Abstract: A method for extending a first application class includes integrating a first data buffer within the first application class for holding extended properties, and utilizing a rule based engine to determine the values to associate with one or more of the extended properties of the first application class.

Abstract: A method for providing data paths between a sending computer and a receiving computer. The method is comprised of steps of periodically receiving broadcasted data through a first subnet data path and through a second subnet data path, and reception of the broadcasted data on either of the subnets indicates status of the respective subnet. The method continues on to change local data routing tables in the sending computer and the receiving computer based upon the status of at least one of the subnets, providing high reliability in a peer-to-peer environment.

Abstract: A substrate processing apparatus comprising a frame, at least one processing module, and a substrate transport apparatus. The frame defines a first chamber with outer substrate transport openings for transporting substrates between the first chamber and an exterior of the frame. The processing module is connected to the exterior of the frame. The processing module communicates with the first chamber of the frame through at least one of the outer openings. The substrate transport apparatus is connected to the frame for transporting substrates between the first chamber and the processing module exterior to the frame. The frame has a second integral chamber formed therein. The second integral chamber communicates with the first chamber through an internal substrate transport opening of the frame. The second integral chamber of the frame has a selectable configuration from a number of predetermined configurations.

Abstract: A system for extracting a signal component from an output signal of a dynamic system. The system comprises a state observer and a corrector filter. The state observer is adapted to track a signal component that represents dominant dynamics in the output signal of the dynamic system and provide an estimation signal representing an estimated signal component in the output signal of the dynamic system. The corrector filter is adapted to compensate for a mismatch between the estimation signal and the actual signal component that represents the dominant dynamics in the output signal. A combination of the estimation signal with an output signal of the corrector filter can provide a synthesized signal including the signal component that represents the dominant dynamics in the output signal.

Abstract: A system for loading and unloading semiconductor wafers includes a frame having a charging opening, a platform mounted on the frame and movable between a deployed position and a retracted position, and a movable closure for the charging opening for opening and closing a horizontal path through the charging opening. In the deployed position, the platform has a generally level orientation adjacent the charging opening and projects away from the frame for receiving thereon a cassette adapted to support therein a plurality of the semiconductor wafers to be passed though the charging opening. In one embodiment, the platform is elevationally movable on the frame between a retracted lowered position distant from the charging opening and a deployed raised position adjacent the charging opening.

Abstract: A method and apparatus involving the application of an algorithm used for finding the time optimal trajectory for torque limited Industrial Robots, to achieve the operation of Cluster Tool Robots in an improved manner by modifying the applied algorithm through adding two additional constraints, i.e., jerk (the rate of change of acceleration) and the acceleration seen by the load. This modification renders it possible to create a robot arm trajectory that minimizes travel time by minimizing the excitation of uncontrolled resonances and avoiding command of an acceleration that would exceed the force of friction between a substrate holder on the end of the arm and a substrate held thereon by friction.

Abstract: Load transferring apparatus comprises a base member, a planar platform for supporting a load and a drive arm pivotally mounted on the base member for moving the platform in plane between a retracted position at which the platform assumes a first orientation and an extended position at which the platform assumes a second angularly transposed orientation while remaining substantially in the plane occupied when in the retracted position. The drive arm is fixed to a drive arm shaft which, in turn, is rotatably mounted on the base member. A constraining link extends between the base member and the platform and is generally parallel to the drive arm. An elevator drive is operable for moving the base member raised and lowered positions and a coupling drivingly connects the drive arm shaft to the drive shaft throughout a range of positions between the raised position and the lowered position. The base plate includes an upstanding stop plate.