Abstract: An environment difference detector includes an elastic surface wave element equipped with a substrate including a surface having an annular surface acoustic wave circulating path, a surface acoustic wave exciting/receiving unit exciting a surface acoustic wave along the circular path and receiving the circulated surface acoustic wave, and a sensitive film disposed on the circular path to change an elastic nature in accordance with a change in an adjacent environment, a speed/intensity measuring unit measuring a circulating speed and intensity of the surface acoustic wave from an electric signal generated by the unit when the unit receives the circulating surface acoustic wave, and an environment evaluation unit evaluating an environment adjacent to the sensitive film from at least one of the circulating speed and the intensity measured by the unit.

Abstract: A system and method for extracting and manipulating image data is provided. A pixel panel is rotated so as to increase a resolution of a projected image. The rotation may be calculated so as to achieve a desired resolution. A portion of the image is retrieved from a memory and an address is calculated for either the portion or discrete bits in order to determine where the bits should appear on the pixel panel. The manipulated bits are transferred to a buffer, which may be a line or frame buffer, and from the buffer to the pixel panel. One or more shift registers may be used to shift the bits into the buffer.

Abstract: A method for increasing a scan rate in a photolithography system by increasing a unit travel length while maintaining a minimum resolution is provided. The method includes determining the minimum resolution and a pixel spacing distance equal to the unit travel length. The method also includes calculating a window size based on the minimum resolution and the pixel spacing distance. A plurality of windows of the calculated size are established so that a pixel in a first window is offset from a pixel in a second window by the minimum resolution in a first dimension and the pixel spacing distance in a second dimension, and one of the plurality of windows is selected for projection onto a subject.

Abstract: A system and method for increasing a scan rate in a photolithography system by increasing a unit travel length while maintaining a minimum resolution is provided. The method includes determining the minimum resolution and a pixel spacing distance equal to the unit travel length. The method also includes calculating a window size based on the minimum resolution and the pixel spacing distance. A plurality of windows of the calculated size are established so that a pixel in a first window is offset from a pixel in a second window by the minimum resolution in a first dimension and the pixel spacing distance in a second dimension, and one of the plurality of windows is selected for projection onto a subject.

Abstract: Attorney Docket No. 22397.324A method and system is provided for moving a substrate relative to a pixel panel in a digital photolithography system. The method can be used for performing photolithography on a substrate, the substrate having a first portion with a first design resolution and a second portion with a second design resolution. The method includes scanning the first portion of the substrate, having the first design resolution, at a first speed and scanning the second portion of the substrate, having the second design resolution, at a second speed, different from the first.

Abstract: A transport system for a spherical object. The transport system has a supply of a first fluid and a passageway for communication of a spherical object in a path between an inlet and an outlet. At least part of the passageway is bounded by a first tube having a first annular wall with at least one opening through the first annular wall. The first tube guides flow of a spherical object in the first fluid from the inlet towards the outlet. The transport system further includes a source of vacuum in communication with the passageway through the at least one opening through the first annular wall. The source of vacuum produces a low pressure region which causes the first fluid in the passageway to be drawn from the passageway through the at least one opening through the first annular wall. The transport system further includes a supply of a second fluid which is in communication with a spherical object moving between the inlet and the outlet.

Abstract: A system and method for non-synchronously projecting light in an imaging system is provided. A pixel panel may be selectively controlled to direct light onto or away from a subject. A light source, such as a laser diode, projects light pulses at the pixel panel. The pulses are not synchronized with the pixel panel, so the light may strike the pixel panel at any time when the pixel panel is operable to direct light towards the subject. The pulses may be constant or variable in energy or duration, depending on the desired results.

Abstract: A system and method for an imaging system is provided. The system utilizes light of at least two wavelengths to project an image. The image is first projected using light of a first wavelength from a device such as a cathode ray tube and is directed towards a diode array connectable to an integrated circuit (IC). The light may pass through a translucent substrate of the diode array and strike sensors associated with the diodes and connected to the IC. Sensors which receive the light may provide power to the associated diodes using a power circuit present on the IC. The diodes receiving power may then emit light of the second wavelength and the emitted light may pass back through the translucent substrate. The IC may provide amplification if desired.

Abstract: A system and method for reducing electric discharge breakdown occurrences in a micro-electromechanical system device is provided. The device comprises a core, a shell, and electrodes, which may be formed on the shell. When voltage is applied to the electrodes, each electrode applies an electrostatic force on the core. The electrodes are arranged in concentric sets, where each set may comprises two or more electrodes. Due to the concentricity of the electrodes, a minimum distance is maintained between the core and an outer electrode of an electrode set when the core nears or touches an inner electrode of the electrode set.

Abstract: A method for scaling a pixel location in a digital photolithography system by rotating a pixel panel is provided. The method determines the angle of rotation of the pixel panel relative to a subject and calculates the original location of the pixel to be scaled. The method calculates the desired location of the pixel and determines the angle through which the pixel panel should be rotated to align the pixel with the desired location in a first dimension. The scan rate of the pixel panel and the subject is altered to align the pixel with the desired location in a second dimension.

Abstract: A system and method is disclosed for coating a conventional wafer or a spherical shaped semiconductor substrate with liquid material such as photoresist by utilizing a “drop on demand” piezo driven dispense nozzle, a bubble-jet dispense nozzle, or a continuous piezo jet with charging electrodes. The proposed system and method will greatly reduce, and in some cases virtually eliminate, the waste of photoresist in the process.

Abstract: A system for image-scanning a pixel-mask pattern onto a subject, such as a subject in digital photolithography, is provided. The system includes a pixel panel for generating a pixel pattern formed of pixel elements. A lens system positioned between the panel and the subject simultaneously directs the pixel elements to the subject. A mirror positioned between the panel and the subject enables the system to direct the pixel elements to a portion of the subject at any one time. A computing system may be used to generate the pixel elements and provide the pixel elements to the panel in a predetermined sequence.

Abstract: A biochemical sensor based on ball integrated circuit technology which is designed to be biocompatible for implantation within a human or animal body. A sensor media is mounted to the ball integrated circuit, the sensor media operable for sensing biochemical molecules. An onboard communication link transmits data sensed by the sensor media from the ball integrated circuit.

Abstract: A digital photolithography system is provided that is capable of making smooth diagonal components. The system includes a computer for providing a first digital pattern to a digital pixel panel, such as a deformable mirror device (DMD). The DMD is capable of providing a first plurality of pixel elements for exposure onto a plurality of wafer sites. After exposure, the wafer can be scanned a distance less than the site length. The DMD then receives a second digital pattern for exposing a second plurality of pixel elements onto the plurality of sites of the subject. The exposed second plurality of pixel elements overlaps the exposed first plurality of pixel elements. This overlapping allows incremental changes to be made in the image being exposed, thereby accommodating the creation of diagonal components.

Abstract: A laser diode array light source includes a plurality of semiconductor diodes attached to a first substrate, with each diode having an aperture for emitting an output of light positioned on a side of the diode, the side being generally perpendicular to the first substrate. A second substrate is positioned adjacent to the first substrate and includes a plurality of reflective surfaces for redirecting each of the outputs of light. In this way, the light from the plurality of diodes can be commonly directed to provide a directional light source.

Abstract: Disclosed is a method, system, and lense system for performing lithography on a substrate. The system includes a unique lense system for nonplanar substrates. The lense system includes a first lense section for receiving a pattern and producing a concave image of the pattern. The concave image can the be received by a second lense section for producing a nonplanar image of the pattern. The system also includes two light sources and a digital imaging device for projecting and exposing the pattern through the lense section and onto the substrate. Light from the first light source is used for exposing the pattern while light from second light source is used for receiving an alignment image. An image sensor, using the light from the second light source, detects an alignment image from the substrate. The alignment image is used to accommodate the projection of the pattern onto the substrate so that the pattern is properly aligned to the substrate.

Abstract: An apparatus and method for adjustably reflecting light is provided. The apparatus includes a base and, positioned above the base, a member having an upper surface and a lower surface. A reflective coating is applied to at least a portion of the upper surface. The system also includes a capacitive plate positioned between the member and the base. The capacitive plate is operable to deflect the member, which alters the orientation of the member relative to the base. A second member, which may be deformable, may be attached to the first member so that deformation of the second member alters the orientation of the first member relative to the base.

Abstract: A system and method for extracting and manipulating image data is provided. A pixel panel is rotated so as to increase a resolution of a projected image. The rotation may be calculated so as to achieve a desired resolution. A portion of the image is retrieved from a memory and an address is calculated for either the portion or discrete bits in order to determine where the bits should appear on the pixel panel. The manipulated bits are transferred to a buffer, which may be a line or frame buffer, and from the buffer to the pixel panel. One or more shift registers may be used to shift the bits into the buffer.

Abstract: A distortion compensation system for use in an imaging device such as a photolithography system is described. The system projects a plurality of image portions onto a plurality of portions of a subject. The system includes a plurality of light-distance modulators corresponding to the plurality of image portions and a mechanical manipulator for individually manipulating each of the light-distance modulators. In this way, any distortion in the subject is compensated by the individual manipulation of the light-distance modulators.

Abstract: A light modulation element, device, and system is discussed. The light modulation element includes three electrodes, a flexible member, and a mirror. The flexible member is connected between the three electrodes so that the first and second electrodes are on one side and the third electrode is on the opposite side of the flexible member. The mirror is attached to the flexible member so that it can move therewith. The flexible member moves responsive to an external electrostatic force provided by one or more of the three electrodes so that the mirror is positioned in a predetermined position responsive to the state of the flexible member.