembly, and as stored energy is released, the discharging movement of the movement translation assembly moves the operating handle to OFF position. The operator gear is operated via an operator handle, operator shaft, and pinion gear assembly. The pinion gear assembly has a carrier pivotally associated with the operator shaft and a pinion gear that rotates the operator gear.

Abstract: A substrate processing apparatus having a substrate transport with substrate holders. The holders are adapted to vacuum hold substrates and thereby allow for rapid movement of the substrates without risk that the substrates will move off of the holders. If vacuum holding of a substrate on a holder fails, the movement of the substrate holder is automatically changed to provide a less rapid gravity only holding of the substrate on the holder.

Abstract: A circuit breaker terminal shield with integral securing and installation and removal features method for fastening a circuit breaker terminal shield apparatus to at least one terminal end of a circuit breaker assembly having at least one circuit breaker terminal, at least one fastening aperture associated with a circuit breaker projecting end member and another circuit breaker projecting end member, the method for fastening the circuit breaker terminal shield apparatus comprising the steps of fastening a first terminal shield fastening member, which is adapted to fasten the terminal shield main frame member, to the circuit breaker projecting end member of the circuit breaker assembly, and fastening a second terminal shield fastening member, which is adapted to further fasten the terminal shield main frame member, to the another circuit breaker projecting end member of the circuit breaker assembly.

Abstract: An improvement is set forth in a robotic arm structure which includes at least two links. .theta. motion is provided about a primary axis at the proximal end portion of the proximalmost of the links. R motion proceeds radially from the primary axis whereby the distal end portion of the distalmost of the links can be moved in a radially extending straight line. At least two independent end effectors are pivotally mounted for rotation relative to the distal end portion of the distalmost link about an end effector axis which is parallel to the primary axis. The structure is improved by adding independent yaw motors for rotating the end effectors independently.

Abstract: A semiconductor wafer batchloading system comprises a portable carrier for supporting and transporting wafers in a substantially particle free environment. A carrier door is movable between an open position and a closed position overlying a carrier port for sealing the interior of the carrier from the surrounding environment. The carrier is movable on a platform between withdrawn and advanced positions for delivering multiple wafers to a wafer receiving station. A plurality of spaced rack members support the wafers, each being aligned with an associated one of a plurality of spaced shelves on the wafer receiving station. The wafer receiving station may be located within a load lock defining a chamber having a substantially particle free environment and including a load lock port with a load lock door movable between a closed position overlying the load lock port and an open position spaced therefrom. A locking mechanism releasably locks the carrier door to the carrier.

Abstract: Disclosed are male and female electrical contacts for transferring high electrical power between a master assembly and a tool assembly of a robotic tool changer. The male and female contacts have corresponding outwardly-projecting and inwardly recessed conical or frusto-conical contact surfaces which tend to cause contaminants to slide off the surface of the contacts. The contacts may instead have corresponding outwardly-projecting and inwardly recessed contact surfaces having spherical, frusto-spherical, ellipsoid, frusto-ellipsoid, ovoid, or frusto-ovoid shapes. Each of the contacts includes a contact base for attaching the contact to one of the assemblies of the robotic tool changer and a contact tip removably attached to the contact base, thereby allowing the contact tip to be replaced without detaching the contact base from the robotic tool changer. The contact tip of either or both of the electrical contacts is mounted in such a way as to have compliance in at least one direction.

Abstract: An apparatus for centering and gripping semiconductor wafers. A solenoid is used to actuate two or three curved contacts. Power to the solenoid, and position information from the solenoid is transmitted along a pair of wires. To center the wafer, the solenoid is actuated and the contacts move radially towards the center of the wafer. The contacts grip the edge of the wafer and a pulse-width-modulation signal is used to determine solenoid position as a function of back electromotive force value or waveform. During handling, the contacts hold the wafer such that the wafer does not move relative to the apparatus.

Abstract: The total number of ions created br obtained during an ionization or ion introduction event in a Fourier transform ion cyclotron resonance mass spectrometer are determined either by using an on-resonance experimental technique or an off-resonance experimental technique. Both techniques exploit ion magnetron motion. In the on-resonance technique the spectrometer is excited in the magnetron mode and the single resonance signal resulting from this excitation is detected to determine the total number of ions. In the off-resonance technique the magnetron mode is excited at a frequency that is near the magnetron frequency while simultaneously detecting the resulting ion motion. The off-resonance technique leaves the ion population in a state that is amenable to subsequent analysis.

Abstract: A machine for supporting and lifting an automotive chassis module into position for assembly with a vehicle body being conveyed overhead along an assembly line includes a mobile vehicle having at least one fixture arranged above the vehicle for receiving and supporting the chassis module, and a guided lift mechanism for moving the fixture vertically between lowered and raised positions. The lift mechanism includes a push chain that is coupled to the fixture and a sprocket that engages the chain and is operative when driven to displace a section of the chain vertically to move the fixture. The lift mechanism further includes at least one support member extending between the fixture and the vehicle which operates to guide the fixture in the vertical direction while isolating the push chain from any loads transverse to the vertical direction.