Patents Assigned to Beijing Superstring Academy of Memory Technology
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Publication number: 20240145591Abstract: The present disclosure relates to a vertical MOSFET device, a manufacturing method and application thereof.Type: ApplicationFiled: December 13, 2021Publication date: May 2, 2024Applicants: Beijing Superstring Academy of Memory Technology, INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Zhuo CHEN, Huilong ZHU
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Publication number: 20240147686Abstract: The present invention relates to a semiconductor memory cell structure, a semiconductor memory as well as preparation method and application thereof. The semiconductor memory cell structure includes: a substrate; and a first transistor layer, an isolation layer and a second transistor layer. The first transistor layer includes a first stack structure formed by stacking a first source, a first channel, and a first drain from bottom to top; and a first gate located on a sidewall of the first stack structure. The second transistor layer includes: a second stack structure formed by stacking a second drain, a second channel, and a second source from bottom to top; and a second gate located on a sidewall of the second stack structure, at least a part of a sidewall of the second drain is in direct contact with the first gate.Type: ApplicationFiled: December 9, 2021Publication date: May 2, 2024Applicants: Beijing Superstring Academy of Memory Technology, INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Qi WANG, Huilong ZHU
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Publication number: 20240130106Abstract: A transistor, a 3D memory and a manufacturing method therefor, and an electronic device are provided in the present application. The 3D memory includes a plurality of layers of memory cells stacked in a direction perpendicular to a substrate, and a word line. A memory cell includes a transistor which includes a source and a drain, a gate extending in the direction perpendicular to the substrate, a semiconductor layer surrounding a sidewall of the gate. The semiconductor layer includes a source contact region and a drain contact region arranged at intervals. A channel between the source contact region and the drain contact region is a horizontal channel, and the word line extends in the direction perpendicular to the substrate and penetrates through the memory cells of different layers.Type: ApplicationFiled: April 20, 2023Publication date: April 18, 2024Applicant: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Jin DAI, Yong YU, Jing LIANG
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Patent number: 11956943Abstract: A memory comprises a substrate, and word lines, bit lines and memory cells located on one side of the substrate. Each of the memory cells comprises a transistor comprising: a semiconductor layer comprising a source contact region, a channel region and a drain contact region connected sequentially; a primary gate electrically connected to one of the word lines; a source electrically connected to one of the bit lines and the source contact region of the semiconductor layer, respectively; a drain electrically connected to the drain contact region of the semiconductor layer; and a secondary gate electrically connected to the drain, wherein an orthographic projection of the primary gate on the substrate and an orthographic projection of the secondary gate on the substrate are at least partially overlapped with an orthographic projection of the channel region of the semiconductor layer on the substrate, respectively.Type: GrantFiled: April 26, 2023Date of Patent: April 9, 2024Assignee: Beijing Superstring Academy of Memory TechnologyInventors: Zhengyong Zhu, Bokmoon Kang, Guilei Wang, Chao Zhao
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Patent number: 11948616Abstract: The present disclosure relates to a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a substrate; a transistor, including a control terminal, a first terminal, and a second terminal; a first magnetic memory structure, a bottom electrode of which is electrically connected to the first terminal of the transistor; a second magnetic memory structure, a top electrode of which is electrically connected to the first terminal of the transistor, the bottom electrode of the first magnetic memory structure is located in a same layer with a bottom electrode of the second magnetic memory structure; a first bit line, electrically connected to a top electrode of the first magnetic memory structure; a second bit line, electrically connected to the bottom electrode of the second magnetic memory structure; and a selection line, electrically connected to a second terminal of the transistor.Type: GrantFiled: June 23, 2022Date of Patent: April 2, 2024Assignees: CHANGXIN MEMORY TECHNOLOGIES, INC., BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Xiaoguang Wang, Dinggui Zeng, Huihui Li, Jiefang Deng, Kanyu Cao
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Patent number: 11928345Abstract: Provided are a computational storage system, computational storage processor, solid-state drive (SSD) and data storing method. The method may include receiving a first storing instruction based on a storage object, generating a second storing instruction based on a flash memory address according to information carried by the first storing instruction and SSD resource information maintained locally, and sending the generated second storing instruction to the SSD. The SSD resource information may include resource occupation information in the SSD. Generating the second storing instruction may include parsing an identification of a storage object, data length information and a starting source address of entire data, allocating a flash memory address or addresses in one or more SSDs for storing data of the storage object according to the data length information and the resource occupancy information in the SSD, and generating the second storing instructions for each SSD.Type: GrantFiled: May 5, 2023Date of Patent: March 12, 2024Assignee: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Jin Dai, Yunsen Zhang
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Publication number: 20240061596Abstract: Provided are a computational storage system, computational storage processor, solid-state drive (SSD) and data storing method. The method may include receiving a first storing instruction based on a storage object, generating a second storing instruction based on a flash memory address according to information carried by the first storing instruction and SSD resource information maintained locally, and sending the generated second storing instruction to the SSD. The SSD resource information may include resource occupation information in the SSD. Generating the second storing instruction may include parsing an identification of a storage object, data length information and a starting source address of entire data, allocating a flash memory address or addresses in one or more SSDs for storing data of the storage object according to the data length information and the resource occupancy information in the SSD, and generating the second storing instructions for each SSD.Type: ApplicationFiled: May 5, 2023Publication date: February 22, 2024Applicant: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Jin DAI, Yunsen ZHANG
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Patent number: 11822797Abstract: An object computational storage system, a data processing method, a client end and a storage medium are disclosed, belonging to the field of electrical digital data processing, including a storage control device and a storage chip or a storage disk connected thereto. The storage control device is a computational storage management system, and performs the following processing: receiving an external data processing request, parsing information of a specified storage object, information of a specified function, and information of input data carried by the data processing request; when it is determined that calling the specified function for the specified storage object is supported, calling the specified function to perform computation on data of the specified storage object according to the input data; and returning a computation result to a sender of the data processing request.Type: GrantFiled: April 20, 2023Date of Patent: November 21, 2023Assignee: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Jin Dai, Yunsen Zhang
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Patent number: 11822326Abstract: A voter-based method of controlling a redundancy is provided, including acquiring a processing element array in a target hardware, wherein the processing element array includes a plurality of processing elements, selecting a plurality of groups of processing elements from the processing element array so as to generate a voter set, wherein a corresponding voter is generated for each group of the plurality of groups of processing elements, and the corresponding voter configured to perform a voting operation in a redundancy control, acquiring, in response to a message indicating a fault state of a detected voter, a target voter from the voter set so as to replace the detected voter, and re-performing the voting operation in the redundancy control by using the target voter. An electronic device and a storage medium are further provided, which are implemented based on the processing element array of the target hardware.Type: GrantFiled: December 17, 2021Date of Patent: November 21, 2023Assignees: Beijing Superstring Academy of Memory Technology, Tsinghua UniversityInventors: Xiangyu Kong, Jianfeng Zhu, Shouyi Yin, Shaojun Wei
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Patent number: 11825642Abstract: A memory cell, a 3D memory and a preparation thereof, and an electronic device. The memory cell includes a first transistor and a second transistor disposed on a substrate, the first transistor includes a first gate, a first electrode, a second electrode and a first semiconductor layer disposed on the substrate; the second transistor includes a third electrode, a fourth electrode, a second gate extending in a direction perpendicular to the substrate and a second semiconductor layer surrounding a sidewall of the second gate which are disposed on the substrate, the second semiconductor layer includes a second source contact region and a second drain contact region arranged at intervals, a channel between the second source contact region and the second drain contact region is a horizontal channel.Type: GrantFiled: May 4, 2023Date of Patent: November 21, 2023Assignee: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Jin Dai, Yong Yu, Jing Liang
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Publication number: 20230363136Abstract: A method for manufacturing a semiconductor device includes the following operations. A substrate is provided. Bit lines extending in a first direction are formed on the substrate. A first dielectric layer is formed on the bit lines. The first dielectric layer is etched from top to bottom to form channel holes in the first dielectric layer, in which the channel holes expose the bit lines. A channel layer is formed in each channel hole, in which the channel layer includes a first source/drain area, a channel area and a second source/drain area which are arranged from bottom to top, the first source/drain area is electrically connected to a respective one bit line. Word lines extending in a second direction are formed in the first dielectric layer.Type: ApplicationFiled: September 13, 2022Publication date: November 9, 2023Applicants: CHANGXIN MEMORY TECHNOLOGIES, INC., BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Deyuan XIAO, Yong YU, Guangsu SHAO
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Publication number: 20230320071Abstract: A semiconductor memory device and a manufacturing method thereof, a reading/writing method, an electronic device and a memory circuit are provided. A transistor is provided in each memory cell in the semiconductor memory device. A gate electrode and an auxiliary electrode are provided in the transistor, and the auxiliary electrode is electrically connected to a drain electrode. During a writing operation, a first voltage is applied to the gate electrode through a word line, and an electrical signal is applied to a source electrode through a bit line according to the external input data.Type: ApplicationFiled: April 28, 2023Publication date: October 5, 2023Applicant: Beijing Superstring Academy of Memory TechnologyInventors: Zhengyong Zhu, Bokmoon Kang, Guilei Wang, Chao Zhao
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Publication number: 20230320070Abstract: A memory comprises a substrate, and word lines, bit lines and memory cells located on one side of the substrate. Each of the memory cells comprises a transistor comprising: a semiconductor layer comprising a source contact region, a channel region and a drain contact region connected sequentially; a primary gate electrically connected to one of the word lines; a source electrically connected to one of the bit lines and the source contact region of the semiconductor layer, respectively; a drain electrically connected to the drain contact region of the semiconductor layer; and a secondary gate electrically connected to the drain, wherein an orthographic projection of the primary gate on the substrate and an orthographic projection of the secondary gate on the substrate are at least partially overlapped with an orthographic projection of the channel region of the semiconductor layer on the substrate, respectively.Type: ApplicationFiled: April 26, 2023Publication date: October 5, 2023Applicant: Beijing Superstring Academy of Memory TechnologyInventors: Zhengyong Zhu, Bokmoon Kang, Guilei Wang, Chao Zhao
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Publication number: 20230301070Abstract: Provided are a semiconductor structure and a method for manufacturing the same, a memory device and a method for manufacturing the same. The semiconductor structure includes at least one transistor. Each of the at least one transistor includes a channel including a first semiconductor layer and a second semiconductor layer disposed around the first semiconductor layer. The second semiconductor layer introduces strain into the channel.Type: ApplicationFiled: July 25, 2022Publication date: September 21, 2023Applicants: CHANGXIN MEMORY TECHNOLOGIES, INC., BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Deyuan Xiao, Yong Yu, Guangsu Shao
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Publication number: 20230209811Abstract: A method for manufacturing a semiconductor structure includes: forming first shallow trench isolation structures in a substrate, which isolate a plurality of active areas extending in first direction in the substrate, in which a first shallow trench isolation structure includes a sacrificial layer and a first dielectric layer stacked from bottom up in sequence; forming a plurality of word line isolation grooves in the substrate, in which a word line isolation groove is located above the sacrificial layer and extends in second direction; forming a second dielectric layer on sidewalls of the word line isolation groove, in which a pore penetrating to the substrate is provided inside the second dielectric layer; metallizing a lower part of an active area based on the pore to form a bit line extending in first direction; and removing the sacrificial layer based on the pore to form an air gap between adjacent bit lines.Type: ApplicationFiled: March 1, 2023Publication date: June 29, 2023Applicants: CHANGXIN MEMORY TECHNOLOGIES, INC., BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Guangsu SHAO, Deyuan XIAO, Weiping BAI, Yunsong QIU
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Publication number: 20230200045Abstract: A semiconductor device includes a substrate. A method includes the following operations. Multiple first trenches extending in a first direction are formed in the substrate. Multiple second trenches extending in a second direction are formed in the substrate in which the first trenches are formed. The first direction is perpendicular to the second direction. A first depth of a first trench is equal to a second depth of a second trench. A first insulating layer, a conducting layer and a second insulating layer are formed in sequence in the first and second trenches. The conducting layer in the first trench is separated on a cross section in the second direction to form two bit lines connected to sidewalls at either side of the first trench and extending in the first direction. Word lines extending in the second direction are formed on the conducting layer in the first and second trenches.Type: ApplicationFiled: September 22, 2022Publication date: June 22, 2023Applicants: CHANGXIN MEMORY TECHNOLOGIES, INC., BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Guangsu SHAO, Deyuan XIAO, Yunsong QIU, Minmin WU
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Publication number: 20230180457Abstract: A method for forming a capacitor includes: providing a substrate; sequentially forming a first sacrificial layer and a first support layer for covering the substrate; forming first openings penetrating through the first support layer; sequentially forming a second sacrificial layer and a second support layer for covering a remaining portion of the first support layer; forming through holes which sequentially penetrate through the second support layer, the second sacrificial layer, the remaining portion of the first support layer, and the first sacrificial layer; forming first electrode layers, each first electrode layer covering an inner wall of a respective one of the through holes; forming second openings penetrating through a remaining portion of the second support layer; and sequentially forming a dielectric layer and a second electrode layer for covering the first electrode layers, to form the capacitor.Type: ApplicationFiled: February 1, 2023Publication date: June 8, 2023Applicants: CHANGXIN MEMORY TECHNOLOGIES, INC., BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Mengmeng YANG, Xiaoling WANG
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Patent number: 11626558Abstract: Embodiments of the present disclosure provide a semiconductor structure and a manufacturing method thereof, and a memory. The semiconductor structure may at least include: a plurality of transistors arranged in a staggered manner, wherein the transistors share one source plate, a channel of the transistor is located on the source plate, and a channel length direction of the transistor is perpendicular to a surface of the source plate, and a material of the channel includes an oxide semiconductor; a plurality of drain contact members, electrically connected to drains of the transistors, wherein an odd number of transistors share one drain contact member, and the transistors sharing the same drain contact member are driven by a same word line; and a plurality of magnetic tunnel junctions, located on the drain contact members, wherein the magnetic tunnel junctions are electrically connected to the drain contact members in a one-to-one corresponding manner.Type: GrantFiled: July 14, 2022Date of Patent: April 11, 2023Assignees: CHANGXIN MEMORY TECHNOLOGIES, INC., BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Xiaoguang Wang, Dinggui Zeng, Huihui Li, Kanyu Cao
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Publication number: 20230061322Abstract: A method for manufacturing a semiconductor structure includes the following: providing a substrate; forming an MTJ structure and a first mask structure in sequence on the substrate; performing a patterning process on the first mask structure to form a first pattern extending in a first direction; transferring the first pattern to the MTJ structure; forming a second mask structure on the MTJ structure; performing a patterning process on the second mask structure to form a second pattern extending in a second direction, the first direction intersecting the second direction and being not perpendicular to the second direction; and performing a patterning process on the MTJ structure by utilizing the second pattern to form a cellular MTJ array, the first pattern and the second pattern together forming a cellular pattern.Type: ApplicationFiled: June 1, 2022Publication date: March 2, 2023Applicants: CHANGXIN MEMORY TECHNOLOGIES, INC., BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Xiaoguang WANG, Huihui LI, DINGGUI ZENG, Jiefang DENG, Kanyu CAO
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Publication number: 20230057480Abstract: A method for forming a semiconductor structure includes: providing a semiconductor substrate including a plurality of first semiconductor pillars and bit line isolation trenches arranged at intervals in a first direction; in which the bit line isolation trenches extend in a second direction, the first direction being perpendicular to the second direction; forming a bit line isolation layer in a bit line isolation trench; in which a gap is provided between the bit line isolation layer and the bit line isolation trench, in which the gap is located at a bottom corner of the bit line isolation trench and extends in the second direction, and exposes part of the bottom of the bit line isolation trench; etching a first semiconductor pillar in the first direction through the gap to form a bit line trench; forming a bit line in the bit line trench.Type: ApplicationFiled: July 4, 2022Publication date: February 23, 2023Applicants: CHANGXIN MEMORY TECHNOLOGIES, INC., BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGYInventors: Guangsu SHAO, Deyuan XIAO, Yunsong QIU, Minmin WU